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1. 发明授权

US07425346B2 Method for making hybrid dielectric film 有权
标题翻译：制造混合电介质膜的方法
公开(公告)号：US07425346B2
公开(公告)日：2008-09-16
申请号：US10936156
申请日：2004-09-07
申请人： Chieh Chen , Atul Kumar , Yuri Pikovsky , Chung J. Lee
发明人： Chieh Chen , Atul Kumar , Yuri Pikovsky , Chung J. Lee
IPC分类号： B05D5/12 , C23C16/18
CPC分类号： H01L21/02271 , H01L21/02118 , H01L21/0212 , H01L21/02123 , H01L21/02126 , H01L21/02131 , H01L21/02164 , H01L21/022 , H01L21/312 , H01L21/316 , H01L21/76808 , H01L21/76811 , H01L21/76835 , Y10T29/41
摘要： A method of forming a hybrid inorganic/organic dielectric layer on a substrate for use in an integrated circuit is provided, wherein the method includes forming a first dielectric layer on the substrate via chemical vapor deposition, and forming a second dielectric layer on the first dielectric layer via chemical vapor deposition, wherein one of the first dielectric layer and the second dielectric layer is formed from an organic dielectric material, and wherein the other of the first dielectric layer and the second dielectric layer is formed from an inorganic dielectric material.
摘要翻译：提供了一种在用于集成电路的衬底上形成杂化无机/有机电介质层的方法，其中所述方法包括通过化学气相沉积在衬底上形成第一电介质层，并在第一电介质上形成第二电介质层层，其中所述第一介电层和所述第二介电层中的一个由有机介电材料形成，并且其中所述第一介电层和所述第二介电层中的另一个由无机介电材料形成。

2. 发明授权

US07309395B2 System for forming composite polymer dielectric film 有权
标题翻译：用于形成复合聚合物电介质膜的系统
公开(公告)号：US07309395B2
公开(公告)日：2007-12-18
申请号：US10816179
申请日：2004-03-31
申请人： Chung J. Lee , Atul Kumar , Chieh Chen , Yuri Pikovsky
发明人： Chung J. Lee , Atul Kumar , Chieh Chen , Yuri Pikovsky
IPC分类号： C23C16/52 , C23C16/04 , C23C16/22 , C23C16/452 , C23C16/48 , C23F1/00 , H01L21/306
CPC分类号： H01L21/0212 , B05D1/185 , B05D1/60 , B05D3/065 , B05D3/067 , B05D7/52 , H01L21/02263 , H01L21/02304 , H01L21/02337 , H01L21/02362 , H01L21/3121 , H01L21/3127
摘要： A system for depositing a composite polymer dielectric film on a substrate is disclosed, wherein the composite polymer dielectric film includes a low dielectric constant polymer layer disposed between a first silane-containing layer and a second silane-containing layer. The system includes a process module having a processing chamber and a monomer delivery system configured to admit a gas-phase monomer into the processing chamber for deposition of the low dielectric constant polymer layer, a post-treatment module for annealing the composite polymer dielectric film, and a silane delivery system configured to admit a vapor flow containing a silane precursor into at least one of the process module and the post-treatment module for the formation of the first silane-containing layer and the silane-containing layer.
摘要翻译：公开了一种用于在基板上沉积复合聚合物电介质膜的系统，其中复合聚合物电介质膜包括设置在第一含硅烷层和第二含硅烷层之间的低介电常数聚合物层。该系统包括具有处理室和单体输送系统的处理模块，该单体输送系统构造成将气相单体进入处理室以沉积低介电常数聚合物层，用于退火复合聚合物电介质膜的后处理模块，以及硅烷输送系统，其被构造成允许含有硅烷前体的蒸汽流进入至少一个工艺模块和后处理模块中，用于形成第一含硅烷层和含硅烷层。

3. 发明申请

US20060051972A1 Hybrid dielectric film 有权
标题翻译：混合电介质膜
公开(公告)号：US20060051972A1
公开(公告)日：2006-03-09
申请号：US10936156
申请日：2004-09-07
申请人： Chieh Chen , Atul Kumar , Yuri Pikovsky , Chung Lee
发明人： Chieh Chen , Atul Kumar , Yuri Pikovsky , Chung Lee
IPC分类号： H01L21/469 , C23C16/00
CPC分类号： H01L21/02271 , H01L21/02118 , H01L21/0212 , H01L21/02123 , H01L21/02126 , H01L21/02131 , H01L21/02164 , H01L21/022 , H01L21/312 , H01L21/316 , H01L21/76808 , H01L21/76811 , H01L21/76835 , Y10T29/41
摘要： A method of forming a hybrid inorganic/organic dielectric layer on a substrate for use in an integrated circuit is provided, wherein the method includes forming a first dielectric layer on the substrate via chemical vapor deposition, and forming a second dielectric layer on the first dielectric layer via chemical vapor deposition, wherein one of the first dielectric layer and the second dielectric layer is formed from an organic dielectric material, and wherein the other of the first dielectric layer and the second dielectric layer is formed from an inorganic dielectric material.
摘要翻译：提供了一种在用于集成电路的衬底上形成杂化无机/有机电介质层的方法，其中所述方法包括通过化学气相沉积在衬底上形成第一电介质层，并在第一电介质上形成第二电介质层层，其中所述第一介电层和所述第二介电层中的一个由有机介电材料形成，并且其中所述第一介电层和所述第二介电层中的另一个由无机介电材料形成。

4. 发明申请

US20050158454A1 Method and system for forming an organic light-emitting device display having a plurality of passive polymer layers 审中-公开
标题翻译：用于形成具有多个被动聚合物层的有机发光器件显示器的方法和系统
公开(公告)号：US20050158454A1
公开(公告)日：2005-07-21
申请号：US11071668
申请日：2005-03-02
申请人： Chung Lee , Atul Kumar , Chieh Chen , Yuri Pikovsky
发明人： Chung Lee , Atul Kumar , Chieh Chen , Yuri Pikovsky
IPC分类号： B05D3/02 , B05D7/24 , B29C71/02 , C08G61/02 , C08J5/18 , H01L21/312 , B05D5/06
CPC分类号： B29C71/02 , B05D1/60 , B05D3/0254 , B29C2071/022 , B29C2071/025 , B29C2071/027 , C08G61/02 , C08G61/025 , C08G2261/3424 , C08J5/18 , H01L21/0212 , H01L21/3127
摘要： A method of forming an organic light-emitting display on a substrate is disclosed, wherein the method includes forming a thin film transistor portion of the device on the substrate, wherein the thin film transistor portion includes control circuitry having an array of thin film transistors; and forming a light-emitting portion of the device over the thin film transistor portion, wherein the light-emitting portion includes an organic light-emitting layer, an electrode layer in electrical communication with the organic light-emitting layer, a polymer barrier layer disposed between the organic light-emitting layer and the electrode, and at least one other passive polymer layer, wherein the barrier layer and at least one other passive polymer layer are formed from a same polymer material.
摘要翻译：公开了一种在衬底上形成有机发光显示器的方法，其中该方法包括在衬底上形成器件的薄膜晶体管部分，其中薄膜晶体管部分包括具有薄膜晶体管阵列的控制电路; 以及在所述薄膜晶体管部分上形成所述器件的发光部分，其中所述发光部分包括有机发光层，与所述有机发光层电连通的电极层，设置有聚合物阻挡层在有机发光层和电极之间以及至少一个其它被动聚合物层，其中阻挡层和至少一个其它被动聚合物层由相同的聚合物材料形成。

5. 发明申请

US20050223989A1 System for forming composite polymer dielectric film 有权
标题翻译：用于形成复合聚合物电介质膜的系统
公开(公告)号：US20050223989A1
公开(公告)日：2005-10-13
申请号：US10816179
申请日：2004-03-31
申请人： Chung Lee , Atul Kumar , Chieh Chen , Yuri Pikovsky
发明人： Chung Lee , Atul Kumar , Chieh Chen , Yuri Pikovsky
IPC分类号： B05D1/18 , B05D3/06 , B05D7/00 , B05D7/24 , C23C16/00 , H01L21/312
CPC分类号： H01L21/0212 , B05D1/185 , B05D1/60 , B05D3/065 , B05D3/067 , B05D7/52 , H01L21/02263 , H01L21/02304 , H01L21/02337 , H01L21/02362 , H01L21/3121 , H01L21/3127
摘要： A system for depositing a composite polymer dielectric film on a substrate is disclosed, wherein the composite polymer dielectric film includes a low dielectric constant polymer layer disposed between a first silane-containing layer and a second silane-containing layer. The system includes a process module having a processing chamber and a monomer delivery system configured to admit a gas-phase monomer into the processing chamber for deposition of the low dielectric constant polymer layer, a post-treatment module for annealing the composite polymer dielectric film, and a silane delivery system configured to admit a vapor flow containing a silane precursor into at least one of the process module and the post-treatment module for the formation of the first silane-containing layer and the silane-containing layer.
摘要翻译：公开了一种用于在基板上沉积复合聚合物电介质膜的系统，其中复合聚合物电介质膜包括设置在第一含硅烷层和第二含硅烷层之间的低介电常数聚合物层。该系统包括具有处理室和单体输送系统的处理模块，该单体输送系统构造成将气相单体进入处理室以沉积低介电常数聚合物层，用于退火复合聚合物电介质膜的后处理模块，以及硅烷输送系统，其被构造成允许含有硅烷前体的蒸汽流进入至少一个工艺模块和后处理模块中，用于形成第一含硅烷层和含硅烷层。

6. 发明申请

US20050174045A1 Organic light-emitting device display having a plurality of passive polymer layers 审中-公开
标题翻译：具有多个被动聚合物层的有机发光器件显示器
公开(公告)号：US20050174045A1
公开(公告)日：2005-08-11
申请号：US11071764
申请日：2005-03-02
申请人： Chung Lee , Atul Kumar , Chieh Chen , Yuri Pikovsky
发明人： Chung Lee , Atul Kumar , Chieh Chen , Yuri Pikovsky
IPC分类号： B05D3/02 , B05D7/24 , B29C71/02 , C08G61/02 , C08J5/18 , H01L21/312 , H01J1/62
CPC分类号： B29C71/02 , B05D1/60 , B05D3/0254 , B29C2071/022 , B29C2071/025 , B29C2071/027 , C08G61/02 , C08G61/025 , C08G2261/3424 , C08J5/18 , H01L21/0212 , H01L21/3127
摘要： An organic light-emitting display is disclosed, wherein the organic light-emitting display includes a thin film transistor portion including an array of thin film transistors, and a light-emitting portion including an array of organic light-emitting elements in electrical communication with the array of thin film transistors, wherein the light-emitting portion is formed from a plurality of layers of materials, and wherein the plurality of layers of materials in the light-emitting portion includes a plurality of passive polymer layers each formed from a single polymer material. Systems and methods for forming organic light-emitting displays are also disclosed.
摘要翻译：公开了一种有机发光显示器，其中所述有机发光显示器包括薄膜晶体管部分，所述薄膜晶体管部分包括薄膜晶体管阵列，以及发光部分，包括与所述有机发光元件电连通的有机发光元件阵列薄膜晶体管阵列，其中所述发光部分由多层材料形成，并且其中所述发光部分中的所述多个材料层包括多个被动聚合物层，每个被动聚合物层由单一聚合物材料形成。还公开了用于形成有机发光显示器的系统和方法。

7. 发明授权

US07549905B2 Method of encapsulating an organic light emitting device 失效
标题翻译：封装有机发光器件的方法
公开(公告)号：US07549905B2
公开(公告)日：2009-06-23
申请号：US11239988
申请日：2005-09-30
申请人： Chung J. Lee , Atul Kumar , Chieh Chen , George Tzeng
发明人： Chung J. Lee , Atul Kumar , Chieh Chen , George Tzeng
IPC分类号： H01J9/00
CPC分类号： H01L51/5253
摘要： A method of forming an organic light emitting device on a substrate is provided, wherein the method includes forming an active device structure on the substrate, adhering a mask to the substrate, wherein the mask covers an electrical contact portion of the substrate while exposing the active device structure, forming an encapsulant layer over the active device structure and the mask, forming a separation between a portion of the encapsulant layer that covers the active device structure and a portion of the encapsulant layer that covers the mask, and removing the mask from the substrate.
摘要翻译：提供一种在衬底上形成有机发光器件的方法，其中该方法包括在衬底上形成有源器件结构，将掩模粘贴到衬底上，其中掩模覆盖衬底的电接触部分，同时暴露活性物质在活性器件结构和掩模上形成密封剂层，在覆盖有源器件结构的封装剂层的一部分和覆盖掩模的封装剂层的一部分之间形成间隔，基质。

8. 发明授权

US07621794B2 Method of encapsulating an organic light-emitting device 失效
标题翻译：封装有机发光装置的方法
公开(公告)号：US07621794B2
公开(公告)日：2009-11-24
申请号：US11271410
申请日：2005-11-09
申请人： Chung J. Lee , Atul Kumar , Chieh Chen
发明人： Chung J. Lee , Atul Kumar , Chieh Chen
IPC分类号： H05B33/10 , H01L51/56 , G02F1/335 , C03B27/00
CPC分类号： H01L51/5256 , Y10T428/1082 , Y10T428/2852
摘要： A method of encapsulating an organic light-emitting device is disclosed, wherein the device includes a light-emitting portion and an electrical contact portion, the method including forming a polymer layer over the light-emitting portion and the electrical contact portion of the device; forming a separation in the polymer layer between a portion of the polymer layer disposed over the light-emitting portion of the device and a portion of the polymer layer disposed over the electrical contact portion of the device; adhering a film removal structure to the portion of the polymer layer disposed over the electrical contact portion of the device; and removing the film removal structure, thereby causing the removal of the portion of the polymer layer disposed over the electrical contact portion of the device.
摘要翻译：公开了一种封装有机发光器件的方法，其中该器件包括发光部分和电接触部分，该方法包括在器件的发光部分和电接触部分上形成聚合物层; 在所述聚合物层的设置在所述器件的发光部分之上的部分和设置在所述器件的电接触部分之上的聚合物层的一部分之间的聚合物层中形成分离; 将膜去除结构粘附到设置在所述器件的电接触部分上方的聚合物层的部分; 并去除膜去除结构，从而导致去除设置在器件的电接触部分上的聚合物层的部分。

9. 发明申请

US20080213579A1 Organic light emitting device having a protective barrier 审中-公开
标题翻译：具有保护屏障的有机发光器件
公开(公告)号：US20080213579A1
公开(公告)日：2008-09-04
申请号：US12075995
申请日：2008-03-14
申请人： Chung J. Lee , Chieh Chen , Atul Kumar
发明人： Chung J. Lee , Chieh Chen , Atul Kumar
IPC分类号： C09K11/00 , B32B27/06 , B32B9/04 , B05D5/12
CPC分类号： B05D1/60 , B05D3/0254 , B29C71/02 , B29C2071/022 , B29C2071/025 , B29C2071/027 , C08G61/02 , C08G61/025 , C08G2261/3424 , C08J5/18 , H01L21/0212 , H01L21/02271 , H01L21/31058 , H01L21/3127 , Y10T428/269 , Y10T428/3154 , Y10T428/31544 , Y10T428/31855
摘要： In an organic light emitting device package including a plurality of layers of materials formed on a substrate the plurality of layers of materials including an organic light emitting layer a protective barrier for protecting the organic light emitting device from environmental degradation the protective barrier comprising a first semi-crystalline parylene-based layer an inorganic barrier layer and a second semi-crystalline parylene-based layer.
摘要翻译：在包括形成在基板上的多层材料的有机发光器件封装中，包括有机发光层的多层材料是用于保护有机发光器件免受环境恶化的保护屏障，该保护屏障包括第一半结晶聚对二甲苯基层为无机阻挡层和第二半结晶聚对二甲苯基层。

10. 发明授权

US07364925B2 Organic light emitting device having a protective barrier 失效
标题翻译：具有保护屏障的有机发光器件
公开(公告)号：US07364925B2
公开(公告)日：2008-04-29
申请号：US11009285
申请日：2004-12-08
申请人： Chung J. Lee , Chieh Chen , Atul Kumar
发明人： Chung J. Lee , Chieh Chen , Atul Kumar
IPC分类号： H01L21/00
CPC分类号： B05D1/60 , B05D3/0254 , B29C71/02 , B29C2071/022 , B29C2071/025 , B29C2071/027 , C08G61/02 , C08G61/025 , C08G2261/3424 , C08J5/18 , H01L21/0212 , H01L21/02271 , H01L21/31058 , H01L21/3127 , Y10T428/269 , Y10T428/3154 , Y10T428/31544 , Y10T428/31855
摘要： A method of forming a protective barrier in an organic light emitting device is disclosed, wherein the organic light emitting device is formed on a substrate and includes a plurality of layers of materials, the plurality of layers of materials including an organic light emitting layer. The method includes forming an inorganic layer and a semi-crystalline parylene-based polymer layer over an underlying layer, wherein the semi-crystalline parylene-based polymer layer is formed via transport polymerization of a reactive intermediate species. Organic light emitting devices having barriers are also disclosed.
摘要翻译：公开了一种在有机发光器件中形成保护屏障的方法，其中所述有机发光器件形成在衬底上，并且包括多层材料，所述多层材料包括有机发光层。该方法包括在下层上形成无机层和半结晶聚对二甲苯基聚合物层，其中通过反应性中间体物质的转移聚合形成半结晶聚对二甲苯基聚合物层。还公开了具有屏障的有机发光器件。

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