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    • 4. 发明申请
    • METHOD FOR MAKING AN EMISSIVE CATHODE
    • 制备阴极阴极的方法
    • WO2007026086A3
    • 2007-05-31
    • PCT/FR2006050490
    • 2006-05-29
    • COMMISSARIAT ENERGIE ATOMIQUEMEYER ROBERTMONTMAYEUL BRIGITTE
    • MEYER ROBERTMONTMAYEUL BRIGITTE
    • B82B3/00B82B1/00H01J1/304H01J9/02
    • H01J9/025B82Y10/00B82Y30/00B82Y40/00C01B32/162D01F9/127H01J1/3048H01J31/127H01J2201/30469H01J2201/319H01L51/0048H01L51/0541H01L51/055
    • The invention concerns a method for producing a triode-type cathode structure including steps for depositing and steps for etching a cathode layer to transform it to cathode conductors; a grid layer to transform it into grid conductors; an electrically insulating layer and the grid conductors until a resistive layer is achieved to provide cavities; cathode conductors to provide them with an open-work structure at the intersection of the cathode conductors and the grid conductors. The invention is characterized in that the steps for etching the grid conductors and the electrically insulating layer consist in: a) depositing a resin layer on the grid layer; b) patterning the resin layer by means of lithography to obtain emissive pads; c) etching the structured grid layer into grid conductors, based on the pattern; d) etching the insulating layer underlying the grid layer by enlarging the etching beyond the emissive pads; e) etching the grid layer at the zones exposed by etching the insulating layer until the resin layer is reached; f) depositing a catalyst layer into the openings of the resin layer so as to form the emissive pads at the base of the cavity; g) removing the resin layer.
    • 本发明涉及一种制造三极型阴极结构的方法,该方法包括以下步骤:沉积和刻蚀阴极层以将其转化为阴极导体的步骤; 一个网格层将其转换为网格导体; 电绝缘层和栅极导体,直到实现电阻层以提供空腔; 阴极导体以在阴极导体和栅极导体的交叉处为它们提供开放式结构。 本发明的特征在于,蚀刻栅格导体和电绝缘层的步骤包括:a)在栅格层上沉积树脂层; b)通过光刻图案化树脂层以获得发射焊盘; c)基于图案将结构化的栅格层蚀刻成栅格导体; d)通过扩大超出发射焊盘的蚀刻来蚀刻栅格层下面的绝缘层; e)在通过蚀刻绝缘层而暴露的区域蚀刻栅格层直到达到树脂层; f)将催化剂层沉积到树脂层的开口中以便在空腔的底部形成发射焊盘; g)除去树脂层。