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1. 发明申请

WO2007111067A1 METHOD FOR SMOOTHING A SURFACE OF A GLASS SUBSTRATE, AND SUBSTRATE FOR A REFLECTIVE MASK BLANK USED IN EUV LITHOGRAPHY, OBTAINABLE BY THAT METHOD 审中-公开
标题翻译：用于平滑玻璃基板的表面的方法以及用于通过该方法获得的用于在EUV平台中使用的反射掩模层的基板
公开(公告)号：WO2007111067A1
公开(公告)日：2007-10-04
申请号：PCT/JP2007/053440
申请日：2007-02-19
申请人： ASAHI GLASS COMPANY, LIMITED , UNO, Toshiyuki , IKUTA, Yoshiaki , YOKOYAMA, Mika , EBIHARA, Ken
发明人： UNO, Toshiyuki , IKUTA, Yoshiaki , YOKOYAMA, Mika , EBIHARA, Ken
IPC分类号： C03C17/02
CPC分类号： C03C17/02 , B82Y10/00 , B82Y40/00 , C03C17/002 , C03C17/36 , C03C17/3665 , G03F1/24
摘要： ABSTRACT To provide a method for smoothing a surface of a glass substrate having a concave defect, such as a pit or a scratch. A method for smoothing a surface of a glass substrate having a concave defect thereon, comprising: forming a film on the surface of the glass substrate having the concave defect by a dry deposition method, the film comprising a glass material having a fluid point Tf of 150 C or above and of not higher than a strain point Ts ( C) of the glass substrate; and heating the film of the glass material at a temperature of not lower than Tf and not higher than Ts to put the film in such state that the film of the glass material can flow so as to bury the concave defect, followed by cooling the film of the glass material, thereby to smooth the surface of the glass substrate having the concave defect.
摘要翻译：摘要提供一种用于平滑具有诸如凹坑或划痕的凹陷缺陷的玻璃基板的表面的方法。一种用于使其上具有凹陷缺陷的玻璃基板的表面平滑的方法，包括：通过干法沉积法在具有凹陷缺陷的玻璃基板的表面上形成膜，所述膜包括具有流体点Tf的玻璃材料 150℃以上且不高于玻璃基板的应变点Ts（℃）在不低于Tf且不高于Ts的温度下加热玻璃材料的膜以使膜处于玻璃材料的膜可以流动的状态，以便掩埋凹陷缺陷，随后冷却膜从而使具有凹陷缺陷的玻璃基板的表面光滑。

2. 发明公开

EP2323138A1 METHOD FOR SMOOTHING OPTICAL MEMBER FOR EUVL AND OPTICAL MEMBER FOR EUVL HAVING SMOOTHED OPTICAL SURFACE 有权
标题翻译： VERFAHREN ZURGLÄTTUNGEINES OPTISCHEN ELEMENTSFÜREUVL
公开(公告)号：EP2323138A1
公开(公告)日：2011-05-18
申请号：EP09812983.6
申请日：2009-08-19
申请人： Asahi Glass Company Limited
发明人： ONO, Motoshi , WATANABE, Mitsuru , YOKOYAMA, Mika
IPC分类号： G21K1/06 , C03C23/00 , G03F7/20 , H01L21/027
CPC分类号： B82Y40/00 , B82Y10/00 , C03C23/0025 , C03C2204/08 , G03F1/24 , G03F1/60 , G21K2201/067
摘要： The present invention provides a method for smoothing an optical surface of an optical component for EUVL. Specifically, the present invention provides a method for smoothing an optical surface of an optical component for EUVL made of a silica glass material containing TiO 2 and comprising SiO 2 as a main component with a laser having an oscillation wavelength, to which the optical component for EUVL has an absorption coefficient of 0.01 µm -1 or more, at a fluence of 0.3 to 1.5 J/cm 2 in an atmosphere having a water vapor partial pressure of 3.6 mmHg or less.
摘要翻译：本发明提供了一种用于平滑EUVL的光学部件的光学表面的方法。具体地说，本发明提供了一种用于使用包含TiO 2并包含SiO 2作为主要成分的石英玻璃材料制成的EUVL的光学部件的光学表面的平滑光学表面的方法，所述激光具有振荡波长，光学部件在水蒸汽分压为3.6mmHg以下的气氛中，EUVL的吸收系数为0.01μm-1以上，流量为0.3〜1.5J / cm 2。

3. 发明授权

EP2323138B1 METHOD FOR SMOOTHING OPTICAL MEMBER FOR EUVL 有权
标题翻译： PROCESS EUVL用光学元件的晚上
公开(公告)号：EP2323138B1
公开(公告)日：2013-10-23
申请号：EP09812983.6
申请日：2009-08-19
申请人： Asahi Glass Company, Limited
发明人： ONO, Motoshi , WATANABE, Mitsuru , YOKOYAMA, Mika
IPC分类号： G21K1/06 , C03C23/00 , G03F1/60 , G03F1/24 , G03F7/20 , H01L21/027
CPC分类号： B82Y40/00 , B82Y10/00 , C03C23/0025 , C03C2204/08 , G03F1/24 , G03F1/60 , G21K2201/067

4. 发明公开

EP3176135A1 PRODUCTION METHOD OF VACUUM MULTILAYER GLASS, AND VACUUM MULTILAYER GLASS 有权转让
标题翻译：真空多层玻璃的生产方法和真空多层玻璃
公开(公告)号：EP3176135A1
公开(公告)日：2017-06-07
申请号：EP15827288.0
申请日：2015-07-29
申请人： Asahi Glass Company, Limited
发明人： KOGA, Masahide , YOKOYAMA, Mika , KAYABA, Noriyoshi , KATO, Keisuke
IPC分类号： C03C27/06 , E06B3/66
CPC分类号： E06B3/67334 , C03B23/203 , C03C27/06 , C03C27/10 , E06B3/66 , E06B3/6612 , E06B3/6617 , E06B3/66333 , E06B3/6715 , E06B3/6775 , E06B2003/66338 , Y02A30/25 , Y02B80/24
摘要： A manufacturing method of a vacuum multilayer glass includes assembling an assembly including a first glass plate, a second glass plate, a sealing material and a getter material; carrying a conveyance table for conveying the assembly into a heating furnace; and heating the assembly in a reduced pressure space in the heating furnace to melt the sealing material and to activate the getter material at the same time, then solidifying the sealing material to bond the first glass plate and the second glass plate with the sealing material and to seal the reduced pressure space formed between the first glass plate and the second glass plate in a state of including the getter material, and causing the getter material to absorb gasses inside the reduced pressure space.
摘要翻译：一种真空多层玻璃的制造方法，包括组装包括第一玻璃板，第二玻璃板，密封材料和吸气材料的组件; 承载用于将组件输送到加热炉中的输送台; 在加热炉的减压空间内加热该组件以熔化密封材料并同时激活吸气材料，然后使密封材料固化以使第一玻璃板和第二玻璃板与密封材料粘合，以及以在包括吸气材料的状态下密封在第一玻璃板和第二玻璃板之间形成的减压空间，并使吸气材料吸收减压空间内的气体。

5. 发明公开

EP3170800A1 VACUUM MULTILAYER GLASS AND METHOD FOR MANUFACTURING VACUUM MULTILAYER GLASS 有权转让
标题翻译：维多利亚州维吾尔族自治州维吾尔族自治州赫尔辛基
公开(公告)号：EP3170800A1
公开(公告)日：2017-05-24
申请号：EP15822701.7
申请日：2015-07-09
申请人： Asahi Glass Company, Limited
发明人： IKEDA, Yusuke , ITO, Hiroshige , YOKOYAMA, Mika , WATANABE, Tomoya , KATO, Keisuke
IPC分类号： C03C27/06
CPC分类号： C03C27/06 , C03C27/10 , E06B3/6612 , E06B3/6775 , Y02A30/25 , Y02B80/24
摘要： A production method is provided. The production method includes a step (a) of forming an assembly body by joining a first glass substrate to a second glass substrate via a joint layer; a step (b) of applying a decompression process to a gap of the assembly body via a through hole of the first glass substrate; a step (c) of sealing the through hole by using a sealing plate with a sealing material. In the step (c), the sealing material is softened by heating the sealing material, the sealing plate is joined to the first glass substrate, and the through hole is sealed. In the step (c), by heating the heating plate together with the heating material in a state where the sealing plate is in contact with the getter directly or via a heat transfer body, the getter is heated, and the getter is arranged in the gap in an activated state before the completion of the step (c).
摘要翻译：提供了制造方法。制造方法包括：通过接合层将第一玻璃基板与第二玻璃基板接合而形成组装体的工序（a）通过第一玻璃基板的通孔对组装体的间隙施加减压处理的工序（b）; 通过使用具有密封材料的密封板来密封通孔的步骤（c）。在步骤（c）中，密封材料通过加热密封材料软化，密封板与第一玻璃基板接合，并且通孔被密封。在步骤（c）中，在密封板与吸气体直接或通过传热体接触的状态下，通过与加热材料一起加热加热板，吸气剂被加热，吸气剂配置在在步骤（c）完成之前处于激活状态的间隙。

6. 发明公开

EP2837607A1 VACUUM MULTILAYER GLASS, SEALING MEMBER, AND METHOD FOR MANUFACTURING VACUUM MULTILAYER GLASS 审中-公开
标题翻译： MEHRSCHICHTIGES VAKUUMGLAS，DICHTUNGSELEMENT UND VERFAHREN ZUR HERSTELLUNG DES MEHRSCHICHTIGEN VAKUUMGLASES
公开(公告)号：EP2837607A1
公开(公告)日：2015-02-18
申请号：EP13775947.8
申请日：2013-04-12
申请人： Asahi Glass Company, Limited
发明人： MATSUMOTO, Syuji , YOKOYAMA, Mika
IPC分类号： C03C27/06 , C03C8/04 , C03C8/08 , C03C27/04 , E06B3/66
CPC分类号： E06B3/6612 , C03C3/068 , C03C3/16 , C03C8/04 , C03C8/08 , C03C8/24 , C03C27/044 , C03C27/08 , E06B3/6617 , E06B3/66304 , E06B3/66357 , E06B3/66371 , E06B3/67326 , E06B3/6775 , Y02A30/25 , Y02B80/24
摘要： A vacuum insulating glazing includes first and second glass substrates that are stacked with a gap set at a pressure less than an atmospheric pressure, and the gap is sealed peripherally by a sealing. The sealing includes a metal component and a glass layer that bonds the metal component and the glass substrates. A material for the metal component is selected from materials whose tensile strength X (N/mm 2 ) and breaking elongation Y (%) satisfy a relationship Y ≧ 0.10X by a room temperature tensile test (tensile speed: 1 mm/min) that is performed after the materials are kept at 490 °C for 40 minutes in an atmosphere.
摘要翻译：真空绝缘玻璃包括第一和第二玻璃基板，其间隔设置在小于大气压力的压力下，并且间隙通过密封在外围密封。密封包括金属部件和粘合金属部件和玻璃基板的玻璃层。金属成分的材料选自拉伸强度X（N / mm 2）和断裂伸长率Y（％）通过室温拉伸试验（拉伸速度：1mm / min）满足关系Y‰§0.10X的材料，在材料在大气中在490℃保持40分钟之后进行。

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