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1. 发明授权

US5814238A Method for dry etching of transition metals 失效
标题翻译：过渡金属的干蚀刻方法
公开(公告)号：US5814238A
公开(公告)日：1998-09-29
申请号：US542149
申请日：1995-10-12
申请人： Carol I. H. Ashby , Albert G. Baca , Peter Esherick , John E. Parmeter , Dennis J. Rieger , Randy J. Shul
发明人： Carol I. H. Ashby , Albert G. Baca , Peter Esherick , John E. Parmeter , Dennis J. Rieger , Randy J. Shul
IPC分类号： C23F4/00 , H01L21/3213 , B44C1/22 , C03C15/00 , C23F1/00
CPC分类号： C23F4/00 , H01L21/32136
摘要： A method for dry etching of transition metals. The method for dry etching of a transition metal (or a transition metal alloy such as a silicide) on a substrate comprises providing at least one nitrogen- or phosphorous-containing .pi.-acceptor ligand in proximity to the transition metal, and etching the transition metal to form a volatile transition metal/.pi.-acceptor ligand complex. The dry etching may be performed in a plasma etching system such as a reactive ion etching (RIE) system, a downstream plasma etching system (i.e. a plasma afterglow), a chemically-assisted ion beam etching (CAIBE) system or the like. The dry etching may also be performed by generating the .pi.-acceptor ligands directly from a ligand source gas (e.g. nitrosyl ligands generated from nitric oxide), or from contact with energized particles such as photons, electrons, ions, atoms, or molecules. In some preferred embodiments of the present invention, an intermediary reactant species such as carbonyl or a halide ligand is used for an initial chemical reaction with the transition metal, with the intermediary reactant species being replaced at least in part by the .pi.-acceptor ligand for forming the volatile transition metal/.pi.-acceptor ligand complex.
摘要翻译：一种干法蚀刻过渡金属的方法。过渡金属（或过渡金属合金如硅化物）在基板上的干蚀刻方法包括在过渡金属附近提供至少一种含氮或磷的pi受体配体，并蚀刻过渡金属以形成挥发性过渡金属/π-受体配体复合物。干蚀刻可以在诸如反应离子蚀刻（RIE）系统，下游等离子体蚀刻系统（等离子体余辉），化学辅助离子束蚀刻（CAIBE）系统等等的等离子体蚀刻系统中进行。干蚀刻也可以通过直接从配体源气体（例如由一氧化氮产生的亚硝酰基配体）或与激发的粒子例如光子，电子，离子，原子或分子的接触产生直接受体配体来进行。在本发明的一些优选实施方案中，中间反应物种如羰基或卤化物配体用于与过渡金属的初始化学反应，其中中间反应物种至少部分被pi受体配体替代形成挥发性过渡金属/π-受体配体复合物。

2. 发明授权

US5054028A Feedback stabilization system for pulsed single longitudinal mode tunable lasers 失效
标题翻译：用于脉冲单纵模可调谐激光器的反馈稳定系统
公开(公告)号：US5054028A
公开(公告)日：1991-10-01
申请号：US340823
申请日：1989-04-20
申请人： Peter Esherick , Thomas D. Raymond
发明人： Peter Esherick , Thomas D. Raymond
IPC分类号： H01S3/081 , H01S3/094 , H01S3/139 , H01S3/213
CPC分类号： H01S3/139 , H01S3/0812 , H01S3/094034 , H01S3/213 , H01S5/143
摘要： A feedback stabilization system for pulse single longitudinal mode tunable lasers having an excited laser medium contained within an adjustable length cavity and producing a laser beam through the use of an internal dispersive element, including detection of angular deviation in the output laser beam resulting from detuning between the cavity mode frequency and the passband of the internal dispersive element, and generating an error signal based thereon. The error signal can be integrated and amplified and then applied as a correcting signal to a piezoelectric transducer mounted on a mirror of the laser cavity for controlling the cavity length.
摘要翻译：一种用于脉冲单纵模式可调激光器的反馈稳定系统，其具有包含在可调节长度腔内的激发的激光介质，并且通过使用内部色散元件产生激光束，包括检测由于失调之间的失谐导致的输出激光束中的角偏差腔模式频率和内部色散元件的通带，并基于此产生误差信号。误差信号可以被积分和放大，然后作为校正信号施加到安装在激光腔的反射镜上的压电换能器，用于控制腔体长度。

3. 发明授权

US5625636A Integration of photoactive and electroactive components with vertical cavity surface emitting lasers 失效
标题翻译：光电和电活性组分与垂直腔表面发射激光器的集成
公开(公告)号：US5625636A
公开(公告)日：1997-04-29
申请号：US774915
申请日：1991-10-11
申请人： Robert P. Bryan , Peter Esherick , Jack L. Jewell , Kevin L. Lear , Gregory R. Olbright
发明人： Robert P. Bryan , Peter Esherick , Jack L. Jewell , Kevin L. Lear , Gregory R. Olbright
IPC分类号： G02B6/12 , G02B6/43 , H01S5/026 , H01S5/183 , H01S5/42 , H01S3/19 , H01S3/10
CPC分类号： G02B6/43 , G02B6/12004 , H01S5/0261 , H01S5/0262 , H01S5/02288 , H01S5/18308 , H01S5/2059 , H01S5/423 , H01S5/50
摘要： A monolithically integrated optoelectronic device is provided which integrates a vertical cavity surface emitting laser and either a photosensitive or an electrosensitive device either as input or output to the vertical cavity surface emitting laser either in parallel or series connection. Both vertical and side-by-side arrangements are disclosed, and optical and electronic feedback means are provided. Arrays of these devices can be configured to enable optical computing and neural network applications.
摘要翻译：提供了一种单片集成的光电子器件，其将垂直腔表面发射激光器和作为输入或输出的感光或电感器件并入或串联连接到垂直腔表面发射激光器。公开了垂直和并排布置，并且提供光学和电子反馈装置。这些设备的阵列可以配置为支持光学计算和神经网络应用。

4. 发明授权

US4791633A Polarization feedback laser stabilization 失效
标题翻译：极化反馈激光稳定
公开(公告)号：US4791633A
公开(公告)日：1988-12-13
申请号：US101535
申请日：1987-09-28
申请人： Peter Esherick , Adelbert Owyoung
发明人： Peter Esherick , Adelbert Owyoung
IPC分类号： H01S3/23 , H01S3/13
CPC分类号： H01S3/10092 , H01S3/025 , H01S3/08036 , H01S3/10061 , H01S3/102 , H01S3/11 , H01S3/1394
摘要： A system for locking two Nd:YAG laser oscillators includes an optical path for feeding the output of one laser into the other with different polarizations. Elliptical polarization is incorporated into the optical path so that the change in polarization that occurs when the frequencies coincide may be detected to provide a feedback signal to control one laser relative to the other.
摘要翻译：用于锁定两个Nd：YAG激光振荡器的系统包括用于将一个激光器的输出馈送到具有不同偏振的另一个的光路。椭圆偏振被并入到光路中，使得可以检测到当频率重合时发生的偏振变化以提供反馈信号以相对于另一个激光来控制一个激光。

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