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1. 发明授权

US07914594B2 Air filtering device and cleaning system of semiconductor manufacturing apparatus with the same 失效
标题翻译：具有相同的半导体制造装置的空气过滤装置和清洗系统
公开(公告)号：US07914594B2
公开(公告)日：2011-03-29
申请号：US12180289
申请日：2008-07-25
申请人： Chang-Min Cho , Joo-Young Kim , Ji-Young Kim , Ju-A Ryu , Yo-Han Ahn , Hyung-Seok Choi , Dong-Seok Ham
发明人： Chang-Min Cho , Joo-Young Kim , Ji-Young Kim , Ju-A Ryu , Yo-Han Ahn , Hyung-Seok Choi , Dong-Seok Ham
IPC分类号： B01D46/00
CPC分类号： B01D46/0058 , B01D46/002 , B01D46/24 , B01D46/4272 , Y10S55/31
摘要： An air filtering device and an air cleaning system of a semiconductor manufacturing apparatus to reduce cost and increase manufacturing productivity. The air filtering device may include a frame having an open aperture coupled to an air supply line. A buffer frame configured to be inserted into the frame may include a plurality of slot parts, each slot part having a plurality of air in/out apertures through which air may flow in or out from the buffer frame. A plurality of filters may be releasably fastened to the plurality of slot parts to filter pollution material contained in air flowing through the air in/out apertures. An air interrupter for interrupting air flowing through the air in/out apertures may be used when replacing the plurality of filters, thereby providing purified air to the semiconductor manufacturing apparatus during the replacement.
摘要翻译：一种半导体制造装置的空气过滤装置和空气净化系统，以降低成本并提高制造生产率。空气过滤装置可以包括具有联接到空气供应管线的开口孔的框架。被构造成插入到框架中的缓冲框架可以包括多个狭槽部分，每个狭槽部分具有多个空气进/出孔，空气可以通过空气进入或离开缓冲器框架。多个过滤器可以可释放地紧固到多个槽部分，以过滤包含在流过空气进/出孔的空气中的污染物质。当更换多个过滤器时，可以使用用于中断通过空气入口/出口的空气的空气断路器，从而在更换期间向半导体制造装置提供净化的空气。

2. 发明申请

US20070039470A1 Apparatus and method for collecting contaminants from an air flow for manufacturing semiconductor devices and system using the same 审中-公开
标题翻译：用于从用于制造半导体器件的气流中收集污染物的装置和方法以及使用该污染物的系统
公开(公告)号：US20070039470A1
公开(公告)日：2007-02-22
申请号：US11329913
申请日：2006-01-10
申请人： Ha-Na Kim , Dong-Seok Ham , Yo-Han Ahn , Chang-Min Cho , Kwang-Min Choi
发明人： Ha-Na Kim , Dong-Seok Ham , Yo-Han Ahn , Chang-Min Cho , Kwang-Min Choi
IPC分类号： B01D47/00
CPC分类号： B01D47/14 , B01D53/18
摘要： Water discharged at a top region of an eliminator flows, e.g., by gravity into, along, and between the portions of the eliminator while an air flow also travels therein, e.g., horizontally and transverse to the water flow. As the air flow encounters the water, e.g., strikes portions of the eliminator having water flowing downward therealong or encounters water falling between portions of the eliminator, contaminants pass from the air flow to the water flow. The air flow, relieved of certain contaminants, continues onward and the water flow collects at the bottom of the eliminator for filtration and re-circulation through the eliminator.
摘要翻译：在消除器的顶部区域排出的水例如通过重力流入消除器的部分之间，并且在消除器的部分之间流动，同时气流也在其中行进，例如水平和横向于水流。当空气流遇到水时，例如撞击具有向下流动的水的消除器的部分或遇到在消除器的部分之间落下的水，污染物从空气流传递到水流。释放某些污染物的空气流继续向前，水流收集在消除器的底部，以过滤并通过消除器再循环。

3. 发明申请

US20060225299A1 Method of transferring a substrate 审中-公开
标题翻译：转移基材的方法
公开(公告)号：US20060225299A1
公开(公告)日：2006-10-12
申请号：US11451315
申请日：2006-06-13
申请人： Hyun-Joo Kim , Yo-Han Ahn , Dong-Seok Ham , Jae-Bong Kim
发明人： Hyun-Joo Kim , Yo-Han Ahn , Dong-Seok Ham , Jae-Bong Kim
IPC分类号： F26B21/06
CPC分类号： H01L21/67017 , H01L21/67772
摘要： A method of controlling contamination in a substrate transfer chamber that is disposed between a load port for supporting a container to receive a plurality of substrates and a substrate process module for processing the substrates includes supplying a purge gas into the substrate transfer chamber to purge an interior of the substrate transfer chamber, circulating the purge gas supplied into the substrate transfer chamber through a gas circular pipe, removing particles and airborne molecular contaminants from the purge gas being circulated, and resupplying the circulated purge gas into the substrate transfer chamber.
摘要翻译：一种控制衬底传送室中的污染物的方法，该衬底传送室设置在用于支撑容器以容纳多个衬底的负载端口和用于处理衬底的衬底处理模块之间，包括将清洗气体供应到衬底传送室中以净化内部的衬底传送室，通过气体环形管循环供给到衬底传送室的吹扫气体，从循环的吹扫气体中除去颗粒和空气传播的分子污染物，并将循环的净化气体再供给到衬底传送室中。

4. 发明授权

US07065898B2 Module for transferring a substrate 失效
标题翻译：用于转移衬底的模块
公开(公告)号：US07065898B2
公开(公告)日：2006-06-27
申请号：US10763203
申请日：2004-01-26
申请人： Hyun-Joon Kim , Yo-Han Ahn , Dong-Seok Ham , Jae-Bong Kim
发明人： Hyun-Joon Kim , Yo-Han Ahn , Dong-Seok Ham , Jae-Bong Kim
IPC分类号： F26B21/06
CPC分类号： H01L21/67017 , H01L21/67772
摘要： A module for transferring a substrate includes a load port for supporting a container to receive a plurality of substrates, a substrate transfer chamber disposed between the load port and a substrate process module, a substrate transfer robot disposed in the substrate transfer chamber for transferring the substrates between the container and the substrate process module, a gas supply unit connected to the substrate transfer chamber for supplying a purge gas into the substrate transfer chamber to purge an interior of the substrate transfer chamber, and a contamination control unit connected to the substrate transfer chamber for circulating the purge gas supplied into the substrate transfer chamber, resupplying the circulated purge gas into the substrate transfer chamber and removing particles and airborne molecular contaminants from the purge gas being circulated. Contamination of a substrate may be prevented and a necessary amount of purge gas may be reduced.
摘要翻译：用于转印衬底的模块包括用于支撑容器以容纳多个衬底的负载端口，设置在负载端口和衬底处理模块之间的衬底传送室，设置在衬底传送室中用于传送衬底的衬底传送机器人在所述容器和所述基板处理模块之间，连接到所述基板传送室的气体供应单元，用于将净化气体供应到所述基板传送室中以净化所述基板传送室的内部;以及污染控制单元，连接到所述基板传送室用于循环供给到基板传送室中的吹扫气体，将循环的净化气体再供给到基板传送室中，并从正在循环的吹扫气体中除去颗粒和空气传播的分子污染物。可以防止基材的污染，并且可以减少必需量的吹扫气体。

5. 发明申请

US20060021934A1 Method and system for fabricating filter structure 审中-公开
标题翻译：制造过滤器结构的方法和系统
公开(公告)号：US20060021934A1
公开(公告)日：2006-02-02
申请号：US11089456
申请日：2005-03-22
申请人： Chang-Min Cho , Jung-Sung Hwang , Dong-Seok Ham , Ha-Na Kim
发明人： Chang-Min Cho , Jung-Sung Hwang , Dong-Seok Ham , Ha-Na Kim
IPC分类号： B01D29/07
CPC分类号： B01D39/083 , B01D39/086 , B01D39/12 , B01D2239/0407 , B01D2239/0478 , B01D2239/083 , B01J20/3223 , Y10T156/10
摘要： The invention discloses a method and system for fabricating a filter structure. The method for fabricating the filter structure comprises preparing a filtering net having mesh patterns, injecting an adhesive on the filtering net, and adhering refining materials to the filtering net coated with the adhesive. Here, the adhesive is injected to have a smaller size than an interval of the mesh patterns. The system for fabricating the filter structure comprises a filtering net, a filtering net transfer device for transferring the filtering net, and an adhesive injection device for injecting an adhesive solution on the filtering net.
摘要翻译：本发明公开了一种制造过滤器结构的方法和系统。制造过滤器结构的方法包括制备具有网眼图案的过滤网，在过滤网上注入粘合剂，以及将精炼材料粘附到涂覆有粘合剂的过滤网上。这里，粘合剂被注入以具有比网状图案的间隔更小的尺寸。用于制造过滤器结构的系统包括过滤网，用于转移过滤网的过滤网转移装置和用于在过滤网上注入粘合剂溶液的粘合剂注入装置。

6. 发明授权

US07163573B2 Chemical filter medium, chemical filter including the chemical filter medium and method for manufacturing the chemical filter 有权
标题翻译：化学过滤介质，化学过滤器，包括化学过滤介质和化学过滤器的制造方法
公开(公告)号：US07163573B2
公开(公告)日：2007-01-16
申请号：US10750780
申请日：2004-01-02
申请人： Dong-Seok Ham , Hoo-Kun Lee
发明人： Dong-Seok Ham , Hoo-Kun Lee
IPC分类号： B01D53/04
CPC分类号： B01D53/66 , B01D53/02 , B01D53/0407 , B01D53/56 , B01D53/82 , B01D2253/102 , B01D2253/108 , B01D2253/25 , B01D2253/304 , B01D2257/106 , B01D2257/404 , B01D2258/0216 , B01D2259/4146 , Y02A50/2347
摘要： A chemical filter medium for removing ozone and nitrogen oxide includes a first ozone absorption layer for mainly removing ozone having a filtering base material for removing ozone, a first nitrogen oxide absorption layer for mainly removing nitrogen oxide formed on the first ozone absorption layer that includes a filtering base material for removing nitrogen oxide, and a second ozone absorption layer formed on the first nitrogen oxide absorption layer that includes a filtering base material for removing ozone. The chemical filter medium can simultaneously remove ozone and nitrogen oxide.
摘要翻译：用于去除臭氧和氮氧化物的化学过滤介质包括用于主要除去具有用于除去臭氧的过滤基材的臭氧的第一臭氧吸收层，用于主要去除在第一臭氧吸收层上形成的氮氧化物的第一氮氧化物吸收层，其包括用于除去氮氧化物的过滤基材和形成在第一氮氧化物吸收层上的第二臭氧吸收层，其包括用于除去臭氧的过滤基材。化学过滤介质可以同时去除臭氧和氮氧化物。

7. 发明申请

US20060207232A1 Chemical filter and fan filter unit having the same 有权
标题翻译：化学过滤器和风扇过滤器单元具有相同的功能
公开(公告)号：US20060207232A1
公开(公告)日：2006-09-21
申请号：US11083121
申请日：2005-03-17
申请人： Dong-Seok Ham , Hoo-Kun Lee
发明人： Dong-Seok Ham , Hoo-Kun Lee
IPC分类号： B01D59/50
CPC分类号： B01D53/0415 , B01D46/10 , B01D46/2411 , B01D53/0446 , B01D2257/106 , B01D2257/406 , B01D2257/80 , B01D2258/0216 , B01D2259/4508 , B01D2279/51
摘要： In a fan filter unit for filtering and continuously supplying clean air into a clean room, the fan filter unit includes a chemical filter for removing chemical contaminants contained in the air, a fan for sucking and blowing out the air, and a particle filter for removing particles such as dusts and moisture contained in the air. A filter medium of the chemical filter has a circular tube shape and is disposed between an inner circular tube and an outer circular tube. A cover is detachably combined with top portions of the inner and the outer circular tubes, and prevents air flow through the top portions of the inner and outer circular tubes. The air is sucked only through the outer circular tube, the chemical filter and the inner circular tube by a suction force of the fan. Accordingly, velocity distribution of the air passing through the chemical filter may be improved and lifetime of the chemical filter may be increased.
摘要翻译：在风扇过滤器单元中，用于过滤并连续地将清洁空气供应到洁净室中，风扇过滤器单元包括用于去除空气中包含的化学污染物的化学过滤器，用于吸入和吹出空气的风扇，以及用于除去空气的颗粒过滤器颗粒如空气中含有的灰尘和水分。化学过滤器的过滤介质具有圆管形状并且设置在内圆管和外圆管之间。一个盖可拆卸地与内圆管和外圆管的顶部组合，并防止空气流过内外圆管的顶部。通过风扇的吸力，空气仅通过外圆管，化学过滤器和内圆管吸入。因此，可以提高通过化学过滤器的空气的速度分布，并且可以提高化学过滤器的寿命。

8. 发明授权

US06679194B2 Cassette table of a semiconductor fabricating apparatus 失效
标题翻译：半导体制造装置的盒式表
公开(公告)号：US06679194B2
公开(公告)日：2004-01-20
申请号：US10265693
申请日：2002-10-08
申请人： Dong-Seok Ham , Kun-Hyung Lee , Hyeogi-Ki Kim , Kyoung-Ho Park
发明人： Dong-Seok Ham , Kun-Hyung Lee , Hyeogi-Ki Kim , Kyoung-Ho Park
IPC分类号： B05C1302
CPC分类号： H01L21/67396 , H01L21/67775 , Y10S414/137 , Y10S414/14
摘要： A cassette table on which a wafer cassette is supported allows static electricity to be discharged from the cassette and hence, form the wafers disposed in the cassette. The cassette table includes a top plate, a cassette supporter that is mounted on the top plate and supports the cassette. At least part of the cassette supporter is made of a material that allows static electricity to be discharged to ground therethrough.
摘要翻译：其上支撑有晶片盒的盒式台面允许静电从盒中排出，因此形成设置在盒中的晶片。盒式桌子包括顶板，安装在顶板上并支撑盒的盒式支架。盒式支架的至少一部分由允许静电通过其排出到地面的材料制成。

9. 发明授权

US06874700B2 Contamination control method and apparatus, and air-conditioning system of a substrate processing facility employing the same 失效
标题翻译：污染控制方法和装置，以及采用该方法和设备的基板处理设备的空调系统
公开(公告)号：US06874700B2
公开(公告)日：2005-04-05
申请号：US10684439
申请日：2003-10-15
申请人： Dong-Seok Ham , Hyun-Joon Kim , Hyun-Ho Cho
发明人： Dong-Seok Ham , Hyun-Joon Kim , Hyun-Ho Cho
IPC分类号： F24F7/06 , B01D53/14 , B01D53/18 , C02F1/28 , C02F1/32 , C02F1/42 , C02F9/00 , F24F3/16 , H01L21/02 , B05B9/00
CPC分类号： F24F3/161
摘要： A contamination control apparatus has a sprayer including at least one nozzle for spraying water, at least one eliminator having a passageway in which air is sprayed with the water to remove potential contaminants from the air, and a circulator for providing the sprayer with the water. The circulator includes a pH control device for adjusting the pH of the water fed to the sprayer, and an organic matter removing device for removing organic matter from the water. The contamination control apparatus can be advantageously employed in an air-conditioning system of a substrate processing facility.
摘要翻译：污染控制装置具有喷雾器，该喷雾器包括至少一个用于喷射水的喷嘴，至少一个消除器，具有通过空气喷洒空气以从空气中除去潜在污染物的通道，以及用于向喷雾器提供水的循环器。循环器包括用于调节供给喷雾器的水的pH值的pH控制装置和用于从水中去除有机物质的有机物除去装置。污染控制装置可以有利地用于基板处理设备的空调系统中。

10. 发明授权

US07320721B2 Chemical filter and fan filter unit having the same 有权
标题翻译：化学过滤器和风扇过滤器单元具有相同的功能
公开(公告)号：US07320721B2
公开(公告)日：2008-01-22
申请号：US11083121
申请日：2005-03-17
申请人： Dong-Seok Ham , Hoo-Kun Lee
发明人： Dong-Seok Ham , Hoo-Kun Lee
IPC分类号： B01D46/00
CPC分类号： B01D53/0415 , B01D46/10 , B01D46/2411 , B01D53/0446 , B01D2257/106 , B01D2257/406 , B01D2257/80 , B01D2258/0216 , B01D2259/4508 , B01D2279/51
摘要： In a fan filter unit for filtering and continuously supplying clean air into a clean room, the fan filter unit includes a chemical filter for removing chemical contaminants contained in the air, a fan for sucking and blowing out the air, and a particle filter for removing particles such as dusts and moisture contained in the air. A filter medium of the chemical filter has a circular tube shape and is disposed between an inner circular tube and an outer circular tube. A cover is detachably combined with top portions of the inner and the outer circular tubes, and prevents air flow through the top portions of the inner and outer circular tubes. The air is sucked only through the outer circular tube, the chemical filter and the inner circular tube by a suction force of the fan. Accordingly, velocity distribution of the air passing through the chemical filter may be improved and lifetime of the chemical filter may be increased.
摘要翻译：在风扇过滤器单元中，用于过滤并连续地将清洁空气供应到洁净室中，风扇过滤器单元包括用于去除空气中包含的化学污染物的化学过滤器，用于吸入和吹出空气的风扇，以及用于除去空气的颗粒过滤器颗粒如空气中含有的灰尘和水分。化学过滤器的过滤介质具有圆管形状并且设置在内圆管和外圆管之间。一个盖可拆卸地与内圆管和外圆管的顶部组合，并防止空气流过内外圆管的顶部。通过风扇的吸力，空气仅通过外圆管，化学过滤器和内圆管吸入。因此，可以提高通过化学过滤器的空气的速度分布，并且可以提高化学过滤器的寿命。

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