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    • 5. 发明申请
    • Method of mask making and structure thereof for improving mask ESD immunity
    • 掩模制造方法及其结构,用于提高掩模的ESD抗扰度
    • US20060216614A1
    • 2006-09-28
    • US11089061
    • 2005-03-24
    • Shyh-Jen GuoYu Lo
    • Shyh-Jen GuoYu Lo
    • G03C5/00G03F1/00
    • G03F1/40G03F1/50G03F1/62
    • A method for fabricating a mask (or reticle) to improve the mask ESD immunity is provided. A substrate having an upper surface is substantially transparent to a selected radiation. A light sensitive layer is formed over the substrate. The light sensitive layer is patterned and etched to form a pattern of openings in the light sensitive layer. The substrate is etched according to the pattern of openings in the light sensitive layer. The light sensitive layer is stripped. An opaque layer is then deposited on the upper surface and in the openings of the patterned substrate. The substrate is planarized by removing excess opaque layer from over the upper surface of the substrate. A pellicle is then mounted outstretched on the upper surface of the substrate.
    • 提供了制造掩模(或掩模版)以提高掩模ESD抗扰度的方法。 具有上表面的基底对所选择的辐射基本上是透明的。 在衬底上形成光敏层。 对感光层进行图案化和蚀刻,以在光敏层中形成开口图案。 根据光敏层中的开口图案蚀刻衬底。 剥去光敏层。 然后在图案化衬底的上表面和开口中沉积不透明层。 通过从衬底的上表面上去除多余的不透明层来平坦化衬底。 然后将防护薄膜组件伸出到衬底的上表面上。
    • 6. 发明授权
    • Method and system for providing enhanced thermal expansion for hard disk drives
    • 为硬盘驱动器提供增强热膨胀的方法和系统
    • US08670214B1
    • 2014-03-11
    • US13332241
    • 2011-12-20
    • Neil KnutsonYu Lo
    • Neil KnutsonYu Lo
    • G11B5/127
    • G11B5/607G11B5/314
    • A method and system provide a magnetic read and/or write transducer for use in disk drive. A read transducer has an air-bearing surface (ABS) and includes a read sensor, a nonmagnetic gap, a heater, and an expander. The nonmagnetic gap is adjacent to a portion of the read sensor and has a first coefficient of thermal expansion (CTE). The heater heats a portion of the magnetic read transducer. The expander is adjacent to a portion of the nonmagnetic gap and has a second CTE greater than the first CTE. The write transducer includes a pole, a coil, an insulator adjacent to and for insulating the coil, a heater and an expander. The expander has a CTE greater than the insulator's CTE.
    • 一种方法和系统提供用于磁盘驱动器的磁读取和/或写入传感器。 读取传感器具有空气轴承表面(ABS),并且包括读取传感器,非磁性间隙,加热器和膨胀器。 非磁性间隙与读取传感器的一部分相邻并且具有第一热膨胀系数(CTE)。 加热器加热磁读取传感器的一部分。 膨胀器与非磁性间隙的一部分相邻并且具有大于第一CTE的第二CTE。 写传感器包括极,线圈,邻近并用于绝缘线圈的绝缘体,加热器和膨胀器。 扩展器的CTE大于绝缘子的CTE。
    • 7. 发明授权
    • Method for burnishing hard disks
    • 抛光硬盘的方法
    • US06526639B2
    • 2003-03-04
    • US09944226
    • 2001-08-30
    • Shanlin DuanWei-Ming LeeYu Lo
    • Shanlin DuanWei-Ming LeeYu Lo
    • B24B3900
    • G11B5/84Y10T29/47
    • The disk burnishing process is conducted with a contact flying burnishing head wherein the leading edge of the burnishing head is disposed above the surface of the disk, while the trailing edge of the burnishing head makes contact with the surface of the disk. The contact flying configuration of the burnishing head is obtained by controlling the rotating disk RPM in conjunction with the burnishing head design characteristics. In the contact flying burnishing process, the burnishing edges of the several burnishing pads of the head are disposed at different heights relative to the disk surface, such that the leading burnishing pad edges are higher than the trailing burnishing pad edges. In this configuration, high asperities are trimmed by the burnishing pads while low asperities are not. Thus, a disk is properly burnished for subsequent hard disk drive performance with a minimum of surface debris being created by the burnishing process.
    • 磁盘抛光工艺是用接触式飞边抛光头进行的,其中抛光头的前缘设置在盘的表面之上,而抛光头的后缘与盘的表面接触。 抛光头的接触飞行构造是通过结合抛光头设计特性来控制旋转盘RPM获得的。在接触飞行抛光过程中,头部的几个抛光垫的抛光边缘相对于 磁盘表面,使得引导的抛光焊盘边缘高于后抛光焊盘边缘。 在这种配置中,高凹凸被抛光垫修剪,而低凹凸不平。 因此,对于随后的硬盘驱动器性能,盘被适当地抛光,并且由抛光过程产生最少的表面碎屑。
    • 9. 发明授权
    • Disk drive laser melt bump disk for accurate glide calibration and certification processing
    • 磁盘驱动器激光熔融凸块用于准确滑行校准和认证处理
    • US06530258B2
    • 2003-03-11
    • US09911147
    • 2001-07-23
    • James Hammond BrannonShanlin DuanYu Lo
    • James Hammond BrannonShanlin DuanYu Lo
    • G01B2130
    • G01N3/62G01N2203/021G01N2203/0623
    • A bump disk for accurate glide calibration has a new type of glass laser melt bumps that give the same signal amplitudes as conventional AlMg laser melt bumps for the same bump height. The present invention provides a solution to switch the calibration bumps from AlMg to glass, and can be used in disk manufacturing lines to save 30% on the cost of hard disks from inaccurate glide certification processes. The solution is to trim or burnish away loose and/or high particles on production disks before the glide tests. This additional processing step causes the responses from the glass bumps to become very similar to those of the AlMg bumps, thereby enabling glass and AlMg disks to become materially compatible.
    • 用于精确滑动校准的凸块具有新型的玻璃激光熔融凸块,其具有与传统的AlMg激光熔融凸块相同的凸起高度的信号幅度。 本发明提供了将校准凸块从AlMg切换到玻璃的解决方案,并且可以用于盘制造线中,以从不准确的滑动认证过程中节省30%的硬盘成本。 解决方案是在滑行测试之前修剪或抛光生产盘上的松散和/或高颗粒。 这种额外的处理步骤使得玻璃凸块的响应变得非常类似于AlMg凸块的响应,从而使玻璃和AlMg磁盘变得与材料相容。