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1. 发明授权

US06431229B1 Solventless purgeable diaphragm valved manifold for low vapor pressure chemicals 有权
标题翻译：无溶剂可清洗隔膜阀门用于低蒸气压化学品
公开(公告)号：US06431229B1
公开(公告)日：2002-08-13
申请号：US09938883
申请日：2001-08-24
申请人： Charles Michael Birtcher , Robert Sam Zorich , Thomas Andrew Steidl , Gil Vivanco , Cynthia Lee Trent , David James Silva
发明人： Charles Michael Birtcher , Robert Sam Zorich , Thomas Andrew Steidl , Gil Vivanco , Cynthia Lee Trent , David James Silva
IPC分类号： B65B104
CPC分类号： F17C13/04 , F17C2205/0323 , F17C2205/0385 , F17C2221/05 , F17C2227/044 , F17C2270/0518 , Y10T137/87684
摘要： A manifold for transfer of chemical, comprising; a heated first conduit for connecting a vessel for containing the chemical to a another vessel, a source of pressurized gas and a source of vacuum; a heated first block valve assembly having first and second diaphragm valves, each valve having a diaphragm and a valve seat side and a diaphragm side, wherein the valve seat side of each valve is juxtaposed to the valve seat side of the other valve, and each valve seat side of each valve communicating with the first conduit; a first connector in the first conduit for detaching the conduit from the vessel; a second conduit, for delivering chemical to the vessel, the second conduit connected to the diaphragm side of the first valve; and a third conduit, for communicating pressurized gas and vacuum to the first conduit, connected to the diaphragm side of the second valve.
摘要翻译：用于转移化学品的歧管，包括：用于将用于容纳化学品的容器连接到另一容器的加热的第一管道，加压气体源和真空源; 具有第一和第二隔膜阀的加热的第一截止阀组件，每个阀具有隔膜和阀座侧和隔膜侧，其中每个阀的阀座侧与另一个阀的阀座侧并置，并且每个每个阀的阀座侧与第一导管连通; 第一连接器，用于将导管从容器中分离出来; 用于将化学品输送到容器的第二导管，连接到第一阀的隔膜侧的第二导管; 以及第三导管，用于将加压气体和真空传送到连接到第二阀的隔膜侧的第一导管。

2. 发明授权

US07334595B2 Cabinet for chemical delivery with solvent purging and removal 有权
标题翻译：化学品输送柜，溶剂清洗除去
公开(公告)号：US07334595B2
公开(公告)日：2008-02-26
申请号：US11104012
申请日：2005-04-12
申请人： Charles Michael Birtcher , Martin Castaneda Martinez , Thomas Andrew Steidl , Gil Vivanco , David James Silva
发明人： Charles Michael Birtcher , Martin Castaneda Martinez , Thomas Andrew Steidl , Gil Vivanco , David James Silva
IPC分类号： G05D7/00 , B08B5/00
CPC分类号： F17C13/04 , B67D7/0272 , C23C16/448 , C23C16/45561 , F17C2203/0329 , F17C2203/0643 , F17C2205/0146 , F17C2205/0326 , F17C2205/0329 , F17C2205/0335 , F17C2205/0341 , F17C2223/047 , F17C2227/0304 , F17C2227/044 , F17C2250/032 , F17C2250/036 , F17C2250/0413 , F17C2250/0417 , F17C2250/0434 , F17C2250/0491 , F17C2250/0495 , F17C2260/013 , F17C2260/015 , F17C2260/016 , F17C2265/017 , F17C2270/0518 , F17C2270/0545 , Y10T137/0419 , Y10T137/0424 , Y10T137/3127 , Y10T137/4259 , Y10T137/6606 , Y10T137/87877 , Y10T137/87893
摘要： The present invention is an apparatus and process for storing and delivering a low vapor pressure process chemical to a process tool for semiconductor fabrication, comprising: a) a bulk container for storing the process chemical; b) a process container for delivering the process chemical to the process tool; c) a first manifold for delivering process chemical from the bulk container to the process container; d) a solvent container containing a quantity of solvent, e) a second manifold for delivering the process chemical from the process container to a process tool; f) a solvent recovery container for containing used solvent and removed process chemical, and, g) a solvent evaporator to differentially remove solvent from process chemical in the solvent recovery container by entrainment in a carrier gas, vacuum removal, heating or combinations thereof. The containers can be baffled on their inert gas inlets. The cabinet can be heated.
摘要翻译：本发明是一种将低蒸气压工艺化学品储存和输送到半导体制造工艺工具的装置和方法，包括：a）用于储存工艺化学品的散装容器; b）用于将过程化学品递送到加工工具的加工容器; c）用于将处理化学品从散装容器输送到处理容器的第一歧管; d）含有一定量溶剂的溶剂容器，e）用于将工艺化学品从处理容器输送到加工工具的第二歧管; f）用于容纳使用的溶剂和除去的工艺化学品的溶剂回收容器，以及g）溶剂蒸发器，以通过夹带在载体气体中，从而在溶剂回收容器中差别地从工艺化学品中除去溶剂，真空去除，加热或其组合。容器在其惰性气体入口处可能受到阻碍。柜子可以加热。

3. 发明授权

US06953047B2 Cabinet for chemical delivery with solvent purging 有权
标题翻译：化学品输送柜，溶剂清洗
公开(公告)号：US06953047B2
公开(公告)日：2005-10-11
申请号：US10046614
申请日：2002-01-14
申请人： Charles Michael Birtcher , Martin Castaneda Martinez , Thomas Andrew Steidl , Gil Vivanco , David James Silva
发明人： Charles Michael Birtcher , Martin Castaneda Martinez , Thomas Andrew Steidl , Gil Vivanco , David James Silva
IPC分类号： H01L21/205 , B67D7/02 , F17C13/04 , B08B5/00 , B08B9/02 , B08B9/032
CPC分类号： F17C13/04 , B67D7/0272 , C23C16/448 , C23C16/45561 , F17C2203/0329 , F17C2203/0643 , F17C2205/0146 , F17C2205/0326 , F17C2205/0329 , F17C2205/0335 , F17C2205/0341 , F17C2223/047 , F17C2227/0304 , F17C2227/044 , F17C2250/032 , F17C2250/036 , F17C2250/0413 , F17C2250/0417 , F17C2250/0434 , F17C2250/0491 , F17C2250/0495 , F17C2260/013 , F17C2260/015 , F17C2260/016 , F17C2265/017 , F17C2270/0518 , F17C2270/0545 , Y10T137/0419 , Y10T137/0424 , Y10T137/3127 , Y10T137/4259 , Y10T137/6606 , Y10T137/87877 , Y10T137/87893
摘要： The present invention is an apparatus for storing and delivering a low vapor pressure process chemical to a process tool for semiconductor fabrication, comprising: a) a bulk container for storing the process chemical; b) a process container for delivering the process chemical to the process tool; c) a first manifold for delivering process chemical from the bulk container to the process container; d) a solvent container containing a quantity of solvent, and; e) a second manifold for delivering the process chemical from the process container to a process tool. A process for using the apparatus is also contemplated.
摘要翻译：本发明是一种用于将低蒸汽压过程化学品储存和输送到用于半导体制造的加工工具的装置，包括：a）用于储存工艺化学品的散装容器; b）用于将过程化学品递送到加工工具的加工容器; c）用于将处理化学品从散装容器输送到处理容器的第一歧管; d）含有一定量溶剂的溶剂容器， e）用于将过程化学品从处理容器输送到处理工具的第二歧管。还设想了使用该装置的方法。

4. 发明授权

US06648034B1 Purgeable manifold for low vapor pressure chemicals containers 有权
标题翻译：用于低蒸气压化学容器的可吹扫歧管
公开(公告)号：US06648034B1
公开(公告)日：2003-11-18
申请号：US10155726
申请日：2002-05-23
申请人： Charles Michael Birtcher , Martin Castaneda Martinez , Thomas Andrew Steidl , Gil Vivanco , David James Silva
发明人： Charles Michael Birtcher , Martin Castaneda Martinez , Thomas Andrew Steidl , Gil Vivanco , David James Silva
IPC分类号： F17C1300
CPC分类号： C23C16/4402 , B08B9/00 , Y10T137/3127 , Y10T137/87684
摘要： A manifold comprising a container having two ports; a conduit connecting the container to a source/dispense of chemical having a first end and a second end and a connector for the ends; first block valve having two diaphragm valves, each valve having a valve seat side and a diaphragm side, each valve seat side faces the other valve seat side, and connected to the first end of the conduit, one diaphragm side connected to a first port, and another diaphragm side connected to vent; a second block valve having two diaphragm valves, having a valve seat side and a diaphragm side, wherein each valve seat side faces the other valve seat side, and each valve seat side connected to the second end of the conduit, the diaphragm side of one valve connected to purge, and the diaphragm side of another valve connected to push gas or chemical outlet.
摘要翻译：一种歧管，包括具有两个端口的容器; 将容器连接到具有第一端和第二端的化学品的源/分配的导管和用于端部的连接器; 第一截止阀具有两个隔膜阀，每个阀具有阀座侧和隔膜侧，每个阀座侧面对另一个阀座侧，并连接到导管的第一端，一个隔膜侧连接到第一端口，另一个隔膜侧连接到排气口; 具有两个隔膜阀的第二截止阀，其具有阀座侧和隔膜侧，其中每个阀座侧面向另一个阀座侧，并且每个阀座侧连接到导管的第二端，隔膜侧为一个阀门连接吹扫，另一个阀门的隔膜侧连接以推动气体或化学品出口。

5. 发明申请

US20130015594A1 Splashguard For High Flow Vacuum Bubbler Vessel 有权
标题翻译：用于高流量真空鼓泡机的防溅装置
公开(公告)号：US20130015594A1
公开(公告)日：2013-01-17
申请号：US13350989
申请日：2012-01-16
申请人： Charles Michael Birtcher , Thomas Andrew Steidl
发明人： Charles Michael Birtcher , Thomas Andrew Steidl
IPC分类号： B01F3/04
CPC分类号： B01F3/04
摘要： The present invention is a container having a diptube inlet, at least one baffle disc positioned between the outlet of the diptube and the outlet of the container to provide a narrow annular space between the baffle disc and the sidewall of the container to prevent liquid droplets from entering the outlet to the container and the inner surface of the container sidewall and an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc. The present invention is also a process of delivering a chemical precursor from a container having the above structure. Liquid and vapor delivery are both contemplated.
摘要翻译：本发明是一种具有汲取管入口的容器，至少一个位于汲取管的出口和容器出口之间的挡板，以在挡板和容器的侧壁之间提供窄的环形空间，以防止液滴从进入容器的出口和容器侧壁的内表面以及邻近挡板的侧壁上的环形径向向内突出的偏转器凸缘。本发明也是从具有上述结构的容器输送化学前体的方法。液态和蒸气输送都是预期的。

6. 发明授权

US08002247B2 Cross purge valve and container assembly 有权
标题翻译：交叉清洗阀和容器组件
公开(公告)号：US08002247B2
公开(公告)日：2011-08-23
申请号：US12464922
申请日：2009-05-13
申请人： Charles Michael Birtcher , Thomas Andrew Steidl , John Eric Baker
发明人： Charles Michael Birtcher , Thomas Andrew Steidl , John Eric Baker
IPC分类号： B01F3/04
CPC分类号： F16K11/02 , B08B9/00 , B08B9/08 , B08B9/0826 , B67D7/0272 , B67D7/0283 , B67D7/0294 , Y10T137/8376
摘要： The present invention is a quartz bubbler container with cross purge capability. This cross purge allows the user to easily purge air and chemical from the valve inlet and outlet by simply flowing inert gas, and avoids the requirement for a more complicated vacuum purging apparatus. The design incorporates two small footprint 3-way valves mounted on the bubbler container inlet and outlet connectors. The 3rd port of each valve is piped together between the valves with a crosspurge line. The valves are corrosion resistant, leak free, maintenance free, non-leaching of impurities, and can accommodate an optional breakseal crusher that will perforate quartz break seals (on the inlet and outlet of ampoule). Liquid out containers of various materials of construction are also contemplated.
摘要翻译：本发明是具有交叉吹扫能力的石英起泡器容器。这种交叉吹扫允许用户通过简单地流动惰性气体容易地从阀入口和出口清除空气和化学物质，并且避免了对更复杂的真空清洗装置的要求。该设计包括安装在起泡器容器入口和出口连接器上的两个小尺寸三通阀。每个阀门的第三个端口通过交叉管线连接在阀门之间。阀门是耐腐蚀的，无泄漏的，免维护的，不浸出的杂质，并且可以容纳一个可选的裂缝式破碎机，其将穿孔石英密封（在安瓿的入口和出口）。也考虑了各种各样的结构材料的液体容器。

7. 发明申请

US20100237085A1 Splashguard for High Flow Vacuum Bubbler Vessel 有权
标题翻译： Splashguard为高流量真空鼓泡船
公开(公告)号：US20100237085A1
公开(公告)日：2010-09-23
申请号：US12407279
申请日：2009-03-19
申请人： Charles Michael Birtcher , Thomas Andrew Steidl
发明人： Charles Michael Birtcher , Thomas Andrew Steidl
IPC分类号： B65D1/40 , B65B31/00
CPC分类号： B01J4/008 , B01J4/02
摘要： The present invention is a container having a diptube inlet, at least one baffle disc positioned between the outlet of the diptube and the outlet of the container to provide a narrow annular space between the baffle disc and the sidewall of the container to prevent liquid droplets from entering the outlet to the container and the inner surface of the container sidewall and an annular, radially inward projecting deflector ledge on the sidewall, proximate the baffle disc. The present invention is also a process of delivering a chemical precursor from a container having the above structure. Liquid and vapor delivery are both contemplated.
摘要翻译：本发明是一种具有汲取管入口的容器，至少一个位于汲取管的出口和容器出口之间的挡板，以在挡板和容器的侧壁之间提供窄的环形空间，以防止液滴从进入容器的出口和容器侧壁的内表面以及邻近挡板的侧壁上的环形径向向内突出的偏转器凸缘。本发明也是从具有上述结构的容器输送化学前体的方法。液态和蒸气输送都是预期的。

8. 发明申请

US20100242835A1 HIGH VOLUME DELIVERY SYSTEM FOR GALLIUM TRICHLORIDE 审中-公开
标题翻译：用于三氯化镓的高容量输送系统
公开(公告)号：US20100242835A1
公开(公告)日：2010-09-30
申请号：US12303950
申请日：2007-06-08
申请人： Chantal Arena , Christiaan J. Werkhoven , Thomas Andrew Steidl , Charles Michael Birtcher , Robert Daniel Clark
发明人： Chantal Arena , Christiaan J. Werkhoven , Thomas Andrew Steidl , Charles Michael Birtcher , Robert Daniel Clark
IPC分类号： C23C16/34 , C30B23/02
CPC分类号： C30B29/40 , C30B25/02 , C30B25/165 , C30B29/403 , C30B29/406
摘要： The present invention is related to the field of semiconductor processing equipment and methods and provides, in particular, methods and equipment for the sustained, high-volume production of Group III-V compound semiconductor material suitable for fabrication of optic and electronic components, for use as substrates for epitaxial deposition, for wafers and so forth. In preferred embodiments, these methods and equipment are optimized for producing Group III-N (nitrogen) compound semiconductor wafers and specifically for producing GaN wafers. Specifically, the precursor is provided at a mass flow of at least 50 g Group III element/hour for a time of at least 48 hours to facilitate high volume manufacture of the semiconductor material. Advantageously, the mass flow of the gaseous Group III precursor is controlled to deliver the desired amount.
摘要翻译：本发明涉及半导体处理设备和方法的领域，并且特别提供用于持续，大批量生产适用于制造光学和电子部件的III-V族化合物半导体材料的方法和设备，以供使用作为用于外延沉积的衬底，用于晶片等。在优选实施例中，这些方法和设备被优化用于生产III-N（氮）化合物半导体晶片，并且专门用于生产GaN晶片。具体地说，以至少50g III族元素/小时的质量流量提供前体至少48小时以促进半导体材料的大量制造。有利地，控制气态III族前体的质量流量以输送所需量。

9. 发明授权

US06966348B2 Purgeable container for low vapor pressure chemicals 有权
标题翻译：用于低蒸气压化学品的可吹扫容器
公开(公告)号：US06966348B2
公开(公告)日：2005-11-22
申请号：US10669942
申请日：2003-09-24
申请人： Thomas Andrew Steidl , Gildardo Vivanco , Charles Michael Birtcher
发明人： Thomas Andrew Steidl , Gildardo Vivanco , Charles Michael Birtcher
IPC分类号： B01J4/00 , B08B9/00 , B67D99/00 , C23C16/44 , C23C16/455 , F16K11/10 , F17C13/04 , H01L21/02 , H01L21/205 , H01L21/304 , F17C13/00
CPC分类号： F17C13/04 , B08B9/00 , C23C16/4402 , F17C2221/05 , F17C2223/0153 , F17C2223/033 , F17C2223/043 , F17C2223/047 , F17C2227/044 , F17C2260/044 , F17C2270/0518 , Y10T137/3127
摘要： A container having two ports; first block valve having two diaphragm valves, each valve having a valve seat side and a diaphragm side, each valve seat side faces the other valve seat side, and connected to the first end of a dispense conduit, one diaphragm side connected to a first port, and another diaphragm side connected to vent and or vacuum; a second valve connected to a push gas conduit and a second port.
摘要翻译：一个容器有两个端口; 第一截止阀具有两个隔膜阀，每个阀具有阀座侧和隔膜侧，每个阀座侧面向另一个阀座侧，并连接到分配管的第一端，一个隔膜侧连接到第一端口，另一个隔膜侧连接到通风口和/或真空; 连接到推进气体导管和第二端口的第二阀。

10. 发明授权

US06276404B1 Chemical delivery system with spill containment door 有权
标题翻译：化学物质输送系统带有泄漏安全门
公开(公告)号：US06276404B1
公开(公告)日：2001-08-21
申请号：US09661750
申请日：2000-09-14
申请人： Charles Michael Birtcher , Thomas Andrew Steidl , William J. Sheehy
发明人： Charles Michael Birtcher , Thomas Andrew Steidl , William J. Sheehy
IPC分类号： B65B104
CPC分类号： B67D7/3209 , B67D7/84
摘要： A high purity chemical storage and delivery system and process with secondary containment, comprising; a cabinet for containing a canister of high purity chemical, a manifold in the cabinet for fluid connection between the canister and the cabinet for controllably dispensing high purity chemical; a control unit for controlling the dispensing of high purity chemical from the canister and the cabinet for a downstream use, a closeable opening in the cabinet for allowing loading and unloading of the canister from the cabinet, at least one door for closing the opening, a liquid tight secondary containment door in the opening for closing off a portion of the opening such that the secondary containment door is sized so that the portion is sufficient to define a volume in conjunction with the cabinet to contain the entire high purity chemical liquid contents of the canister.
摘要翻译：一种高纯度化学品储存和输送系统及具有次级容纳物的方法，包括：用于容纳高纯度化学品的罐的柜，在柜中的歧管，用于罐和柜之间的流体连接，用于可控地分配高纯度化学品; 控制单元，用于控制从罐和机柜排出高纯度化学品用于下游用途;机壳中的可关闭开口，用于允许罐从柜体装载和卸载;至少一个门，用于关闭开口; 用于封闭开口的一部分的液密的二级容纳门，使得二级容纳门的尺寸设定成使得该部分足以与橱柜一起限定体积以容纳整个高纯度化学液体内容物罐。

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