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1. 发明授权

US07592821B2 Apparatus and method for managing thermally induced motion of a probe card assembly 有权
标题翻译：用于管理探针卡组件的热诱导运动的装置和方法
公开(公告)号：US07592821B2
公开(公告)日：2009-09-22
申请号：US11877466
申请日：2007-10-23
申请人： Benjamin N. Eldridge , Gary W. Grube , Eric D. Hobbs , Gaetan L. Mathieu , Makarand S. Shinde , Alexander H. Slocum , A. Nicholas Sporck , Thomas N. Watson
发明人： Benjamin N. Eldridge , Gary W. Grube , Eric D. Hobbs , Gaetan L. Mathieu , Makarand S. Shinde , Alexander H. Slocum , A. Nicholas Sporck , Thomas N. Watson
IPC分类号： G01R31/02
CPC分类号： G01R31/2874 , G01R31/2863 , G01R31/2889 , Y10T29/5313
摘要： A probe card assembly can include a probe head assembly having probes for contacting an electronic device to be tested. The probe head assembly can be electrically connected to a wiring substrate and mechanically attached to a stiffener plate. The wiring substrate can provide electrical connections to a testing apparatus, and the stiffener plate can provide structure for attaching the probe card assembly to the testing apparatus. The stiffener plate can have a greater mechanical strength than the wiring substrate and can be less susceptible to thermally induced movement than the wiring substrate. The wiring substrate may be attached to the stiffener plate at a central location of the wiring substrate. Space may be provided at other locations where the wiring substrate is attached to the stiffener plate so that the wiring substrate can expand and contract with respect to the stiffener plate.
摘要翻译：探针卡组件可以包括具有用于接触要测试的电子设备的探针的探针头组件。探针头组件可以电连接到布线基板并且机械地附接到加强板。布线基板可以提供到测试装置的电连接，并且加强板可以提供用于将探针卡组件附接到测试装置的结构。加强板可以具有比布线基板更大的机械强度，并且可以比布线基板更不易受热引起的移动。布线基板可以在布线基板的中心位置处附接到加强板。可以在将布线基板附接到加强板的其他位置处设置空间，使得布线基板能够相对于加强板膨胀和收缩。

2. 发明申请

US20100000080A1 APPARATUS AND METHOD FOR MANAGING THERMALLY INDUCED MOTION OF A PROBE CARD ASSEMBLY 审中-公开
标题翻译：用于管理探针卡组件的热诱导运动的装置和方法
公开(公告)号：US20100000080A1
公开(公告)日：2010-01-07
申请号：US12477748
申请日：2009-06-03
申请人： Benjamin N. Eldridge , Gary W. Grube , Eric D. Hobbs , Gaetan L. Mathieu , Makarand S. Shinde , Alexander H. Slocum , A. Nicholas Sporck , Thomas N. Watson
发明人： Benjamin N. Eldridge , Gary W. Grube , Eric D. Hobbs , Gaetan L. Mathieu , Makarand S. Shinde , Alexander H. Slocum , A. Nicholas Sporck , Thomas N. Watson
IPC分类号： H05K13/04
CPC分类号： G01R31/2874 , G01R31/2863 , G01R31/2889 , Y10T29/5313
摘要： A probe card assembly can include a probe head assembly having probes for contacting an electronic device to be tested. The probe head assembly can be electrically connected to a wiring substrate and mechanically attached to a stiffener plate. The wiring substrate can provide electrical connections to a testing apparatus, and the stiffener plate can provide structure for attaching the probe card assembly to the testing apparatus. The stiffener plate can have a greater mechanical strength than the wiring substrate and can be less susceptible to thermally induced movement than the wiring substrate. The wiring substrate may be attached to the stiffener plate at a central location of the wiring substrate. Space may be provided at other locations where the wiring substrate is attached to the stiffener plate so that the wiring substrate can expand and contract with respect to the stiffener plate.
摘要翻译：探针卡组件可以包括具有用于接触要测试的电子设备的探针的探针头组件。探针头组件可以电连接到布线基板并且机械地附接到加强板。布线基板可以提供到测试装置的电连接，并且加强板可以提供用于将探针卡组件附接到测试装置的结构。加强板可以具有比布线基板更大的机械强度，并且可以比布线基板更不易受热引起的移动。布线基板可以在布线基板的中心位置处附接到加强板。可以在将布线基板附接到加强板的其他位置处设置空间，使得布线基板能够相对于加强板膨胀和收缩。

3. 发明授权

US07285968B2 Apparatus and method for managing thermally induced motion of a probe card assembly 有权
标题翻译：用于管理探针卡组件的热诱导运动的装置和方法
公开(公告)号：US07285968B2
公开(公告)日：2007-10-23
申请号：US11306515
申请日：2005-12-30
申请人： Benjamin N. Eldridge , Gary W. Grube , Eric D. Hobbs , Gaetan L. Mathieu , Makarand S. Shinde , Alexander H. Slocum , A. Nicholas Sporck , Thomas N. Watson
发明人： Benjamin N. Eldridge , Gary W. Grube , Eric D. Hobbs , Gaetan L. Mathieu , Makarand S. Shinde , Alexander H. Slocum , A. Nicholas Sporck , Thomas N. Watson
IPC分类号： G01R31/02
CPC分类号： G01R31/2874 , G01R31/2863 , G01R31/2889 , Y10T29/5313
摘要： A probe card assembly can include a probe head assembly having probes for contacting an electronic device to be tested. The probe head assembly can be electrically connected to a wiring substrate and mechanically attached to a stiffener plate. The wiring substrate can provide electrical connections to a testing apparatus, and the stiffener plate can provide structure for attaching the probe card assembly to the testing apparatus. The stiffener plate can have a greater mechanical strength than the wiring substrate and can be less susceptible to thermally induced movement than the wiring substrate. The wiring substrate may be attached to the stiffener plate at a central location of the wiring substrate. Space may be provided at other locations where the wiring substrate is attached to the stiffener plate so that the wiring substrate can expand and contract with respect to the stiffener plate.
摘要翻译：探针卡组件可以包括具有用于接触要测试的电子设备的探针的探针头组件。探针头组件可以电连接到布线基板并且机械地附接到加强板。布线基板可以提供到测试装置的电连接，并且加强板可以提供用于将探针卡组件附接到测试装置的结构。加强板可以具有比布线基板更大的机械强度，并且可以比布线基板更不易受热引起的移动。布线基板可以在布线基板的中心位置处附接到加强板。可以在将布线基板附接到加强板的其他位置处设置空间，使得布线基板能够相对于加强板膨胀和收缩。

4. 发明授权

US07239159B2 Method and apparatus for verifying planarity in a probing system 失效
标题翻译：用于验证探测系统中的平面度的方法和装置
公开(公告)号：US07239159B2
公开(公告)日：2007-07-03
申请号：US10906046
申请日：2005-02-01
申请人： Gary W. Grube , Thomas N. Watson
发明人： Gary W. Grube , Thomas N. Watson
IPC分类号： G01R31/02
CPC分类号： G01B7/287 , G01B11/306 , G01R31/2886
摘要： An apparatus for determining a planarity of a first structure configured to hold a probing device to the planarity of a second structure configured to hold a device to be probed is disclosed. In one example of the apparatus, a plurality of moveable push rods are disposed in a substrate, which is attached to the first structure. In initial non-displaced positions, the push rods correspond to a planarity of the first structure. The second structure is then brought into contact with the push rods, displacing the push rods into second positions that correspond to a planarity of the second structure. In another example of the apparatus, beams of light are reflected off of reflectors disposed on the first structure and onto sensors disposed on the second structure. The locations of the reflected beams on the sensors are noted and used to determine the planarity of the first structure with respect to the second structure.
摘要翻译：公开了一种用于确定构造成将探测装置保持为构造成保持要探测的装置的第二结构的平面性的第一结构的平坦度的装置。在该装置的一个示例中，多个可移动推杆设置在附接到第一结构的基板中。在初始非位移位置，推杆对应于第一结构的平面度。然后将第二结构与推杆接触，将推杆移位到与第二结构的平面度对应的第二位置。在该设备的另一示例中，光束从设置在第一结构上的反射器和设置在第二结构上的传感器上反射。注意反射光束在传感器上的位置并用于确定第一结构相对于第二结构的平面度。

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