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1. 发明授权

US06352627B2 Method and device for PVD coating 有权
标题翻译： PVD涂层的方法和装置
公开(公告)号：US06352627B2
公开(公告)日：2002-03-05
申请号：US09402961
申请日：1999-10-14
申请人： Antonius Leyendecker , Georg Erkens , Stefan Esser , Hans-Gerd Fuss , Bernd Hermeler , Rainer Wenke
发明人： Antonius Leyendecker , Georg Erkens , Stefan Esser , Hans-Gerd Fuss , Bernd Hermeler , Rainer Wenke
IPC分类号： C23C1434
CPC分类号： C23C14/345 , C23C14/3464 , H01J37/34 , H01J37/3444
摘要： The invention relates to a PVD coating method and to a PVD coating device with a chamber in which at least one target cathode, at least one anode and at least one substrate holder which is intended to hold at least one substrate are arranged, and with a control device which delivers a first voltage in order to supply the target cathode with a negative electrical potential relative to the anode in order to form a plasma in which the substrate is arranged, and which delivers a second voltage in order to supply the anode with a positive electrical potential relative to the chamber wall. In this sputter-coating device, the ion fraction of the target material which can be achieved is too low for qualitatively satisfactory coating properties. It is increased according to the invention in that the control device delivers a third voltage which supplies the substrate with an electrical potential that is more negative than the potential of the anode.
摘要翻译：本发明涉及一种PVD涂覆方法以及具有室的PVD涂覆装置，其中布置有至少一个靶阴极，至少一个阳极和至少一个用于容纳至少一个基板的基板保持器，并且具有控制装置，其传递第一电压，以便相对于所述阳极向所述目标阴极提供负电位，以便形成其中布置所述衬底的等离子体，并且所述等离子体传送第二电压以向所述阳极提供相对于室壁的正电位。在这种溅射涂布装置中，可以实现的目标材料的离子分数对于定性满意的涂层性能而言太低。根据本发明，增加了控制装置传送第三电压，该第三电压向基板提供比阳极电位更负的电位。

2. 发明授权

US06869334B1 Process for producing a hard-material-coated component 有权
标题翻译：硬质材料涂层部件的制造方法
公开(公告)号：US06869334B1
公开(公告)日：2005-03-22
申请号：US09979724
申请日：2000-05-29
申请人： Antonius Leyendecker , Hans-Gerd Fuss , Rainer Wenke , Georg Erkens , Stefan Esser , Ingo Künzel
发明人： Antonius Leyendecker , Hans-Gerd Fuss , Rainer Wenke , Georg Erkens , Stefan Esser , Ingo Künzel
IPC分类号： B24C11/00 , B24C1/08 , B24C1/10 , C23C14/58 , C23C30/00 , B24B1/00
CPC分类号： C23C14/5886 , B24C1/08 , C23C14/58
摘要： The invention relates to a process for producing a hard-material-coated component, comprising the following steps: application of a layer of hard material to the component in a PVD coating unit; and structural further processing of the outer surface of the layer of hard material, and to a component produced using the process. Particularly in the case of thick coatings or coatings with a columnar structure, such processes have a problem producing a sufficiently smooth surface on the coating. The problem is solved by the fact that for the structural further processing, the surface of the layer is blasted in a blasting device in order to improve this surface, an inorganic blasting agent with a grain size in the range from 1 μm to 100 μm and a sharp-edged grain shape being used.
摘要翻译：本发明涉及一种制备硬质材料涂层组件的方法，包括以下步骤：在PVD涂层单元中向该组分施加一层硬质材料; 以及硬质材料层的外表面的结构进一步处理，以及使用该方法制造的部件。特别是在具有柱状结构的厚涂层或涂层的情况下，这种方法在涂层上产生足够光滑表面的问题。解决这个问题的原因是，为了进行结构的进一步处理，为了改善该表面，在喷砂装置中对该层的表面进行喷砂处理，将粒径在1〜100μm的无机喷砂剂和使用尖锐的谷物形状。

3. 发明授权

US07588640B2 Workpiece carrier device 有权
标题翻译：工件载体装置
公开(公告)号：US07588640B2
公开(公告)日：2009-09-15
申请号：US11494669
申请日：2006-07-27
申请人： Stefan Esser
发明人： Stefan Esser
IPC分类号： B05C13/02
CPC分类号： C23C14/505 , Y10S269/90
摘要： A workpiece carrier (2) comprises a rotary frame (3) and a driving part (20), both of which are rotatable about a driving axle (4). The rotary frame (3) can be driven by a motor (6), and carries a plurality of workpiece holders (13) which are distributed around the driving axle (4) so as to be rotatable about holder axes. A driving disc (22) of the driving part (21) is in each case rotatable about an anchorage point (23) from which its center point is at a distance of an eccentricity (E). A transmission part (25) having a coupling cutout which closely receives the driving disc (22) has driving apertures (26) through which there project driving pins (19) of the workpiece holders (13), which said driving pins (19) are likewise at a distance of the eccentricity (E) from the holder axes. The driving part (20) can be driven at a greater angular velocity by the rotation of the rotary frame (3), via an auxiliary gear set (31) attached to the base frame (1). The rotary frames of a plurality of workpiece carriers can be mounted on a base frame which is itself rotatable, and they can be rotated through engagement with a stationary toothed wheel.
摘要翻译：工件托架（2）包括旋转框架（3）和驱动部件（20），它们都能绕驱动轴（4）旋转。旋转框架（3）可由电动机（6）驱动，并且承载围绕驱动轴（4）分布的多个工件保持件（13），以便能够围绕保持器轴线旋转。驱动部分（21）的驱动盘（22）在每种情况下都能围绕其中心点处于偏心距离（E）的锚固点（23）旋转。具有紧密接收驱动盘（22）的联接切口的传动部分（25）具有驱动孔（26），所述驱动销（22）通过所述驱动孔（26）突出所述工件保持器（13）的驱动销（19），所述驱动销（19）同样地距离保持器轴线的偏心距离（E）。通过旋转框架（3）的旋转，驱动部件（20）可以通过附接到基架（1）的辅助齿轮组（31）以更大的角速度被驱动。多个工件载体的旋转框架可以安装在本身可旋转的基架上，并且它们可以通过与固定的齿轮啮合而旋转。

4. 发明申请

US20110083604A1 WORKPIECE CARRIER 审中-公开
标题翻译：工作承运人
公开(公告)号：US20110083604A1
公开(公告)日：2011-04-14
申请号：US12996928
申请日：2009-06-04
申请人： Stefan Esser
发明人： Stefan Esser
IPC分类号： B05C13/00
CPC分类号： B05C13/00 , C23C14/505 , C23C14/564
摘要： A plurality of discs arranged along a central shaft and having holders uniformly distributed over the circumference, inclined obliquely outwards and intended for workpieces are supported in each case on a ring surrounding the discs. The successive rings form an approximately cylindrical cladding which prevents undesired coating of the discs. The cladding has groups of openings for the holders of a disc which are uniformly distributed over the circumference at the same height and each of which is formed by an upper recess in the ring carrying the disc and an adjacent lower recess of the following ring. Boundary lines between successive rings start in each case somewhat below the narrowest points of the webs separating adjacent openings, so that the lower recesses in each case do not narrow towards the edge of the ring and the upper recesses narrow at most slightly in such a way that the workpiece carrier can be assembled from bottom to top without difficulties.
摘要翻译：沿着中心轴布置并且具有均匀分布在圆周上的倾斜向外并且用于工件的保持件的多个盘在每个壳体中被支撑在围绕盘的环上。连续的环形成近似圆柱形的包层，防止盘的不期望的涂覆。包层具有用于盘的保持器的开口组，其均匀地分布在同一高度的圆周上，并且每个由开口的环中的上凹部和随后的环的相邻的下凹部形成。连续环之间的边界线在每种情况下开始略微低于分隔相邻开口的腹板的最窄点，使得每种情况下的下凹部不会朝向环的边缘变窄，并且上凹部以这种方式最窄工件载体可以从下到上组装而没有困难。

5. 发明申请

US20070057138A1 Workpiece carrier device 有权
标题翻译：工件载体装置
公开(公告)号：US20070057138A1
公开(公告)日：2007-03-15
申请号：US11494669
申请日：2006-07-27
申请人： Stefan Esser
发明人： Stefan Esser
IPC分类号： A47B91/00
CPC分类号： C23C14/505 , Y10S269/90
摘要： A workpiece carrier (2) comprises a rotary frame (3) and a driving part (20), both of which are rotatable about a driving axle (4). The rotary frame (3) can be driven by a motor (6), and carries a plurality of workpiece holders (13) which are distributed around the driving axle (4) so as to be rotatable about holder axes. A driving disc (22) of the driving part (21) is in each case rotatable about an anchorage point (23) from which its centre point is at a distance of an eccentricity (E). A transmission part (25) having a coupling cutout which closely receives the driving disc (22) has driving apertures (26) through which there project driving pins (19) of the workpiece holders (13), which said driving pins (19) are likewise at a distance of the eccentricity (E) from the holder axes. The driving part (20) can be driven at a greater angular velocity by the rotation of the rotary frame (3), via an auxiliary gear set (31) attached to the base frame (1). The rotary frames of a plurality of workpiece carriers can be mounted on a base frame which is itself rotatable, and they can be rotated through engagement with a stationary toothed wheel.
摘要翻译：工件托架（2）包括旋转框架（3）和驱动部件（20），它们都能绕驱动轴（4）旋转。旋转框架（3）可由电机（6）驱动，并且承载围绕驱动轴（4）分布的多个工件保持件（13），以便能够围绕保持器轴线旋转。驱动部分（21）的驱动盘（22）在每种情况下都能围绕其中心点处于偏心距离（E）的锚固点（23）旋转。具有紧密接收驱动盘（22）的联接切口的传动部分（25）具有驱动孔（26），所述驱动销（22）通过所述驱动孔（26）突出所述工件保持器（13）的驱动销（19），所述驱动销（19）同样地距离保持器轴线的偏心距离（E）。通过旋转框架（3）的旋转，驱动部件（20）可以通过附接到基架（1）的辅助齿轮组（31）以更大的角速度被驱动。多个工件载体的旋转框架可以安装在本身可旋转的基架上，并且它们可以通过与固定的齿轮啮合而旋转。

6. 发明授权

US08596626B2 Workpiece carrier device 有权
标题翻译：工件载体装置
公开(公告)号：US08596626B2
公开(公告)日：2013-12-03
申请号：US12681833
申请日：2008-10-02
申请人： Stefan Esser , Martin Zäch
发明人： Stefan Esser , Martin Zäch
IPC分类号： B23Q1/25 , B23Q1/64 , A47B91/00
CPC分类号： B23Q1/64 , C23C14/505 , C23C16/458 , F16H21/14
摘要： A workpiece carrier (2) comprises a rotary frame (3) and a driving part (22), both of which are rotatable about a driving axle (4). The rotary frame (3) can be driven by a motor (6), and carries a plurality of workpiece holders (13) which are distributed around the driving axle (4) so as to be rotatable about holder axes. Mounted in the driving part (22) on a mount is a pinion (25) which engages with a stationary central wheel (21) and a ring gear (27) of a transmission part (26), at the centre of which lies an output point (29) which is at a distance of an eccentricity from the driving axle (4). Driving apertures (28) on the transmission part (26), through which driving pins (19) of the workpiece holders (13) project, are also at the distance of the eccentricity from the holder axes. On rotation of the rotary frame (3), the driving part (22) revolves about the driving axle (4) and additionally imposes on the transmission part (26), which rotates concomitantly with the rotary frame (3), an eccentric motion such that the output point (29) circles round the driving axle (4), as a result of which corresponding rotation of the workpiece holders (13) is effected.
摘要翻译：工件托架（2）包括旋转框架（3）和驱动部件（22），两者都能绕驱动轴（4）旋转。旋转框架（3）可由电动机（6）驱动，并且承载围绕驱动轴（4）分布的多个工件保持件（13），以便能够围绕保持器轴线旋转。安装在安装件上的驱动部分（22）中的是与传动部分（26）的固定中心轮（21）和齿圈（27）接合的小齿轮（25），其中心位于输出点（29）与驱动轴（4）的偏心距离。传动部分（26）上的工件保持器（13）的驱动销（19）伸出的传动孔（28）也位于距保持器轴线偏心的距离处。在旋转框架（3）旋转时，驱动部件（22）围绕驱动轴（4）旋转并且附加地施加在与旋转框架（3）同时旋转的传动部分（26）上，偏心运动输出点（29）围绕驱动轴（4）环绕，由此实现工件保持器（13）的相应旋转。

7. 发明授权

US5272014A Wear-resistant coating for substrate and method for applying 失效
标题翻译：用于基材的耐磨涂层和应用方法
公开(公告)号：US5272014A
公开(公告)日：1993-12-21
申请号：US382993
申请日：1989-07-21
申请人： Toni Leyendecker , Stefan Esser , Oliver Lemmer
发明人： Toni Leyendecker , Stefan Esser , Oliver Lemmer
IPC分类号： B23B27/14 , C23C14/06 , C23C14/32 , C23C16/30 , C23C16/505 , B32B15/00 , C23C16/00
CPC分类号： C23C14/0641 , C23C14/06 , C23C14/32 , C23C16/30 , C23C16/505 , Y10T428/31678
摘要： A multi-component, metal-containing, wear-resistant coating which is not homogeneous. The coating has a difference of a metallic element concentration of at least about 2 atom percent between the edges of the coating surface and the coating surface remote from the edge. Non-homogeneous coatings of the invention are surprisingly wear-resistant compared to homogeneous coatings.The invention also relates to a method of applying the coatings of the invention by a PVC-process or a plasma-CVD-process wherein the electrical potential difference between the substrate and the ionized coating material is selected to enhance the inhomogeneity of the coating.
摘要翻译：多组分，含金属的耐磨涂层，不均匀。涂层在涂层表面的边缘和远离边缘的涂层表面之间具有至少约2原子百分比的金属元素浓度的差异。与均匀涂层相比，本发明的非均匀涂层令人惊奇地是耐磨的。本发明还涉及通过PVC工艺或等离子体CVD工艺施加本发明的涂层的方法，其中选择衬底和电离涂层材料之间的电位差以增强涂层的不均匀性。

8. 发明申请

US20100270722A1 WORKPIECE CARRIER DEVICE 有权
标题翻译：工作车载设备
公开(公告)号：US20100270722A1
公开(公告)日：2010-10-28
申请号：US12681833
申请日：2008-10-02
申请人： Stefan Esser , Martin Zäch
发明人： Stefan Esser , Martin Zäch
IPC分类号： B23Q1/64
CPC分类号： B23Q1/64 , C23C14/505 , C23C16/458 , F16H21/14
摘要： A workpiece carrier (2) comprises a rotary frame (3) and a driving part (22), both of which are rotatable about a driving axle (4). The rotary frame (3) can be driven by a motor (6), and carries a plurality of workpiece holders (13) which are distributed around the driving axle (4) so as to be rotatable about holder axes. Mounted in the driving part (22) on a mount is a pinion (25) which engages with a stationary central wheel (21) and a ring gear (27) of a transmission part (26), at the centre of which lies an output point (29) which is at a distance of an eccentricity from the driving axle (4). Driving apertures (28) on the transmission part (26), through which driving pins (19) of the workpiece holders (13) project, are also at the distance of the eccentricity from the holder axes. On rotation of the rotary frame (3), the driving part (22) revolves about the driving axle (4) and additionally imposes on the transmission part (26), which rotates concomitantly with the rotary frame (3), an eccentric motion such that the output point (29) circles round the driving axle (4), as a result of which corresponding rotation of the workpiece holders (13) is effected.
摘要翻译：工件托架（2）包括旋转框架（3）和驱动部件（22），两者都能绕驱动轴（4）旋转。旋转框架（3）可由电动机（6）驱动，并且承载围绕驱动轴（4）分布的多个工件保持件（13），以便能够围绕保持器轴线旋转。安装在安装件上的驱动部分（22）中的是与传动部分（26）的固定中心轮（21）和齿圈（27）接合的小齿轮（25），其中心位于输出点（29）与驱动轴（4）的偏心距离。传动部分（26）上的工件保持器（13）的驱动销（19）伸出的传动孔（28）也位于距保持器轴线偏心的距离处。在旋转框架（3）旋转时，驱动部件（22）围绕驱动轴（4）旋转并且附加地施加在与旋转框架（3）同时旋转的传动部分（26）上，偏心运动输出点（29）围绕驱动轴（4）环绕，由此实现工件保持器（13）的相应旋转。

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