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1. 发明授权

US07045107B2 Process for the production of nitrogen trifluoride 有权
标题翻译：三氟化氮生产工艺
公开(公告)号：US07045107B2
公开(公告)日：2006-05-16
申请号：US10945243
申请日：2004-09-20
申请人： Vipul Dholakia , Athanasios Tsirukis , Anthony J. Zehnder , Richard Peter Boehme
发明人： Vipul Dholakia , Athanasios Tsirukis , Anthony J. Zehnder , Richard Peter Boehme
IPC分类号： C01B21/083
CPC分类号： C01B21/0835
摘要： The present invention is directed to an improved reaction process that allows for the achievement of excellent NF3 production yields, while minimizing the amount of unreacted fluorine exiting with the process gases and minimizing the amount of liquid melt waste (HF/NH3) produced by the process. The basic NF3 process resides in reacting F2 with an ammonium ion source, e.g., ammonium acid fluoride, under conditions for forming NF3. The improvement in the process comprises: introducing F2 and said ammonium ion source cocurrently and downflow through a packed column or monolith column at a first temperature; reacting said F2 and ammonium ion source in said column; and, removing a mixture of NF3 and byproducts from said column at a second temperature higher than said first temperature.
摘要翻译：本发明涉及一种改进的反应方法，其允许实现优异的N 3 N 3生产产率，同时使与工艺气体排出的未反应的氟的量最小化并使液体熔体废物的量最小化 HF / NH 3）。基本的NF 3工艺是在形成NF 3 N的条件下使F 2 N与铵离子源例如铵酰氟反应。该方法的改进包括：并入并引入F 2 N 2和所述铵离子源并在第一温度下通过填充塔或整体柱下流; 使所述柱中的所述F 2 N 2和铵离子源反应; 并且在高于所述第一温度的第二温度下从所述塔中除去NF 3 N 3和副产物的混合物。

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