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    • 10. 发明申请
    • VERTICALLY TRANSLATABLE CHUCK ASSEMBLY AND METHOD FOR A PLASMA REACTOR SYSTEM
    • 用于等离子体反应器系统的垂直可翻转组件和方法
    • WO02059933A3
    • 2002-10-10
    • PCT/US0148851
    • 2001-12-20
    • TOKYO ELECTRON LTDJOHNSON WAYNE LFINK STEVEN TBROWNING JEFFJEVTIC JOVAN
    • JOHNSON WAYNE LFINK STEVEN TBROWNING JEFFJEVTIC JOVAN
    • H01J37/32H01L21/00
    • H01L21/67069H01J37/32082H01J37/32174
    • A chuck assembly (110) for supporting a workpiece (116) within a plasma reactor chamber (60) having sidewalls (64) surrounding an interior region (65) capable of supporting a plasma. The assembly includes a chuck base (130) and a plurality of support arms (150A-150C) extending outwardly from the chuck base perimeter to the chamber sidewalls. The support arms are adapted to support the chuck base within the interior region, while also being adapted to provide a path for mechanically, electrically, pneumatically and/or fluidly communicating with the chuck assembly from outside the chamber. The chuck assembly includes a workpiece support member (160) arranged above the chuck base, capable of supporting the workpiece and serving as a chuck electrode. The workpiece support member is supported by one or more vertical translation member (168) arranged between and operatively connected to the chuck base and the workpiece support member. The chuck assembly includes a match network (180MN), wherein at least a portion of the match network is mounted directly to the workpiece support member. The use of the support arms allows for the positioning of a vacuum pump system (250) directly beneath the chuck assembly.
    • 一种用于在具有围绕能够支撑等离子体的内部区域(65)的侧壁(64)的等离子体反应器室(60)内支撑工件(116)的卡盘组件(110)。 组件包括卡盘基座(130)和从卡盘基部周边向外延伸到腔室侧壁的多个支撑臂(150A-150C)。 所述支撑臂适于在所述内部区域内支撑所述卡盘基座,同时还适于提供用于从所述腔室外部与所述卡盘组件机械,电气,气动和/或流体连通的路径。 卡盘组件包括布置在卡盘基座上方的能够支撑工件并用作卡盘电极的工件支撑构件(160)。 工件支撑构件由一个或多个垂直平移构件(168)支撑,该垂直平移构件布置在卡盘基座和工件支撑构件之间并且可操作地连接到卡盘基座和工件支撑构件上。 卡盘组件包括匹配网络(180MN),其中匹配网络的至少一部分直接安装到工件支撑构件。 支撑臂的使用允许将真空泵系统(250)直接定位在卡盘组件的正下方。