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1. 发明申请

US20220324740A1 REFLECTIVE MEMBER AND GLASS LAYERED MEMBER PRODUCTION METHOD 有权
公开(公告)号：US20220324740A1
公开(公告)日：2022-10-13
申请号：US17642525
申请日：2020-08-17
申请人： SHIN-ETSU QUARTZ PRODUCTS CO., LTD. , YAMAGATA SHIN-ETSU QUARTZ CO., LTD. , HERAEUS QUARZGLAS GMBH & CO. KG
发明人： Toru SEGAWA , Kazuhiro YAMAGUCHI , Tomonori WATANABE , Daiki FUJITA
IPC分类号： C03B19/06 , C03B23/203
摘要： One aspect is a reflective member, which has a laminated structure in which transparent quartz glass members are formed on an upper surface and a lower surface of an opaque siliceous sintered powder layer. The opaque siliceous sintered powder layer has a thickness of 0.1 mm or more and a thickness distribution of ±0.05 mm or less. When a load is applied to each of the transparent quartz glass members on an upper surface and a lower surface of the laminated structure in a direction parallel to the laminated structure, the reflective member is fractured at a load of 5 N or more per square centimeter. The laminated structure includes a semi-transparent portion having a width of 0.01 mm or less, which has an intermediate opacity between an opacity of the opaque siliceous sintered powder layer and an opacity of each of the transparent quartz glass members.

2. 发明申请

US20220348490A1 HEAT-REFLECTING MEMBER, AND METHOD FOR MANUFACTURING GLASS MEMBER HAVING HEAT-REFLECTING LAYER INCLUDED THEREIN 有权
公开(公告)号：US20220348490A1
公开(公告)日：2022-11-03
申请号：US17765230
申请日：2020-09-18
申请人： SHIN-ETSU QUARTZ PRODUCTS CO., LTD. , YAMAGATA SHIN-ETSU QUARTZ CO., LTD. , HERAEUS QUARZGLAS GMBH & CO. KG
发明人： Kazuhiro YAMAGUCHI , Daiki FUJITA , Yoshihiro HARADA , Toru SEGAWA , Tomonori WATANABE
IPC分类号： C03B19/06 , C03B33/07 , C03B33/08
摘要： Provided is a heat reflective member, which is prevented from braking even in a high-temperature environment. It generates no dust in use, and can be washed with a chemical liquid. The heat reflective member has a laminated structure in which quartz glass layers are formed on an upper surface and a lower surface of a siliceous sintered powder layer. The heat reflective member includes: an impermeable layer which is formed at a portion of the siliceous sintered powder layer at an end portion of the heat reflective member, which has a thickness at least larger than half of a thickness of the siliceous sintered powder layer, and through which a gas or a liquid is prevented from penetrating; and a buffer layer which is formed between the impermeable layer and the siliceous sintered powder layer, and which changes in density from the impermeable layer toward the sintered powder layer.

3. 发明专利

TW583149B 具備經噴砂處理表面之石英物件及清潔該物件之方法失效
简体标题：具备经喷砂处理表面之石英对象及清洁该对象之方法
公开(公告)号：TW583149B
公开(公告)日：2004-04-11
申请号：TW089118717
申请日：2000-09-13
申请人：何瑞斯廓格拉斯公司 HERAEUS QUARZGLAS GMBH & CO. KG , 信越石英股份有限公司 SHIN-ETSU QUARTZ PRODUCTS CO., LTD. , 信越石英山形股份有限公司 YAMAGATA SHIN-ETSU QUARTZ CO., LTD.
发明人：齊藤實 MAKOTO SAITO
IPC分类号： C03C
CPC分类号： C03C19/00 , C03C15/00 , C03C23/0075 , C03C23/008
摘要：本文說明一種具有噴砂處理表面之石英物件，其係經提供一種噴砂後表面及清潔該表面。根據本發明，為了減少此種石英物件顆粒產生，此處提出在該表面產生每1 CF(立方英呎)之顆粒尺寸在0.2或以上而小於0.3μm數目為30或更少，顆粒尺寸在0.3或以上而小於0.5μm數目為60或更少，顆粒尺寸在0.5或以上而小於1.0μm數目為60或更少，而顆粒尺寸在1.0μm或更大者數目為10或更少。
根據本發明清潔石英物件之方法，為能夠提供有效去除不純物並降低顆粒產生之方法，因為本方法結合以硝酸水溶液在HF水溶液中刷洗清潔，於有機溶劑中刷洗清潔，以及在純水溢流條件下於純水中超音波清潔等步驟。
简体摘要：本文说明一种具有喷砂处理表面之石英对象，其系经提供一种喷砂后表面及清洁该表面。根据本发明，为了减少此种石英对象颗粒产生，此处提出在该表面产生每1 CF(立方英呎)之颗粒尺寸在0.2或以上而小于0.3μm数目为30或更少，颗粒尺寸在0.3或以上而小于0.5μm数目为60或更少，颗粒尺寸在0.5或以上而小于1.0μm数目为60或更少，而颗粒尺寸在1.0μm或更大者数目为10或更少。根据本发明清洁石英对象之方法，为能够提供有效去除不纯物并降低颗粒产生之方法，因为本方法结合以硝酸水溶液在HF水溶液中刷洗清洁，于有机溶剂中刷洗清洁，以及在纯水溢流条件下于纯水中超音波清洁等步骤。

4. 发明专利

JP2006282401A Method for producing quartz glass fiber, quartz glass strand, quartz glass yarn and quartz glass cloth 有权
标题翻译： QUARTZ玻璃纤维，QUARTZ玻璃条，QUARTZ玻璃纱和QUARTZ玻璃布生产方法
公开(公告)号：JP2006282401A
公开(公告)日：2006-10-19
申请号：JP2005100521
申请日：2005-03-31
申请人： Shinetsu Quartz Prod Co Ltd , Yamagata Shin-Etsu Quartz Co Ltd , 信越石英株式会社 , 株式会社山形信越石英
发明人： SATO AKIRA , YAGUCHI TAKASHI , FUJINOKI AKIRA , NISHIMURA HIROYUKI
IPC分类号： C03B37/025 , C03B37/07 , C03B37/12
CPC分类号： C03B37/025 , C03B2201/02
摘要： PROBLEM TO BE SOLVED: To provide a method for producing a quartz glass fiber capable of stably producing an extra-fine quartz glass fiber having a diameter of 7 μm or less.
SOLUTION: The method for producing a quartz glass fiber comprises heating and drawing a quartz glass material which is a quartz glass rod or a quartz glass fiber having a diameter (mm) D of 0.10-1.40 mm by a burner flame from a direction substantially orthogonal to the travel direction of the material to produce an extra-fine quartz glass fiber having a diameter (mm) of d. The linear velocity of the burner flame is set at 80 m/s or less. The draw-down ratio (D/d) is 14-200. The width of a burner nozzle used in the travel direction of the quartz glass material is at most 3.0 mm. These conditions allows the leading end of a conical fusion zone, in which the diameter changes from the quartz glass material to the extra-fine quartz fiber, to shift to the outside of the burner flame. As a result, an extra-fine quartz glass fiber having a diameter of 7 μm or less can be produced with a range of fluctuation of the diameter of within ±5%.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：解决的问题：提供一种能够稳定地制造直径为7μm以下的超细石英玻璃纤维的石英玻璃纤维的制造方法。解决方案：石英玻璃纤维的制造方法包括通过燃烧器火焰从石英玻璃棒或直径（mm）D为0.10-1.40mm的石英玻璃棒或石英玻璃纤维加热和拉制石英玻璃方向基本上垂直于材料的行进方向，以产生直径（mm）为d的超细石英玻璃纤维。燃烧器火焰的线速度设定为80m / s以下。减数比（D / d）为14-200。在石英玻璃材料行进方向上使用的燃烧器喷嘴的宽度最大为3.0mm。这些条件允许直径从石英玻璃材料到超细石英纤维的锥形熔融区的前端移动到燃烧器火焰的外部。结果，可以制造直径为7μm以下的超细石英玻璃纤维，其直径的波动范围在±5％以内。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2006182610A Method of manufacturing superfine quartz glass short fiber, and superfine quartz glass short fiber 有权
标题翻译：超级石英玻璃短纤维制造方法及超细玻璃纤维短纤维
公开(公告)号：JP2006182610A
公开(公告)日：2006-07-13
申请号：JP2004378807
申请日：2004-12-28
申请人： Shinetsu Quartz Prod Co Ltd , Yamagata Shin-Etsu Quartz Co Ltd , 信越石英株式会社 , 株式会社山形信越石英
发明人： SATO AKIRA , TAKAHASHI SHIYOUJI , ASAJIMA KAZUO , FUJINOKI AKIRA , NISHIMURA HIROYUKI , YAGUCHI TAKASHI
IPC分类号： C03B37/065 , C03C3/06
CPC分类号： C03B37/065 , C03B2201/02
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a superfine quartz glass short fiber by which the diameter of the fiber is made superfine, the number of generated shots is reduced, the superfine quartz glass short fiber meeting with the required quality is continuously and stably manufactured, and to provide the superfine quartz glass short fiber.
SOLUTION: The method of manufacturing a superfine quartz glass short fiber comprises: a step for manufacturing a quartz glass continuous fiber having 0.1-0.4 mm diameter and ≤10% diameter variation per 1 m by heating and drawing a quartz glass rod having 2-100 mm diameter while winding by a winding means; and a step for manufacturing the quartz glass short fiber in which the frequency of one having ≥0.1 μm and 3 /min and ≤70 mm
3 /min introducing rate in which the coefficient of fluctuation is within ±10%.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种制造超细石英玻璃短纤维的方法，通过该方法使纤维的直径超细，产生的射击次数减少，超细石英玻璃短纤维满足所需的质量连续稳定地制造，并提供超细石英玻璃短纤维。解决方案：制造超细石英玻璃短纤维的方法包括：通过加热和拉伸石英玻璃棒来制造具有0.1-0.4mm直径和≤10％直径变化的石英玻璃连续纤维的步骤，该石英玻璃棒具有直径为2-100毫米，通过缠绕装置缠绕; 以及制造石英玻璃短纤维的步骤，其中通过从卷绕装置中排出制造的石英玻璃连续纤维，其中≥0.1μm和<2.0μm直径的频率≥50％，并将其引入具有≥ 50m / sec和≤500m/ sec的线速度，其中波动系数在±5％以内以将≥4mm 3 / min和≤70mm的石英玻璃连续纤维吹走， SP> 3 / min波动系数在±10％以内的引入速率。版权所有（C）2006，JPO＆NCIPI

6. 发明专利

JP2009203107A Surface treating method of quartz glass article 有权
标题翻译：石墨玻璃表面处理方法
公开(公告)号：JP2009203107A
公开(公告)日：2009-09-10
申请号：JP2008046496
申请日：2008-02-27
申请人： Shinetsu Quartz Prod Co Ltd , Yamagata Shin-Etsu Quartz Co Ltd , 信越石英株式会社 , 株式会社山形信越石英
发明人： FUJINOKI AKIRA , KAMIYA KAZUO , KAWAZOE HIROSHI , TAWARAYAMA HIROMASA , INOUE HIROYUKI , OSAWA KENTA
IPC分类号： C03C23/00
摘要： PROBLEM TO BE SOLVED: To provide a surface treating method of a quartz glass article, by which the surface of a quartz glass substrate having steps or recessed and projected parts, a quartz glass tube or rod having a curved surface or a groove part, or a quartz glass tool using them, that cannot be polished by conventional mechanical polishing, can be smoothed up to a surface-roughness nearly equal to the surface-roughness obtained by flame polishing without causing shape change in the surface.
SOLUTION: The surface roughness of the quartz glass article having a coarse surface is improved by subjecting the surface of the article to a surface treatment comprising holding the glass article in an atmosphere having water vapor partial pressure of 0.001-0.1 MPa at 800-1,250°C.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了提供石英玻璃制品的表面处理方法，通过该表面处理具有台阶或凹凸部的石英玻璃基板的表面，具有曲面或凹槽的石英玻璃管或棒部分或使用它们的石英玻璃工具不能通过常规机械抛光抛光，可以平滑至几乎等于通过火焰抛光获得的表面粗糙度的表面粗糙度，而不会导致表面形状变化。解决方案：具有粗糙表面的石英玻璃制品的表面粗糙度通过对制品的表面进行表面处理而得到改善，包括将玻璃制品保持在水分蒸汽分压为0.001-0.1MPa的气氛中，800℃ -1,250℃。版权所有（C）2009，JPO＆INPIT

7. 发明专利

JP2008063157A Quartz glass member for semiconductor manufacture 有权
标题翻译： QUARTZ玻璃成员半导体制造
公开(公告)号：JP2008063157A
公开(公告)日：2008-03-21
申请号：JP2006239779
申请日：2006-09-05
申请人： Shinetsu Quartz Prod Co Ltd , Yamagata Shin-Etsu Quartz Co Ltd , 信越石英株式会社 , 株式会社山形信越石英
发明人： SATO TATSUHIRO , FUJINOKI AKIRA , TAKAHASHI SHIYOUJI , HIRATSUKA YOICHI
IPC分类号： C03B20/00 , C03C3/06 , H01L21/22
摘要： PROBLEM TO BE SOLVED: To provide a quartz glass member for semiconductor manufacture which has high heat resistance and high shielding effect to metallic impurities.
SOLUTION: In the quartz glass member for semiconductor manufacture which is formed to have at least 2 layers, an outer layer comprises natural quartz glass having ≥10
12.0 poise viscosity at 1,280°C and containing ≤1 ppm each of sodium, potassium and lithium and an innermost layer comprises a synthetic quartz glass having ≥10
11.7 poise viscosity at 1,280°C, ≤0.2 ppm each of sodium, potassium and lithium.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：解决的问题：提供对金属杂质具有高耐热性和高屏蔽效应的用于半导体制造的石英玻璃构件。解决方案：在形成为至少2层的用于半导体制造的石英玻璃构件中，外层包括在1,280℃下具有≥10个粘度的天然石英玻璃，含有≤ 钠，钾和锂各1ppm，最内层包括在1,280℃下具有≥10SPI粘度的合成石英玻璃，钠，钾和锂各自为0.2ppm。版权所有（C）2008，JPO＆INPIT

8. 发明专利

JP2010125372A Glass washing tank and ultrasonic cleaning device 有权
标题翻译：玻璃清洗罐和超声波清洗装置
公开(公告)号：JP2010125372A
公开(公告)日：2010-06-10
申请号：JP2008300894
申请日：2008-11-26
申请人： Atokku:Kk , Shinetsu Quartz Prod Co Ltd , Yamagata Shin-Etsu Quartz Co Ltd , 信越石英株式会社 , 株式会社アトック , 株式会社山形信越石英
发明人： SAITO MINORU , MIZUNO HIDETOSHI
IPC分类号： B08B3/12 , B06B1/20 , C03C23/00
摘要： PROBLEM TO BE SOLVED: To provide a glass washing tank in which a surface state is improved, particularly the surface, through which ultrasonic waves pass, in a glass washing tank that is used for an ultrasonic cleaning device for precision equipment, semiconductor industrial components, and medical equipment, and that uses heat-resisting glass (boro-silicated glass, Pyrex(R)), laboratory glass (high silicate glass, VYCOR(R)) and also quartz glass, and to provide an ultrasonic cleaning device with the glass washing tank.
SOLUTION: The glass washing tank is used for the ultrasonic cleaning device, and has a bottom wall, front/rear and left/right sidewalls, and wherein an upper part is opened. The inner and outer faces of at least one wall of the glass washing tank are made into mirror polishing plane. Wherein, the mirror-polished plane has the square mean roughness RMS of ≤0.02 μm and a flatness of ≤0.1 mm, and an energy attenuation from the ultrasonic vibrator of the ultrasonic cleaning device is defined as ≤5%.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种在用于精密设备的超声波清洗装置的半导体玻璃洗涤槽中提高表面状态的玻璃洗涤槽，特别是超声波通过的玻璃清洗槽工业部件和医疗设备，并且使用耐热玻璃（硼硅玻璃，Pyrex），实验室玻璃（高硅酸盐玻璃，VYCOR）以及石英玻璃，并提供超声波清洗装置与玻璃清洗槽。解决方案：玻璃洗涤槽用于超声波清洗装置，并具有底壁，前/后和左/右侧壁，并且其中上部打开。玻璃洗涤槽的至少一个壁的内表面和外表面被制成镜面抛光平面。其中，镜面抛光面的平均粗糙度RMS为≤0.02μm，平坦度≤0.1mm，超声波清洗装置的超声波振子的能量衰减定义为≤5％。版权所有（C）2010，JPO＆INPIT

9. 发明公开

EP4039659A1 HEAT-REFLECTING MEMBER, AND METHOD FOR MANUFACTURING GLASS MEMBER HAVING HEAT-REFLECTING LAYER INCLUDED THEREIN 审中-实审转让
公开(公告)号：EP4039659A1
公开(公告)日：2022-08-10
申请号：EP20871500.3
申请日：2020-09-18
申请人： Shin-Etsu Quartz Products Co., Ltd. , Yamagata Shin-Etsu Quartz Co., Ltd. , Heraeus Quarzglas GmbH & Co. KG
发明人： YAMAGUCHI Kazuhiro , FUJITA Daiki , HARADA Yoshihiro , SEGAWA Toru , WATANABE Tomonori
IPC分类号： C03B20/00 , C03B33/08
摘要： Provided are a heat reflective member, which is prevented from being broken even in a high-temperature environment at the time of its manufacturing and its use while maintaining a high reflectance, generates no dust at the time of its use, and can be washed with a chemical liquid, and a method of manufacturing a glass member with a heat reflective layer suitable as the heat reflective member. The heat reflective member is a heat reflective member having a laminated structure in which quartz glass layers are formed on an upper surface and a lower surface of a siliceous sintered powder layer, wherein the heat reflective member includes: an impermeable layer which is formed at a portion of the siliceous sintered powder layer at an end portion of the heat reflective member, which has a thickness at least larger than half of a thickness of the siliceous sintered powder layer, and through which a gas or a liquid is prevented from penetrating; and a buffer layer which is formed between the impermeable layer and the siliceous sintered powder layer, and which changes in density from the impermeable layer toward the sintered powder layer.

10. 发明公开

EP1681151A3 A core drill and processing machines using same 有权
标题翻译：核心钻机和使用它的加工机器
公开(公告)号：EP1681151A3
公开(公告)日：2006-07-26
申请号：EP06004768.5
申请日：1999-09-09
申请人： Atock Co., Ltd. , Shin-Etsu Quartz Products Co.,Ltd. , Yamagata Shin-Etsu Quartz Co. Ltd.
发明人： Mizuno, Toru Atock Co., Ltd., Fukushima Factory , Hattori, Ikuo c/o Atock Co., Ltd. , Sugama, Akihiko Shin-Etsu Quartz Products Co., Ltd , Matsuya, Toshikatsu Yamagata Shin-Etsu Quartz Co. , Ise, Yoshiaki Yamagata Shin-Etsu Quartz Co., Ltd.
IPC分类号： B28D1/04
CPC分类号： B28D1/041 , B28D1/121 , Y10T408/81
摘要： Provided is a core drill (211) and a core-drill processing machine (240) for forming a hole into hard material, whereby the mechanical processing with reduction in the cutting and/or contact resistance to the tools is realized, so that in the case of the core drill (211), not only are grinding powder of a workpiece (W) and loosed-off abrasive grains effectively removed to prevent those from being loaded between the drill (211) and the workpiece (W), but neither of cracking and chipping occur when the drill (211) passes through the workpiece (W).
A core drill (211) comprises: a shank (214); a base metal section (216) having a cup-like shape constructed of a disk-like top wall (216a) and a cylindrical side wall (216b) provided on a fore-end of the shank (214); a grinding stone portion (217) mounted on an outer end part of the base metal section (216); and abrasive grain layers (230a,230b) formed on inner and outer side surfaces of the cylindrical side wall (216b) of the base metal section (216).
摘要翻译：本发明提供一种用于在硬质材料上形成孔的芯钻（211）和芯钻加工机（240），由此实现了减少对刀具的切削和/或接触阻力的机械加工，从而在（211）的情况下，不仅磨削工件（W）的磨削粉末和松散的磨粒被有效地去除以防止钻头（211）和工件（W）之间被加载，而且当钻头（211）穿过工件（W）时发生裂纹和碎裂。芯钻（211）包括：柄（214）; 由圆盘状的顶壁216a和设置在该柄214的前端的圆筒状的侧壁216b构成的杯状的基底金属部216; 磨石部分（217），其安装在所述基底金属部分（216）的外端部分上; 和形成在基体金属部分（216）的圆柱形侧壁（216b）的内侧和外侧表面上的磨粒层（230a，230b）。

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