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1. 发明专利

DE3740561A1 未知
公开(公告)号：DE3740561A1
公开(公告)日：1988-07-21
申请号：DE3740561
申请日：1987-11-30
申请人： CANON KK
发明人： FURUKAWA MOTOMU , HIGOMURA MAKOTO , OHTSUKA MASARU , YAMAMOTO HIRONORI , OHKAWA SHINKICHI , MATSUSHITA KOICHI , KAWAI YASUO , KARIYA TAKAO , KUSUNOKI HARUYUKI , YAMAURA TOSHIHIKO
IPC分类号： G03F7/20 , G03F7/22 , G03F9/00 , H02K7/116
摘要： A stage device usable, e.g., in an X-ray exposure apparatus, for moving a semiconductor wafer placed in a vacuum ambience and held by a wafer chuck, is disclosed. In the stage device, the wafer chuck holds the wafer so that the surface of the wafer onto which a circuit pattern is to be transferred is placed in a vertical plane, and the wafer chuck is moved vertically and horizontally for step-and-repeat exposure of the wafer. The device includes a guide mechanism, locking mechanism and a constant-tension spring mechanism, to thereby ensure high-accuracy movement of the wafer chuck in the vertical direction as well as high-precision positioning of the wafer. Further, in the stage device, a drive source producing a drive to move the wafer chuck is disposed in a vacuum ambience while, on the other hand, the supply of operating fluids to air bearing assemblies, for guiding the movement of the wafer chuck, is achieved by use of metal pipes coupled by rotary joints. The wafer chuck is resiliently supported by one of the air bearing assemblies, such that the wafer chuck can be moved in the vacuum ambience very accurately and without difficulties.

2. 发明专利

DE68921341T2 未知
公开(公告)号：DE68921341T2
公开(公告)日：1995-08-17
申请号：DE68921341
申请日：1989-10-30
申请人： CANON KK
发明人： UZAWA SHUNICHI , KARIYA TAKAO , HIGOMURA MAKOTO , MIZUSAWA NOBUTOSHI , EBINUMA RYUICHI , UDA KOJI , OZAWA KUNITAKA , AMEMIYA MITSUAKI , SAKAMOTO EIJI , ABE NAOTO , SAITOH KENJI
IPC分类号： G03F7/20 , G03F9/00

3. 发明专利

DE3740561C2 未知
公开(公告)号：DE3740561C2
公开(公告)日：1997-07-10
申请号：DE3740561
申请日：1987-11-30
申请人： CANON KK
发明人： FURUKAWA MOTOMU , HIGOMURA MAKOTO , OHTSUKA MASARU , YAMAMOTO HIRONORI , OHKAWA SHINKICHI , MATSUSHITA KOICHI , KAWAI YASUO , KARIYA TAKAO , KUSUNOKI HARUYUKI , YAMAURA TOSHIHIKO
IPC分类号： G03F7/20 , G03F7/22 , G03F9/00 , G03B27/42 , G03B27/53
摘要： A stage device usable, e.g., in an X-ray exposure apparatus, for moving a semiconductor wafer placed in a vacuum ambience and held by a wafer chuck, is disclosed. In the stage device, the wafer chuck holds the wafer so that the surface of the wafer onto which a circuit pattern is to be transferred is placed in a vertical plane, and the wafer chuck is moved vertically and horizontally for step-and-repeat exposure of the wafer. The device includes a guide mechanism, locking mechanism and a constant-tension spring mechanism, to thereby ensure high-accuracy movement of the wafer chuck in the vertical direction as well as high-precision positioning of the wafer. Further, in the stage device, a drive source producing a drive to move the wafer chuck is disposed in a vacuum ambience while, on the other hand, the supply of operating fluids to air bearing assemblies, for guiding the movement of the wafer chuck, is achieved by use of metal pipes coupled by rotary joints. The wafer chuck is resiliently supported by one of the air bearing assemblies, such that the wafer chuck can be moved in the vacuum ambience very accurately and without difficulties.

4. 发明专利

DE68921341D1 未知
公开(公告)号：DE68921341D1
公开(公告)日：1995-03-30
申请号：DE68921341
申请日：1989-10-30
申请人： CANON KK
发明人： UZAWA SHUNICHI , KARIYA TAKAO , HIGOMURA MAKOTO , MIZUSAWA NOBUTOSHI , EBINUMA RYUICHI , UDA KOJI , OZAWA KUNITAKA , AMEMIYA MITSUAKI , SAKAMOTO EIJI , ABE NAOTO , SAITOH KENJI
IPC分类号： G03F7/20 , G03F9/00

5. 发明专利

JP2500260B2 失效
公开(公告)号：JP2500260B2
公开(公告)日：1996-05-29
申请号：JP15850394
申请日：1994-07-11
申请人： CANON KK
发明人： YAMAMOTO SEKINORI , OOKAWA SHINKICHI , MATSUSHITA KOICHI , KAWAI YASUO , HIGOMURA MAKOTO , KARYA TAKUO
IPC分类号： G01B21/00 , G03F7/20 , G03F9/00 , G12B5/00 , H01L21/027

6. 发明专利

JP2500258B2 失效
公开(公告)号：JP2500258B2
公开(公告)日：1996-05-29
申请号：JP15850094
申请日：1994-07-11
申请人： CANON KK
发明人： YAMAMOTO SEKINORI , OOKAWA SHINKICHI , MATSUSHITA KOICHI , KAWAI YASUO , HIGOMURA MAKOTO , KARYA TAKUO
IPC分类号： G01B21/00 , G03F7/20 , G03F9/00 , G12B5/00 , H01L21/027

7. 发明专利

JPH0557520A WORKING DEVICE 失效
公开(公告)号：JPH0557520A
公开(公告)日：1993-03-09
申请号：JP22295591
申请日：1991-09-03
申请人： CANON KK
发明人： YOKOMATSU TAKAO , ASAMI MASAYOSHI , HIGOMURA MAKOTO
IPC分类号： B23D1/12 , B23Q5/34
摘要： PURPOSE:To embody a groove depth error of 1/100mum at the time of straight groove working, or that of a several nm order necessary at the time of mold working, unrealized by conventional machining technique. CONSTITUTION:A coarse motion Y slider 11 is mounted on a X slier 1, and moreover a fine motion Y slider 12 is fitted to the coarse motion Y slider 11 with fixtures mounted on the X slider 1. Work 14 is fixed to the fine motion Y slider 12. The fine motion Y slider 12 is composed of a fine motion mount for moving the work 14, a fine motion actuator, and a fine motion displacement sensor, etc., detecting the displacement of the fine motion mount. A cutting tool 9 is set at a given standard surface position, a cutting depth between the cutting tool 9 and a given bottom surface is set by electrifying the fine motion actuator, and control is made so as to fix the cutting depth based on the output of the fine motion displacement sensor.

8. 发明专利

JPH0241678A DRIVING GEAR FOR INCHWORM MOTOR 失效
公开(公告)号：JPH0241678A
公开(公告)日：1990-02-09
申请号：JP18817788
申请日：1988-07-29
申请人： CANON KK
发明人： TAKIZAWA NAOKI , HIGOMURA MAKOTO
IPC分类号： H02N2/00
摘要： PURPOSE:To keep a driving gear at high speed and to make it of high resolution by varying the moving momentum in one sequence from the state where a clamp mechanism is fully closed to the next same state at one sequence unit. CONSTITUTION:A driving control circuit of an inchworm motor is composed of a sequence control circuit 1 to control the starting and stopping of the sequential action, an oscillation circuit 2, a ROM 3 into which the data of the driving sequence is written, a counter 4, a buffer 5, and a D/A converter 6. It is also equipped with piezoelectric elements 7, 10 to 11 of the motor, a first-order lag circuit 8 and a linear amplifier 9. As the moving momentum per sequence is decided by the extending quantity of the piezoelectric element 7, the data is written into the ROM 3 so that the output signal to data buses D1 to D6 will change depending upon the contents of a signal S1 to change the moving momentum of the motor. Thus, by setting the moving momentum to be positioned at high resolution for only the moving momentum of the last one sequence related to positioning, the degree of precision is improved.

9. 发明专利

JPS63217994A DRIVE CONTROLLER 失效
公开(公告)号：JPS63217994A
公开(公告)日：1988-09-12
申请号：JP4889887
申请日：1987-03-05
申请人： CANON KK
发明人： KUROSAWA HIROSHI , HIGOMURA MAKOTO
IPC分类号： H02P5/46 , H01L21/68
摘要： PURPOSE:To control the speed within wide variable speed width and the position, by providing a high-speed positioning motor and a driving motor in controlling constant speed, and by using either of the two motors properly as the situation demands. CONSTITUTION:The torque produced by a constant speed feeding servo motor 1 is transmitted to a worm wheel 4 through a worm gear 3. The worm wheel 4 and a clutch 5 are coupled with a shaft. When the clutch 5 is connected, the rotating torque is conveyed to a gear 6 as it is. When it is not connected, only the upper side plate of the clutch 5 rotates. The torque produced by a high-speed position controlling servo motor 9 is transmitted to a gear 12 by a clutch 11 similarly in the case of the clutch 5.

10. 发明专利

JPS63216111A DRIVE CONTROLLER 失效
公开(公告)号：JPS63216111A
公开(公告)日：1988-09-08
申请号：JP4889987
申请日：1987-03-05
申请人： CANON KK
发明人： KUROSAWA HIROSHI , HIGOMURA MAKOTO
IPC分类号： G05D3/12
摘要： PURPOSE:To improve the tracking fidelity of speed or position with respect to a command value by providing a position detection means to each of a drive section and a section to be driven and giving weight to the outputs so as to feed back the result. CONSTITUTION:When a drive instruction including the control mode, position and speed command is given from a CPU 18, an interface board 19 compares the command with signals 37, 38 from a rotary encoder 8 and a linear scale 17 to output a speed command signal 25, a position command signal 26 and selection signals 27, 28 of servomotors, 1, 9. The speed command signal 25 is enabled by the selection signals 27, 28, sent to a driver 22 or 23 via a preamplifier 20 or 21 enabled by the selection signals 27, 28 the driver 22 or 23 receiving it outputs a voltage to a motor 1 or 9, and the output is adjusted based on a voltage 33 or 35 from a tachogenerator 2 or 10. Thus, the time delay is suppressed in the device having a complicated dynamic transmission system.

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