专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JP2008094649A Surface treatment method of quartz glass substrate and hydrogen radical etching apparatus 有权
标题翻译：石英玻璃基板表面处理方法及氢气蚀刻装置
公开(公告)号：JP2008094649A
公开(公告)日：2008-04-24
申请号：JP2006276811
申请日：2006-10-10
申请人： Canon Anelva Corp , Kawazoe Frontier Technology Kk , Shinetsu Quartz Prod Co Ltd , キヤノンアネルバ株式会社 , 信越石英株式会社 , 川副フロンティアテクノロジー株式会社
发明人： KAMIYA KAZUO , FUJINOKI AKIRA , ISHIBASHI KEIJI , KAWAZOE HIROSHI , INOUE HIROYUKI , UTSUNO FUTOSHI
IPC分类号： C03C15/00 , C03B20/00 , G03F1/24 , G03F1/68 , G03F1/80 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a surface treatment method of a quartz glass substrate capable of obtaining a quartz glass substrate having a high flatness (subnanometer level) which can meet the demand for a lithography reflection mask substrate using an extreme ultraviolet ray (EUV) in the field of LSI or the like, and a hydrogen radical etching apparatus suitably used for the treatment method. SOLUTION: The method is for controlling the surface flatness of a quartz glass substrate, where the quartz glass substrate is set in a hydrogen radical etching apparatus and hydrogen radicals work on the quartz glass substrate to control the surface flatness by a subnanometer level. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种石英玻璃基板的表面处理方法，该石英玻璃基板能够获得能够满足对使用极紫外线的光刻反射掩模基板的需求的高平坦度（亚纳米级）的石英玻璃基板（EUV）等，以及适用于该处理方法的氢根蚀刻装置。解决方案：该方法用于控制石英玻璃基板的表面平坦度，其中石英玻璃基板设置在氢根蚀刻装置中，氢自由基在石英玻璃基板上工作，以通过亚纳米级来控制表面平坦度。版权所有（C）2008，JPO＆INPIT

2. 发明专利

JP2013040425A Apparatus and method for manufacturing glass nonwoven fabric and glass nonwoven fabric 有权
标题翻译：制造玻璃非织造布和玻璃非织造布的装置和方法
公开(公告)号：JP2013040425A
公开(公告)日：2013-02-28
申请号：JP2011179035
申请日：2011-08-18
申请人： Shinetsu Quartz Prod Co Ltd , 信越石英株式会社 , Shin Etsu Chem Co Ltd , 信越化学工業株式会社
发明人： KAMIYA KAZUO , KUBOTA YOSHIHIRO
IPC分类号： D04H1/728 , D01D5/08
CPC分类号： D04H3/004 , D01D5/0007 , D04H3/03
摘要： PROBLEM TO BE SOLVED: To provide an apparatus and method for manufacturing a glass nonwoven fabric that is formed of a glass filament with an extra fine diameter, for instance, a diameter of 0.3 μm to 5 μm by using an electrospinning method, particularly is used for manufacturing a high-frequency circuit board having a low dielectric constant and low loss, and is extremely thin, for instance, has a thickness of 50 μm to 1 mm, and to provide the glass nonwoven fabric.SOLUTION: The apparatus for manufacturing the glass nonwoven fabric comprises: glass material supply means 14 for supplying a long glass raw material 12; transportation means 16 for transporting the supplied long glass raw material at a predetermined speed; guide electrode means which conducts an operation for sending the transported long glass raw material, is made of an electroconductive material and becomes an electrode; heating means for melting and softening the sent long glass raw material; a target member that is arranged so as to oppose to the guide electrode means with a predetermined distance from the guide electrode means and is made of an electroconductive material; and direct-current power source means 24 for applying direct voltage between the guide electrode means and the target member.
摘要翻译：解决问题的方案为了提供一种通过静电纺丝法制造玻璃纤维的装置和方法，该装置和方法由具有超细直径的玻璃纤维形成，例如直径为0.3μm至5μm，特别是用于制造低介电常数和低损耗的高频电路板，并且非常薄，例如具有50μm至1mm的厚度，并提供玻璃无纺布。解决方案：用于制造玻璃无纺布的装置包括：用于供应长玻璃原料12的玻璃材料供给装置14; 用于以预定速度运送供应的长玻璃原料的运送装置16; 用于传送运送的长玻璃原料的操作的引导电极装置由导电材料制成并成为电极; 用于熔化和软化送出的长玻璃原料的加热装置; 目标构件被布置成与导向电极装置相对的距导向电极装置预定距离并且由导电材料制成; 以及用于在引导电极装置和目标构件之间施加直流电压的直流电源装置24。版权所有（C）2013，JPO＆INPIT

3. 发明专利

JP2009203107A Surface treating method of quartz glass article 有权
标题翻译：石墨玻璃表面处理方法
公开(公告)号：JP2009203107A
公开(公告)日：2009-09-10
申请号：JP2008046496
申请日：2008-02-27
申请人： Shinetsu Quartz Prod Co Ltd , Yamagata Shin-Etsu Quartz Co Ltd , 信越石英株式会社 , 株式会社山形信越石英
发明人： FUJINOKI AKIRA , KAMIYA KAZUO , KAWAZOE HIROSHI , TAWARAYAMA HIROMASA , INOUE HIROYUKI , OSAWA KENTA
IPC分类号： C03C23/00
摘要： PROBLEM TO BE SOLVED: To provide a surface treating method of a quartz glass article, by which the surface of a quartz glass substrate having steps or recessed and projected parts, a quartz glass tube or rod having a curved surface or a groove part, or a quartz glass tool using them, that cannot be polished by conventional mechanical polishing, can be smoothed up to a surface-roughness nearly equal to the surface-roughness obtained by flame polishing without causing shape change in the surface.
SOLUTION: The surface roughness of the quartz glass article having a coarse surface is improved by subjecting the surface of the article to a surface treatment comprising holding the glass article in an atmosphere having water vapor partial pressure of 0.001-0.1 MPa at 800-1,250°C.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供石英玻璃制品的表面处理方法，通过该表面处理具有台阶或凹凸部的石英玻璃基板的表面，具有曲面或凹槽的石英玻璃管或棒部分或使用它们的石英玻璃工具不能通过常规机械抛光抛光，可以平滑至几乎等于通过火焰抛光获得的表面粗糙度的表面粗糙度，而不会导致表面形状变化。解决方案：具有粗糙表面的石英玻璃制品的表面粗糙度通过对制品的表面进行表面处理而得到改善，包括将玻璃制品保持在水分蒸汽分压为0.001-0.1MPa的气氛中，800℃ -1,250℃。版权所有（C）2009，JPO＆INPIT

4. 发明专利

JP2013040082A Long glass fiber manufacturing device and method, and long glass fiber 有权
标题翻译：长玻璃纤维制造装置和方法，以及长期的玻璃纤维
公开(公告)号：JP2013040082A
公开(公告)日：2013-02-28
申请号：JP2011179036
申请日：2011-08-18
申请人： Shinetsu Quartz Prod Co Ltd , 信越石英株式会社 , Shin-Etsu Chemical Co Ltd , 信越化学工業株式会社
发明人： KAMIYA KAZUO , KUBOTA YOSHIHIRO
IPC分类号： C03B37/025
CPC分类号： C03B37/0253 , C03B37/03 , C03B37/065 , Y02P40/57
摘要： PROBLEM TO BE SOLVED: To provide a device and method for manufacturing a long glass fiber having an ultrafine diameter and a long glass fiber, in particular, a long quartz glass fiber having an ultrafine diameter used for forming high frequency circuit substrates of a low dielectric constant and low loss.SOLUTION: There are provided a device for electrospinning, a method using the device and a long fiber obtained by the device. The device is provided with: a glass material supply means for supplying a long glass material; a conveyance means for conveying the supplied long glass material at a prescribed velocity; a guide electrode means which operates to feed the conveyed glass fiber, is formed from a conductive material and is an electrode; a heating means for melting and softening the fed long glass material; a rotary bobbin means which comprises a conductive material arranged at a prescribed interval opposite to the guide electrode means; and a DC power supply means for applying a DC voltage between the guide electrode means and the rotary bobbin means.
摘要翻译：解决的问题：提供一种具有超细直径的长玻璃纤维和长玻璃纤维的制造装置和方法，特别是具有用于形成高频电路基板的超细直径的长石英玻璃纤维低介电常数和低损耗。提供了一种静电纺丝装置，使用该装置的方法和由该装置获得的长纤维。该装置设有：用于供应长玻璃材料的玻璃材料供给装置; 用于以规定速度输送所供应的长玻璃材料的输送装置; 用于输送所输送的玻璃纤维的引导电极装置由导电材料形成，并且是电极; 用于熔化和软化进料的长玻璃材料的加热装置; 旋转筒管装置，其包括以与引导电极装置相对的规定间隔布置的导电材料; 以及用于在引导电极装置和旋转绕线架装置之间施加直流电压的直流电源装置。版权所有（C）2013，JPO＆INPIT

5. 发明专利

JP2005132697A Adhesive for silicon oxide and adhesion method using the same 有权
标题翻译：用于氧化硅的粘合剂和使用该硅氧烷的粘合方法
公开(公告)号：JP2005132697A
公开(公告)日：2005-05-26
申请号：JP2003372413
申请日：2003-10-31
申请人： Shinetsu Quartz Prod Co Ltd , 信越石英株式会社
发明人： SAKAGUCHI TSUKASA , OSHIMA TAKAYUKI , KAMIYA KAZUO
IPC分类号： C03C27/12
摘要： PROBLEM TO BE SOLVED: To provide an adhesive for silicon oxide with which members in which pasting faces are formed of silicon oxide can uniformly and firmly be joined at room temperature, and to provide an adhesion method therefor.
SOLUTION: The adhesive for silicon oxide for joining members in which the pasting faces are formed of silicon oxide comprises hexafluorosilicic acid, silica particulates and an additive. In the adhesion method, the adhesive is applied at least to one side in the pasting faces formed of silicon oxide in the members, and they are pasted at room temperature.
COPYRIGHT: (C)2005,JPO&NCIPI

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式