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1. 发明申请

WO2002073244A3 METHOD OF MAKING HIGH REPETITION RATE EXCIMER LASER CRYSTAL OPTICS AND UV<200NM TRANSMITTING OPTICAL FLORIDE CRYSTAL 审中-公开
公开(公告)号：WO2002073244A3
公开(公告)日：2002-09-19
申请号：PCT/US2002/006124
申请日：2002-03-01
申请人： CORNING INCORPORATED
发明人： PELL, Michael, A. , SMITH, Charlene, M. , SPARROW, Robert, W. , THEN, Paul, M. , GRAY, Sandra
IPC分类号： G02B1/00
摘要： The invention provides a method of making ≥ 4 kHz repetition rate argon fluoride excimer laser crystal optics. The method includes providing a magnesium fluoride crystal solid precursor, nonmetallically crushing the magnesium fluoride solid precursor to provide a crushed low metal contaminant magnesium fluoride feedstock, providing a magnesium fluoride crystal growth crucible, loading the crushed magnesium fluoride feedstock into the crystal growth crucible, melting the loaded crushed magnesium fluoride feedstock to provide a precrystalline magnesium fluoride melt, growing an oriented magnesium fluoride crystal from the precrystalline magnesium fluoride melt, cooling the grown magnesium fluoride crystal to provide a magnesium fluoride laser optical crystal and forming the magnesium fluoride laser crystal into an excimer laser crystal optic for transmitting a high repetition rate (≥ 4 kHz repetition rate) excimer laser output.

2. 发明申请

WO2003031694A1 PREPARATION OF FEEDSTOCK OF ALKALINE EARTH AND ALKALI METAL FLUORIDES 审中-公开
标题翻译：碱性土和碱金属氟化物的制备
公开(公告)号：WO2003031694A1
公开(公告)日：2003-04-17
申请号：PCT/US2002/031472
申请日：2002-10-02
申请人： CORNING INCORPORATED
发明人： LEBLOND, Nicolas , MAYOLET, Alexandre, Michel , PELL, Michael, A. , WHALEN, Joseph, M.
IPC分类号： C30B11/10
CPC分类号： C01F11/22 , C01B9/08 , C01P2006/80 , C30B11/00 , C30B29/12 , Y10T117/10
摘要： A method for making a below 200-nm wavelength optical fluoride crystal feedstock includes loading a fluoride raw material into a chamber, exposing the fluoride raw material to a flow of gaseous fluoride at a predetermined temperature, and storing the exposed fluoride raw material in a dry atmosphere.
摘要翻译：制造低于200nm波长的氟化物晶体原料的方法包括将氟原料装载到室中，将氟原料暴露于预定温度下的氟化物气流，并将暴露的氟化物原料储存在干燥大气层。

3. 发明申请

WO2002079549A2 PREPARATION OF 157NM TRANSMITTING BARIUM FLUORIDE CRYSTALS WITH PERMEABLE GRAPHITE 审中-公开
标题翻译：用透明石墨制备157纳米发射的氟化镁晶体
公开(公告)号：WO2002079549A2
公开(公告)日：2002-10-10
申请号：PCT/US2002/009803
申请日：2002-03-28
申请人： CORNING INCORPORATED
发明人： MEYER-FREDHOLM, Michèle, M., L. , PELL, Michael, A.
IPC分类号： C30B
CPC分类号： C30B11/002 , C30B11/00 , C30B29/12
摘要： The object of the present invention is a process of preparing an optical fluoride crystal containing barium fluoride , which comprises : loading a crucible with a barium fluoride starting material crystal feedstock which contains at least one oxide as impurity, and an effective and non-excess amount of at least one fluorinating agent which is solid at ambient temperature, melting said mixture within said crucible, growing the crystal, by controlled cooling of the molten mixture, controlled cooling of said crystal to ambient temperature, recovering said crystal; and which is characterised in that the oxide(s) resulting from the reaction between said fluorinating agent(s) and said oxide(s), the impurity or impurities, can be discharged from said crucible, in view of the intrinsic permeability of the material constituting it. Said process is particularly adapted for preparing 157nm transmitting lithography excimer laser optical fluoride crystals in graphite crucibles.
摘要翻译：本发明的目的是制备含有氟化钡的氟化物晶体的方法，该方法包括将含有至少一种氧化物杂质的钡氟原料晶体原料装载在坩埚中，并且将有效和不过量的至少一种氟化剂，其在环境温度下为固体，熔化所述坩埚内的所述混合物，通过熔融混合物的受控冷却使晶体生长，将所述晶体控制冷却至环境温度，回收所述晶体; 其特征在于，考虑到材料的固有渗透性，从所述氟化剂和所述氧化物之间的反应产生的氧化物，杂质或杂质可以从所述坩埚中排出构成它。所述方法特别适用于在石墨坩埚中制备157nm透射光刻准分子激光氟化物晶体。

4. 发明申请

WO2002073244A2 METHOD OF MAKING HIGH REPETITION RATE EXCIMER LASER CRYSTAL OPTICS AND UV<200NM TRANSMITTING OPTICAL FLORIDE CRYSTAL 审中-公开
标题翻译：制备高重复率激光光学晶体光学和UV <200NM透射光学晶体晶体的方法
公开(公告)号：WO2002073244A2
公开(公告)日：2002-09-19
申请号：PCT/US2002/006124
申请日：2002-03-01
申请人： CORNING INCORPORATED
发明人： PELL, Michael, A. , SMITH, Charlene, M. , SPARROW, Robert, W. , THEN, Paul, M. , GRAY, Sandra
IPC分类号： G02B
CPC分类号： H01S3/225 , C30B11/00 , C30B29/12 , H01S3/034 , H01S3/0346 , H01S3/08004 , H01S3/1055 , H01S3/106
摘要： The invention provides a method of making ≥ 4 kHz repetition rate argon fluoride excimer laser crystal optics. The method includes providing a magnesium fluoride crystal solid precursor, nonmetallically crushing the magnesium fluoride solid precursor to provide a crushed low metal contaminant magnesium fluoride feedstock, providing a magnesium fluoride crystal growth crucible, loading the crushed magnesium fluoride feedstock into the crystal growth crucible, melting the loaded crushed magnesium fluoride feedstock to provide a precrystalline magnesium fluoride melt, growing an oriented magnesium fluoride crystal from the precrystalline magnesium fluoride melt, cooling the grown magnesium fluoride crystal to provide a magnesium fluoride laser optical crystal and forming the magnesium fluoride laser crystal into an excimer laser crystal optic for transmitting a high repetition rate (≥ 4 kHz repetition rate) excimer laser output.
摘要翻译：本发明提供了制造> / = 4kHz重复率的氟化氢准分子激光晶体光学器件的方法。该方法包括提供氟化镁晶体固体前体，非金属地粉碎氟化镁固体前体以提供粉碎的低金属污染物氟化镁原料，提供氟化镁晶体生长坩埚，将粉碎的氟化镁原料装入晶体生长坩埚中，熔化负载粉碎的氟化镁原料提供一种预晶化的氟化镁熔体，从预晶化的氟化镁熔体中生长取向的氟化镁晶体，冷却生长的氟化镁晶体，提供氟化镁激光光学晶体，并将氟化镁激光晶体形成为准分子激光晶体光学器件用于传输高重复率（> / = 4kHz重复率）准分子激光输出。

5. 发明公开

EP1444387A1 PREPARATION OF FEEDSTOCK OF ALKALINE EARTH AND ALKALI METAL FLUORIDES 审中-公开
标题翻译：制造和ERDALKALIMETALLFLUORID-碱金属氟化物的适用材料
公开(公告)号：EP1444387A1
公开(公告)日：2004-08-11
申请号：EP02766467.1
申请日：2002-10-02
申请人： CORNING INCORPORATED
发明人： LEBLOND, Nicolas , MAYOLET, Alexandre, Michel , PELL, Michael, A. , WHALEN, Joseph, M.
IPC分类号： C30B11/10 , C30B19/00 , C30B33/02 , B01J2/00 , B01J2/04 , B01J2/12
CPC分类号： C01F11/22 , C01B9/08 , C01P2006/80 , C30B11/00 , C30B29/12 , Y10T117/10
摘要： A method for making a below 200-nm wavelength optical fluoride crystal feedstock includes loading a fluoride raw material into a chamber, exposing the fluoride raw material to a flow of gaseous fluoride at a predetermined temperature, and storing the exposed fluoride raw material in a dry atmosphere.

6. 发明公开

EP1449013A2 METHOD OF MAKING HIGH REPETITION RATE EXCIMER LASER CRYSTAL OPTICS AND UV-200NM TRANSMITTING OPTICAL FLORIDE CRYSTAL 审中-公开
标题翻译：用于生产EXCIMERLASERKRISTALLOPTIK高重复率和UV 200纳米渗透OPTICAL氟化物晶体
公开(公告)号：EP1449013A2
公开(公告)日：2004-08-25
申请号：EP02728371.2
申请日：2002-03-01
申请人： Corning Incorporated
发明人： PELL, Michael, A. , SMITH, Charlene, M. , SPARROW, Robert, W. , THEN, Paul, M. , GRAY, Sandra Lee
IPC分类号： G02B1/00 , B29D11/00 , C01F5/24 , C01F11/18 , C01F5/28 , C01F11/22 , C01D3/02
CPC分类号： H01S3/225 , C30B11/00 , C30B29/12 , H01S3/034 , H01S3/0346 , H01S3/08004 , H01S3/1055 , H01S3/106
摘要： The invention relates to an High Repetition Rate UV Excimer Laser which includes a source of a laser beam and one or more windows which include magnesium fluoride. Another aspect of the invention relates to an excimer laser which includes a source of a laser beam, one or more windows which include magnesium fluoride and a source for annealing the one or more windows. Another aspect of the invention relates to a method of producing a predetermined narrow width laser beam.

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