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    • 1. 发明授权
    • Antifuse structure and process
    • 形成反熔丝的方法
    • US06344373B1
    • 2002-02-05
    • US09106980
    • 1998-06-29
    • Arup BhattacharyyaRobert M. GeffkenChung H. LamRobert K. Leidy
    • Arup BhattacharyyaRobert M. GeffkenChung H. LamRobert K. Leidy
    • H01L2182
    • H01L23/5252H01L2924/0002H01L2924/00
    • According to the preferred embodiment, an antifuse structure and method for personalizing a semiconductor device is provided that overcomes the limitations of the prior art. The preferred embodiment antifuse comprises a two layer transformable insulator core between two electrodes. The transformable core is normally non-conductive but can be transformed into a conductive material by supplying a sufficient voltage across the electrodes. The two layer core preferably comprises an injector layer and a dielectric layer. The injector layer preferably comprises a two phase material such as silicon rich nitride or silicon rich oxide. Initially, the injector layer and dielectric layer are non-conductive. When a sufficient voltage is applied the core fuses together and becomes conductive.
    • 根据优选实施例,提供了克服现有技术限制的用于个性化半导体器件的反熔丝结构和方法。 优选的实施例反熔丝包括在两个电极之间的两层可变形的绝缘体芯。 可变形的芯通常是非导电的,但是可以通过在电极之间提供足够的电压而将其转变成导电材料。 两层芯优选包括注入层和电介质层。 注射器层优选地包括两相材料,例如富氮的氮化物或富硅氧化物。 最初,喷射器层和电介质层是不导电的。 当施加足够的电压时,芯保持在一起并变得导电。
    • 2. 发明授权
    • Antifuse structure
    • 防腐结构
    • US5811870A
    • 1998-09-22
    • US850033
    • 1997-05-02
    • Arup BhattacharyyaRobert M. GeffkenChung H. LamRobert K. Leidy
    • Arup BhattacharyyaRobert M. GeffkenChung H. LamRobert K. Leidy
    • H01L21/82H01L23/525H01L29/04
    • H01L23/5252H01L2924/0002
    • According to the preferred embodiment, an antifuse structure and method for personalizing a semiconductor device is provided that overcomes the limitations of the prior art. The preferred embodiment antifuse comprises a two layer transformable insulator core between two electrodes. The transformable core is normally non-conductive but can be transformed into a conductive material by supplying a sufficient voltage across the electrodes. The two layer core preferably comprises an injector layer and a dielectric layer. The injector layer preferably comprises a two phase material such as silicon rich nitride or silicon rich oxide. Initially, the injector layer and dielectric layer are non-conductive. When a sufficient voltage is applied the core fuses together and becomes conductive.
    • 根据优选实施例,提供了克服现有技术限制的用于个性化半导体器件的反熔丝结构和方法。 优选的实施例反熔丝包括在两个电极之间的两层可变形的绝缘体芯。 可变形的芯通常是非导电的,但是可以通过在电极之间提供足够的电压而将其转变成导电材料。 两层芯优选包括注入层和电介质层。 注射器层优选地包括两相材料,例如富氮的氮化物或富硅氧化物。 最初,喷射器层和电介质层是不导电的。 当施加足够的电压时,芯保持在一起并变得导电。
    • 8. 发明授权
    • Sub-lithographic printing method
    • 亚平版印刷法
    • US08421194B2
    • 2013-04-16
    • US13006403
    • 2011-01-13
    • Chung H. LamHemantha K. Wickramasinghe
    • Chung H. LamHemantha K. Wickramasinghe
    • H01L29/06
    • H01L21/0337
    • A trench structure and an integrated circuit comprising sub-lithographic trench structures in a substrate. In one embodiment the trench structure is created by forming sets of trenches with a lithographic mask and filling the sets of trenches with sets of step spacer blocks comprising two alternating spacer materials which are separately removable from each other. In one embodiment, the trench structures formed are one-nth the thickness of the lithographic mask's feature size. The size of the trench structures being dependent on the thickness and number of spacer material layers used to form the set of step spacer blocks. The number of spacer material layers being n/2 and the thickness of each spacer material layer being one-nth of the lithographic mask's feature size.
    • 沟槽结构和集成电路,其包括衬底中的次光刻沟槽结构。 在一个实施例中,沟槽结构是通过用光刻掩膜形成一组沟槽而形成的,并且用一组间隔块块填充该组沟槽,该组间隔块包括彼此分离地可拆卸的两个交替间隔物材料。 在一个实施例中,形成的沟槽结构是光刻掩模的特征尺寸的厚度的十分之一。 沟槽结构的尺寸取决于用于形成一组步进间隔块的间隔材料层的厚度和数量。 间隔材料层的数量为n / 2,每个间隔材料层的厚度为光刻掩模的特征尺寸的十分之一。