专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20060038554A1 Electron beam test system stage 审中-公开
标题翻译：电子束测试系统阶段
公开(公告)号：US20060038554A1
公开(公告)日：2006-02-23
申请号：US11190320
申请日：2005-07-27
申请人： Shinichi Kurita , Emanuel Beer , Hung Nguyen , Benjamin Johnston , Fayez Abboud
发明人： Shinichi Kurita , Emanuel Beer , Hung Nguyen , Benjamin Johnston , Fayez Abboud
IPC分类号： G01R31/28
CPC分类号： G01R31/305
摘要： A method and integrated system for electron beam testing a substrate is provided. In one aspect, the integrated system includes an electron beam testing chamber having a substrate table disposed therein. The substrate table is capable of moving a substrate within the testing chamber in both horizontal and vertical directions. The system also includes a load lock chamber disposed adjacent a first side of the testing chamber, and a prober storage assembly disposed beneath the testing chamber. A prober transfer assembly is disposed adjacent a second side of the testing chamber and arranged to transfer one or more probers between the prober storage assembly and the testing chamber. Further, one or more electron beam testing devices are disposed on an upper surface of the testing chamber.
摘要翻译：提供了一种用于电子束测试衬底的方法和集成系统。一方面，集成系统包括电子束测试室，其具有设置在其中的衬底台。衬底台能够在水平和垂直方向上移动测试室内的衬底。该系统还包括邻近测试室的第一侧设置的负载锁定室，以及设置在测试室下方的探测器存储组件。探测器传送组件设置在测试室的第二侧附近，并布置成在探测器存储组件和测试室之间传送一个或多个探测器。此外，一个或多个电子束测试装置设置在测试室的上表面上。

2. 发明申请

US20080111577A1 Integrated Substrate Transfer Module 有权
标题翻译：集成基板传输模块
公开(公告)号：US20080111577A1
公开(公告)日：2008-05-15
申请号：US12016834
申请日：2008-01-18
申请人： Shinichi Kurita , Emanuel Beer , Hung Nguyen , Benjamin Johnston , Fayez Abboud
发明人： Shinichi Kurita , Emanuel Beer , Hung Nguyen , Benjamin Johnston , Fayez Abboud
IPC分类号： G01R31/26
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： A system and method for supporting and transferring a substrate relative to a plurality of testing columns are provided. The system includes a testing table adapted to support and move the substrate relative to the plurality of testing columns. The testing table may include an end effector disposed therein to transfer the substrate relative to an upper surface of the testing table. The method includes transferring the substrate to the testing table and moving the substrate relative to the plurality of testing columns. Signals indicative of electronic device performance are sensed to determine operability of the devices on the substrate.
摘要翻译：提供了一种用于相对于多个测试柱支撑和传送衬底的系统和方法。该系统包括适于相对于多个测试柱支撑和移动衬底的测试台。测试台可以包括设置在其中的端部执行器，以相对于测试台的上表面传送衬底。该方法包括将衬底转移到测试台并相对于多个测试柱移动衬底。感测指示电子设备性能的信号以确定衬底上的器件的可操作性。

3. 发明申请

US20060273815A1 Substrate support with integrated prober drive 审中-公开
标题翻译：基板支持与集成探测器驱动
公开(公告)号：US20060273815A1
公开(公告)日：2006-12-07
申请号：US11298648
申请日：2005-12-08
申请人： Benjamin Johnston , Fayez Abboud , Hung Nguyen
发明人： Benjamin Johnston , Fayez Abboud , Hung Nguyen
IPC分类号： G01R31/26
CPC分类号： G01R31/2893
摘要： A method and apparatus for testing a plurality of electronic devices on a large area substrate is described. The apparatus includes a prober positioning assembly coupled to a substrate support within a testing chamber. The substrate support is a testing table capable of movement in X, Y and Z axes and the prober positioning assembly is capable of movement relative to the testing table. A prober exchanger is positioned adjacent the testing chamber and facilitates prober transfer through cooperative and relative movement with the prober positioning assembly. A load lock chamber having a single transfer door actuator, an atmospheric substrate lift, and a plurality of substrate alignment members is also described.
摘要翻译：描述了用于在大面积基板上测试多个电子装置的方法和装置。该装置包括耦合到测试室内的衬底支撑件的探针定位组件。基板支撑件是能够在X，Y和Z轴上移动的测试台，并且探测器定位组件能够相对于测试台移动。探测器交换器位于测试室附近，并且通过与探测器定位组件的协调和相对运动来促进探测器传送。还描述了具有单个传送门致动器，大气基板升降器和多个基板对准构件的装载锁定室。

4. 发明申请

US20060244467A1 In-line electron beam test system 有权
公开(公告)号：US20060244467A1
公开(公告)日：2006-11-02
申请号：US11375625
申请日：2006-03-14
申请人： Fayez Abboud , Sriram Krishnaswami , Benjamin Johnston , Hung Nguyen , Matthias Brunner , Ralf Schmid , John White , Shinichi Kurita , James Hunter
发明人： Fayez Abboud , Sriram Krishnaswami , Benjamin Johnston , Hung Nguyen , Matthias Brunner , Ralf Schmid , John White , Shinichi Kurita , James Hunter
IPC分类号： G01R31/302
CPC分类号： H01L21/67748 , H01J2237/2811 , H01J2237/2817 , H01L21/67201 , H01L21/67236
摘要： A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.

5. 发明申请

US20050179453A1 Integrated substrate transfer module 有权
标题翻译：集成基板传输模块
公开(公告)号：US20050179453A1
公开(公告)日：2005-08-18
申请号：US11018236
申请日：2004-12-21
申请人： Shinichi Kurita , Emanuel Beer , Hung Nguyen , Benjamin Johnston , Fayez Abboud
发明人： Shinichi Kurita , Emanuel Beer , Hung Nguyen , Benjamin Johnston , Fayez Abboud
IPC分类号： G01R31/302 , G01R31/26 , G01R31/305 , G02F1/13 , G09G3/00 , H01L21/687
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： A substrate table and method for supporting and transferring a substrate are provided. The substrate table includes a segmented stage having an upper surface for supporting a substrate, and an end effector. The end effector includes two or more spaced apart fingers and an upper surface for supporting a substrate. The end effector is at least partially disposed and moveable within the segmented stage such that the fingers of the end effector and the segmented stage interdigitate to occupy the same horizontal plane. The segmented stage is adapted to raise and lower about the end effector.
摘要翻译：提供了用于支撑和转移衬底的衬底台和方法。衬底台包括具有用于支撑衬底的上表面的分段段和端部执行器。末端执行器包括两个或更多间隔开的指状物和用于支撑基底的上表面。末端执行器至少部分地设置并在分段台内移动，使得末端执行器和分段台阶的指状物相互指向以占据相同的水平面。分段段适于围绕末端执行器升高和降低。

6. 发明申请

US20050179452A1 Configurable prober for TFT LCD array test 有权
标题翻译：可配置探针用于TFT LCD阵列测试
公开(公告)号：US20050179452A1
公开(公告)日：2005-08-18
申请号：US10903216
申请日：2004-07-30
申请人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号： G01R31/302 , G01R31/26 , G01R31/305 , G02F1/13 , G09G3/00 , H01L21/687
CPC分类号： G01R1/07364 , G01R31/2893 , G01R31/305 , G09G3/006
摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame. The electrical pins may be movable along the axial length of the prober bars, or may be selectively pushed down to contact selected contact pads on the substrate.
摘要翻译：提供了一种用于电子设备测试系统的改进的探测器。探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。通常，玻璃基板是正方形的，框架也是正方形的。以这种方式，“x”和“y”轴由框架定义。电引脚可以沿着探针杆的轴向长度移动，或者可以选择性地向下推动以接触衬底上的所选择的接触垫。

7. 发明申请

US20070235665A1 Charged particle beam system and method for manufacturing and inspecting LCD devices 审中-公开
标题翻译：带电粒子束系统及液晶显示装置的制造和检验方法
公开(公告)号：US20070235665A1
公开(公告)日：2007-10-11
申请号：US11393290
申请日：2006-03-30
申请人： Bassaam Shamoun , Fayez Abboud
发明人： Bassaam Shamoun , Fayez Abboud
IPC分类号： A61N5/00 , G21K5/10
CPC分类号： H01J37/3177 , B82Y10/00 , B82Y40/00 , G03F7/0007 , G21K5/04 , H01J2237/31774
摘要： A layer on a large area substrate is patterned by providing a large area substrate in the optical path of a plurality of charged particle beams that are emitted from charged particle emitters. Each charged particle beam has an emitted beam current of at least I0, and the beam current on the substrate is at least 0.4 I0. Each charged particle beam is deflected in at least one dimension and is switched on and off to generate an exposed pattern on the photoresist film.
摘要翻译：通过在从带电粒子发射器发射的多个带电粒子束的光路中提供大面积的基板，对大面积基板上的层进行构图。每个带电粒子束具有至少为I O 0的发射束电流，并且衬底上的束电流为至少0.4 I 0 0。每个带电粒子束在至少一个维度上被偏转，并且被打开和关闭以在光致抗蚀剂膜上产生曝光图案。

8. 发明申请

US20060158208A1 Prober tester 审中-公开
标题翻译：探测器
公开(公告)号：US20060158208A1
公开(公告)日：2006-07-20
申请号：US11036754
申请日：2005-01-14
申请人： Fayez Abboud , Paul Bocian , Bassam Shamoun , Janusz Jozwiak
发明人： Fayez Abboud , Paul Bocian , Bassam Shamoun , Janusz Jozwiak
IPC分类号： G01R31/02
CPC分类号： G09G3/006
摘要： A continuity test system adapted for testing individual contact pins within a flat panel test system is disclosed. The method and apparatus is designed to test continuity of individual contact pins via connection of a contact test pad assembly to a plurality of pins within a user defined pin arrangement. The contact test pad assembly has a plurality of contact points mounted thereon adapted to be in communication with individual contact pins within the defined pin arrangement. The system uses a test circuit in communication with the contact test pad assembly that is in communication with a power source and a controller that receives continuity information from the circuit and provides results to a user.
摘要翻译：公开了一种用于测试平板测试系统内的各个接触针的连续性测试系统。该方法和设备旨在通过将接触测试焊盘组件连接到用户定义的引脚布置中的多个引脚来测试各个接触引脚的连续性。接触测试焊盘组件具有安装在其上的多个接触点，其适于与限定的引脚装置内的各个接触销连接。系统使用与与电源通信的接触测试焊盘组件进行通信的测试电路，以及从电路接收连续性信息并向用户提供结果的控制器。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式