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1. 发明专利

JP2010146916A Electron-emitting element, and manufacturing method for image display apparatus using the same 审中-公开
标题翻译：电子发射元件及使用其的图像显示装置的制造方法
公开(公告)号：JP2010146916A
公开(公告)日：2010-07-01
申请号：JP2008324466
申请日：2008-12-19
申请人： Canon Inc , キヤノン株式会社
发明人： NOZU KYOTA , IWATA KENICHI , KOBAYASHI TAMAKI , KITAMURA SHIN , SHIMAZU AKIRA
IPC分类号： H01J9/02
CPC分类号： H01J9/025 , H01J1/3046 , H01J31/127 , H01J2201/30423 , H01J2329/0423
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method for an electron-emitting element which has high electron-emitting efficiency and is highly reliable. SOLUTION: The manufacturing method for an electron-emitting element includes: a first process of preparing a first conductive film on at least a side face of an insulating layer having an upper face and the side face connected with the upper face; a second process of preparing a second conductive film from above the upper face over to above the side face of the first conductive film on the first conductive film; and a third process of etching the second conductive film. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种具有高电子发射效率和高可靠性的电子发射元件的制造方法。解决方案：电子发射元件的制造方法包括：在具有上表面和与上表面连接的侧面的绝缘层的至少一个侧面上制备第一导电膜的第一工艺; 从所述第一导电膜上的所述第一导电膜的上表面上方到所述第一导电膜的侧面上方制备第二导电膜的第二工序; 以及蚀刻所述第二导电膜的第三工艺。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2013148707A Actuator and movable mirror 有权
标题翻译：执行器和可移动镜
公开(公告)号：JP2013148707A
公开(公告)日：2013-08-01
申请号：JP2012008935
申请日：2012-01-19
申请人： Canon Inc , キヤノン株式会社
发明人： NOZU KYOTA , SHIMADA YASUHIRO , NAKANISHI KOICHIRO
IPC分类号： G02B26/06 , B81B3/00
CPC分类号： G02B26/0816 , G02B7/182 , G02B26/0825 , G02B26/0841 , H02N1/006 , H02N1/008
摘要： PROBLEM TO BE SOLVED: To provide a technique for restricting occurrence of pull-in, in a movable mirror that uses an actuator including an interdigital electrode.SOLUTION: The actuator comprises: a movable portion connected to a reflecting member having a reflecting face; a movable interdigital electrode located a distance away from the reflecting member, supported by the movable portion, and extending in a direction parallel to the reflecting face; a fixed interdigital electrode supported by a support portion, extending in a direction parallel to the reflecting face, and alternatively arranged with the movable interdigital electrode; and voltage control means that applies a voltage to the movable interdigital electrode and the fixed interdigital electrode, thereby displacing the movable interdigital electrode and the movable portion in the direction of the normal of the reflecting face. A portion supporting the movable interdigital electrode and a portion supporting the fixed interdigital electrode are arranged such that the movable interdigital electrode and the fixed interdigital electrode are exchanged when the movable interdigital electrode is displaced in the normal direction of the reflecting face of the movable interdigital electrode.
摘要翻译：要解决的问题：提供一种在使用包括叉指电极的致动器的可移动反射镜中限制拉入的发生的技术。解决方案：致动器包括：连接到具有反射面的反射部件的可动部分; 位于与所述反射部件一定距离的移动叉指电极，由所述可动部支撑，并且在与所述反射面平行的方向上延伸; 由支撑部支撑的固定叉指电极，其在与反射面平行的方向上延伸，并且可替代地布置有可动叉指电极; 以及电压控制装置，其向可移动叉指电极和固定叉指电极施加电压，从而使可移动叉指电极和可动部分沿反射面的法线方向移位。支撑可移动叉指电极的部分和支撑固定叉指电极的部分被布置成使得当可移动叉指电极沿着可移动叉指电极的反射面的法线方向移位时，可交换指状电极和固定叉指电极被交换。

3. 发明专利

JP2010263139A Pattern forming method 审中-公开
标题翻译：图案形成方法
公开(公告)号：JP2010263139A
公开(公告)日：2010-11-18
申请号：JP2009114381
申请日：2009-05-11
申请人： Canon Inc , キヤノン株式会社
发明人： NOZU KYOTA , KONDO AKIFUMI
IPC分类号： H01L21/027
CPC分类号： G03B27/32
摘要： PROBLEM TO BE SOLVED: To provide a method using an inexpensive binary mask to form a pattern, in which dots or holes are disposed in a narrow-pitched two-dimensional cycle, at reduced costs with tact saving and high positional accuracy.
SOLUTION: A mask is used in which line patterns are disposed in X and Y directions with pitches P. First exposure is performed at a first position and second exposure is then performed after shifting a position of the mask just by P/2 in the X and Y directions.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种使用廉价的二进制掩模来形成图形的方法，其中点或孔以狭窄的二维周期设置，以节省成本和高位置精度的成本降低。
解决方案：使用掩模，其中线形图案在具有间距P的X和Y方向上布置。首先在第一位置进行曝光，然后在将掩模的位置移动到P / 2之后进行第二曝光在X和Y方向。版权所有（C）2011，JPO＆INPIT

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