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1. 发明申请

WO2013028272A1 ENERGY SENSORS FOR LIGHT BEAM ALIGNMENT 审中-公开
标题翻译：用于光束对准的能量传感器
公开(公告)号：WO2013028272A1
公开(公告)日：2013-02-28
申请号：PCT/US2012/046093
申请日：2012-07-10
申请人： CYMER, INC. ( A NEVADA CORPORATION) , GRAHAM, Matthew, R. , CHANG, Steven , CROUCH, James, H. , FOMENKOV, Igor, V.
发明人： GRAHAM, Matthew, R. , CHANG, Steven , CROUCH, James, H. , FOMENKOV, Igor, V.
IPC分类号： H05G2/00
CPC分类号： G03F7/70033 , H05G2/003 , H05G2/008
摘要： An apparatus includes a drive laser system producing an amplified light beam of pulses that travels along a drive axis; a beam delivery system that directs the amplified light beam of pulses toward a target region; a target material delivery system that provides a target mixture containing a target material in the target region; two or more sensors radially separated from a main axis that crosses the target region, the two or more sensors being configured to detect energy of ultraviolet electromagnetic radiation emitted from a plasma state of the target material when the amplified light beam of pulses intersects the target mixture; and a controller that receives the output from the two or more sensors. The controller is configured to estimate a relative radial alignment between the target mixture and the drive axis within the target region based on an analysis of the detected energy.
摘要翻译：一种装置包括驱动激光系统，其产生沿驱动轴线行进的放大的脉冲光束; 射束传送系统，其将放大的脉冲光束朝向目标区域引导; 目标材料输送系统，其在目标区域中提供含有靶材料的目标混合物; 两个或更多个传感器与跨越目标区域的主轴径向分离，两个或更多个传感器被配置为当被放大的脉冲光束与目标混合物相交时，检测从目标材料的等离子体状态发射的紫外电磁辐射的能量 ; 以及接收来自两个或更多个传感器的输出的控制器。控制器被配置为基于对所检测的能量的分析来估计目标混合物和目标区域内的驱动轴之间的相对径向对准。

2. 发明申请

WO2012012267A1 ALIGNMENT OF LIGHT SOURCE FOCUS 审中-公开
标题翻译：光源对焦
公开(公告)号：WO2012012267A1
公开(公告)日：2012-01-26
申请号：PCT/US2011/044058
申请日：2011-07-14
申请人： CYMER, INC. , GRAHAM, Matthew, R. , PARTLO, William, N. , CHANG, Steven , BERGSTEDT, Robert, A.
发明人： GRAHAM, Matthew, R. , PARTLO, William, N. , CHANG, Steven , BERGSTEDT, Robert, A.
IPC分类号： A61N5/06
CPC分类号： H05G2/008 , G01B11/0608 , G01B11/26 , H05G2/003 , H05G2/005
摘要： An extreme ultraviolet light system includes a steering system that steers and focuses an amplified light beam traveling along a propagation direction to a focal plane near a target location within an extreme ultraviolet light chamber, a detection system including at least one detector positioned to detect an image of a laser beam reflected from at least a portion of a target material within the chamber,, a wavefront modification system in the path of the reflected laser beam and between, the target location- and the detection system, and a controller. The -wavefront modification system is configured to modify the wavefront of the reflected laser beam as a function of a target focal plane position along the propagation direction. The controller includes logic for adjusting a location o f the focal plane of the amplified light' beam relative to the target material based on the detected image of the reflected laser beam,
摘要翻译：一种极紫外光系统包括：转向系统，其将沿着传播方向传播的放大的光束转向并聚焦在远紫外光室内的目标位置附近的焦平面;检测系统，包括至少一个检测器，其被定位成检测图像从腔室内的目标材料的至少一部分反射的激光束，在反射激光束的路径中以及目标位置与检测系统之间的波前修改系统以及控制器。波前修改系统被配置为根据沿着传播方向的目标焦平面位置来修改反射激光束的波前。控制器包括用于基于检测到的反射激光束的图像来调整放大的光束相对于目标材料的焦平面的位置的逻辑，

3. 发明申请

WO2012134736A1 SYSTEM AND METHOD FOR COMPENSATING FOR THERMAL EFFECTS IN AN EUV LIGHT SOURCE 审中-公开
标题翻译：用于补偿EUV光源中的热效应的系统和方法
公开(公告)号：WO2012134736A1
公开(公告)日：2012-10-04
申请号：PCT/US2012/027907
申请日：2012-03-06
申请人： CYMER, INC. , GRAHAM, Matthew, R. , HAUGAN, Olav , PARTLO, William, N.
发明人： GRAHAM, Matthew, R. , HAUGAN, Olav , PARTLO, William, N.
IPC分类号： H05G2/00
CPC分类号： H05G2/008 , G02B7/028 , H01S3/005
摘要： A method and apparatus for compensating for thermal effects on the focal spot of a lens used to focus a laser beam on a target material at an irradiation site in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system is disclosed. The EUV energy output of the light system is measured at sample intervals as a proxy for the laser power. The thermal load on the focusing lens is estimated from the measured EUV power, the expected change in the focal length of the lens for the thermal load is calculated, and the lens position is adjusted to compensate for the calculated focal length change. The actual position of the lens may be determined and compared to its desired position, and adjusted to insure that it remains in the desired position.
摘要翻译：公开了一种用于补偿在激光产生的等离子体（UVP）极紫外（EUV）光系统中的照射位置处将激光束聚焦在目标材料上的用于焦点的焦点的热效应的方法和装置。以采样间隔测量光系统的EUV能量输出作为激光功率的代表。根据所测量的EUV功率估计聚焦透镜上的热负荷，计算用于热负荷的透镜焦距的预期变化，并且调节透镜位置以补偿计算的焦距变化。可以确定透镜的实际位置并将其与其期望位置进行比较，并进行调整以确保其保持在期望的位置。

4. 发明申请

WO2007011443A2 FISTULA GRAFT WITH DEFORMABLE SHEET-FORM MATERIAL 审中-公开
标题翻译：具有可变形材料的FISTULA GRAFT
公开(公告)号：WO2007011443A2
公开(公告)日：2007-01-25
申请号：PCT/US2006/016233
申请日：2006-04-28
申请人： COOK INCORPORATED , COOK BIOTECH INCORPORATED , PATEL, Umesh, H. , OBERMILLER, F., Joseph , FETTE, Clay, D. , GRAHAM, Matthew, R.
发明人： PATEL, Umesh, H. , OBERMILLER, F., Joseph , FETTE, Clay, D. , GRAHAM, Matthew, R.
IPC分类号： A61K35/22 , A61K35/38
CPC分类号： A61L27/3604 , A61B17/0057 , A61B2017/00641 , A61K35/22 , A61K35/38 , A61L31/005
摘要： Described are medical products, systems, and methods for treating fistulae having a primary opening, such as in the alimentary canal. Certain methods of the invention include providing an implantable material including a compliant sheet form biocompatible material, and forcing this sheet form biocompatible material into the primary opening so as to deform the sheet form biocompatible material to conform to and block the primary opening. The biocompatible material preferably comprises a remodelable material, for example, a remodelable extracellular matrix material such as submucosa .
摘要翻译：描述了用于治疗具有初级开口的瘘的医疗产品，系统和方法，例如在消化道中。本发明的某些方法包括提供可植入材料，其包括顺应性片材形式的生物相容性材料，并且迫使该片材形成生物相容性材料进入主要开口，以使片材形式的生物相容性材料变形以符合和阻止初级开口。生物相容性材料优选包含可重塑材料，例如可重塑的细胞外基质材料，例如粘膜下层。

5. 发明申请

WO2005094694A2 MEDICAL GRAFT PRODUCTS WITH DIFFERING REGIONS AND METHODS AND SYSTEMS FOR PRODUCING THE SAME 审中-公开
标题翻译：具有不同区域的医疗移植产品以及生产该产品的方法和系统
公开(公告)号：WO2005094694A2
公开(公告)日：2005-10-13
申请号：PCT/US2005/010720
申请日：2005-03-29
申请人： COOK BIOTECH INCORPORATED , MCALEXANDER, Chad, S. , FETTE, Clay , HODDE, Jason, P. , GRAHAM, Matthew, R.
发明人： MCALEXANDER, Chad, S. , FETTE, Clay , HODDE, Jason, P. , GRAHAM, Matthew, R.
IPC分类号： A61B17/00
CPC分类号： A61L27/3691 , A61F2/0045 , A61F2/0063 , A61F2250/0014 , A61F2250/0039 , A61L27/3629 , A61L27/3633 , A61L27/50 , A61L27/56 , A61L2430/22 , A61L2430/40 , Y10S623/901 , Y10S623/917
摘要： Described are methods and systems for drying remodelable materials, such that selective regions of the remodelable materials have differing properties. Also described are medical graft products having selective regions of differing material properties. Advantageous remodelable materials include collagenous extracellular matrix material, such as small intestine submucosa.
摘要翻译：描述了用于干燥可重塑材料的方法和系统，使得可重塑材料的选择性区域具有不同的性质。还描述了具有不同材料特性的选择性区域的医疗移植产品。有利的可重塑材料包括胶原细胞外基质材料，如小肠粘膜下层。

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