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    • 3. 发明授权
    • Hot electron emission array for e-beam photolithography and display screens
    • 用于电子束光刻和显示屏的热电子发射阵列
    • US06956333B2
    • 2005-10-18
    • US10339119
    • 2003-01-09
    • Harald BruneDetlev Gruetzmacher
    • Harald BruneDetlev Gruetzmacher
    • H01L51/50H01J1/312H01J29/04H01J29/10H01J31/12H01J37/073H01L21/027H01L51/52G09G3/10
    • B82Y10/00H01J1/312H01J31/127H01L51/5203
    • This invention relates to a device for emitting addressable locations comprises parallel spaced-apart first conductors (10) intersecting with parallel spaced-apart second conductors (11). The intersecting first and second conductors define addressable locations where electrons (12) are emitted in response to the application of an energizing voltage. One face of the first conductors is covered with an insulating layer (13) against which the second conductors (11) are applied, this insulating layer (13) forming a tunnel barrier for hot electrons (12) that travel ballistically through and are emitted from the second conductors (11) in response to the application of the energizing voltage. The emitted electrons impinge a target (30, 40, 50) which can be a light-emitting screen of a flat panel display, such as an electroluminescent polymer of a flat panel screen, or an electroluminescent phosphorous screen, or a target wafer bombarded by the electrons emitted from a flexible e-beam lithography mask. The intersecting conductors (10, 11) can be Al wires, or can be produced by C-MOS technology.
    • 本发明涉及一种用于发射可寻址位置的装置,包括与平行间隔开的​​第二导体(11)相交的平行间隔开的​​第一导体(10)。 相交的第一和第二导体限定可响应于施加电压的电子(12)被发射的寻址位置。 第一导体的一个面覆盖有施加第二导体(11)的绝缘层(13),该绝缘层(13)形成用于热电子(12)的隧道势垒,弹性传播通过并从其中发射 所述第二导体(11)响应于施加所述激励电压。 发射的电子撞击可以是平板显示器的发光屏的靶(30,40,50),例如平板屏幕的电致发光聚合物或电致发光磷屏,或由 从柔性电子束光刻掩模发射的电子。 交叉导体(10,11)可以是Al线,或者可以通过C-MOS技术制造。