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1. 发明授权

US06953047B2 Cabinet for chemical delivery with solvent purging 有权
标题翻译：化学品输送柜，溶剂清洗
公开(公告)号：US06953047B2
公开(公告)日：2005-10-11
申请号：US10046614
申请日：2002-01-14
申请人： Charles Michael Birtcher , Martin Castaneda Martinez , Thomas Andrew Steidl , Gil Vivanco , David James Silva
发明人： Charles Michael Birtcher , Martin Castaneda Martinez , Thomas Andrew Steidl , Gil Vivanco , David James Silva
IPC分类号： H01L21/205 , B67D7/02 , F17C13/04 , B08B5/00 , B08B9/02 , B08B9/032
CPC分类号： F17C13/04 , B67D7/0272 , C23C16/448 , C23C16/45561 , F17C2203/0329 , F17C2203/0643 , F17C2205/0146 , F17C2205/0326 , F17C2205/0329 , F17C2205/0335 , F17C2205/0341 , F17C2223/047 , F17C2227/0304 , F17C2227/044 , F17C2250/032 , F17C2250/036 , F17C2250/0413 , F17C2250/0417 , F17C2250/0434 , F17C2250/0491 , F17C2250/0495 , F17C2260/013 , F17C2260/015 , F17C2260/016 , F17C2265/017 , F17C2270/0518 , F17C2270/0545 , Y10T137/0419 , Y10T137/0424 , Y10T137/3127 , Y10T137/4259 , Y10T137/6606 , Y10T137/87877 , Y10T137/87893
摘要： The present invention is an apparatus for storing and delivering a low vapor pressure process chemical to a process tool for semiconductor fabrication, comprising: a) a bulk container for storing the process chemical; b) a process container for delivering the process chemical to the process tool; c) a first manifold for delivering process chemical from the bulk container to the process container; d) a solvent container containing a quantity of solvent, and; e) a second manifold for delivering the process chemical from the process container to a process tool. A process for using the apparatus is also contemplated.
摘要翻译：本发明是一种用于将低蒸汽压过程化学品储存和输送到用于半导体制造的加工工具的装置，包括：a）用于储存工艺化学品的散装容器; b）用于将过程化学品递送到加工工具的加工容器; c）用于将处理化学品从散装容器输送到处理容器的第一歧管; d）含有一定量溶剂的溶剂容器， e）用于将过程化学品从处理容器输送到处理工具的第二歧管。还设想了使用该装置的方法。

2. 发明授权

US07334595B2 Cabinet for chemical delivery with solvent purging and removal 有权
标题翻译：化学品输送柜，溶剂清洗除去
公开(公告)号：US07334595B2
公开(公告)日：2008-02-26
申请号：US11104012
申请日：2005-04-12
申请人： Charles Michael Birtcher , Martin Castaneda Martinez , Thomas Andrew Steidl , Gil Vivanco , David James Silva
发明人： Charles Michael Birtcher , Martin Castaneda Martinez , Thomas Andrew Steidl , Gil Vivanco , David James Silva
IPC分类号： G05D7/00 , B08B5/00
CPC分类号： F17C13/04 , B67D7/0272 , C23C16/448 , C23C16/45561 , F17C2203/0329 , F17C2203/0643 , F17C2205/0146 , F17C2205/0326 , F17C2205/0329 , F17C2205/0335 , F17C2205/0341 , F17C2223/047 , F17C2227/0304 , F17C2227/044 , F17C2250/032 , F17C2250/036 , F17C2250/0413 , F17C2250/0417 , F17C2250/0434 , F17C2250/0491 , F17C2250/0495 , F17C2260/013 , F17C2260/015 , F17C2260/016 , F17C2265/017 , F17C2270/0518 , F17C2270/0545 , Y10T137/0419 , Y10T137/0424 , Y10T137/3127 , Y10T137/4259 , Y10T137/6606 , Y10T137/87877 , Y10T137/87893
摘要： The present invention is an apparatus and process for storing and delivering a low vapor pressure process chemical to a process tool for semiconductor fabrication, comprising: a) a bulk container for storing the process chemical; b) a process container for delivering the process chemical to the process tool; c) a first manifold for delivering process chemical from the bulk container to the process container; d) a solvent container containing a quantity of solvent, e) a second manifold for delivering the process chemical from the process container to a process tool; f) a solvent recovery container for containing used solvent and removed process chemical, and, g) a solvent evaporator to differentially remove solvent from process chemical in the solvent recovery container by entrainment in a carrier gas, vacuum removal, heating or combinations thereof. The containers can be baffled on their inert gas inlets. The cabinet can be heated.
摘要翻译：本发明是一种将低蒸气压工艺化学品储存和输送到半导体制造工艺工具的装置和方法，包括：a）用于储存工艺化学品的散装容器; b）用于将过程化学品递送到加工工具的加工容器; c）用于将处理化学品从散装容器输送到处理容器的第一歧管; d）含有一定量溶剂的溶剂容器，e）用于将工艺化学品从处理容器输送到加工工具的第二歧管; f）用于容纳使用的溶剂和除去的工艺化学品的溶剂回收容器，以及g）溶剂蒸发器，以通过夹带在载体气体中，从而在溶剂回收容器中差别地从工艺化学品中除去溶剂，真空去除，加热或其组合。容器在其惰性气体入口处可能受到阻碍。柜子可以加热。

3. 发明授权

US06648034B1 Purgeable manifold for low vapor pressure chemicals containers 有权
标题翻译：用于低蒸气压化学容器的可吹扫歧管
公开(公告)号：US06648034B1
公开(公告)日：2003-11-18
申请号：US10155726
申请日：2002-05-23
申请人： Charles Michael Birtcher , Martin Castaneda Martinez , Thomas Andrew Steidl , Gil Vivanco , David James Silva
发明人： Charles Michael Birtcher , Martin Castaneda Martinez , Thomas Andrew Steidl , Gil Vivanco , David James Silva
IPC分类号： F17C1300
CPC分类号： C23C16/4402 , B08B9/00 , Y10T137/3127 , Y10T137/87684
摘要： A manifold comprising a container having two ports; a conduit connecting the container to a source/dispense of chemical having a first end and a second end and a connector for the ends; first block valve having two diaphragm valves, each valve having a valve seat side and a diaphragm side, each valve seat side faces the other valve seat side, and connected to the first end of the conduit, one diaphragm side connected to a first port, and another diaphragm side connected to vent; a second block valve having two diaphragm valves, having a valve seat side and a diaphragm side, wherein each valve seat side faces the other valve seat side, and each valve seat side connected to the second end of the conduit, the diaphragm side of one valve connected to purge, and the diaphragm side of another valve connected to push gas or chemical outlet.
摘要翻译：一种歧管，包括具有两个端口的容器; 将容器连接到具有第一端和第二端的化学品的源/分配的导管和用于端部的连接器; 第一截止阀具有两个隔膜阀，每个阀具有阀座侧和隔膜侧，每个阀座侧面对另一个阀座侧，并连接到导管的第一端，一个隔膜侧连接到第一端口，另一个隔膜侧连接到排气口; 具有两个隔膜阀的第二截止阀，其具有阀座侧和隔膜侧，其中每个阀座侧面向另一个阀座侧，并且每个阀座侧连接到导管的第二端，隔膜侧为一个阀门连接吹扫，另一个阀门的隔膜侧连接以推动气体或化学品出口。

4. 发明授权

US06431229B1 Solventless purgeable diaphragm valved manifold for low vapor pressure chemicals 有权
标题翻译：无溶剂可清洗隔膜阀门用于低蒸气压化学品
公开(公告)号：US06431229B1
公开(公告)日：2002-08-13
申请号：US09938883
申请日：2001-08-24
申请人： Charles Michael Birtcher , Robert Sam Zorich , Thomas Andrew Steidl , Gil Vivanco , Cynthia Lee Trent , David James Silva
发明人： Charles Michael Birtcher , Robert Sam Zorich , Thomas Andrew Steidl , Gil Vivanco , Cynthia Lee Trent , David James Silva
IPC分类号： B65B104
CPC分类号： F17C13/04 , F17C2205/0323 , F17C2205/0385 , F17C2221/05 , F17C2227/044 , F17C2270/0518 , Y10T137/87684
摘要： A manifold for transfer of chemical, comprising; a heated first conduit for connecting a vessel for containing the chemical to a another vessel, a source of pressurized gas and a source of vacuum; a heated first block valve assembly having first and second diaphragm valves, each valve having a diaphragm and a valve seat side and a diaphragm side, wherein the valve seat side of each valve is juxtaposed to the valve seat side of the other valve, and each valve seat side of each valve communicating with the first conduit; a first connector in the first conduit for detaching the conduit from the vessel; a second conduit, for delivering chemical to the vessel, the second conduit connected to the diaphragm side of the first valve; and a third conduit, for communicating pressurized gas and vacuum to the first conduit, connected to the diaphragm side of the second valve.
摘要翻译：用于转移化学品的歧管，包括：用于将用于容纳化学品的容器连接到另一容器的加热的第一管道，加压气体源和真空源; 具有第一和第二隔膜阀的加热的第一截止阀组件，每个阀具有隔膜和阀座侧和隔膜侧，其中每个阀的阀座侧与另一个阀的阀座侧并置，并且每个每个阀的阀座侧与第一导管连通; 第一连接器，用于将导管从容器中分离出来; 用于将化学品输送到容器的第二导管，连接到第一阀的隔膜侧的第二导管; 以及第三导管，用于将加压气体和真空传送到连接到第二阀的隔膜侧的第一导管。

5. 发明授权

US06341615B1 Self-cleaning vacuum purge system 失效
标题翻译：自清洁真空吹扫系统
公开(公告)号：US06341615B1
公开(公告)日：2002-01-29
申请号：US09660633
申请日：2000-09-13
申请人： Robert Sam Zorich , David James Silva
发明人： Robert Sam Zorich , David James Silva
IPC分类号： G05D1620
CPC分类号： B01D45/00 , Y10T137/0396 , Y10T137/3084 , Y10T137/6606 , Y10T137/86083
摘要： A vacuum purge system is provided to protect the vacuum pump from becoming flooded with liquid that on occasion is purged with vapors from process equipment. The liquid is trapped in a vessel and then evaporated and exhausted through the vacuum pump as vapor. Evaporation of trapped liquid is effected by reducing or stopping the purge stream to the trapping vessel while continuing to operate the vacuum pump, thereby reducing the absolute pressure within the vessel. Evaporation of liquid can also be effected by supplying heat to the trapped vessel, either in cooperation with or instead of the pressure reduction. Use of a programmable logic controller enables a cyclic operation that traps liquid from entering the pump, removes the trapped liquid as vapor, and then resumes normal purge operation.
摘要翻译：提供真空吹扫系统以保护真空泵不被液体淹没，有时用过程设备的蒸气吹扫。将液体捕获在容器中，然后蒸发并通过真空泵作为蒸气排出。捕集的液体的蒸发通过在继续操作真空泵的同时将吹扫流还原或停止到捕集容器，从而降低容器内的绝对压力来实现。液体的蒸发也可以通过与压缩还原反应或代替减压来向被捕集的容器提供热量来实现。使用可编程逻辑控制器可以进行循环操作，以捕获液体进入泵，将捕集的液体作为蒸汽去除，然后恢复正常清洗操作。

6. 发明授权

US07114522B2 Adapter manifold with dual valve block 失效
标题翻译：带双阀块的适配器歧管
公开(公告)号：US07114522B2
公开(公告)日：2006-10-03
申请号：US10944364
申请日：2004-09-18
申请人： David James Silva
发明人： David James Silva
IPC分类号： F16K7/17
CPC分类号： F16K11/22 , F16K11/022 , Y10T137/87249 , Y10T137/87893
摘要： An adapter manifold comprising a first dual valve block having a first diaphragm valve and a second diaphragm valve; a first, a second, and a third low dead space connector for connecting the adapter manifold with dual valve block to the remaining portions of the chemical delivery system; a first conduit for connecting both the diaphragm side of the first diaphragm valve and the seat side of the second diaphragm valves to the first low dead space connector; a second conduit for connecting the seat side of the first diaphragm valve to the second low dead space connector; and a third conduit for connecting the diaphragm side of the second diaphragm valve to the third low dead space connector.
摘要翻译：一种适配器歧管，包括具有第一隔膜阀和第二隔膜阀的第一双阀块; 第一，第二和第三低死空间连接器，用于将适配器歧管与双阀块连接到化学物质输送系统的其余部分; 第一管道，用于将第一隔膜阀的隔膜侧和第二隔膜阀的座侧连接到第一低死区连接器; 用于将第一隔膜阀的座侧连接到第二低死区连接器的第二导管; 以及用于将第二隔膜阀的隔膜侧连接到第三低死区连接器的第三导管。

7. 发明授权

US07198056B2 High purity chemical delivery system 失效
标题翻译：高纯化学品输送系统
公开(公告)号：US07198056B2
公开(公告)日：2007-04-03
申请号：US11055225
申请日：2005-02-10
申请人： David James Silva
发明人： David James Silva
IPC分类号： B67D5/54
CPC分类号： F04F1/06 , Y10T137/3127 , Y10T137/4259
摘要： A high purity chemical delivery system is provided that connects a high purity chemical container to a high purity chemical utilization point and that comprises three manifolds, each of the manifolds having a plurality of diaphragm valves. The inventive system enables rapid clean out and purge after the container is replaced by means of a plurality of vacuum and purge cycles, which remove residual chemical and entrapped impurities while reduced manufacturing downtimes compared with systems in the prior art.
摘要翻译：提供了一种高纯度化学物质输送系统，其将高纯度化学容器连接到高纯度化学品利用点，并且包括三个歧管，每个歧管具有多个隔膜阀。在通过多个真空和吹扫循环替换容器之后，本发明的系统能够快速清洁和清除，这与现有技术中的系统相比减少了制造停机时间，从而消除了残留的化学和捕获的杂质。

8. 发明授权

US07114531B2 System and method for purging high purity interfaces 失效
公开(公告)号：US07114531B2
公开(公告)日：2006-10-03
申请号：US10909854
申请日：2004-08-02
申请人： David James Silva
发明人： David James Silva
IPC分类号： B65B31/00
CPC分类号： C23C16/4402 , B01J4/02 , B01J2219/00162 , B08B9/00 , B08B9/032 , B08B9/0323 , Y10T137/87684
摘要： A system for purging high purity interfaces connecting a high purity chemical container to process lines comprises a first purging manifold, connected at one end to a first adapter manifold extending from the high purity chemical container, and connected at the other end either to a process tool, to a second high purity container, to a source of gas, or to a source of vacuum on one side, or to a source of vent or to a source of vacuum on the other side; and a second purging manifold connecting the second adapter manifold either to a source of push gas, a source of purge gas, or a source of vacuum; or to a source of vent. A related method comprises blowing purge gas through both the first and the second purging manifolds, and, optionally, applying vacuum to both purging manifolds.

9. 发明授权

US07290572B2 Method for purging a high purity manifold 失效
标题翻译：吹扫高纯度歧管的方法
公开(公告)号：US07290572B2
公开(公告)日：2007-11-06
申请号：US11160801
申请日：2005-07-10
申请人： David James Silva
发明人： David James Silva
IPC分类号： B65B1/04
CPC分类号： F17C13/04 , F17C2205/0146 , F17C2205/0323 , F17C2221/05 , F17C2227/0302 , F17C2227/044 , F17C2227/045 , F17C2250/0631 , F17C2250/0636 , F17C2250/0673 , F17C2260/048 , F17C2270/0518
摘要： A method for purging a manifold for the delivery of a high purity chemical by injecting of a purge gas into the manifold under vacuum conditions. In one embodiment, the method comprises a first step of injecting a purge gas into the manifold at a first end while applying vacuum at a second end; a second step of closing the first end and evacuating the manifold by applying vacuum at the second end; and a third step of opening the first end and injecting purge gas into the manifold at the first end while applying vacuum at the second end, causing a turbulent flow of the purge gas along the internal walls of the manifold due to the pressure differential between the purge gas and the evacuated manifold. An effective removal of residuals of the high purity chemical within the manifold is thereby achieved.
摘要翻译：一种用于通过在真空条件下将吹扫气体注入到歧管中来吹扫用于输送高纯度化学品的歧管的方法。在一个实施例中，该方法包括第一步骤，其在第一端处将净化气体注入到歧管中，同时在第二端施加真空; 第二步骤，通过在第二端施加真空来关闭第一端并排出歧管; 以及第三步骤，在第一端处打开第一端并将吹扫气体注入到歧管中，同时在第二端处施加真空，由于第二端部之间的压力差导致吹扫气体沿着歧管内壁的紊流吹扫气体和抽真空歧管。从而实现了在歧管内高效清除高纯度化学物质的有效去除。

10. 发明授权

US07198072B2 Purgeable manifold system 失效
标题翻译：可清洗歧管系统
公开(公告)号：US07198072B2
公开(公告)日：2007-04-03
申请号：US10890550
申请日：2004-07-13
申请人： David James Silva
发明人： David James Silva
IPC分类号： B65B31/00
CPC分类号： B01J4/02 , B01J2219/00162 , B08B9/00 , B08B9/0323 , Y10T137/87684
摘要： A purgeable manifold system for the movement of low vapor pressure chemicals that may be embodied in a variety of forms. In one embodiment, a container for storing the low vapor pressure chemical has a plurality of ports; a first manifold detachably connects a first port to a source of gas, vent, or vacuum by flow communication through a first diaphragm valve; a second manifold detachably connects a second port to a source of gas, vent, vacuum, or low vapor pressure chemical, or to a process tool by flow communication through a second and a third diaphragm valve, or alternatively detachably connects a third port to the same source by flow communication through a fourth and the third diaphragm valve; and a third manifold, detachably connects a fourth port to a source of gas, vent, or vacuum by flow communication through a fifth diaphragm valve.
摘要翻译：用于移动可以以各种形式体现的低蒸汽压力化学品的可清洗歧管系统。在一个实施例中，用于储存低蒸气压化学品的容器具有多个端口; 第一歧管通过第一隔膜阀通过流动连通将第一端口可拆卸地连接到气体，通气口或真空源; 第二歧管将第二端口可拆卸地连接到气体源，排气口，真空或低蒸气压化学物质，或者通过通过第二和第三隔膜阀的流动连通而连接到处理工具，或者可替换地将第三端口连接到通过第四和第三隔膜阀的流动连通相同的源; 和第三歧管，通过通过第五隔膜阀的流动连通将第四端口可拆卸地连接到气体，通风口或真空源。

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