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1. 发明授权

US06242368B1 Removal of carbon from substrate surface 失效
标题翻译：从基材表面去除碳
公开(公告)号：US06242368B1
公开(公告)日：2001-06-05
申请号：US09434307
申请日：1999-11-05
申请人： Arthur Edward Holmer , Michael Mark Litwin , Kevin Bruce Albaugh
发明人： Arthur Edward Holmer , Michael Mark Litwin , Kevin Bruce Albaugh
IPC分类号： H01L21306
CPC分类号： H01L21/02046 , Y10S438/906 , Y10S438/974
摘要： The invention is a method of removing materials such as carbon and metallic elements from a substrate surface via heating in an atmosphere of molecular chlorine and steam. In a preferred embodiment, carbon residue is removed from the surface of a Si or GaAs substrate material.
摘要翻译：本发明是通过在分子氯和蒸汽的气氛中加热从基材表面除去碳和金属元素等材料的方法。在优选的实施方案中，从Si或GaAs衬底材料的表面去除碳残余物。

2. 发明授权

US5998305A Removal of carbon from substrate surfaces 失效
标题翻译：从基材表面去除碳
公开(公告)号：US5998305A
公开(公告)日：1999-12-07
申请号：US625673
申请日：1996-03-29
申请人： Arthur Edward Holmer , Michael Mark Litwin , Kevin Bruce Albaugh
发明人： Arthur Edward Holmer , Michael Mark Litwin , Kevin Bruce Albaugh
IPC分类号： H01L21/302 , H01L21/027 , H01L21/304 , H01L21/306 , H01L21/3065 , B08B3/12
CPC分类号： H01L21/02046 , Y10S438/906 , Y10S438/974
摘要： The invention is a method of removing materials such as carbon and metallic elements from a substrate surface via heating in an atmosphere of molecular chlorine and steam. In a preferred embodiment, carbon residue is removed from the surface of a Si or GaAs substrate material.
摘要翻译：本发明是通过在分子氯和蒸汽的气氛中加热从基材表面除去碳和金属元素等材料的方法。在优选的实施方案中，从Si或GaAs衬底材料的表面去除碳残余物。

3. 发明授权

US06375913B1 Integration of ceramic membrane into a silicon oxide production plant 失效
标题翻译：将陶瓷膜整合到氧化硅生产工厂中
公开(公告)号：US06375913B1
公开(公告)日：2002-04-23
申请号：US09545850
申请日：2000-04-10
申请人： Kevin Bruce Albaugh , Nitin Ramesh Keskar
发明人： Kevin Bruce Albaugh , Nitin Ramesh Keskar
IPC分类号： C01B3312
CPC分类号： C01B13/0251 , B01D53/22 , B01D2257/104 , C01B33/18 , C01B2210/0046
摘要： An integrated system for producing high purity silicon dioxide comprising: a) a source of an oxygen-containing feed gas containing at least one impurity, b) an oxygen transport membrane cell containing an oxygen-selective transport membrane that has a cathode side and an opposing anode side, the membrane being at an elevated temperature effective for separation of oxygen in the feed gas from the impurity by transporting oxygen ions from the oxygen-containing feed gas through the membrane to the anode to form a purified oxygen permeate on the anodeside, while retaining an essentially oxygen-depleted, impurity-containing retentate on the cathode side, c) a passageway from the source (a) to the cathode side of the membrane cell, d) a silicon source, and e) a silicon oxidation furnace, in communication with the anode side of the membrane cell, for reaction of the purified oxygen permeate with silicon from the silicon source, at an elevated reaction temperature effective for the reaction, in order to produce the high purity silicon dioxide.
摘要翻译：一种用于生产高纯度二氧化硅的集成系统，包括：a）含有至少一种杂质的含氧原料气源，b）含有选择性输送膜的氧传输膜电池，其具有阴极侧和相对的阳极侧，膜处于升高的温度，有效地通过将氧离子从含氧进料气体通过膜输送到阳极来分离来自杂质的进料气体中的氧，以在阳极体上形成纯净的氧气渗透物，同时在阴极侧保留基本上贫氧的含杂质的滞留物，c）从膜（a）的源极（a）到阴极侧的通道，d）硅源，以及e）硅氧化炉，与膜电池的阳极侧的连通，用于使纯化的氧渗透物与来自硅源的硅反应，在对反应有效的升高的反应温度下，i 以产生高纯二氧化硅。

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