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    • 7. 发明申请
    • METHOD AND APPARATUS FOR DIELECTROPHORETIC SEPARATION
    • 用于电介质分离的方法和装置
    • US20060260944A1
    • 2006-11-23
    • US11419144
    • 2006-05-18
    • Marc MadouBenjamin ParkAlan Paradiso
    • Marc MadouBenjamin ParkAlan Paradiso
    • B03C5/02
    • B03C5/005B03C5/026
    • A dielectrophoretic separation device includes a chamber including an inlet and an outlet disposed between the inlet and the outlet. A plurality of three dimensional electrodes are disposed in within the chamber. The electrodes may take the form of a wire or semi-cylindrical conductors disposed on a substrate. At least some of the electrodes include smooth surfaces so as to create an electric field (in response to an applied alternating current) that has a low strength in a region disposed away from the electrodes and an electric field having a high fields strength in a region between adjacent electrodes. Particulate matter or other species experiencing a positive DEP force may be separated and collected in the gaps or regions formed between adjacent electrodes.
    • 介电电泳分离装置包括一个室,该室包括设置在入口和出口之间的入口和出口。 多个三维电极设置在腔室内。 电极可以采取布置在基板上的线或半圆柱形导体的形式。 至少一些电极包括光滑的表面,以便在远离电极的区域中产生具有低强度的电场(响应于所施加的交流电),并且在区域中具有高场强的电场 在相邻电极之间。 经历正DEP力的颗粒物质或其他物质可以分离并收集在相邻电极之间形成的间隙或区域中。
    • 9. 发明授权
    • Surface and composition enhancements to high aspect ratio C-MEMS
    • 高纵横比C-MEMS的表面和组成增强
    • US07534470B2
    • 2009-05-19
    • US11090918
    • 2005-03-25
    • Marc J. MadouChunlei WangLili TaherabadiBenjamin ParkRabih Zaouk
    • Marc J. MadouChunlei WangLili TaherabadiBenjamin ParkRabih Zaouk
    • C23C6/00
    • B81C1/00547B81C1/00111B82Y30/00C23C16/04C23C16/26Y10S977/844Y10S977/947
    • C-MEMS architecture having carbon structures with high surface areas due to high aspect ratios and nanoscale surface enhancements, and improved systems and methods for producing such structures are provided. Specifically, high aspect ratio carbon structures are microfabricated by pyrolyzing a patterned carbon precursor polymer. Pyrolysing the polymer preferably comprises a multi-step process in an atmosphere of inert and forming gas at high temperatures that trail the glass transition temperature (Tg) for the polymer. The surface area of the carbon microstructures is increases by nanotexturing the surface through oxygen plasma exposure, and by integrating nanoscale structures with the carbon microstructures by exposing the carbon microstructures and a catalyst to hydrocarbon gas. In a preferred embodiment, the carbon microstructures are the source of carbon gas.
    • 提供了由于高纵横比和纳米级表面增强而具有高表面积的碳结构的C-MEMS架构,以及用于生产这种结构的改进的系统和方法。 具体地说,通过热解图案化的碳前体聚合物,高纵横比的碳结构被微制成。 热解聚合物优选在惰性气氛中在高温下形成气体的多步法,该温度跟踪聚合物的玻璃化转变温度(Tg)。 碳微观结构的表面积通过使氧等离子体暴露的纳米表面增加,并且通过将碳微结构和催化剂暴露于烃气体中而将纳米尺度结构与碳微结构相结合而增加。 在优选的实施方案中,碳微结构是碳气体的来源。