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    • 1. 发明授权
    • Rolling shutter optical switch device with dimples on shutter, annular rim at optical port and shortened shutter attachment edge
    • 卷帘快门光开关装置带有快门上的凹坑,光口处的环形边缘和缩短的快门附件边缘
    • US06829399B2
    • 2004-12-07
    • US09799826
    • 2001-03-05
    • Carl O. BozlerSteven RabeDale C. FlandersPeter S. Whitney
    • Carl O. BozlerSteven RabeDale C. FlandersPeter S. Whitney
    • G02B626
    • B81B3/0072B81B3/0008B81B2201/045G02B6/3518G02B6/3546G02B6/3564G02B6/357G02B6/358G02B6/3584G02B26/02G02B26/0816
    • An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.
    • 一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。 滚动快门可以采取两种状态之一。 在第一关闭状态下,膜在端口上展开到基板上,使得指向端口的光照射在快门上。 在第二打开状态下,膜从端口卷起,使得指向端口的光照射在端口上。 在一个实施例中,在膜上形成反射镜,使得当膜在衬底上处于关闭状态时,指向端口的光被反射镜反射。 在一个配置中,光学端口包括孔或孔,这样的光通过端口而不受干扰。 该装置可以包括位于膜的远端的闩锁电极,使得当其被推出时,其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。 可以在膜中形成狭缝,以通过减轻膜中的应变来保持反射镜平坦,并允许邻近装置的气体在被激活时通过膜。 快门可以包括凹坑以最小化膜和基底之间的接触面积,以减少两者粘在一起的可能性。 膜的附着边缘可以比其宽度短,以减少膜中的变形,以保持镜子平坦。 可以围绕端口设置凸起的环形边缘,使得当快门被按压在端口上时,其被拉紧并在边缘上平坦。 此功能也用于保持镜子的平整度。 开关器件可用作光开关阵列的一部分。
    • 2. 发明授权
    • Silicon optical bench OCT probe for medical imaging
    • 硅光学台用于医学成像的OCT探针
    • US08515221B2
    • 2013-08-20
    • US12693181
    • 2010-01-25
    • Dale C. FlandersJames W. GetzWalid A. AtiaPeter S. WhitneyMark E. Kuznetsov
    • Dale C. FlandersJames W. GetzWalid A. AtiaPeter S. WhitneyMark E. Kuznetsov
    • G02B6/26
    • G01Q60/22A61B5/0066A61B5/0084A61B5/02007A61B2562/12G02B23/2469
    • An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
    • 用于在体内发射和/或接收光的光学探针包括传输和/或接收光信号的光纤,包括纵向延伸的光纤槽的硅光学台,其保持光纤的光纤端接和反射 表面,其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法,其包括在诸如SOI(绝缘体上硅)晶片的复合晶片材料的第一层中形成折射透镜,并且沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。
    • 7. 发明授权
    • Integrated optical system monitoring system
    • 集成光学系统监控系统
    • US06776536B1
    • 2004-08-17
    • US09648413
    • 2000-08-25
    • Dale C. FlandersPeter S. Whitney
    • Dale C. FlandersPeter S. Whitney
    • G02B636
    • H04B10/07955G02B6/29362G02B6/29395G02B6/4215G02B6/4226G02B6/4246H04B10/077
    • An integrated optical monitoring system comprises a hermetic package and an optical bench sealed within a package. An optical fiber pigtail enters the package via a feed-through to connect and terminate above the bench. A tunable filter is connected to the top of the bench and filters an optical signal transmitted by the fiber pigtail. A detector, also connected to the bench, detects the filtered signal from the tunable filter. Thus, the entire system is integrated together, on a single bench within a preferably small package. This configuration makes the system useful as a subsystem, for example, in a larger system offering higher levels of functionality and optical signal processing capability.
    • 集成光学监控系统包括密封包装和密封在包装内的光学工作台。 光纤尾纤通过馈通进入包装,以在工作台上方连接和终止。 可调谐滤波器连接到台架的顶部,并对由纤维尾纤传输的光信号进行滤波。 也连接到工作台的检测器检测来自可调谐滤波器的滤波信号。 因此,整个系统集成在一起,在一个优选的小包装内的单个工作台上。 该配置使得该系统可用作子系统,例如在较大的系统中提供更高水平的功能和光信号处理能力。
    • 10. 发明申请
    • Silicon Optical Bench OCT Probe for Medical Imaging
    • 硅光学台面OCT医用成像探头
    • US20110182550A1
    • 2011-07-28
    • US12693181
    • 2010-01-25
    • Dale C. FlandersJames W. GetzWalid A. AtiaPeter S. WhitneyMark E. Kuznetsov
    • Dale C. FlandersJames W. GetzWalid A. AtiaPeter S. WhitneyMark E. Kuznetsov
    • G02B6/26B29C65/72B29D11/00
    • G01Q60/22A61B5/0066A61B5/0084A61B5/02007A61B2562/12G02B23/2469
    • An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
    • 用于在体内发射和/或接收光的光学探针包括透射和/或接收光信号的光纤,包括纵向延伸的光纤槽的硅光学台,其保持光纤的光纤终端和反射 表面,其将光纤端接件的端面光学耦合到光学平台的侧面。 使用硅各向异性蚀刻技术制造纤维槽。 一些例子使用使用LIGA或其他电铸技术制造的光学平台周围的外壳。 还描述了一种用于形成透镜结构的方法,其包括在诸如SOI(绝缘体上硅)晶片的复合晶片材料的第一层中形成折射透镜,并沿着光学器件通过复合晶片材料的背面形成光学端口 折射透镜的轴线。 折射透镜优选使用灰度光刻形成并且对第一层进行干蚀刻。