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    • 1. 发明申请
    • Method of Processing Nature Pattern on Expitaxial Substrate
    • 在外延基板上处理自然图案的方法
    • US20080283503A1
    • 2008-11-20
    • US11748478
    • 2007-05-14
    • Cheng-yi LiuYi-ju ChenShih-Chieh HsuChing-Liang Lin
    • Cheng-yi LiuYi-ju ChenShih-Chieh HsuChing-Liang Lin
    • B44C1/22
    • H01L33/22H01L33/0062
    • A method of processing nature pattern on expitaxial substrate, unlike the conventional method of processing regular pattern on expitaxial substrate (such as sapphire substrate) by lithography, wet etches a sapphire substrate directly to obtain a nature pattern, so as to simplify the fabrication process. Compared with the conventional way of processing pattern sapphire, the nature pattern sapphire substrate produced by the method can avoid voids between the interface of sapphire and GaN and apply this technology to a wired bond LED structure to increase the sidewall light extraction and improve the texture of the sapphire surface of a flip chip LED structure. In addition, this method also can be applied to a thin-GaN LED for achieving the surface texture after the sapphire is removed by laser.
    • 在外延衬底上处理自然图案的方法,与通过光刻在外延衬底(例如蓝宝石衬底)上处理规则图案的常规方法不同,直接湿法蚀刻蓝宝石衬底以获得自然图案,从而简化制造工艺。 与传统的蓝宝石处理方式相比,通过该方法生产的蓝宝石蓝宝石衬底可以避免蓝宝石和GaN界面之间的空隙,并将此技术应用于有线键合LED结构,增加侧壁光提取,改善纹理 蓝宝石表面的倒装芯片LED结构。 此外,该方法也可以应用于在通过激光去除蓝宝石之后实现表面纹理的薄GaN LED。
    • 2. 发明申请
    • LIGHT EMITTING DIODE AND MANUFACTURING METHOD THEREOF
    • 发光二极管及其制造方法
    • US20070010035A1
    • 2007-01-11
    • US11425149
    • 2006-06-20
    • Cheng-Yi LiuShih-Chieh HsuChing-Liang LinYong-Syun Lin
    • Cheng-Yi LiuShih-Chieh HsuChing-Liang LinYong-Syun Lin
    • H01L21/00
    • H01L33/0079H01L33/42
    • A method for fabricating a light emitting diode (LED) is provided. First, a first type doped semiconductor layer, an emitting layer and a second type doped semiconductor layer are sequentially formed on an epitaxy substrate. Then, a first transparent conductive layer is formed on the second type doped semiconductor layer. Next, a substitution substrate having a second transparent conductive layer formed thereon is provided. Then, a wafer bonding process is performed on the epitaxy substrate and the substitution substrate, so as to bond the first transparent conductive layer and the second transparent conductive layer. Finally, the epitaxy substrate is removed. As mentioned above, an LED with better reliability is fabricated according to the method provided by the present invention. Moreover, the present invention further provides an LED.
    • 提供一种制造发光二极管(LED)的方法。 首先,在外延基板上依次形成第一掺杂半导体层,发光层和第二掺杂半导体层。 然后,在第二型掺杂半导体层上形成第一透明导电层。 接下来,提供其上形成有第二透明导电层的置换基板。 然后,在外延基板和置换基板上进行晶片接合工艺,以便将第一透明导电层和第二透明导电层接合。 最后,除去外延衬底。 如上所述,根据本发明提供的方法制造具有更好可靠性的LED。 此外,本发明还提供一种LED。