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1. 发明申请

WO2004015453A2 DETECTION AND MAKING OF ULTRALOW LEAD CONTAMINATED UV OPTICAL FLUORIDE CRYSTALS FOR < 200 NM LITHOGRAPHY 审中-公开
标题翻译：超导铅污染的紫外光学氟化物晶体的检测和制作<200NM光刻
公开(公告)号：WO2004015453A2
公开(公告)日：2004-02-19
申请号：PCT/US2003/022975
申请日：2003-07-24
申请人： CORNING INCORPORATED
发明人： MAYOLET, Alexandre, Michel , TIMOFEEV, Nikolay T.
IPC分类号： G02B
CPC分类号： G01N21/64
摘要： The invention provides a method of detecting sub-ppm lead impurity levels in a below 200 nm transmitting optical calcium fluoride crystal. The method includes providing a below 200 nm wavelength transmitting optical calcium fluoride crystal , providing a fluorescence spectrometer having a light source for producing a 200 to 210 nm selectable wavelength incident radiation and a detector for detecting excited luminescence light in the wavelength range of 210-260 nm produced by the incident radiation, exciting a first luminescence area of the crystal with the 200 to 210 nm selectable wavelength incident radiation and detecting with the detector excited 210 to 260 luminescence light produced from the crystal luminescence area by the 200 to 210 incident radiation to provide a lead ppb impurity level measurement less than 100 ppb. The invention provides for improved manufacturing of below 200 nm wavelength optical elements and optical fluoride crystals such as ultralow lead contaminated calcium fluoride.
摘要翻译：本发明提供了在200nm以下的透射光学氟化钙晶体中检测亚ppm铅杂质水平的方法。该方法包括提供低于200nm的波长透射光学氟化钙晶体，提供具有用于产生200至210nm可选波长入射辐射的光源的荧光光谱仪和用于检测在210-260的波长范围内的激发的发光的检测器 nm，通过入射辐射产生的激光晶体的第一发光区域，以200〜210nm可选波长的入射辐射激发，并用探测器激发210〜260个由晶体发光区域产生的发光，通过200〜210次入射辐射，提供低于100ppb的铅ppb杂质水平测量。本发明提供了低于200nm波长的光学元件和氟化物晶体的改进制造，例如超低铅污染的氟化钙。

2. 发明申请

WO2003031694A1 PREPARATION OF FEEDSTOCK OF ALKALINE EARTH AND ALKALI METAL FLUORIDES 审中-公开
标题翻译：碱性土和碱金属氟化物的制备
公开(公告)号：WO2003031694A1
公开(公告)日：2003-04-17
申请号：PCT/US2002/031472
申请日：2002-10-02
申请人： CORNING INCORPORATED
发明人： LEBLOND, Nicolas , MAYOLET, Alexandre, Michel , PELL, Michael, A. , WHALEN, Joseph, M.
IPC分类号： C30B11/10
CPC分类号： C01F11/22 , C01B9/08 , C01P2006/80 , C30B11/00 , C30B29/12 , Y10T117/10
摘要： A method for making a below 200-nm wavelength optical fluoride crystal feedstock includes loading a fluoride raw material into a chamber, exposing the fluoride raw material to a flow of gaseous fluoride at a predetermined temperature, and storing the exposed fluoride raw material in a dry atmosphere.
摘要翻译：制造低于200nm波长的氟化物晶体原料的方法包括将氟原料装载到室中，将氟原料暴露于预定温度下的氟化物气流，并将暴露的氟化物原料储存在干燥大气层。

3. 发明公开

EP1444387A1 PREPARATION OF FEEDSTOCK OF ALKALINE EARTH AND ALKALI METAL FLUORIDES 审中-公开
标题翻译：制造和ERDALKALIMETALLFLUORID-碱金属氟化物的适用材料
公开(公告)号：EP1444387A1
公开(公告)日：2004-08-11
申请号：EP02766467.1
申请日：2002-10-02
申请人： CORNING INCORPORATED
发明人： LEBLOND, Nicolas , MAYOLET, Alexandre, Michel , PELL, Michael, A. , WHALEN, Joseph, M.
IPC分类号： C30B11/10 , C30B19/00 , C30B33/02 , B01J2/00 , B01J2/04 , B01J2/12
CPC分类号： C01F11/22 , C01B9/08 , C01P2006/80 , C30B11/00 , C30B29/12 , Y10T117/10
摘要： A method for making a below 200-nm wavelength optical fluoride crystal feedstock includes loading a fluoride raw material into a chamber, exposing the fluoride raw material to a flow of gaseous fluoride at a predetermined temperature, and storing the exposed fluoride raw material in a dry atmosphere.

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