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1. 发明授权

US06790428B2 Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride 失效
标题翻译：在制造三氟化氮中还原或除去NH 3 / HF副产物的方法
公开(公告)号：US06790428B2
公开(公告)日：2004-09-14
申请号：US10102488
申请日：2002-03-20
申请人： Athanasios Tsirukis , John Theodore Lileck , Howard Paul Withers, Jr. , Kenneth E. Fegley
发明人： Athanasios Tsirukis , John Theodore Lileck , Howard Paul Withers, Jr. , Kenneth E. Fegley
IPC分类号： C01B719
CPC分类号： C01B21/0832 , C01B7/196
摘要： A process for reducing or eliminating NH3/HF/MFz liquid waste melt in the manufacture of NF3 is provided which includes the steps of providing an NF3 reactor for a reaction of F2 with a liquid NH3/HF/MFz mixture that produces NF3, HF, N2 and other nitrogen fluorides as gaseous products and a liquid NH3/HF/MFz mixture as the liquid waste melt. The process further provides for reduction or elimination of the liquid NH3/HF/MFz waste melt produced by the reactor.
摘要翻译：提供了一种在制造NF3中减少或消除NH 3 / HF / MFz液体废液的方法，该方法包括以下步骤：提供NF3反应器以使F2与产生NF 3，HF的液体NH 3 / HF / MFz混合物反应， N2和其它氮化氟作为气态产物，液态NH3 / HF / MFz混合物作为液体废液。该方法进一步提供减少或消除由反应器产生的液体NH 3 / HF / MF z废液。

2. 发明申请

US20060231159A1 Dual-flow valve and internal processing vessel isolation system 有权
标题翻译：双流量阀和内部处理容器隔离系统
公开(公告)号：US20060231159A1
公开(公告)日：2006-10-19
申请号：US11399322
申请日：2006-04-07
申请人： Stuart Kerr , Benjamin Inman , Athanasios Tsirukis , James Leenhouts , Jeffrey Phillips
发明人： Stuart Kerr , Benjamin Inman , Athanasios Tsirukis , James Leenhouts , Jeffrey Phillips
IPC分类号： B65B1/04
CPC分类号： F16K1/305 , Y10T137/7816 , Y10T137/7818 , Y10T137/87652 , Y10T137/87684
摘要： Fluid flow valve assembly comprising a valve body having an external port and an inlet end having at least a first port, a second port, and a third port; a first valve disposed within the valve body and adapted to control fluid flow between the first and second ports; and a second valve disposed within the valve body and adapted to control fluid flow between the third port and the external port.
摘要翻译：流体流量阀组件包括具有外部端口的阀体和至少具有第一端口，第二端口和第三端口的入口端; 第一阀，其设置在所述阀体内并且适于控制所述第一和第二端口之间的流体流动; 以及第二阀，其设置在所述阀体内并且适于控制所述第三端口和所述外部端口之间的流体流动。

3. 发明申请

US20060062711A1 PROCESS FOR THE PRODUCTION OF NITROGEN TRIFLUORIDE 有权
标题翻译：生产三氮呋喃的方法
公开(公告)号：US20060062711A1
公开(公告)日：2006-03-23
申请号：US10945243
申请日：2004-09-20
申请人： Vipul Dholakia , Athanasios Tsirukis , Anthony Zehnder , Richard Boehme
发明人： Vipul Dholakia , Athanasios Tsirukis , Anthony Zehnder , Richard Boehme
IPC分类号： C01B21/06
CPC分类号： C01B21/0835
摘要： The present invention is directed to an improved reaction process that allows for the achievement of excellent NF3 production yields, while minimizing the amount of unreacted fluorine exiting with the process gases and minimizing the amount of liquid melt waste (HF/NH3) produced by the process. The basic NF3 process resides in reacting F2 with an ammonium ion source, e.g., ammonium acid fluoride, under conditions for forming NF3. The improvement in the process comprises: introducing F2 and said ammonium ion source cocurrently and downflow through a packed column or monolith column at a first temperature; reacting said F2 and ammonium ion source in said column; and, removing a mixture of NF3 and byproducts from said column at a second temperature higher than said first temperature.
摘要翻译：本发明涉及一种改进的反应方法，其允许实现优异的N 3 N 3生产产率，同时使与工艺气体排出的未反应的氟的量最小化并使液体熔体废物的量最小化 HF / NH 3）。基本的NF 3工艺是在形成NF 3 N的条件下使F 2 N与铵离子源例如铵酰氟反应。该过程的改进包括

4. 发明授权

US07045107B2 Process for the production of nitrogen trifluoride 有权
标题翻译：三氟化氮生产工艺
公开(公告)号：US07045107B2
公开(公告)日：2006-05-16
申请号：US10945243
申请日：2004-09-20
申请人： Vipul Dholakia , Athanasios Tsirukis , Anthony J. Zehnder , Richard Peter Boehme
发明人： Vipul Dholakia , Athanasios Tsirukis , Anthony J. Zehnder , Richard Peter Boehme
IPC分类号： C01B21/083
CPC分类号： C01B21/0835
摘要： The present invention is directed to an improved reaction process that allows for the achievement of excellent NF3 production yields, while minimizing the amount of unreacted fluorine exiting with the process gases and minimizing the amount of liquid melt waste (HF/NH3) produced by the process. The basic NF3 process resides in reacting F2 with an ammonium ion source, e.g., ammonium acid fluoride, under conditions for forming NF3. The improvement in the process comprises: introducing F2 and said ammonium ion source cocurrently and downflow through a packed column or monolith column at a first temperature; reacting said F2 and ammonium ion source in said column; and, removing a mixture of NF3 and byproducts from said column at a second temperature higher than said first temperature.
摘要翻译：本发明涉及一种改进的反应方法，其允许实现优异的N 3 N 3生产产率，同时使与工艺气体排出的未反应的氟的量最小化并使液体熔体废物的量最小化 HF / NH 3）。基本的NF 3工艺是在形成NF 3 N的条件下使F 2 N与铵离子源例如铵酰氟反应。该方法的改进包括：并入并引入F 2 N 2和所述铵离子源并在第一温度下通过填充塔或整体柱下流; 使所述柱中的所述F 2 N 2和铵离子源反应; 并且在高于所述第一温度的第二温度下从所述塔中除去NF 3 N 3和副产物的混合物。

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