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1. 发明申请

US20110114021A1 PLANAR ANTENNA MEMBER AND PLASMA PROCESSING APPARATUS INCLUDING THE SAME 审中-公开
标题翻译：平面天线成员和等离子体处理装置，包括它们
公开(公告)号：US20110114021A1
公开(公告)日：2011-05-19
申请号：US12922402
申请日：2009-03-13
申请人： Atsushi Ueda , Hikaru Adachi , Caizhong Tian , Yoshinori Fukuda , Toshiaki Hongo , Masao Yoshioka
发明人： Atsushi Ueda , Hikaru Adachi , Caizhong Tian , Yoshinori Fukuda , Toshiaki Hongo , Masao Yoshioka
IPC分类号： C23C16/50 , H01Q13/10 , C23C8/10
CPC分类号： H05H1/46 , H01J37/32192 , H01J37/3222
摘要： The present invention is a planar antenna member configured to introduce electromagnetic waves generated by an electromagnetic-wave generating source into a processing vessel of a plasma processing apparatus, the planar antenna member comprising: a base member of a circular plate shape, made of a conductive material; and a plurality of through-holes formed in the base member of a circular plate shape, the through-holes being configured to radiate the electromagnetic waves; wherein: the through-holes include a plurality of first through-holes which are arranged on a circumference of a circle whose center corresponds to a center of the planar antenna member, and a plurality of second through-holes which are arranged concentrically with the circle outside the first through-holes; a ratio L1/r is within a range between 0.35 and 0.5, in which L1 is a distance from the center of the planar antenna member to a center of one of the first through-holes, and r is a radius of the planar antenna member; and a ratio L2/r is within a range between 0.7 and 0.85, in which L2 is a distance from the center of the planar antenna member to a center of one of the second through-holes, and r is the radius of the planar antenna member.
摘要翻译：本发明是一种平面天线部件，其被配置为将由电磁波发生源产生的电磁波引入到等离子体处理装置的处理容器中，所述平面天线部件包括：圆形板状的基体部件，材料; 以及形成在所述基板的圆板形状的多个通孔，所述通孔被配置为辐射所述电磁波; 其中：所述通孔包括多个第一通孔，所述多个第一通孔布置在其中心对应于所述平面天线构件的中心的圆的圆周上，以及多个第二通孔，所述第二通孔与所述圆第一通孔外; 比率L1 / r在0.35和0.5之间的范围内，其中L1是从平面天线构件的中心到第一通孔中的一个的中心的距离，r是平面天线构件的半径 ; 并且比率L2 / r在0.7和0.85之间的范围内，其中L2是从平面天线构件的中心到第二通孔中的一个的中心的距离，并且r是平面天线的半径会员。

2. 发明授权

US08837895B2 Fiber holder and fiber laser apparatus 有权
标题翻译：光纤夹持器和光纤激光装置
公开(公告)号：US08837895B2
公开(公告)日：2014-09-16
申请号：US13478660
申请日：2012-05-23
申请人： Fumihiko Nakano , Tadamasa Yokoi , Yuichi Ishizu , Masao Yoshioka
发明人： Fumihiko Nakano , Tadamasa Yokoi , Yuichi Ishizu , Masao Yoshioka
IPC分类号： G02B6/00
CPC分类号： H01S3/06704 , G02B6/4457 , H01S3/06758 , H01S3/09408 , H01S3/10023
摘要： A fiber holder which can wind an optical fiber easily and accurately, and hold an optical fiber in a wound state is provided. The optical fiber is accommodated in the groove (introduction portion) formed on the fiber bobbin, after that, the bobbin cover is rotated in the rotational direction of the helical groove while the optical fiber is kept in contact with the cutout formed in the bobbin cover. With this, the optical fiber can be accommodated in the groove. Thus, the optical fiber can be wound easily and accurately, and the optical fiber can be held on the fiber bobbin.
摘要翻译：提供了能够容易地且准确地卷绕光纤并且保持处于卷绕状态的光纤的光纤保持器。光纤被容纳在形成在纤维线轴上的槽（导入部）中，之后，筒管沿螺旋槽的旋转方向旋转，同时光纤与形成在筒管盖上的切口保持接触。由此，光纤可以容纳在槽中。因此，可以容易且精确地卷绕光纤，并且可以将光纤保持在纤维线轴上。

3. 发明授权

US08100210B2 Electrically driven industrial vehicle 有权
标题翻译：电动工业车辆
公开(公告)号：US08100210B2
公开(公告)日：2012-01-24
申请号：US12162533
申请日：2007-02-02
申请人： Akio Takeuchi , Yoshihide Shimada , Masao Yoshioka , Yutaka Yamazaki , Akira Yamamoto
发明人： Akio Takeuchi , Yoshihide Shimada , Masao Yoshioka , Yutaka Yamazaki , Akira Yamamoto
IPC分类号： B60R16/04 , B60K1/00
CPC分类号： B60K1/04 , B60K2001/0455 , B60K2001/0477 , B60L11/005 , B60Y2200/25 , B60Y2200/412 , H01M10/052 , Y02E60/122 , Y02T10/7011 , Y02T10/7022
摘要： An electrically driven industrial vehicle comprising a revolving body (11) attached to a undercarriage (7) so as to be able to turn horizontally; a power shovel device (20) for receiving a hydraulic drive force and operating, the power shovel device being mounted on the revolving body (11); and a hydraulic drive force generating unit provided to the revolving body (11), for generating hydraulic drive force for operating the power shovel device (20). The hydraulic drive force generating unit has a hydraulic fluid tank (73) for storing hydraulic fluid; a hydraulic pump (14) for feeding the hydraulic fluid in the hydraulic fluid tank to the power shovel device (20); an electric motor (13) for driving the hydraulic pump; and a lithium ion battery (50) for feeding electrical drive power to the electric motor.
摘要翻译：一种电动工业车辆，包括附接到起落架（7）以能够水平转动的旋转体（11）; 用于接收液压驱动力并操作的铲铲装置（20），所述铲土装置安装在所述旋转体（11）上; 以及设置在所述旋转体（11）上的用于产生用于操作所述铲土装置（20）的液压驱动力的液压驱动力产生单元。液压驱动力产生单元具有用于储存液压流体的液压油箱（73）液压泵（14），用于将液压油箱中的液压油供给到铲斗装置（20）; 用于驱动液压泵的电动机（13）; 以及用于向电动机供电的锂离子电池（50）。

4. 发明申请

US20100224426A1 ELECTRICALLY DRIVEN INDUSTRIAL VEHICLE 有权
标题翻译：电动驱动工业车辆
公开(公告)号：US20100224426A1
公开(公告)日：2010-09-09
申请号：US12294471
申请日：2007-03-09
申请人： Yoshihide Shimada , Masao Yoshioka , Yutaka Yamazaki
发明人： Yoshihide Shimada , Masao Yoshioka , Yutaka Yamazaki
IPC分类号： B62D11/04 , B60K1/00
CPC分类号： E02F3/3414 , E02F9/0858 , E02F9/207 , E02F9/2079
摘要： A shovel loader (1) has a vehicle body frame (9), a travel device (5), a loader device (20), and a drive power generation section for generating drive power for making the travel device (5) travel. The vehicle body frame (9) has a pair of side frames (9a, 9a) arranged on both the left and right sides of the shovel loader (1). The loader device (20) is made up of a pair of lift arms (21,21) vertically swingably attached to the pair of side frames (9a, 9a) and of a bucket (29) vertically swingably attached to the forward end of the pair of lift arms (21,21). The drive power generation section has a pair of electric motors (71,71) for individually transmitting drive power to the pair of travel devices (5,5) and capable of being controlled independent of each other so that a vehicle (10) can be made to travel in a mariner the left and right are independent of each other, and also has a battery (50) for supplying electric power to the electric motors (71,71).
摘要翻译：铲装置（1）具有车身框架（9），行走装置（5），装载装置（20）和用于产生用于使行进装置（5）行进的驱动力的驱动力发电部。车身框架（9）具有布置在铲式装载机（1）的左右两侧的一对侧框架（9a，9a）。装载装置（20）由一对提升臂（21,21）构成，该提升臂垂直地可摆动地安装在一对侧框架（9a，9a）上，一对铲斗（29）垂直地可摆动地附接到一对提升臂（21,21）。驱动发电部具有一对电动机（71,71），用于将驱动力单独地传递给一对行驶装置（5,5），并能够彼此独立地进行控制，使得车辆（10）能够使得在水手中行进左右彼此独立，并且还具有用于向电动机（71,71）供电的电池（50）。

5. 发明申请

US20050150455A1 Processing apparatus and processing method 审中-公开
标题翻译：处理装置及处理方法
公开(公告)号：US20050150455A1
公开(公告)日：2005-07-14
申请号：US11002788
申请日：2004-12-03
申请人： Yasuo Kobayashi , Masao Yoshioka
发明人： Yasuo Kobayashi , Masao Yoshioka
IPC分类号： H01L21/302 , C23C16/00 , H01J37/32 , H01L21/00 , H01L21/306 , H01L21/3065 , H01L21/311 , H05H1/46
CPC分类号： H01L21/02052 , H01J37/32192 , H01J2237/2001 , H01L21/02063 , H01L21/31111 , H01L21/67115
摘要： The present invention provides a processing apparatus and a processing method, both of which can carry out a low-temperature process to allow active gas species to react with an oxide film on an object to be processed to form a product film and a heating process to heat the object to a predetermined temperature to evaporate the product film, in succession. This processing apparatus 12 is provided with a shielding plate 103 capable of entering a gap between the object W and a transparent window 28 and also withdrawing from the gap. On condition that the shielding plate 103 is closed to cut off irradiation heat from the transparent window 28, the product film is formed by allowing the active gas species of NF3 gas to react with a native oxide film on the object under the low-temperature condition. After that, upon closing the shielding plate 103, the native oxide film is removed by applying heat irradiated from a heating lamp 36 to the product film through the transparent window 28. Additionally, the apparatus includes a low-temperature processing chamber 207 allowing NF3 gas to react with the native oxide film at a low temperature and a heating chamber 209 for heating the product film, independently.
摘要翻译：本发明提供了一种处理装置和处理方法，它们都可以进行低温处理，以使活性气体物质与待处理物体上的氧化膜反应以形成产物膜和加热过程将物体加热到预定温度，以连续蒸发产物膜。该处理装置12设置有能够进入物体W和透明窗28之间的间隙并且也从间隙排出的遮蔽板103。在屏蔽板103闭合以截断来自透明窗28的照射热的条件下，通过使NF 3 N 3气体的活性气体种类与自然氧化物膜反应形成产物膜，物体在低温条件下。之后，在闭合屏蔽板103时，通过从加热灯36照射的热量通过透明窗口28将该自然氧化膜移除到产品膜。此外，该设备包括一个低温处理室207，在低温下与天然氧化物膜反应，并且独立地加热产物膜的加热室209。

6. 发明授权

US08398813B2 Processing apparatus and processing method 有权
标题翻译：处理装置及处理方法
公开(公告)号：US08398813B2
公开(公告)日：2013-03-19
申请号：US11980613
申请日：2007-10-31
申请人： Yasuo Kobayashi , Masao Yoshioka
发明人： Yasuo Kobayashi , Masao Yoshioka
IPC分类号： C23F1/00
CPC分类号： H01L21/02052 , H01J37/32192 , H01J2237/2001 , H01L21/02063 , H01L21/31111 , H01L21/67115
摘要： The present invention provides a processing apparatus and a processing method, both of which can carry out a low-temperature process to allow active gas species to react with an oxide film on an object to be processed to form a product film and a heating process to heat the object to a predetermined temperature to evaporate the product film, in succession. This processing apparatus 12 is provided with a shielding plate 103 capable of entering a gap between the object W and a transparent window 28 and also withdrawing from the gap. On condition that the shielding plate 103 is closed to cut off irradiation heat from the transparent window 28, the product film is formed by allowing the active gas species of NF3 gas to react with a native oxide film on the object under the low-temperature condition. After that, upon closing the shielding plate 103, the native oxide film is removed by applying heat irradiated from a heating lamp 36 to the product film through the transparent window 28. Additionally, the apparatus includes a low-temperature processing chamber 207 allowing NF3 gas to react with the native oxide film at a low temperature and a heating chamber 209 for heating the product film, independently.
摘要翻译：本发明提供了一种处理装置和处理方法，它们都可以进行低温处理，以使活性气体物质与待处理物体上的氧化膜反应以形成产物膜和加热过程将物体加热到预定温度，以连续蒸发产物膜。该处理装置12设置有能够进入物体W和透明窗28之间的间隙并且也从间隙排出的遮蔽板103。在屏蔽板103闭合以截断来自透明窗28的照射热的条件下，通过使NF 3气体的活性气体种类与在低温条件下的物体上的自然氧化膜反应形成产物膜。之后，在闭合屏蔽板103时，通过从加热灯36照射的热量通过透明窗28向产品膜施加热而去除自然氧化膜。另外，该装置包括一个允许NF 3气体的低温处理室207 在低温下与天然氧化膜反应，并且加热室209独立地加热产物膜。

7. 发明申请

US20080113104A1 Processing apparatus and processing method 审中-公开
标题翻译：处理装置及处理方法
公开(公告)号：US20080113104A1
公开(公告)日：2008-05-15
申请号：US11980612
申请日：2007-10-31
申请人： Yasuo Kobayashi , Masao Yoshioka
发明人： Yasuo Kobayashi , Masao Yoshioka
IPC分类号： B05D3/04
CPC分类号： H01L21/02052 , H01J37/32192 , H01J2237/2001 , H01L21/02063 , H01L21/31111 , H01L21/67115
摘要： The present invention provides a processing apparatus and a processing method, both of which can carry out a low-temperature process to allow active gas species to react with an oxide film on an object to be processed to form a product film and a heating process to heat the object to a predetermined temperature to evaporate the product film, in succession. This processing apparatus 12 is provided with a shielding plate 103 capable of entering a gap between the object W and a transparent window 28 and also withdrawing from the gap. On condition that the shielding plate 103 is closed to cut off irradiation heat from the transparent window 28, the product film is formed by allowing the active gas species of NF3 gas to react with a native oxide film on the object under the low-temperature condition. After that, upon closing the shielding plate 103, the native oxide film is removed by applying heat irradiated from a heating lamp 36 to the product film through the transparent window 28. Additionally, the apparatus includes a low-temperature processing chamber 207 allowing NF3 gas to react with the native oxide film at a low temperature and a heating chamber 209 for heating the product film, independently.
摘要翻译：本发明提供了一种处理装置和处理方法，它们都可以进行低温处理，以使活性气体物质与待处理物体上的氧化膜反应以形成产物膜和加热过程将物体加热到预定温度，以连续蒸发产物膜。该处理装置12设置有能够进入物体W和透明窗28之间的间隙并且也从间隙排出的遮蔽板103。在屏蔽板103闭合以截断来自透明窗28的照射热的条件下，通过使NF 3 N 3气体的活性气体种类与自然氧化物膜反应形成产物膜，物体在低温条件下。之后，在闭合屏蔽板103时，通过从加热灯36照射的热量通过透明窗28将其照射到产品薄膜上去除自然氧化膜。此外，该装置包括一个低温处理室207，允许NF 3气体与低温下的天然氧化膜反应，并且加热室209独立地加热产品膜。

8. 发明授权

US08030860B2 Working vehicle 有权
标题翻译：工作车辆
公开(公告)号：US08030860B2
公开(公告)日：2011-10-04
申请号：US12301300
申请日：2007-05-24
申请人： Masao Yoshioka
发明人： Masao Yoshioka
IPC分类号： H02K23/66 , H02J7/00 , H02H7/18
CPC分类号： H02J9/005 , B60L1/003 , B60L1/20 , B60L11/123 , B60L11/1861 , B60L11/1868 , B60L2200/40 , B60L2210/10 , B60L2210/30 , B60L2210/40 , B60L2240/547 , B60L2240/549 , B60L2250/24 , B60L2250/26 , E02F3/325 , E02F9/207 , E02F9/2091 , E02F9/2246 , H02J7/0031 , Y02T10/6217 , Y02T10/7005 , Y02T10/7044 , Y02T10/7066 , Y02T10/7077 , Y02T10/7216 , Y02T10/7241 , Y02T10/92
摘要： A power shovel vehicle including a hydraulic pump that outputs hydraulic oil for operating a hydraulic actuator, an electric motor for driving the hydraulic pump, a main battery for supplying direct current electric power, an inverter for converting the direct current electric power into alternating current electric power and operating the electric motor, a second relay for making and breaking the connection between the main battery and the inverter, an operating device for operating the hydraulic actuator, a controller for controlling operation of the hydraulic actuator and inverter, and turning on and off the second relay, a first relay for making and breaking the connection between the main battery and the controller, a power source monitoring controller for monitoring conditions of the main battery and turning on and off the first relay, a hydraulic sensor for detecting the discharge pressure of the hydraulic pump, and an electric current sensor for measuring a load current flowing into the inverter.
摘要翻译：一种动力铲车，包括输出用于操作液压致动器的液压油的液压泵，用于驱动液压泵的电动机，用于提供直流电力的主电池，用于将直流电力转换为交流电的逆变器电动和操作电动机，用于制造和断开主电池和逆变器之间的连接的第二继电器，用于操作液压致动器的操作装置，用于控制液压致动器和逆变器的操作的控制器，以及打开和关闭第二继电器，用于制造和断开主电池和控制器之间的连接的第一继电器，用于监测主电池的状态并打开和关闭第一继电器的电源监控控制器，用于检测排出压力的液压传感器的液压泵，以及用于测量流过的负载电流的电流传感器进入逆变器。

9. 发明授权

US07973499B2 Working vehicle 有权
标题翻译：工作车辆
公开(公告)号：US07973499B2
公开(公告)日：2011-07-05
申请号：US12301545
申请日：2007-05-24
申请人： Masao Yoshioka
发明人： Masao Yoshioka
IPC分类号： H02K23/66 , H02J7/00 , H02H7/18
CPC分类号： E02F9/2091 , B60L3/003 , B60L3/0046 , B60L3/04 , B60L11/12 , B60L2200/40 , B60L2240/529 , E02F9/207 , E02F9/2095 , E02F9/2246 , E02F9/2292 , E02F9/267 , H02P27/06 , H02P29/0241 , Y02T10/642 , Y02T10/7005 , Y02T10/7077
摘要： A crawler type power shovel vehicle (1) operated by a hydraulic actuator (20), constructed from an electric motor (31) for driving a hydraulic pump (32) for supplying hydraulic oil to the hydraulic actuator (20), a battery (50) for supplying direct current power, an inverter (41) for operating the electric motor (31) by converting the direct current power into alternating current power and supplying it to the motor, a controller (40) for causing the inverter (41) to control operation of the electric motor (31), and a voltage/current sensor (42) for detecting the magnitude of a load current flowing from the battery (50) into the inverter (41). The controller (40) stops the motor (31) when the magnitude of the load current detected by the voltage/current sensor (42) continuously exceeds a predetermined threshold for a predetermined time period.
摘要翻译：由用于驱动用于向液压致动器（20）供给液压油的液压泵（32）的电动机（31）构成的由液压致动器（20）操作的履带式铲车车辆（1），电池），用于通过将直流电转换为交流电并将其提供给电动机来操作电动机（31）的逆变器（41），用于使逆变器（41）向电动机（31）的控制动作以及检测从电池（50）流向逆变器（41）的负载电流的大小的电压/电流传感器（42）。当由电压/电流传感器（42）检测到的负载电流的大小持续超过预定阈值达预定时间段时，控制器（40）停止电动机（31）。

10. 发明申请

US20090173554A1 WORKING VEHICLE 有权
标题翻译：工作车辆
公开(公告)号：US20090173554A1
公开(公告)日：2009-07-09
申请号：US12301300
申请日：2007-05-24
申请人： Masao Yoshioka
发明人： Masao Yoshioka
IPC分类号： B60K1/04 , H02P6/08
CPC分类号： H02J9/005 , B60L1/003 , B60L1/20 , B60L11/123 , B60L11/1861 , B60L11/1868 , B60L2200/40 , B60L2210/10 , B60L2210/30 , B60L2210/40 , B60L2240/547 , B60L2240/549 , B60L2250/24 , B60L2250/26 , E02F3/325 , E02F9/207 , E02F9/2091 , E02F9/2246 , H02J7/0031 , Y02T10/6217 , Y02T10/7005 , Y02T10/7044 , Y02T10/7066 , Y02T10/7077 , Y02T10/7216 , Y02T10/7241 , Y02T10/92
摘要： A crawler type power shovel vehicle (1) driven by a hydraulic actuator (20). The power shovel vehicle (1) is constructed from a hydraulic pump (32) that outputs hydraulic oil for operating the hydraulic actuator (20), an electric motor (31) for driving the hydraulic pump (32), a main battery (50a) for supplying direct current electric power, an inverter (43) for converting the direct current electric power into alternating current electric power and operating the electric motor (31), a second relay (47) for making and breaking the connection between the main battery (50a) and the inverter (43), an operating device (14) for operating the hydraulic actuator (20), a controller (42) for controlling operation of the hydraulic actuator (20) and inverter (43) and turning on and off the second relay (47), a first relay (46) for making and breaking the connection between the main battery (50a) and the controller (42), a power source monitoring controller (41) for monitoring conditions of the main battery (50a) and turning on and off the first relay (46), a hydraulic sensor (36) for detecting the discharge pressure of the hydraulic pump (32), and an electric current sensor (49) for measuring a load current flowing into the inverter (43). The electric motor (31) is stopped when there is no change in the discharge oil pressure and load current, and the controller (42) is stopped when no operation is performed.
摘要翻译：由液压致动器（20）驱动的履带式铲车（1）。动力铲车（1）由液压泵（32）构成，液压泵输出用于操作液压致动器（20）的液压油，用于驱动液压泵（32）的电动机（31），主电池（50a）用于提供直流电力的逆变器（43），用于将直流电力转换为交流电力并操作电动机（31）;第二继电器（47），用于使主电池（ 50a）和逆变器（43），用于操作液压致动器（20）的操作装置（14），用于控制液压致动器（20）和逆变器（43）的操作并且打开和关闭第二继电器（47），用于制造和断开主电池（50a）和控制器（42）之间的连接的第一继电器（46），用于监视主电池（50a）的状态的电源监视控制器（41）并打开和关闭第一个继电器（46），一个液压传感器用于检测液压泵（32）的排出压力的检测器（36）和用于测量流入逆变器（43）的负载电流的电流传感器（49）。当排出油压和负载电流没有变化时，电动机31停止，并且在不进行动作的情况下控制器42停止。

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