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    • 1. 发明申请
    • INTERFEROMETRIC MEASURING DEVICE
    • 干涉测量装置,
    • WO2004065897A3
    • 2004-10-07
    • PCT/DE2004000065
    • 2004-01-20
    • BOSCH GMBH ROBERTLINDNER MICHAELTHOMINET VINCENTSCHMIDTKE BERND
    • LINDNER MICHAELTHOMINET VINCENTSCHMIDTKE BERND
    • G01B9/02G01B11/24G02B26/06G01B9/023G01B11/30
    • G01B9/02065G01B9/02057G01B9/0209G01B11/2441G02B26/06
    • The invention relates to an interferometric measuring device, especially for measuring the form of a surface of an object (O). Said measuring device comprises a radiation source (LQ) emitting short-coherent electromagnetic radiation, a component, especially a beam splitter (ST), for forming an object beam which is guided towards the object (O) via an object light path (OL) and a reference beam which is guided towards a reference plane (R) via a reference light path (RL), and a receiving element (BA) which is used to receive electromagnetic radiation reflected by the object (O) and the reference plane (R) and brought to interference. An adaptive optical element (AOE) is used to influence the imaging of the object (O) onto the receiving element (BA) and/or the wave front of the reference beam and/or the optical path length in the reference light path (RL) and/or the object light path (OL).
    • 它是一种干涉测量装置,尤其是一种物体的表面的形状测定(O)已经提出。 这种具有短相干的电磁辐射发射辐射源(LQ),组件,特别是用于通过物体的光路(OL)形成到所述对象(O)的光束分离器(ST)导致物体光束和一个经由基准光(RL)的参考平面 (R)引导参考光束,和一个接收元件(BA),与所述对象(O)中的所述一个和所述基准平面(R)反射,并带到干扰电磁辐射是应收。 在这种情况下,其中设置在所述对象(O)到所述接收构件的所述图像的自适应光学元件(AOE)由装置(BA)和/或参考光束和/或参考光的光路长度的波阵面(RL)和/或所述 对象光路(OL)可以被影响。
    • 2. 发明申请
    • INTERFEROMETRIC MEASURING DEVICE
    • 干涉测量装置,
    • WO2004109226A3
    • 2005-03-03
    • PCT/DE2004000699
    • 2004-04-03
    • BOSCH GMBH ROBERTLINDNER MICHAEL
    • LINDNER MICHAEL
    • G01B9/02G01B11/24G01B11/30
    • G01B9/02039G01B9/02057G01B9/0209G01B11/2441G01B11/303
    • The invention relates to an interferometric measuring device for measuring the contours of the surface of an object (O) by means of depth scanning. Said device comprises a radiation source (LQ) that emits radiation of a short coherence length, a beam splitter (ST) for forming an object beam (OS) that is directed towards the object (O) via an object optical path by means of a panoramic lens (RSO) and a reference beam (RS) that is directed towards a reflective reference element (R) via a reference optical path and a camera (BA), which captures the radiation that is reflected by the object (O) and the reference element (R) and that has been subject to interference and feeds said radiation to an evaluation device for determining the surface contours. To enable a cost-effective, completely precise, rapid and stable measurement of surfaces, in particular in narrow cavities, a reference surface (RE) that is oblique in relation to the object surface is formed by means of the reference element (R) and the device is configured in such a way that the depth scanning operation for measuring the contours is carried out by the lateral displacement of the object (O) in relation to the object beam (OS).
    • 本发明涉及用于物体(O)通过与短相干辐射发射辐射源(LQ),用于经由物体的光路与全景光学器件(RSO)到物体上形成一个光束分离器(ST)深度扫描的装置的表面的形状测定的干涉测量装置 (O)导致物体光束(OS)和在参考光路的反射基准部件(R)引导参考光束(RS)和具有图像传感器(BA),其反射通过所述对象(O)和所述基准部件(R)和 接收干扰带来的辐射并将其馈送到一个评估装置,用于确定表面形状。 表面的完整准确,快速,健壮的测量,特别是也与由基准元件(R)的装置中,这使得可以相对较少的努力窄腔具有形成倾斜取向基准面(RE)一个相对于物体表面上,并且所形成的器件 ,(O)是通过相对于所述物体光束(OS)的物体的横向运动的装置的深度扫描形状测量进行。
    • 8. 发明专利
    • DE502004010008D1
    • 2009-10-15
    • DE502004010008
    • 2004-06-19
    • BOSCH GMBH ROBERT
    • LINDNER MICHAELSCHMIDTKE BERND
    • G01B11/24G01B9/02G01B11/02G01B11/30G02B23/24
    • An optical measuring system for detecting geometric data of surfaces of at least one object is described, comprising a beam delivery section, a probe system which is connected to the latter and has a plurality of probe outputs for output of a particular measuring beam to an assigned particular surface location and recording the light reflected back by the surface, and having a downstream analyzer unit for determining the geometric data on the basis of light reflected back by the surface locations. A very accurate and mechanically robust determination of surface geometric data, e.g., diameter and roundness of a bore, is achieved by designing the probe system having the probe outputs in such a manner that the relative position of the probe system having the probe outputs positioned in fixed relationship to one another is also determinable in relation to the object(s) at least with regard to several relevant degrees of freedom, in addition to and simultaneously with the determination of the geometric data of the surface(s).