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    • 5. 发明授权
    • Manufacturing method for epitaxial wafer
    • 外延晶圆的制造方法
    • US07960254B2
    • 2011-06-14
    • US12645744
    • 2009-12-23
    • Naoyuki WadaMakoto Takemura
    • Naoyuki WadaMakoto Takemura
    • H01L21/20C23C16/00
    • H01L21/68742C23C16/4411C23C16/481C23C24/082H01L21/02532H01L21/02579
    • To provide a manufacturing method for an epitaxial wafer that alleviates distortions on a back surface thereof due to sticking between a wafer and a susceptor, thereby preventing decrease in flatness thereof due to a lift pin. A manufacturing method for an epitaxial wafer according to the present invention includes: an oxide film forming step in which an oxide film is formed on a back surface thereof; an etching step in which a hydrophobic portion exposing a back surface of the semiconductor wafer is provided by partially removing the oxide film; a wafer placing step in which the semiconductor wafer is placed; and an epitaxial growth step in which an epitaxial layer is grown on a main surface of the semiconductor wafer; and the diameter of the lift pin installation circle provided on a circle on a bottom face of a susceptor is smaller than that of the hydrophobic portion.
    • 为了提供一种外延晶片的制造方法,其能够缓和由于晶片和基座之间的粘附而引起的背面的变形,从而防止由于升降销引起的平坦度的降低。 根据本发明的外延晶片的制造方法包括:在其背面形成有氧化膜的氧化膜形成工序; 通过部分去除氧化膜来提供暴露半导体晶片的背面的疏水部分的蚀刻步骤; 放置半导体晶片的晶片放置步骤; 以及在半导体晶片的主表面上生长外延层的外延生长步骤; 并且设置在基座的底面上的圆上的提升销安装圈的直径小于疏水部分的直径。
    • 8. 发明申请
    • Pyridobenzoxazine derivative
    • 吡啶并苯并恶嗪衍生物
    • US20070191356A1
    • 2007-08-16
    • US10587946
    • 2005-02-01
    • Makoto TakemuraHitoshi Ohki
    • Makoto TakemuraHitoshi Ohki
    • A61K31/535C07D265/38
    • C07D498/06A23K20/111A23K20/195A23K50/80A23L3/3544A61K31/5383
    • A quinolone antimicrobial agent having potent antimicrobial activity against gram positive and gram negative bacteria and having high safety is provided. A compound represented by the following formula (1): [Chemical formula 1] [wherein, R1: hydrogen, alkyl, cycloalkyl, or substituted carbonyl derived from amino acid, peptide or tripeptide; R2: hydrogen, alkyl, or cycloalkyl; R3: hydrogen, amino, halogen, or alkyl; R4: hydrogen, phenyl, acetoxymethyl, pivaloyloxymethyl, ethoxycarbonyl, choline, dimethylaminoethyl, 5-indanyl, phthalidinyl, 5-alkyl-2-oxo-1,3-dioxol-4-ylmethyl, 3-acetoxy-2-oxobutyl, alkyl, alkoxymethyl, or phenylalkyl; X, X1, X2: hydrogen or halogen] or salt thereof, or a hydrate thereof; and antimicrobial agent and therapeutic agent for infections, each containing the compound, salt thereof or a hydrate thereof.
    • 提供了对革兰氏阳性和革兰氏阴性细菌具有强抗微生物活性并具有高安全性的喹诺酮类抗微生物剂。 由下式(1)表示的化合物:[化学式1] [其中,R 1,H 2,氢,烷基,环烷基或衍生自氨基酸,肽或三肽的取代的羰基; R 2:氢,烷基或环烷基; 氢,氨基,卤素或烷基; 吡啶,二甲基氨基乙基,5-茚满基,邻苯二甲酰基,5-烷基-2-氧代-1,3-二氧杂环戊烯-4-基甲基,3-甲氧基羰基, 乙酰氧基-2-氧代丁基,烷基,烷氧基甲基或苯基烷基; X,X 1,X 2:氢或卤素]或其盐或其水合物; 和抗微生物剂和感染治疗剂,各自含有化合物,其盐或其水合物。
    • 10. 发明授权
    • Cycloalkyl-substituted aminomethylpyrrolidine derivatives
    • 环烷基取代的氨基甲基吡咯烷衍生物
    • US06573260B1
    • 2003-06-03
    • US09856631
    • 2001-05-24
    • Makoto TakemuraHisashi TakahashiRie MiyauchiToshiyuki TakedaIsao Hayakawa
    • Makoto TakemuraHisashi TakahashiRie MiyauchiToshiyuki TakedaIsao Hayakawa
    • A61K314709
    • C07D401/04
    • This invention provides a quinolone derivative which exerts strong antibacterial action upon various bacteria and has high safety, and it relates to a compound having a structure of formula (I), its salts and hydrates thereof: {R1 and R2: hydrogen, alkyl; n: 1 to 4; Q: following structure (Ia): [R3: alkyl, alkenyl, halogenoalkyl, cyclic alkyl, aryl, heteroaryl, alkoxyl, alkylamino; R4: hydrogen, alkylthio; R5: hydrogen, amino, hydroxyl, thiol, halogenomethyl, alkyl, alkenyl, alkynyl, alkoxyl; X1: halogen, hydrogen, A1: nitrogen, structure of formula (II): (X2: hydrogen, amino, halogen, cyano, halogenomethyl, halogenomethyl, alkyl, alkenyl, alkynyl, alkoxyl; R4 and R3 or X2 and R3 may together form a cyclic structure; Y: hydrogen, various ester forming groups]}.
    • 本发明提供了一种喹诺酮衍生物,其对各种细菌具有强烈的抗菌作用并具有高度的安全性,它涉及具有式(I)结构的化合物及其盐和水合物:{R1和R2:氢,烷基; n:1到4; Q:以下结构(Ia):[R3:烷基,烯基,卤代烷基,环烷基,芳基,杂芳基,烷氧基,烷基氨基; R4:氢,烷硫基; R5:氢,氨基,羟基,硫醇,卤代甲基,烷基,烯基,炔基,烷氧基; X1:卤素,氢,A1:氮,式(II)的结构:(X2:氢,氨基,卤素,氰基,卤代甲基,卤代甲基,烷基,烯基,炔基,烷氧基; R4和R3或X2和R3可以一起形成 环状结构; Y:氢,各种酯形成基团]}。