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1. 发明授权

US06461528B1 Method of fabricating lateral nanopores, directed pore growth and pore interconnects and filter devices using the same 失效
标题翻译：制造侧向纳米孔的方法，定向孔生长和孔互连以及使用其的过滤装置
公开(公告)号：US06461528B1
公开(公告)日：2002-10-08
申请号：US09699114
申请日：2000-10-27
申请人： Axel Scherer , Theodore Doll , Thomas Hoffman
发明人： Axel Scherer , Theodore Doll , Thomas Hoffman
IPC分类号： B31D300
CPC分类号： B01L3/5082 , B01J2219/00317 , B01J2219/00783 , B01J2219/00844 , B01J2219/00907 , B01L2200/12 , B82Y15/00 , C40B60/14 , G01Q80/00
摘要： Lateral pores in a thin metal film as well as fabricating branching and expanding ore arrays can be fabricated by a method of growing long pores laterally underneath a ask by use of stress compliant masks or varying the anodization voltage. Applications range from use with scanning electron microscope (SEM-compatible single molecule probe stations), to nanowire fixtures and to the use with a “pixelating, nonscanning” near field optical microscope (NOM). Pores are defined by conventional anodization vertically into the underlying membrane of preporous material through any overlying masking layers. The general solution is to utilize mechanically stable masks that withstand the stress during anodization and counteract the pore formation stress to lead to good pore ordering and directed growth. Multilayer masks are well suited for this. With a composition of materials having different elastic properties, tensile stress can be matched to counteract compressive stress caused by porous material growth. The boundary stress problem between preporous and porous material is solved by using a planarizing mask material that provides locally increased masking layer thickness at the critical boundary between nonporous and porous material in the film.
摘要翻译：薄金属膜中的侧向孔以及制造分支和扩展的矿石阵列可以通过使用应力柔顺掩模或改变阳极氧化电压在问题下横向生长长孔的方法来制造。应用范围从使用扫描电子显微镜（SEM兼容单分子探针站）到纳米线夹具以及使用“像素化，非选择”近场光学显微镜（NOM）。通过常规的阳极氧化，通过任何叠加的掩蔽层将孔定义为预浸材料的下面的膜。一般的解决方案是利用在阳极氧化过程中承受应力的机械稳定的掩模，并抵消孔隙形成应力以导致良好的孔排序和定向生长。多层面罩非常适合这一点。通过具有不同弹性特性的材料组成，拉伸应力可以匹配以抵消由多孔材料生长引起的压缩应力。通过使用在膜中无孔和多孔材料的临界边界处提供局部增加的掩蔽层厚度的平面化掩模材料来解决预型和多孔材料之间的边界应力问题。

2. 发明授权

US06952055B2 Intermediate structures in porous substrates in which electrical and optical microdevices are fabricated and intermediate structures formed by the same 失效
标题翻译：在其中制造电和光学微器件的多孔基底中的中间结构和由其形成的中间结构
公开(公告)号：US06952055B2
公开(公告)日：2005-10-04
申请号：US09947089
申请日：2001-08-31
申请人： Axel Scherer , Theodore Doll , Victor Fuenzalida
发明人： Axel Scherer , Theodore Doll , Victor Fuenzalida
IPC分类号： G02B6/122 , H01F41/04 , H01G9/04 , H01G9/055 , H01L21/033 , H01L23/522 , H01L23/58 , H01I21/76
CPC分类号： H01G9/055 , B82Y20/00 , G02B6/1225 , H01F41/043 , H01L21/0334 , H01L23/5223 , H01L23/5227 , H01L2924/0002 , Y10S438/96 , H01L2924/00
摘要： The invention is a method of fabricating electrically passive components or optical elements on top or underneath of an integrated circuit by using a porous substrate that is locally filled with electrically conducting, light emitting, insulating or optically diffracting materials. The invention is directed to a method of fabricating electrically passive components like inductors, capacitors, interconnects and resistors or optical elements like light emitters, waveguides, optical switches of filters on top or underneath of an integrated circuit by using porous material layer that is locally filled with electrically conducting, light emitting, insulating or optically diffracting materials. In the illustrated embodiment the fabrication of voluminous, solenoid-type inductive elements in a porous insulating material by standard back- and front-side-lithography and contacting these two layers by electroplating micro-vias through the pores is described. By using a very dense interconnect spacing, an inter-pore capacitor structure is obtained between the metalized pores and the pore walls utilized as insulators.
摘要翻译：本发明是通过使用局部填充有导电，发光，绝缘或光学衍射材料的多孔基底来在集成电路的顶部或底部制造无源部件或光学元件的方法。本发明涉及一种通过使用局部填充的多孔材料层来制造诸如电感器，电容器，互连和电阻器的电学无源元件的方法，如光发射器，波导，集成电路顶部或下方的滤波器的光学开关具有导电，发光，绝缘或光学衍射材料。在所示实施例中，描述了通过标准的背面和正面光刻在多孔绝缘材料中制造大量的螺线管型感应元件，并通过使微孔电穿孔而接触这两层。通过使用非常密集的互连间距，在金属化孔和用作绝缘体的孔壁之间获得孔间电容器结构。

3. 发明授权

US06613241B1 MEMS elements with integrated porous membranes and method of making the same 有权
标题翻译：集成多孔膜的MEMS元件及其制造方法
公开(公告)号：US06613241B1
公开(公告)日：2003-09-02
申请号：US09699116
申请日：2000-10-27
申请人： Axel Scherer , Theodore Doll , Michael Hochberg
发明人： Axel Scherer , Theodore Doll , Michael Hochberg
IPC分类号： B44C122
CPC分类号： B01D67/0086 , B01D67/0065 , B01D71/025 , B81B2201/10 , B81C1/00158 , B81C2201/0109 , B81C2201/053 , B81C2203/032 , C25D11/045 , Y10T428/24331 , Y10T428/24926
摘要： The invention is a method of introducing porous membranes into MEMS elements by supporting the membranes by frames to form an heterostructure. This is achieved by attaching to a structured or porous substrate one or more monolithically fabricated frames and membranes. Having membranes disposed on frames enables them to be batch processed and facilitates separation, handling and mounting within MEMS or nanofluidic systems. Applications include, but are not limited to, filters for gases or liquids, electron transmissive windows and scanning electron microscopy (SEM) accessible arrays of nanotest tubes containing liquid phases and other sample states. The invention includes the apparatus made by the method.
摘要翻译：本发明是通过框架支撑膜以形成异质结构而将多孔膜引入MEMS元件的方法。这通过将一个或多个整体制造的框架和膜附接到结构化或多孔基底来实现。将膜放置在框架上使得它们能够被批量处理，并且有助于在MEMS或纳米流体系统中的分离，处理和安装。应用包括但不限于用于气体或液体的过滤器，电子透射窗和扫描电子显微镜（SEM）可访问的纳米级管，其包含液相和其他样品状态的阵列。本发明包括通过该方法制造的装置。

4. 发明授权

US06350623B1 Method of forming intermediate structures in porous substrates in which electrical and optical microdevices are fabricated and intermediate structures formed by the same 失效
标题翻译：在其中制造电和光学微器件的多孔基板中形成中间结构的方法和由其形成的中间结构
公开(公告)号：US06350623B1
公开(公告)日：2002-02-26
申请号：US09699221
申请日：2000-10-27
申请人： Axel Scherer , Theodore Doll , V. Fuenzalida
发明人： Axel Scherer , Theodore Doll , V. Fuenzalida
IPC分类号： H01L2100
CPC分类号： H01G9/055 , B82Y20/00 , G02B6/1225 , H01F41/043 , H01L21/0334 , H01L23/5223 , H01L23/5227 , H01L2924/0002 , Y10S438/96 , H01L2924/00
摘要： The invention is a method of fabricating electrically passive components or optical elements on top or underneath of an integrated circuit by using a porous substrate that is locally filled with electrically conducting, light emitting, insulating or optically diffracting materials. The invention is directed to a method of fabricating electrically passive components like inductors, capacitors, interconnects and resistors or optical elements like light emitters, waveguides, optical switches of filters on top or underneath of an integrated circuit by using porous material layer that is locally filled with electrically conducting, light emitting, insulating or optically diffracting materials. In the illustrated embodiment the fabrication of voluminous, solenoid-type inductive elements in a porous insulating material by standard back- and front-side-lithography and contacting these two layers by electroplating micro-vias through the pores is described. By using a very dense interconnect spacing, an inter-pore capacitor structure is obtained between the metalized pores and the pore walls utilized as insulators.
摘要翻译：本发明是通过使用局部填充有导电，发光，绝缘或光学衍射材料的多孔基底来在集成电路的顶部或底部制造无源部件或光学元件的方法。本发明涉及一种通过使用局部填充的多孔材料层来制造诸如电感器，电容器，互连和电阻器的电学无源部件的方法，如光发射器，波导，集成电路的顶部或下方的滤波器的光学开关具有导电，发光，绝缘或光学衍射材料。在所示实施例中，描述了通过标准的背面和正面光刻在多孔绝缘材料中制造大量的螺线管型感应元件，并通过使微孔电穿孔而接触这两层。通过使用非常密集的互连间距，在金属化孔和用作绝缘体的孔壁之间获得孔间电容器结构。

5. 发明授权

US09316586B2 Apparatus for thermal cycling 有权
标题翻译：热循环装置
公开(公告)号：US09316586B2
公开(公告)日：2016-04-19
申请号：US13417121
申请日：2012-03-09
申请人： George Maltezos , Matthew Johnston , David Goodwin , Axel Scherer , Christopher I. Walker
发明人： George Maltezos , Matthew Johnston , David Goodwin , Axel Scherer , Christopher I. Walker
IPC分类号： G01N21/64 , B01L7/00 , B01L3/00
CPC分类号： G01N21/645 , B01L3/50851 , B01L3/50853 , B01L7/52 , B01L7/54 , B01L2200/147 , B01L2300/0829 , B01L2300/0838 , B01L2300/12 , B01L2300/168 , B01L2300/1822 , B01L2300/1827 , B01L2300/185 , B01L2300/1861
摘要： This invention provides a system for performing PCR, and real time PCR in particular, with great speed and specificity. The system employs a heat block containing a liquid composition to rapidly transfer heat to and from reaction vessels. The system makes use of the reflective properties of the liquid metal to reflect signal from the PCR into the vessel and out the top. In this way, the signal can be measured by an optical assembly in real time without removing the vessels from the heat block.
摘要翻译：本发明提供了一种用于特别快速和特异性地进行PCR和实时PCR的系统。该系统采用含有液体组合物的热块来快速地将热量传递到反应容器和从其返回。该系统利用液态金属的反射特性，将来自PCR的信号反射入容器并排出顶部。以这种方式，可以通过光学组件实时地测量信号，而不从容器中取出容器。

6. 发明授权

US09005987B2 Methods for quantitative target detection and related devices and systems 有权
标题翻译：定量目标检测方法及相关设备及系统
公开(公告)号：US09005987B2
公开(公告)日：2015-04-14
申请号：US12761299
申请日：2010-04-15
申请人： Emil P. Kartalov , Axel Scherer , Clive R. Taylor
发明人： Emil P. Kartalov , Axel Scherer , Clive R. Taylor
IPC分类号： G01N27/22 , B01L3/00 , G01N27/00
CPC分类号： B01L3/502753 , B01L2200/0647 , B01L2300/0645 , B01L2300/0816 , B01L2300/0864
摘要： Described herein are methods for quantitative target detection in a sample through use of microbeads and related devices and systems.
摘要翻译：本文描述了通过使用微珠和相关装置和系统在样品中进行定量目标检测的方法。

7. 发明授权

US08670471B2 Photonic crystal cavities and related devices and methods 有权
标题翻译：光子晶体腔及相关器件及方法
公开(公告)号：US08670471B2
公开(公告)日：2014-03-11
申请号：US12711111
申请日：2010-02-23
申请人： Seheon Kim , Axel Scherer
发明人： Seheon Kim , Axel Scherer
IPC分类号： H01S3/10
CPC分类号： H01S5/183 , B82Y20/00 , H01L31/0352 , H01L31/035281 , H01L33/0045 , H01L2933/0083 , H01S5/041 , H01S5/105 , H01S5/18319 , H01S5/18327 , H01S5/18352 , H01S5/34 , H01S5/3412 , Y02E10/50
摘要： Photonic crystal cavities and related devices and methods are described. The described cavities can be used as lasers, photovoltaic sources, and single photon sources. The cavities can be both optically and electrically pumped. A fabrication process of the cavities is also described.
摘要翻译：描述了光子晶体腔及相关装置和方法。所描述的空腔可以用作激光器，光电源和单个光子源。空腔可以光学和电气泵送。还描述了空腔的制造工艺。

8. 发明授权

US08535512B2 Devices and methods for sequencing nucleic acids 有权
标题翻译：用于核酸测序的装置和方法
公开(公告)号：US08535512B2
公开(公告)日：2013-09-17
申请号：US13248994
申请日：2011-09-29
申请人： Sameer Walavalkar , Axel Scherer , Thomas A. Tombrello , Aditya Rajagopal , Andrew P. Homyk , Erika Garcia
发明人： Sameer Walavalkar , Axel Scherer , Thomas A. Tombrello , Aditya Rajagopal , Andrew P. Homyk , Erika Garcia
IPC分类号： H01L21/44 , G01N27/26
CPC分类号： G01N27/447 , B82Y30/00 , C12Q1/6869 , G01N33/48721 , C12Q2563/116 , C12Q2565/631
摘要： Methods and devices for sequencing nucleic acids are disclosed herein. Devices are also provided herein for measuring DNA with nano-pores sized to allow DNA to pass through the nano-pore. The capacitance can be measured for the DNA molecule passing through the nano-pore. The capacitance measurements can be correlated to determine the sequence of base pairs passing through the nano-pore to sequence the DNA.
摘要翻译：本文公开了用于测序核酸的方法和装置。本文还提供了用于测量具有大小允许DNA穿过纳米孔的纳米孔的DNA的装置。可以测量通过纳米孔的DNA分子的电容。电容测量可以相关，以确定通过纳米孔的碱基对序列来对DNA进行排序。

9. 发明授权

US08220487B2 Microfabricated elastomeric valve and pump systems 有权
标题翻译：微型弹性阀和泵系统
公开(公告)号：US08220487B2
公开(公告)日：2012-07-17
申请号：US11933998
申请日：2007-11-01
申请人： Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
发明人： Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
IPC分类号： F16K1/20
CPC分类号： F15C1/06 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L2300/0861 , B01L2300/0887 , B01L2400/046 , B01L2400/0481 , B01L2400/0655 , C12Q1/6874 , F04B43/043 , F16K1/20 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0048 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0078 , F16K2099/008 , F16K2099/0094 , Y10T137/2224 , Y10T137/87981 , C12Q2535/125
摘要： A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
摘要翻译：一种制造弹性体结构的方法，包括：在第一微加工模具的顶部上形成第一弹性体层，所述第一微加工模具具有形成沿所述第一弹性体层的底表面延伸的第一凹槽的第一凸起突起; 在第二微加工模具的顶部上形成第二弹性体层，所述第二微加工模具具有第二凸起突起，所述第二凸起突起形成沿所述第二弹性体层的底表面延伸的第二凹槽; 将第二弹性体层的底表面粘合到第一弹性体层的顶表面上，使得控制通道在第一和第二弹性体层之间的第二凹部中形成; 以及将第一弹性体层定位在平面基底的顶部上，使得流动通道在第一弹性体层和平面基底之间的第一凹部中形成。

10. 发明申请

US20120091374A1 MICROFABRICATED ELASTOMERIC VALVE AND PUMP SYSTEMS 有权
标题翻译：微型弹药阀和泵系统
公开(公告)号：US20120091374A1
公开(公告)日：2012-04-19
申请号：US13278061
申请日：2011-10-20
申请人： Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
发明人： Marc A. Unger , Hou-Pu Chou , Todd A. Thorsen , Axel Scherer , Stephen R. Quake
IPC分类号： F16K31/12
CPC分类号： B32B3/00 , B01J2219/00355 , B01J2219/00378 , B01J2219/00396 , B01J2219/00398 , B01J2219/00439 , B01J2219/005 , B01J2219/00527 , B01J2219/00605 , B01J2219/00612 , B01J2219/00659 , B01J2219/00707 , B01J2219/00722 , B01J2219/00725 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L7/54 , B01L9/527 , B01L2200/025 , B01L2200/027 , B01L2200/0605 , B01L2200/10 , B01L2300/0681 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2300/14 , B01L2300/18 , B01L2400/046 , B01L2400/0481 , B01L2400/0655 , B01L2400/0688 , B32B2037/1081 , B81B3/0032 , B81B3/0051 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , C12Q1/6874 , F04B43/043 , F15C5/00 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0094 , Y10T137/0491 , Y10T137/2224 , Y10T137/87716 , Y10T137/87804 , Y10T137/87812 , Y10T137/87893 , Y10T156/10 , Y10T156/1002 , Y10T156/1064 , Y10T428/24479 , Y10T428/2457 , Y10T428/24612 , Y10T428/24744 , C12Q2535/125
摘要： A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
摘要翻译：一种制造弹性体结构的方法，包括：在第一微加工模具的顶部上形成第一弹性体层，所述第一微加工模具具有形成沿所述第一弹性体层的底表面延伸的第一凹槽的第一凸起突起; 在第二微加工模具的顶部上形成第二弹性体层，所述第二微加工模具具有第二凸起突起，所述第二凸起突起形成沿所述第二弹性体层的底表面延伸的第二凹槽; 将第二弹性体层的底表面粘合到第一弹性体层的顶表面上，使得控制通道在第一和第二弹性体层之间的第二凹部中形成; 以及将第一弹性体层定位在平面基底的顶部上，使得流动通道在第一弹性体层和平面基底之间的第一凹部中形成。

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