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    • 4. 发明专利
    • PRESSURE SENSOR DEVICE
    • JP2000111431A
    • 2000-04-21
    • JP27509899
    • 1999-09-28
    • BOSCH GMBH ROBERT
    • WEIBLEN KURTBERNHARD ZAPELJOERG HAUERTRAH HANS-PETER
    • G01L7/08G01L9/00G01L9/04
    • PROBLEM TO BE SOLVED: To prevent disadvantageous effect from being given to a signal due to various different thermal inflation since a diaphragm and a deformable member are optimally matched in terms of structure. SOLUTION: In a pressure sensor device, a diaphragm 1 and a member that is deformed by the displacement of the diaphragm 1 are provided, the member 2 is connected to the diaphragm via a first connection member 101 and to a frame 3 via a second connection member 102, a deformation-measuring device 11 for detecting the deformation of the deformable member 2 is provided, and the first connection member 101 does not move in a first direction (z) and is flexible in a second direction (y), and the second connection member 102 does not move in the first direction (z) and in the second direction (y). In the pressure sensor device, the first connection member 101 and the second connection member 102 are made of first and second support profiles being made of materials with the same thermal inflation and extremely larger height and width than the thickness, and the support profiles are flexible only in each thickness direction.
    • 7. 发明专利
    • METHOD FOR MANUFACTURING PRESSURE SENSOR
    • JP2001033337A
    • 2001-02-09
    • JP2000188226
    • 2000-06-22
    • BOSCH GMBH ROBERT
    • WEIBLEN KURTDOERING ANTONNIEDER JUERGENHAAG FRIEDER
    • G01L19/14B81B7/00G01L9/00G01L9/04H01L29/84
    • PROBLEM TO BE SOLVED: To prevent a gap between a mold part and an assembly section from being formed by clamping the assembly section having a region being extended from the fitting surface of a semiconductor pressure pickup to the outside of a side part inside an injection mold. SOLUTION: A conductor frame with a semiconductor pressure pickup is inserted into an injection molding mold 40 that is composed of an upper part 41 and a lower part 42. A projection region 13 of an assembly section 12 of the conductor frame is clamped between an upper part 41 and a lower part 42 of the injection molding mold, thus the position detector of the assembly section 12 in the molding mold 40 is fixed. The lower part 42 of the mold in contact with a lower surface 15 of the assembly section 1 covers also a pressure passage 27. Then, the semiconductor pressure pickup is buried into a casing 30 made of a forming material by an injection molding method such as a force feeding forming. In this method, the forming material is liquefied in an injection mold chamber and then is forced into a mold closed under pressure to be cured in the mold. Then, the mold part is eliminated from the pressure sensor.