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JP2006108717A Method of feeding gas to excimer laser oscillation device 有权
标题翻译：将气体送入激光振荡器的方法
公开(公告)号：JP2006108717A
公开(公告)日：2006-04-20
申请号：JP2006006937
申请日：2006-01-16
申请人： Canon Inc , Japan Air Gases Ltd , Tadahiro Omi , キヤノン株式会社 , ジャパン・エア・ガシズ株式会社 , 忠弘大見
发明人： OMI TADAHIRO , SHIRAI YASUYUKI , MIZOGAMI SATOSHI , SANO NAOTO
IPC分类号： H01S3/225
摘要： PROBLEM TO BE SOLVED: To provide a gas feeding system for a plurality of excimer laser oscillation devices, in which the deviation in gas pressure does not exist by each line of a plurality of main lines. SOLUTION: In a method of feeding gas to a plurality of excimer laser oscillation devices, the gas feed system comprises a plurality of main lines, each having a supply end that is connected to a gas source and a tail end that is connected to an evacuation means; and a plurality of branch lines that are branched from respective main lines and are respectively connected to the excimer laser oscillation devices, where purging is carried out at all times at a flowrate of 1 cc/min or higher, at each tail end of the main lines. In a gas feeding system for feeding fluorine gas to the oscillation devices 31, a fluorinated passivation film is provided to fluorine-gas contacting surfaces. A chromium-oxide passivation film is provided on inert-gas contacting surfaces. The supply ends and the tail ends of the plurality of main lines 111a are respectively connected to common lines 111b, 111c, wherein each of the main lines has a plurality of branch lines 21, that are respectively connected to the plurality of the oscillation devices 31. Purging is carried out at all times at a flow rate of 1 cc/min or higher at the tail ends. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于多个准线激光振荡装置的气体供给系统，其中多个主线的每条线不存在气压的偏差。解决方案：在将气体供给到多个受激准分子激光振荡装置的方法中，气体供给系统包括多条主线，每条主线具有连接到气源的供给端和连接的尾端撤离方式; 以及从各主线分支并分别连接到准分子激光振荡装置的多条分支线，其中在主体的每个尾端始终以1cc / min以上的流量一直进行清洗线。在向振荡装置31供给氟气的供气系统中，在氟气接触面上设置氟化钝化膜。在惰性气体接触表面上提供氧化铬钝化膜。供给端和多条主线111a的尾端分别连接到公共线路111b，111c，其中每条主线路具有分别连接到多个振荡装置31的多个分支线路21 在尾端以1cc / min或更高的流速始终进行清洗。版权所有（C）2006，JPO＆NCIPI

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