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    • 2. 发明申请
    • SUBSTRATE-TRANSPORTING MODULE, LOADING AND UNLOADING SYSTEM, AND METHOD FOR TRANSPORTING SUBSTRATES IN A SUBSTRATE-PROCESSING INSTALLATION
    • 基板输送模块中,在基板处理植物基底装卸及运输程序
    • WO2012153232A3
    • 2013-01-03
    • PCT/IB2012052184
    • 2012-05-02
    • ROTH & RAU AGMAI JOACHIMBALLMANN MARKUSMUELLER DANNYSCHULZE THOMASLIPPOLD PATRICK
    • MAI JOACHIMBALLMANN MARKUSMUELLER DANNYSCHULZE THOMASLIPPOLD PATRICK
    • H01L21/677H01L21/673H01L21/687
    • H01L21/67754H01L21/6734H01L21/67748H01L21/68771
    • The present invention relates to a substrate-transporting module of a substrate-processing installation, wherein the substrate-transporting module has a carrying device in the form of a carrying panel and/or of a carrying frame and is designed for horizontally accommodating, and horizontally transporting, at least one planar substrate or at least one planar substrate-transporting means. The invention also relates to a loading and unloading system of a substrate-processing installation having such a substrate-transporting module. In addition, the present invention relates to a method for transporting at least one planar substrate, or at least one planar substrate-transporting means, in a substrate-processing installation having at least one substrate-transporting module which has a carrying device in the form of a carrying panel and/or of a carrying frame. The problem of the present invention is that of making available a substrate-transporting module, a loading and unloading system, and a method for transporting substrates in a substrate-processing installation, which make it possible to avoid contamination from one section to the next of a continuous substrate-processing installation and which allow a substrate-processing installation to be operated more effectively. The intention here is for the substrate-transporting module and the corresponding loading and unloading system to be capable of being designed in as cost-effective a manner as possible. This problem is solved, in the first instance, by a substrate-transporting module of a substrate-processing installation of the type in question above, wherein, from the carrying device, carrying elements with horizontally oriented bearing sections, which form a bearing means for the at least one planar substrate or the at least one planar substrate-transporting means, extend into a region beneath the carrying device, and wherein the carrying device can be coupled to a transporting system for transporting the substrate-transporting module in the substrate-processing installation. The problem is solved, in addition, by a loading and unloading system which utilizes the substrate-transporting module according to the invention and by a corresponding method.
    • 本发明涉及处理植物,Substratbe¬的衬底传输模块,其特征在于,具有在一支承板和/或支撑框架形式的支承装置,并适于水平记录,和至少一个平的基底的一个水平运输或至少一个平的基底传输对象的基板传送模块。 本发明还涉及一种具有这样的基板传输模块的基板处理系统的装载和卸载。 此外,本发明涉及在具有至少一个基片传输模块,其包括在一支承板和/或支撑框架的形式的支撑装置的基板处理系统输送至少一种片状基材或至少一个平的基底的传输对象的方法。 本发明的目的是提供一种基板传输模块,装载和卸载系统和基板的基板处理系统中的运输提供,这使得有可能避免在连续的衬底处理系统的下一个抵接部的抵接部的污染的方法和 使得可以以操作的基板处理系统更加有效。 其目的是在基片传输模块,并且可以尽可能地廉价地形成相应的装载和卸载系统。 该目的是通过上述类型的基板处理系统的基板输送模块,解决了一方面,其中所述支撑装置支撑与水平对准轴承部延伸,用于所述至少一个平坦的基板支撑件或形成至少一个平面衬底运输目的,在支撑装置下方的区域的元件 并且其中,与用于衬底传输模块在基板处理系统中的传输的传输系统中的支撑装置可耦合。 该目的是通过本发明使用的装载和卸载系统和相应的方法的基板传送模块进一步实现。