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    • 6. 发明授权
    • Rapid thermal processing lamphead with improved cooling
    • 快速热处理灯头具有改进的冷却
    • US08294068B2
    • 2012-10-23
    • US12207711
    • 2008-09-10
    • Joseph M. RanishKhurshed SorabjiKedarnath SangamAlexander Lerner
    • Joseph M. RanishKhurshed SorabjiKedarnath SangamAlexander Lerner
    • A21B1/22F26B19/00
    • F27B17/0025F27D5/0037F27D21/0014H01L21/67109H01L21/67115
    • Embodiments of a lamphead and apparatus utilizing same are provided herein. In some embodiments, a lamphead for use in thermal processing may include a monolithic member having a plurality of coolant passages and a plurality of lamp passages and reflector cavities, wherein each lamp passage is configured to accommodate a lamp and each reflector cavity is shaped to act as a reflector or to receive a replaceable reflector for the lamp, and wherein the plurality of coolant passages are disposed proximate to the plurality of lamp passages; and at least one heat transfer member extending from the monolithic member into each coolant passage. In some embodiments, the lamphead may be disposed in an apparatus comprising a process chamber having a substrate support, wherein the lamphead is positioned to provide energy to the substrate support.
    • 本发明提供了一种灯头及其使用装置的实施例。 在一些实施例中,用于热处理的灯头可以包括具有多个冷却剂通道和多个灯通道和反射器腔的整体构件,其中每个灯通道被配置成容纳灯,并且每个反射器空腔成形为能够起作用 作为反射器或接收用于灯的可更换反射器,并且其中所述多个冷却剂通道设置成靠近所述多个灯通道; 以及至少一个传热构件,其从所述整体构件延伸到每个冷却剂通道中。 在一些实施例中,灯头可以设置在包括具有基板支撑件的处理室的设备中,其中灯头被定位成向基板支撑件提供能量。