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    • 5. 发明申请
    • LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
    • LITHOGRAPHIC装置和装置制造方法
    • US20120013879A1
    • 2012-01-19
    • US13178965
    • 2011-07-08
    • Arie Jeffrey Den BoefFrank StaalsLukasz Jerzy Macht
    • Arie Jeffrey Den BoefFrank StaalsLukasz Jerzy Macht
    • G03B27/54G01B11/22
    • G01B11/0608B82Y10/00B82Y40/00G03F7/0002G03F9/7034G03F9/7088
    • The invention provides a level sensor configured to determine a height level of a surface of a substrate supported on a movable substrate support, the level sensor including multiple projection units, multiple detection units, and a processing unit to calculate a height level for each of a plurality of measurement locations on the basis of the measurement beams from the projection units, wherein the level sensor is configured to measure height levels simultaneously at multiple measurement locations on the substrate, wherein the substrate support is configured to move the substrate in a first direction substantially parallel to the surface of the substrate to measure a height level at different locations on the substrate, and wherein at least part of the multiple measurement locations are at least spaced in a second direction that is substantially parallel to the surface of the substrate and perpendicular to the first direction.
    • 本发明提供了一种水平传感器,其被配置为确定支撑在可移动衬底支撑件上的衬底的表面的高度水平,所述液位传感器包括多个投影单元,多个检测单元和处理单元,以计算每个 基于来自所述投影单元的测量光束的多个测量位置,其中所述液位传感器被配置为在所述基板上的多个测量位置处同时测量高度水平,其中所述基板支撑件被配置成基本上在第一方向上移动所述基板 平行于衬底的表面以测量衬底上不同位置处的高度水平,并且其中多个测量位置的至少一部分在基本上平行于衬底的表面并且垂直于衬底的第二方向上至少间隔开 第一个方向。
    • 6. 发明授权
    • Lithographic apparatus and device manufacturing method involving a level sensor having multiple projection units and detection units
    • 涉及具有多个投影单元和检测单元的液位传感器的平版印刷设备和设备制造方法
    • US08488107B2
    • 2013-07-16
    • US13178965
    • 2011-07-08
    • Arie Jeffrey Den BoefFrank StaalsLukasz Jerzy Macht
    • Arie Jeffrey Den BoefFrank StaalsLukasz Jerzy Macht
    • G03B27/58
    • G01B11/0608B82Y10/00B82Y40/00G03F7/0002G03F9/7034G03F9/7088
    • The invention provides a level sensor configured to determine a height level of a surface of a substrate supported on a movable substrate support, the level sensor including multiple projection units, multiple detection units, and a processing unit to calculate a height level for each of a plurality of measurement locations on the basis of the measurement beams from the projection units, wherein the level sensor is configured to measure height levels simultaneously at multiple measurement locations on the substrate, wherein the substrate support is configured to move the substrate in a first direction substantially parallel to the surface of the substrate to measure a height level at different locations on the substrate, and wherein at least part of the multiple measurement locations are at least spaced in a second direction that is substantially parallel to the surface of the substrate and perpendicular to the first direction.
    • 本发明提供了一种水平传感器,其被配置为确定支撑在可移动衬底支撑件上的衬底的表面的高度水平,所述液位传感器包括多个投影单元,多个检测单元和处理单元,以计算每个 基于来自所述投影单元的测量光束的多个测量位置,其中所述液位传感器被配置为在所述基板上的多个测量位置处同时测量高度水平,其中所述基板支撑件被配置成基本上在第一方向上移动所述基板 平行于衬底的表面以测量衬底上不同位置处的高度水平,并且其中多个测量位置的至少一部分在基本上平行于衬底的表面并且垂直于衬底的第二方向上至少间隔开 第一个方向。