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    • 3. 发明专利
    • DE60307887D1
    • 2006-10-05
    • DE60307887
    • 2003-10-31
    • FUJIKIN KK
    • MOCHIZUKI YASUNORIMAKINO MEGUMUKOYOMOGI MUTSUNORI
    • F16K27/00F16K11/22
    • A body 2 comprises a center channel block 11 and side channel blocks 12, 13. Each of shut-off valves 5, 6 is removably mounted on both the center channel block and one of the side channel blocks. The center channel block has Y-shaped channels 22 identical in number with the number of the subgas inlets 23 and each comprising one common channel 22a and two branched channels 22b, 22c. The common channel 22a of the Y-shaped channel 22 has an opening serving as the subgas inlet 23 and the branched channels 22b, 22c of the Y-shaped channel 22 communicate with the inlet ports of the corresponding pair of shut-off valves 5, 6 to thereby provide the subgas inflow channels. The main gas channel 18 and the main channel communication passageways 19 are formed in one of the side channel blocks 12, and the vent gas channel 20 and the vent channel communication passageways 21 are formed on the other side channel block 13.
    • 4. 发明公开
    • FLUID CONTROL DEVICE
    • VORRICHTUNGFÜRFLUIDSTEUERUNG
    • EP1568927A4
    • 2006-01-11
    • EP03770068
    • 2003-10-31
    • FUJIKIN KK
    • MOCHIZUKI YASUNORIMAKINO MEGUMUKOYOMOGI MUTSUNORI
    • F16K11/22F16K27/00
    • F16K27/003
    • A fluid control device, wherein a body (2) is formed of a center passage block (11) and side passage blocks (12, 13), open/close valves (5, 6) are detachably installed across the center passage block and the side passage blocks, Y-passages (22) each formed of one common passage (22a) and two branch passages (22b, 22c) of the same quantity as sub gas inlets (23) are installed in the center passage block, the opening of the common passage (22a) of the Y-passage (22) is formed in the sub gas inlet (23) and the branch passages (22b, 22c) of the Y-passage (22) are allowed to communicate with the inlet ports of the open/close valves (5, 6) to form a sub gas inflow passage, and a main gas passage (18) and a main passage side communication passage (19) are formed in one side passage block (12) and a vent gas passage (20) and a vent passage side communication passage (21) is formed in the other side passage block (13).
    • 1。一种流体控制装置,其中,中央通路块(11)和侧通路块(12,13)形成主体(2),开闭阀(5,6)可拆卸地安装在中央通路块和 在中央通路块中安装有各自由一个公共通路(22a)和与副气体入口(23)相同数量的两个分支通路(22b,22c)形成的Y通路(22) Y通路22的共用通路22a形成在副气体入口23中,并且Y通路22的分支通路22b,22c能够与Y通路22的入口端口连通, 形成副气体流入通路的开闭阀5,6以及主通气路18和主通路侧连通通路19形成在一侧通路块12内, 在另一侧通路块(13)上形成通路(20)和通气通路侧连通通路(21)。
    • 6. 发明专利
    • DE69912239D1
    • 2003-11-27
    • DE69912239
    • 1999-08-09
    • FUJIKIN KKTOKYO ELECTRON LTDOHMI TADAHIRO
    • OHMI TADAHIROIIDA SEIICHIKAGATSUME SATOSHIHIROSE JUNNISHINO KOUJIIKEDA NOBUKAZUYAMAJI MICHIODOHI RYOUSUKEYOSHIKAWA KAZUHIROKOYOMOGI MUTSUNORIUNO TOMIOIDETA EIJIHIROSE TAKASHI
    • G05D7/06F16K37/00
    • A method and apparatus for detection of the clogging of the orifice by measuring the upstream side pressure without breaking up the piping system in a flow rate control unit using an orifice, so as to extend the life of the flow control unit and enhance its safety. To be specific, the apparatus of detecting the clogging of the orifice in a pressure-type rate flow controller has a control valve (CV), an orifice (2), a pressure detector (14) for measuring the upstream pressure P1 therebetween and a flow rate setting circuit (32) wherein with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated from the equation QC = KP1 (K: constant) and wherein the control valve (CV) is controlled by the difference signal QY between the calculated flow rate QC and the set flow rate QS, the apparatus comprising: a storage memory M memorizing standard pressure attenuation data Y(t) of the upstream pressure P1 measured with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL, with the orifice (2) not clogged a pressure detector (14) for determination of the pressure attenuation data P(t) of the upstream pressure P1 with the flow rate switched from the high set flow rate QSR to the low set flow rate QSL, with the orifice (2) in the actual conditions a central processing unit CPU for checking the pressure attenuation data P(t) against standard pressure attenuation data Y(t) and an alarm circuit (46) that turns on a clogging alarm when the pressure attenuation data P(t) deviates from standard pressure attenuation data Y(t) to a specific degree or beyond that.
    • 7. 发明专利
    • FLUID CONTROL DEVICE
    • CA2621258A1
    • 2007-03-22
    • CA2621258
    • 2006-07-21
    • FUJIKIN KK
    • KOYOMOGI MUTSUNORI
    • F16K27/00H01L21/02
    • There is provided a fluid control device having no dead volume. A fluid flow path is constituted by a loop-shaped flow-path portion L, and a first inlet flow-path portion B1, a second inlet flow-path portion B2 and a common outlet flow-path portion B3 which are communicated with a first inlet A1, a second inlet A2 and a common outlet A3 at predetermined portions P1, P2 and P3 of the loop-shaped flow-path portion L. There are provided a first shut-off valve V1 for opening and closing the first inlet flow-path portion B1 and a second shut-off valve V2 for opening and closing the second inlet flow-path portion B2. Accordingly, the first fluid which has flowed into the first inlet A1 and reached the loop-shaped flow-path portion L and the second fluid which has flowed into the second inlet A2 and reached the loop-shaped flow-path portion L are flowed through the loop-shaped flow-path portion L such that each of the first and second fluids are divided into two parts and thereafter are ejected from the common outlet A3.
    • 8. 发明专利
    • AT252741T
    • 2003-11-15
    • AT99935120
    • 1999-08-09
    • FUJIKIN KKTOKYO ELECTRON LTDOHMI TADAHIRO
    • OHMI TADAHIROIIDA SEIICHIKAGATSUME SATOSHIFUJIICHO NIRASAKI-SHIHIROSE JUNNISHINO KOUJIIKEDA NOBUKAZUYAMAJI MICHIODOHI RYOUSUKEYOSHIKAWA KAZUHIRONISHI-KUKOYOMOGI MUTSUNORIUNO TOMIOIDETA EIJIHIROSE TAKASHI
    • G05D7/06F16K37/00
    • A method and apparatus for detection of the clogging of the orifice by measuring the upstream side pressure without breaking up the piping system in a flow rate control unit using an orifice, so as to extend the life of the flow control unit and enhance its safety. To be specific, the apparatus of detecting the clogging of the orifice in a pressure-type rate flow controller has a control valve (CV), an orifice (2), a pressure detector (14) for measuring the upstream pressure P1 therebetween and a flow rate setting circuit (32) wherein with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated from the equation QC = KP1 (K: constant) and wherein the control valve (CV) is controlled by the difference signal QY between the calculated flow rate QC and the set flow rate QS, the apparatus comprising: a storage memory M memorizing standard pressure attenuation data Y(t) of the upstream pressure P1 measured with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL, with the orifice (2) not clogged a pressure detector (14) for determination of the pressure attenuation data P(t) of the upstream pressure P1 with the flow rate switched from the high set flow rate QSR to the low set flow rate QSL, with the orifice (2) in the actual conditions a central processing unit CPU for checking the pressure attenuation data P(t) against standard pressure attenuation data Y(t) and an alarm circuit (46) that turns on a clogging alarm when the pressure attenuation data P(t) deviates from standard pressure attenuation data Y(t) to a specific degree or beyond that.
    • 9. 发明专利
    • DE60307887T2
    • 2007-08-30
    • DE60307887
    • 2003-10-31
    • FUJIKIN KK
    • MOCHIZUKI YASUNORIMAKINO MEGUMUKOYOMOGI MUTSUNORI
    • F16K27/00F16K11/22
    • A body 2 comprises a center channel block 11 and side channel blocks 12, 13. Each of shut-off valves 5, 6 is removably mounted on both the center channel block and one of the side channel blocks. The center channel block has Y-shaped channels 22 identical in number with the number of the subgas inlets 23 and each comprising one common channel 22a and two branched channels 22b, 22c. The common channel 22a of the Y-shaped channel 22 has an opening serving as the subgas inlet 23 and the branched channels 22b, 22c of the Y-shaped channel 22 communicate with the inlet ports of the corresponding pair of shut-off valves 5, 6 to thereby provide the subgas inflow channels. The main gas channel 18 and the main channel communication passageways 19 are formed in one of the side channel blocks 12, and the vent gas channel 20 and the vent channel communication passageways 21 are formed on the other side channel block 13.
    • 10. 发明专利
    • DE69912239T2
    • 2004-07-29
    • DE69912239
    • 1999-08-09
    • FUJIKIN KKTOKYO ELECTRON LTDOHMI TADAHIRO
    • OHMI TADAHIROIIDA SEIICHIKAGATSUME SATOSHIHIROSE JUNNISHINO KOUJIIKEDA NOBUKAZUYAMAJI MICHIODOHI RYOUSUKEYOSHIKAWA KAZUHIROKOYOMOGI MUTSUNORIUNO TOMIOIDETA EIJIHIROSE TAKASHI
    • G05D7/06F16K37/00
    • A method and apparatus for detection of the clogging of the orifice by measuring the upstream side pressure without breaking up the piping system in a flow rate control unit using an orifice, so as to extend the life of the flow control unit and enhance its safety. To be specific, the apparatus of detecting the clogging of the orifice in a pressure-type rate flow controller has a control valve (CV), an orifice (2), a pressure detector (14) for measuring the upstream pressure P1 therebetween and a flow rate setting circuit (32) wherein with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated from the equation QC = KP1 (K: constant) and wherein the control valve (CV) is controlled by the difference signal QY between the calculated flow rate QC and the set flow rate QS, the apparatus comprising: a storage memory M memorizing standard pressure attenuation data Y(t) of the upstream pressure P1 measured with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL, with the orifice (2) not clogged a pressure detector (14) for determination of the pressure attenuation data P(t) of the upstream pressure P1 with the flow rate switched from the high set flow rate QSR to the low set flow rate QSL, with the orifice (2) in the actual conditions a central processing unit CPU for checking the pressure attenuation data P(t) against standard pressure attenuation data Y(t) and an alarm circuit (46) that turns on a clogging alarm when the pressure attenuation data P(t) deviates from standard pressure attenuation data Y(t) to a specific degree or beyond that.