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1. 发明申请

WO2016138964A1 NOZZLE FOR A MATERIAL SOURCE ARRANGEMENT USED IN VACUUM DEPOSITION 审中-公开
标题翻译：用于真空沉积中使用的材料源安装的喷嘴
公开(公告)号：WO2016138964A1
公开(公告)日：2016-09-09
申请号：PCT/EP2015/057235
申请日：2015-04-01
申请人： APPLIED MATERIALS, INC. , GEBELE, Thomas , LOPP, Andreas , DIEGUEZ-CAMPO, Jose Manuel , SCHÜSSLER, Uwe , HAAS, Dieter
发明人： GEBELE, Thomas , LOPP, Andreas , DIEGUEZ-CAMPO, Jose Manuel , SCHÜSSLER, Uwe , HAAS, Dieter
IPC分类号： C23C14/24 , C23C14/12 , C23C14/04
CPC分类号： C23C14/243 , C23C14/042 , C23C14/12
摘要： A nozzle (400) for being connected to a distribution pipe (106; 106a; 106b) for guiding evaporated material from a material source (102; 102a; 102b) into a vacuum chamber (110) is described. The nozzle includes a nozzle inlet (401) for receiving the evaporated material, a nozzle outlet (403) for releasing the evaporated material to the vacuum chamber (110), and a nozzle passage (402) between the nozzle inlet (401) and the nozzle outlet (403) along a length direction (460) of the nozzle (400). The nozzle passage (402) has a passage wall (404) surrounding a passage channel (405). Further, the nozzle (400) comprises at least two fins (406) extending into the passage channel (405). Further, a material source arrangement having such a nozzle, a vacuum deposition system with a material source arrangement, and a method for depositing evaporated material are provided.
摘要翻译：描述了用于连接到用于将蒸发的材料从材料源（102; 102a; 102b）引导到真空室（110）中的分配管（106; 106a; 106b）的喷嘴（400）。喷嘴包括用于接收蒸发的材料的喷嘴入口（401），用于将蒸发的材料释放到真空室（110）的喷嘴出口（403）和喷嘴入口（401）与喷嘴入口喷嘴出口（403）沿着喷嘴（400）的长度方向（460）。喷嘴通道（402）具有围绕通道（405）的通道壁（404）。此外，喷嘴（400）包括延伸到通道（405）中的至少两个散热片（406）。此外，提供了具有这种喷嘴的材料源装置，具有材料源装置的真空沉积系统和用于沉积蒸发材料的方法。

2. 发明公开

EP3234213A1 MATERIAL DEPOSITION ARRANGEMENT, A VACUUM DEPOSITION SYSTEM AND METHOD FOR DEPOSITING MATERIAL 审中-公开
标题翻译：材料沉积装置，真空沉积系统和用于沉积材料的方法
公开(公告)号：EP3234213A1
公开(公告)日：2017-10-25
申请号：EP14815340.6
申请日：2014-12-17
申请人： Applied Materials, Inc.
发明人： GEBELE, Thomas , SCHÜSSLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel , LOPP, Andreas
IPC分类号： C23C14/12 , C23C14/24
CPC分类号： C23C14/243 , C23C14/042 , C23C14/12 , C23C14/24 , H01L51/001 , H01L51/0011
摘要： A material deposition arrangement for depositing evaporated material on a substrate in a vacuum chamber is described. The material deposition arrangement includes a crucible for providing material to be evaporated; a linear distribution pipe in fluid communication with the crucible; and a plurality of nozzles in the distribution pipe for guiding the evaporated material into the vacuum chamber. Each nozzle may have a nozzle inlet for receiving the evaporated material, a nozzle outlet for releasing the evaporated material to the vacuum chamber, and a nozzle passage between the nozzle inlet and the nozzle outlet. The nozzle passage of at least one of the plurality of nozzles includes a first section having a first length and a first size, and a second having a second length and a second size. The ratio of the second size to the first size is between 2 and 10.
摘要翻译：描述了用于将蒸发的材料沉积在真空室（110）中的基板（121）上的材料沉积装置（100）。材料沉积装置包括用于提供待蒸发材料的坩埚（102; 102a; 102b）与所述坩埚（102; 102a; 102b）流体连通的线性分配管（106; 106a; 106b）; 和在分配管（106; 106a; 106b）中的多个喷嘴，用于引导蒸发的材料进入真空室（110）。每个喷嘴（400）可以具有用于接收蒸发材料的喷嘴入口（401），用于将蒸发材料释放到真空室的喷嘴出口（403）以及喷嘴入口（401）和喷嘴入口喷嘴出口（403）。多个喷嘴中的至少一个的喷嘴通道（402）包括具有第一部分长度（412）和第一部分尺寸（411）的第一部分（410），以及具有第二部分（410）的第二部分长度（421）和第二部分尺寸（421）。第二部分尺寸（421）与第一部分尺寸（411）的比率在2和10之间。

3. 发明公开

EP3119920A1 EVAPORATION SOURCE FOR ORGANIC MATERIAL 审中-公开
标题翻译：有机物蒸发源
公开(公告)号：EP3119920A1
公开(公告)日：2017-01-25
申请号：EP14712648.6
申请日：2014-03-21
申请人： Applied Materials, Inc.
发明人： DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan , LOPP, Andreas , SCHÜSSLER, Uwe
IPC分类号： C23C14/24 , C23C14/04 , C23C14/56
CPC分类号： C23C14/243 , C23C14/042 , C23C14/56 , H01L51/001 , H01L51/0011 , H01L51/56
摘要： An evaporation source array for depositing two or more organic materials on a substrate is described. The evaporation source array includes two or more evaporation crucibles, wherein the two or more evaporation crucibles are configured to evaporate the two or more organic materials, two or more distribution pipes with outlets provided along the length of the two or more distribution pipes, wherein a first distribution pipe of the two or more distribution pipes is in fluid communication with a first evaporation crucible of the two or more evaporation crucibles, two or more heat shields, which surround the first distribution pipe, a cooling shield arrangement provided at at least one side of the two or more distribution pipes, wherein the at least one side is the side at which the outlets are provided, and a cooling element provided at or in the cooling shield arrangement for active cooling of the cooling shield arrangement.
摘要翻译：描述了用于在衬底上沉积两种或更多种有机材料的蒸发源阵列。所述蒸发源阵列包括两个或更多个蒸发坩埚，其中所述两个或更多个蒸发坩埚被配置为蒸发所述两种或更多种有机材料，两个或更多个分配管，所述分配管具有沿着所述两个或更多个分配管的长度设置的出口，两个或更多个分配管的第一分配管与两个或更多个蒸发坩埚中的第一蒸发坩埚流体连通，围绕第一分配管的两个或更多个隔热罩，设置在至少一侧其中所述至少一个侧面是设置有所述出口的侧面;以及冷却元件，所述冷却元件设置在所述冷却防护装置上或所述冷却防护装置中，用于主动冷却所述冷却防护装置。

4. 发明公开

EP3119919A1 EVAPORATION SOURCE FOR ORGANIC MATERIAL 审中-公开
标题翻译： VERDAMPFUNGSQUELLEFÜR组织材料
公开(公告)号：EP3119919A1
公开(公告)日：2017-01-25
申请号：EP14712647.8
申请日：2014-03-21
申请人： Applied Materials, Inc.
发明人： BANGERT, Stefan , DIEGUEZ-CAMPO, Jose Manuel , SCHÜSSLER, Uwe , LOPP, Andreas
IPC分类号： C23C14/24 , C23C14/04
CPC分类号： H01L51/56 , C23C14/042 , C23C14/243 , C23C14/26 , H01L51/001 , H01L51/0011 , H01L51/0012
摘要： An evaporation source for organic material is described. The evaporation source includes an evaporation crucible, wherein the evaporation crucible is configured to evaporate the organic material, a distribution pipe with one or more outlets provided along the length of the distribution pipe, wherein the distribution pipe is in fluid communication with the evaporation crucible, and wherein the distribution pipe has a cross-section perpendicular to the length of the distribution pipe, which is non-circular, and which includes: an outlet side at which the one or more outlets are provided, wherein the width of the outlet side of the cross-section is 30% or less of the maximum dimension of the cross-section.
摘要翻译：描述了有机材料的蒸发源。蒸发源包括蒸发坩埚，其中蒸发坩埚被构造成蒸发有机材料，分配管具有沿着分配管的长度设置的一个或多个出口，其中分配管与蒸发坩埚流体连通，并且其中所述分配管具有垂直于所述分配管的长度的横截面，所述分布管是非圆形的，并且包括：设置所述一个或多个出口的出口侧，其中所述出口侧的宽度横截面为截面最大尺寸的30％以下。

5. 发明申请

WO2018108266A1 DEPOSITION SYSTEM 审中-公开
公开(公告)号：WO2018108266A1
公开(公告)日：2018-06-21
申请号：PCT/EP2016/081027
申请日：2016-12-14
申请人： APPLIED MATERIALS, INC. , HAAS, Dieter , SCHÜSSLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan
发明人： HAAS, Dieter , SCHÜSSLER, Uwe , DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan
IPC分类号： C23C14/24 , C23C14/50 , C23C14/56 , C23C14/04 , C03C17/02
摘要： According to the present disclosure, a processing system (100) for depositing one or more layers on a substrate supported by a carrier is provided. The processing system includes: a load lock chamber (110) for loading a substrate; a routing module (410) for transporting the substrate; a first vacuum swing module (131); and a process module (510) including a deposition source for depositing material; a service module (610); an unload lock chamber (116) for unloading the substrate; a further routing module (412); a mask carrier magazine (320) configured for storing and transporting masks employed during operation of the processing system; a further vacuum swing module (132); and a transportation system (710) configured for transporting the carrier between the first vacuum swing module (131) and the further vacuum swing module (132).

6. 发明申请

WO2015139776A1 EVAPORATION SOURCE FOR ORGANIC MATERIAL 审中-公开
标题翻译：有机材料蒸发源
公开(公告)号：WO2015139776A1
公开(公告)日：2015-09-24
申请号：PCT/EP2014/055741
申请日：2014-03-21
申请人： APPLIED MATERIALS, INC. , BANGERT, Stefan , DIEGUEZ-CAMPO, Jose Manuel , SCHÜSSLER, Uwe , LOPP, Andreas
发明人： BANGERT, Stefan , DIEGUEZ-CAMPO, Jose Manuel , SCHÜSSLER, Uwe , LOPP, Andreas
IPC分类号： C23C14/24 , C23C14/04
CPC分类号： H01L51/56 , C23C14/042 , C23C14/243 , C23C14/26 , H01L51/001 , H01L51/0011 , H01L51/0012
摘要： An evaporation source for organic material is described. The evaporation source includes an evaporation crucible, wherein the evaporation crucible is configured to evaporate the organic material, a distribution pipe with one or more outlets provided along the length of the distribution pipe, wherein the distribution pipe is in fluid communication with the evaporation crucible, and wherein the distribution pipe has a cross-section perpendicular to the length of the distribution pipe, which is non-circular, and which includes: an outlet side at which the one or more outlets are provided, wherein the width of the outlet side of the cross-section is 30% or less of the maximum dimension of the cross-section.
摘要翻译：描述了有机材料的蒸发源。蒸发源包括蒸发坩埚，其中蒸发坩埚被配置为蒸发有机材料，分配管具有沿着分配管的长度设置的一个或多个出口，其中分配管与蒸发坩埚流体连通，并且其中所述分配管具有垂直于所述分配管的长度的横截面，所述分布管是非圆形的，并且包括：设置所述一个或多个出口的出口侧，其中出口侧的宽度横截面为横截面最大尺寸的30％以下。

7. 发明公开

EP2268845A1 MASK SUPPORT, MASK ASSEMBLY, AND ASSEMBLY COMPRISING A MASK SUPPORT AND A MASK 有权
标题翻译：荫罩支撑和布置与MASKENTSTÜTZE和掩码
公开(公告)号：EP2268845A1
公开(公告)日：2011-01-05
申请号：EP08873931.3
申请日：2008-12-01
申请人： Applied Materials Inc. a Corporation of the State of Delaware
发明人： LANDGRAF, Heike , SCHÜSSLER, Uwe , BANGERT, Stefan
IPC分类号： C23C14/04
CPC分类号： C23C14/042 , B05C21/005 , C23C14/04 , G03F7/12 , H05B33/10 , Y10T29/49826 , Y10T29/49863
摘要： A mask support 10 comprises a frame element 20 and an elastic element 30. The elastic element 30 is fixed to the frame element 20. The elastic element 30 is a component integrally formed of a flexible material. It comprises a lever or arm portion 37 having a first engagement protrusion 38 extending in an angle of approximately 90° from the free end of the arm portion 37. A mask assembly 40 comprises a laminar mask 41, e.g. manufactured from a thin metal foil, and connecting elements 42. The connecting elements 42 include an engagement portion 43 for engagement with the engagement protrusion 38 of the elastic element 30. The mask 41 may be attached/stretched to the mask support 10 as well as to detached from the mask support 10 comfortably.

8. 发明申请

WO2018077388A1 MEASUREMENT ASSEMBLY FOR MEASURING A DEPOSITION RATE, EVAPORATION SOURCE, DEPOSITION APPARATUS, AND METHOD THEREFOR 审中-公开
标题翻译：用于测量沉积速率的测量组件，蒸发源，沉积装置及其方法
公开(公告)号：WO2018077388A1
公开(公告)日：2018-05-03
申请号：PCT/EP2016/075681
申请日：2016-10-25
申请人： APPLIED MATERIALS, INC. , DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan , SCHÜSSLER, Uwe , LANDGRAF, Heike , LOPP, Andreas , STAAF, Hans
发明人： DIEGUEZ-CAMPO, Jose Manuel , BANGERT, Stefan , SCHÜSSLER, Uwe , LANDGRAF, Heike , LOPP, Andreas , STAAF, Hans
IPC分类号： C23C14/04 , C23C14/12 , C23C14/24 , C23C14/54 , G01B7/06
CPC分类号： C23C14/546 , C23C14/042 , C23C14/12 , C23C14/24
摘要： A measurement assembly (100) for measuring a deposition rate of an evaporated material is described. The measurement assembly (100) includes: a first oscillation crystal (110) for measuring the deposition rate; a second oscillation crystal (120) for measuring the deposition rate; and a movable shutter (140). The movable shutter (140) is configured for blocking the evaporated material provided from a first measurement outlet (151), the first measurement outlet directed for providing evaporated material to the first oscillation crystal (110). Further, the movable shutter (140) is configured for blocking the evaporated material provided from a second measurement outlet (152), the second measurement outlet directed for providing evaporated material to the second oscillation crystal (120).
摘要翻译：描述用于测量蒸发材料的沉积速率的测量组件（100）。测量组件（100）包括：用于测量沉积速率的第一振荡晶体（110）第二振荡晶体（120），用于测量沉积速率; 和可动快门（140）。可移动遮光器（140）被配置用于阻挡从第一测量出口（151）提供的蒸发材料，第一测量出口指向用于将蒸发材料提供给第一振荡晶体（110）。此外，可动快门（140）被配置用于阻挡从第二测量出口（152）提供的蒸发材料，第二测量出口指向用于向第二振荡晶体（120）提供蒸发材料。

9. 发明申请

WO2017050349A1 MEASUREMENT ASSEMBLY FOR MEASURING A DEPOSITION RATE AND METHOD THEREFORE 审中-公开
标题翻译：用于测量沉积速率的测量装置及其方法
公开(公告)号：WO2017050349A1
公开(公告)日：2017-03-30
申请号：PCT/EP2015/071608
申请日：2015-09-21
申请人： APPLIED MATERIALS, INC. , DIEGUEZ-CAMPO, Jose Manuel , LOPP, Andreas , SCHÜSSLER, Uwe , BANGERT, Stefan
发明人： DIEGUEZ-CAMPO, Jose Manuel , LOPP, Andreas , SCHÜSSLER, Uwe , BANGERT, Stefan
IPC分类号： G01N29/02 , C23C14/54 , G01N29/24 , H01L41/113
CPC分类号： C23C14/546 , C23C14/24 , G01N29/022 , G01N29/2443 , G01N2291/0256
摘要： A measurement assembly (100) for measuring a deposition rate of an evaporated material is described. The measurement assembly (100) includes an oscillation crystal (110) for measuring the deposition rate, a measurement outlet (150) for providing evaporated material to the oscillation crystal (110), and a magnetic closing mechanism (160) configured for opening and closing the measurement outlet (150) by magnetic force.
摘要翻译：描述了用于测量蒸发材料的沉积速率的测量组件（100）。测量组件（100）包括用于测量沉积速率的振荡晶体（110），用于向振荡晶体（110）提供蒸发材料的测量出口（150）以及用于打开和关闭的磁性关闭机构（160）测量出口（150）通过磁力。

10. 发明申请

WO2017005290A1 CARRIER FOR SUPPORTING AT LEAST ONE SUBSTRATE DURING A SPUTTER DEPOSITION PROCESS, APPARATUS FOR SPUTTER DEPOSITION ON AT LEAST ONE SUBSTRATE, AND METHOD FOR SPUTTER DEPOSITION ON AT LEAST ONE SUBSTRATE 审中-公开
标题翻译：用于在溅射沉积过程中支持至少一个基底的载体，用于至少一个基底上的溅射沉积的装置，以及用于至少一个基板上的溅射沉积的方法
公开(公告)号：WO2017005290A1
公开(公告)日：2017-01-12
申请号：PCT/EP2015/065366
申请日：2015-07-06
申请人： APPLIED MATERIALS, INC. , KELLER, Stefan , BRÜNING, Andre , SCHÜSSLER, Uwe , ZILBAUER, Thomas Werner , BANGERT, Stefan
发明人： KELLER, Stefan , BRÜNING, Andre , SCHÜSSLER, Uwe , ZILBAUER, Thomas Werner , BANGERT, Stefan
IPC分类号： C23C14/50 , C23C14/56 , H01J37/32 , C23C14/34
CPC分类号： C23C14/50 , C23C14/34 , C23C14/562 , C23C14/564 , H01J37/32715 , H01J37/34 , H01M10/052 , H01M10/0562
摘要： A carrier (100) for supporting at least one substrate during a sputter deposition process is provided. The carrier (100) includes a carrier body (102) and an insulating portion provided at the carrier body (102). The insulating portion provides a surface (103) of an electrically insulating material, wherein the surface (103) is configured to face one or more sputter deposition sources during the sputter deposition process.
摘要翻译：提供了一种用于在溅射沉积工艺期间支撑至少一个基板的载体（100）。载体（100）包括载体（102）和设置在载体（102）上的绝缘部分。绝缘部分提供电绝缘材料的表面（103），其中表面（103）构造成在溅射沉积过程期间面向一个或多个溅射沉积源。

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