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    • 1. 发明授权
    • Method for avoiding photo residue in dual damascene with acid treatment
    • 用酸处理避免双重镶嵌光斑残留的方法
    • US06417096B1
    • 2002-07-09
    • US09611738
    • 2000-07-07
    • Anseime ChenJun MaedaSheng-Yueh ChangSung-Hsiung Wang
    • Anseime ChenJun MaedaSheng-Yueh ChangSung-Hsiung Wang
    • H01L214763
    • H01L21/76826H01L21/3105H01L21/31144H01L21/76807
    • A substrate is provided. A first dielectric layer is formed over the substrate by deposition. Etching stop layer and a second dielectric layer are formed in turn over the first dielectric. Next, the second dielectric layer is dealt with Lewis acid. Then, a first photoresist layer is defined and formed over the second dielectric layer. And then dry etching is carried out by means of the first photoresist layer as the mask to form a via hole. The surface of the second dielectric layer and the via hole are treated with Lewis acid. Subsequently, the second photoresist layer is defined and formed on the second dielectric layer. Dry etching is proceed, and etching stop layer is as a etching terminal point to remove exposed partial surface of the second dielectric layer so as to form a trench having larger horizontal size than the via hole. Subsequently, the second photoresist layer is removed to form the opening of the damascene.
    • 提供基板。 通过沉积在衬底上形成第一介电层。 蚀刻停止层和第二介电层依次形成在第一电介质上。 接下来,第二介电层被处理路易斯酸。 然后,在第二介电层上限定并形成第一光致抗蚀剂层。 然后通过第一光致抗蚀剂层作为掩模进行干蚀刻以形成通孔。 用路易斯酸处理第二介电层和通孔的表面。 随后,第二光致抗蚀剂层被限定并形成在第二介电层上。 进行干蚀刻,并且蚀刻停止层作为蚀刻终点以去除第二电介质层的暴露的部分表面,以形成具有比通孔更大的水平尺寸的沟槽。 随后,去除第二光致抗蚀剂层以形成大马士革的开口。
    • 6. 发明授权
    • Liquid dispensing apparatus, automatic analyzer using same, and liquid surface detecting apparatus
    • 液体分配装置,使用其的自动分析装置和液面检测装置
    • US07670564B2
    • 2010-03-02
    • US11044593
    • 2005-01-28
    • Goro YoshidaJun Maeda
    • Goro YoshidaJun Maeda
    • G05D9/00
    • G01N35/1016G01F23/292G01N2035/1025
    • In a liquid dispensing apparatus comprising a dispensing probe for sipping and injecting a liquid sample and a dispensing controller for operating the dispensing probe to ascend, descend and rotate, the liquid dispensing apparatus includes a sample moving device for moving a rack holding the liquid sample, a light beam generator, a photosensor for receiving a light beam reflected from a surface of the liquid sample, a computing unit for computing a liquid surface level based on an output signal from the photosensor, and a controller for controlling operations of those components in a supervising way and processing information necessary for the operations. With the liquid dispensing apparatus, precise information of the liquid surface level can be obtained before the start of the dispensing operation.
    • 在包括用于汲取和注射液体样品的分配探针和用于操作分配探针上升,下降和旋转的分配控制器的液体分配装置中,液体分配装置包括用于移动保持液体样品的架子的样品移动装置, 光束发生器,用于接收从液体样品的表面反射的光束的光传感器,用于基于来自光电传感器的输出信号计算液面水平的计算单元,以及控制器,用于控制 监督操作所需的方式和处理信息。 利用液体分配装置,可以在分配操作开始之前获得液面水平的精确信息。
    • 7. 发明申请
    • Foreign matter detecting system
    • 异物检测系统
    • US20050219523A1
    • 2005-10-06
    • US11060499
    • 2005-02-18
    • Chieko OnumaMitsuji IkedaNoriko IlzumiJun MaedaTakashi Matsuyama
    • Chieko OnumaMitsuji IkedaNoriko IlzumiJun MaedaTakashi Matsuyama
    • G01B11/00G01N21/88G01N21/90
    • G01N21/9027G01N21/8806
    • A foreign matter detecting system which can acquire a clear image and detect a foreign matter with high accuracy based on the acquired image regardless of whether a subject is located far or near from an image capturing device in spite of a depth variation or a level difference. An image capturing unit having an externally controllable focus position is disposed above or below a liquid surface, and a ray of light from an LED is illuminated toward the liquid surface from above or the side at least at a focus position of the image capturing unit so that a foreign matter on the liquid surface causes mirror reflection. The focus position of the image capturing unit is changed over the range from the top of a container containing a liquid to the bottom thereof. At each focus position, an input image from the image capturing unit is taken into an image input unit of an image processing section. An image selecting unit of the image processing section selects an image focused on the liquid surface or a clearest image of the liquid surface from among the input images. An image detecting unit of the image processing section checks the presence and position of the mirror reflection, thereby detecting the foreign matter.
    • 不管深度变化还是水平差,即使拍摄对象远离摄影装置,无论拍摄对象是远距离还是远离拍摄装置,均可以基于获取的图像,以高精度获取清晰图像并检测异物的异物检测系统。 具有外部可控焦点位置的图像捕获单元设置在液面的上方或下方,并且来自LED的光线至少在图像捕获单元的焦点位置从上方或侧面向液体表面照射, 液面上的异物引起镜面反射。 图像拍摄单元的聚焦位置在从包含液体的容器的顶部到其底部的范围内改变。 在每个焦点位置,将来自图像捕获单元的输入图像带入图像处理部分的图像输入单元。 图像处理部分的图像选择单元从输入图像中选择聚焦在液面上的图像或液面的最清晰图像。 图像处理部的图像检测单元检查镜面反射的存在和位置,从而检测异物。
    • 8. 发明授权
    • Thread joint for tube
    • 管接头
    • US5649725A
    • 1997-07-22
    • US544137
    • 1995-10-17
    • Shigeo NagasakuKenichi OhyabuJun MaedaAkira Narita
    • Shigeo NagasakuKenichi OhyabuJun MaedaAkira Narita
    • E21B17/042F16L15/00F16L15/04F16L25/00
    • E21B17/042F16L15/004
    • A thread joint for a tube which suppresses galling without deteriorating its sealing performance since a sliding distance L.sub.S which expresses a quantity of spiral sliding of sealing portions relative to each other during a tightening period from the start of a contact between the sealing portions until shoulder portions abut each other satisfies the following relationship:Sliding Distance L.sub.S .ltoreq.-0.0093.times. (Tube Outer Diameter).sup.2 +4.73.times. (Tube Outer Diameter).To shorten the sliding distance L.sub.S, the sealing portion of a box portion is formed shorter than the sealing portion of a pin portion. In this case, a circumferential groove may be formed to discharge a dope. Conversely, the sealing portion of the pin portion is formed shorter than the sealing portion of the box portion. In this case, a precedent-stage unthread portion whose inclination is smaller than that of the sealing portion of the pin portion is formed between a male thread and the sealing portion of the pin portion. In addition, tapers of the sealing portions of the pin portion and the box portion are set at 1/6 or larger, and/or, a distance where the sealing portion of the box portion (pin portion) is formed so as to contact a curve which is tangent to the sealing portion of the pin portion (box portion) is 1.45 mm or larger.
    • 一种用于管的螺纹接头,其在从密封部分之间的接触开始直到肩部部分的紧固期间的紧固期间,表现出密封部分相对于彼此的螺旋滑动量的滑动距离LS,从而抑制磨损,而不会降低其密封性能 彼此相邻满足以下关系:滑动距离LS <= - 0.0093x(管外直径)2 + 4.73x(管外直径)。 为了缩短滑动距离LS,盒部的密封部形成为比销部的密封部短。 在这种情况下,可以形成周向槽以排出涂料。 相反,销部分的密封部分形成得比盒部分的密封部分短。 在这种情况下,在外螺纹和销部的密封部之间形成有倾斜小于销部的密封部的倾斜度的前级无螺纹部。 此外,销部分和箱部分的密封部分的锥度设定为+ E,fra 1/6 + EE或更大,和/或设置在盒部分(销部分)的密封部分 形成为与销部(盒部)的密封部相切的曲线接触的距离为1.45mm以上。