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    • 10. 发明授权
    • Method for making UHP tungsten hexafluoride
    • 制造UHP六氟化钨的方法
    • US6103212A
    • 2000-08-15
    • US358550
    • 1999-07-22
    • Sateria SalimArthur Edward Holmer
    • Sateria SalimArthur Edward Holmer
    • C01G41/04C01B9/08
    • C01G41/04
    • This invention is directed to a method for producing UHP tungsten hexafluoride by introducing an amount of crude tungsten hexafluoride to an evaporating process for separation into an amount of tungsten hexafluoride-containing volatile impurities and an amount of non-volatile metallic impurities; passing the amount of tungsten hexafluoride-containing volatile residue to a gas phase adsorption process for separation into an amount of semi-crude tungsten hexafluoride product and an amount of hydrogen fluoride non-volatile residue; and passing the amount of semi-crude tungsten hexafluoride product to a sparging system using UHP helium for separation into a non-volatile UHP tungsten hexafluoride product.
    • 本发明涉及一种通过将一定量的六氟化钨引入到用于分离成一定量的含六氟化钨的挥发性杂质和一定量的非挥发性金属杂质的蒸发方法来生产UHP六氟化钨的方法; 将含六氟化钨的挥发性残渣的量通过气相吸附法分离成半粗六氟化钨产物和一定量的氟化氢不挥发残余物; 并将半粗制六氟化钨产品的量用UHP氦气分散到不挥发性UHP六氟化钨产品的喷射系统中。