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    • 1. 发明授权
    • Fast transition RF impedance matching network for plasma reactor ignition
    • 用于等离子体反应器点火的快速转换RF阻抗匹配网络
    • US5815047A
    • 1998-09-29
    • US563849
    • 1995-11-27
    • Carl A. SorensenWendell T. BloniganJohn White
    • Carl A. SorensenWendell T. BloniganJohn White
    • H03H7/40
    • H03H7/40
    • An impedance matching network for an RF coupled plasma reactor having RF excitation apparatus receiving RF power through the impedance matching network from an RF generator for producing a plasma in the reactor has at least one capacitor connected to the output of the RF generator and having a capacitance value providing an impedance match to the plasma impedance during a steady state of the plasma, at least a first rapidly tunable capacitor connected in parallel with the one capacitor, the rapidly tunable capacitor being rapidly switchable between a high capacitance value providing a match to the plasma impedance during the onset of plasma ignition and a lesser minimum capacitance value, and a controller for rapidly switching the rapidly tunable capacitor from the high to the lesser capacitance value upon reaching the plasma steady state.
    • 一种用于RF耦合等离子体反应器的阻抗匹配网络,其具有RF激发装置,其通过来自RF发生器的阻抗匹配网络接收RF功率,用于在电抗器中产生等离子体,具有连接到RF发生器输出的至少一个电容器, 在等离子体的稳定状态期间提供与等离子体阻抗的阻抗匹配的值,至少与一个电容器并联连接的第一快速可调谐电容器,快速可调谐电容器可在提供与等离子体的匹配的高电容值之间快速切换 等离子体点火开始期间的阻抗和较小的最小电容值,以及用于在快速调节电容器达到等离子体稳态时从快速切换到较小电容值的控制器。
    • 3. 发明授权
    • RF matching network with distributed outputs
    • 射频匹配网络与分布式输出
    • US06359250B1
    • 2002-03-19
    • US09664983
    • 2000-09-18
    • Wendell T. BloniganCarl A. Sorensen
    • Wendell T. BloniganCarl A. Sorensen
    • B23K1000
    • H01J37/32174H01J37/32082
    • An apparatus for distributing RF power outputs to a first electrode in a parallel plate electrode system for generating plasma in depositing films on a substrate. A RF power output is applied to a distributed RF matching network to excite a plasma from a process gas stream to deposit a uniform film onto the substrate. The distributed matching network includes a load capacitor for receiving a radio frequency power input and an inductor having first and second ends with the first end coupled to the load capacitor. The matching network also includes multiple drive capacitors each of which couples the second end of the inductor to a different one of multiple points distributed on the first electrode. The capacitance of each drive capacitor is user-selectable, and the points on the backing plate to which the drive capacitors are coupled are user-selectable.
    • 一种用于在平行板电极系统中的第一电极上分配RF功率输出的装置,用于在衬底上沉积膜中产生等离子体。 将RF功率输出施加到分布式RF匹配网络,以从工艺气流中激发等离子体以将均匀的膜沉积到衬底上。 分布式匹配网络包括用于接收射频功率输入的负载电容器和具有第一端和第二端的电感器,其第一端耦合到负载电容器。 匹配网络还包括多个驱动电容器,每个驱动电容器将电感器的第二端耦合到分布在第一电极上的多个点中的不同的一个。 每个驱动电容器的电容可由用户选择,驱动电容耦合到背板上的点可由用户选择。
    • 9. 发明申请
    • RIGID RF TRANSMISSION LINE WITH EASY REMOVAL SECTION
    • RIGID射频发射线,轻松移除部分
    • US20080276868A1
    • 2008-11-13
    • US12039616
    • 2008-02-28
    • Carl A. SorensenJohn M. WhiteKim Neill
    • Carl A. SorensenJohn M. WhiteKim Neill
    • C23C16/453H01B7/17
    • H01P1/045H01J37/32082H01J37/32174
    • An RF feed for a processing apparatus is disclosed. Coupling an RF generator to an RF matching network by a rigid RF feed lessens the amount of power that is lost during transmission from the generator to the matching network. The rigid RF feed comprises an inverted J shaped section that decouples the generator from the matching network whenever servicing the chamber is necessary. The J shape section has two parallel portions coupled together by a perpendicular portion. The J shaped section may be removed as a one piece assembly by uncoupling the J shaped section at a location disposed near the top of the chamber and a location near the floor of the chamber. The connections between the J shaped section and the remainder of the RF feed face the same direction to ensure easy coupling and decoupling without twisting and/or bending any portion of the rigid RF feed.
    • 公开了一种用于处理装置的RF馈送。 通过刚性RF馈送将RF发生器耦合到RF匹配网络可以减少在从发生器到匹配网络的传输过程中丢失的功率量。 刚性射频馈电包括倒置的J形截面,每当需要维修腔室时,将发生器与匹配网络分离。 J形截面具有通过垂直部分联接在一起的两个平行部分。 J形截面可以作为一个单独的组件被移除,该J形截面在设置在室顶部附近的位置处以及靠近该室底部的位置脱离J形截面。 J形截面和RF进料的其余部分之间的连接面向相同的方向,以确保容易的耦合和解耦,而不会扭曲和/或弯曲刚性RF进给的任何部分。