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1. 发明申请

WO2004081495A3 MICROMACHINED VIBRATORY GYROSCOPE WITH ELECTROSTATIC COUPLING 审中-公开
标题翻译：具有静电耦合的微型振动陀螺仪
公开(公告)号：WO2004081495A3
公开(公告)日：2005-04-21
申请号：PCT/US2004006453
申请日：2004-03-03
申请人： BEI TECHNOLOGIES INC , CONTI TEMIC MICROELECTRONIC , CONTINENTAL TEVES AG & CO OHG , YAN HAI , BURGHARDT ROLAND , HARTMANN BERNHARD , KAPSER KONRAD , ROSE MATTHIAS
发明人： YAN HAI , BURGHARDT ROLAND , HARTMANN BERNHARD , KAPSER KONRAD , ROSE MATTHIAS
IPC分类号： G01C19/5712 , G01C19/56
CPC分类号： G01C19/5719 , Y10T74/1275
摘要： Micromachined vibratory gyroscope having two or more coplanar movable masses suspended over a planar substrate. Two perpendicular axes (x and y) are defined within the substrate plane, while a third, the z-axis or input axis, is defined to be perpendicular to the substrate plane. The movements of the two masses along the x-axis are coupled through an electrostatic coupling means so that the natural resonant frequency of the in-phase mode and that of the anti-phase mode are separated from each other for the resonances along the x-axis. When the two masses are driven to vibrate along the x-axis in the anti-phase mode and the device experiences rotation about the z-axis, Coriolis forces act differentially on the masses in the Ydirection, causing the two masses to dither in an anti-phase motion along the y-axis. The anti-phase dithering along the y-axis can be sensed directly by a rate sensor to measure the rate of rotation about the z-axis. Alternatively, the anti-phase dithering of the first and second bodies along the y-axis can be transferred to other movable bodies (i.e., rate-sensing masses) whose movement is then sensed to measure the rate of rotation about the z-axis. The sensing bodies are preferably suspended in such manner that, in the absence of Coriolis forces, the x-axis motion of the vibrating masses does not affect the sensing bodies. That inhibits motion of the sensing bodies in response to linear acceleration within the plane of the substrate, but permits those bodies to respond readily to the Corollas-induced motion about an axis perpendicular to the substrate plane.
摘要翻译：微机械振动陀螺仪具有悬挂在平面基板上的两个或更多个共面可移动质量块。两个垂直轴（x和y）被限定在衬底平面内，而第三个z轴或输入轴被定义为垂直于衬底平面。沿着x轴的两个质量块的移动通过静电耦合装置耦合，使得同相模式和反相模式的固有谐振频率彼此分离，用于沿x轴的谐振，轴。当两个质量被驱动以反相模式沿着x轴振动并且该装置经历围绕z轴的旋转时，科里奥利力在Y方向上的质量作用差异地导致两个质量在反向沿y轴的相位运动。可以通过速率传感器直接感测沿y轴的反相抖动，以测量围绕z轴的旋转速率。或者，沿着y轴的第一和第二主体的相位抖动可以传递到其它可移动体（即，速率感测质量），其移动然后被感测以测量围绕z轴的旋转速率。感测体优选地以这样的方式悬挂，即在没有科里奥利力的情况下，振动块的x轴运动不影响感测体。这可以抑制感测体响应于衬底平面内的线性加速度的运动，但是允许这些物体容易地响应于围绕垂直于衬底平面的轴的花冠诱发的运动。

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