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1. 发明授权

US6071059A Loading and unloading station for semiconductor processing installations 失效
标题翻译：半导体加工设备的装卸站
公开(公告)号：US6071059A
公开(公告)日：2000-06-06
申请号：US3025
申请日：1998-01-05
申请人： Andreas Mages , Werner Scheler , Herbert Blaschitz , Alfred Schulz , Heinz Schneider
发明人： Andreas Mages , Werner Scheler , Herbert Blaschitz , Alfred Schulz , Heinz Schneider
IPC分类号： B65D85/86 , B65G1/00 , B65G49/00 , B65G49/07 , H01L21/00 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67775 , H01L21/67769 , H01L21/67772 , Y10S414/137 , Y10S414/138 , Y10S414/139 , Y10S414/14
摘要： In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation. The loading and unloading is carried out in that a manipulating device which is arranged in the semiconductor processing installation engages through the charging opening into the transporting container. The invention is applicable in the manufacturing of integrated circuits.
摘要翻译：在半导体加工装置的装载和卸载站中，本发明的目的是确保在洁净室条件下运输容器的充电。这些运输容器本身用作盘形物体的杂志并且横向敞开。还可以任选地加载和卸载更多量的这种运输容器，其中运输容器的更换必须在有利的人体工程学条件下进行。根据本发明，用于装载，卸载和重新装载盘形物体的运输容器通过使用粘合接合的具有封闭件的容器盖以固定的方式联接。充电开口和输送容器同时打开，因为容器盖和封闭件共同向下移动到半导体处理装置中。装载和卸载是通过布置在半导体加工装置中的操纵装置通过装填开口接合到输送容器中而实现的。本发明可应用于集成电路的制造。

2. 发明授权

US06837663B2 Loading and unloading station for semiconductor processing installations 有权
标题翻译：半导体加工设备的装卸站
公开(公告)号：US06837663B2
公开(公告)日：2005-01-04
申请号：US10460698
申请日：2003-06-12
申请人： Andreas Mages , Werner Scheler , Herbert Blaschitz , Alfred Schulz , Heinz Schneider
发明人： Andreas Mages , Werner Scheler , Herbert Blaschitz , Alfred Schulz , Heinz Schneider
IPC分类号： B65D85/86 , B65G1/00 , B65G49/00 , B65G49/07 , H01L21/00 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67775 , H01L21/67769 , H01L21/67772 , Y10S414/137 , Y10S414/138 , Y10S414/139 , Y10S414/14
摘要： In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation. The loading and unloading is carried out in that a manipulating device which is arranged in the semiconductor processing installation engages through the charging opening into the transporting container. The invention is applicable in the manufacturing of integrated circuits.

3. 发明授权

US06609876B2 Loading and unloading station for semiconductor processing installations 有权
标题翻译：半导体加工设备的装卸站
公开(公告)号：US06609876B2
公开(公告)日：2003-08-26
申请号：US10012142
申请日：2001-11-13
申请人： Andreas Mages , Werner Scheler , Herbert Blaschitz , Alfred Schulz , Heinz Schneider
发明人： Andreas Mages , Werner Scheler , Herbert Blaschitz , Alfred Schulz , Heinz Schneider
IPC分类号： B65G4907
CPC分类号： H01L21/67775 , H01L21/67769 , H01L21/67772 , Y10S414/137 , Y10S414/138 , Y10S414/139 , Y10S414/14
摘要： In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from containers under clean room conditions. These transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using an adhering engagement. The charging opening and transporting container are opened simultaneously in that the container cover and the closure are moved down jointy into the semiconductor processing installation. The loading and unloading is carried out in that a manipulating device which is arranged in the semiconductor processing installation engages through the charging opening into the transporting container. The invention is applicable in the manufacturing of integrated circuits.
摘要翻译：在半导体加工装置的装载和卸载站中，本发明的目的是确保在洁净室条件下从容器进行充电。这些运输容器在洁净室条件下。这些运输容器本身用作盘形物体的杂志并且横向敞开。还可以任选地加载和卸载更多量的这种运输容器，其中运输容器的更换必须在有利的人体工程学条件下进行。根据本发明，用于装载，卸载和重新装载盘形物体的运输容器通过使用粘合接合的具有封闭件的容器盖以固定的方式联接。充电开口和运输容器同时打开，因为容器盖和封闭件被连接地移入半导体处理装置中。装载和卸载是通过布置在半导体加工装置中的操纵装置通过装填开口接合到输送容器中而实现的。本发明可应用于集成电路的制造。

4. 发明授权

US06461094B1 Loading and unloading station for semiconductor processing installations 有权
公开(公告)号：US06461094B1
公开(公告)日：2002-10-08
申请号：US09496865
申请日：2000-02-02
申请人： Andreas Mages , Werner Scheler , Herbert Blaschitz , Alfred Schulz , Heinz Schneider
发明人： Andreas Mages , Werner Scheler , Herbert Blaschitz , Alfred Schulz , Heinz Schneider
IPC分类号： B65G4907
CPC分类号： H01L21/67775 , H01L21/67769 , H01L21/67772 , Y10S414/137 , Y10S414/138 , Y10S414/139 , Y10S414/14
摘要： In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation. The loading and unloading is carried out in that a manipulating device which is arranged in the semiconductor processing installation engages through the charging opening into the transporting container. The invention is applicable in the manufacturing of integrated circuits.

5. 发明授权

US06375403B1 Loading and unloading station for semiconductor processing installations 有权
标题翻译：半导体加工设备的装卸站
公开(公告)号：US06375403B1
公开(公告)日：2002-04-23
申请号：US09497057
申请日：2000-02-02
申请人： Andreas Mages , Werner Scheler , Herbert Blaschitz , Alfred Schulz , Heinz Schneider
发明人： Andreas Mages , Werner Scheler , Herbert Blaschitz , Alfred Schulz , Heinz Schneider
IPC分类号： B65G4907
CPC分类号： H01L21/67775 , H01L21/67769 , H01L21/67772 , Y10S414/137 , Y10S414/138 , Y10S414/139 , Y10S414/14
摘要： In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation. The loading and unloading is carried out in that a manipulating device which is arranged in the semiconductor processing installation engages through the charging opening into the transporting container. The invention is applicable in the manufacturing of integrated circuits.
摘要翻译：在半导体加工装置的装载和卸载站中，本发明的目的是确保在洁净室条件下运输容器的充电。这些运输容器本身用作盘形物体的杂志并且横向敞开。还可以任选地加载和卸载更多量的这种运输容器，其中运输容器的更换必须在有利的人体工程学条件下进行。根据本发明，用于装载，卸载和重新装载盘形物体的运输容器通过具有密封件的容器盖以固定的方式联接在一起。充电开口和输送容器同时打开，因为容器盖和封闭件共同向下移动到半导体处理装置中。装载和卸载是通过布置在半导体加工装置中的操纵装置通过装填开口接合到输送容器中而实现的。本发明可应用于集成电路的制造。

6. 发明授权

US5772386A Loading and unloading station for semiconductor processing installations 失效
标题翻译：半导体加工设备的装卸站
公开(公告)号：US5772386A
公开(公告)日：1998-06-30
申请号：US615386
申请日：1996-03-14
申请人： Andreas Mages , Werner Scheler , Herbert Blaschitz , Alfred Schulz , Heinz Schneider
发明人： Andreas Mages , Werner Scheler , Herbert Blaschitz , Alfred Schulz , Heinz Schneider
IPC分类号： B65D85/86 , B65G1/00 , B65G49/00 , B65G49/07 , H01L21/00 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67775 , H01L21/67769 , H01L21/67772 , Y10S414/137 , Y10S414/138 , Y10S414/139 , Y10S414/14
摘要： In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation. The loading and unloading is carried out in that a manipulating device which is arranged in the semiconductor processing installation engages through the charging opening into the transporting container. The invention is applicable in the manufacturing of integrated circuits.
摘要翻译：在半导体加工装置的装载和卸载站中，本发明的目的是确保在洁净室条件下运输容器的充电。这些运输容器本身用作盘形物体的杂志并且横向敞开。还可以任选地加载和卸载更多量的这种运输容器，其中运输容器的更换必须在有利的人体工程学条件下进行。根据本发明，用于装载，卸载和重新装载盘形物体的运输容器通过使用粘合接合的具有封闭件的容器盖以固定的方式联接。充电开口和输送容器同时打开，因为容器盖和封闭件共同向下移动到半导体处理装置中。装载和卸载是通过布置在半导体加工装置中的操纵装置通过装填开口接合到输送容器中而实现的。本发明可应用于集成电路的制造。

7. 发明授权

US5655869A Device for coupling loading and unloading devices with semiconductor processing machines 失效
标题翻译：用于使用半导体加工机器耦合加载和卸载装置的装置
公开(公告)号：US5655869A
公开(公告)日：1997-08-12
申请号：US430816
申请日：1995-04-28
申请人： Werner Scheler , Berndt Lahne , Andreas Mages , Uwe Michl , Eberhard Gemkow , Alfred Schulz
发明人： Werner Scheler , Berndt Lahne , Andreas Mages , Uwe Michl , Eberhard Gemkow , Alfred Schulz
IPC分类号： B65G49/07 , H01L21/02 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67775 , Y10S414/14
摘要： The object of a device for coupling loading and unloading devices with semiconductor machines is to couple devices required for the use of SMIF technology with semiconductor processing machines in which subsequent integration of SMIF technology is not possible, wherein the charging to be carried out after coupling is highly flexible and capable of managing increasing dimensions of semiconductor wafers. An adjustable receiving element for the loading and unloading device is provided inside a movable enclosure, this receiving element being displaceable between at least two planes situated one above the other, one plane serving for charging the loading and unloading device and every other plane being used for the charging of the semiconductor machine carried out by the loading and unloading device. The enclosure has aligning and holding elements for fastening to a coupling element which is aligned with the semiconductor processing machine. The device enables retrofitting of semiconductor processing planes with SMIF technology while taking into account ergonomic requirements.
摘要翻译：用于将加载和卸载装置与半导体机器耦合的装置的目的是将SMIF技术所需的设备与半导体加工机器耦合，其中SMIF技术的后续集成是不可能的，其中在耦合之后执行的充电是高度灵活且能够管理半导体晶片的尺寸增加。用于装载和卸载装置的可调节接收元件设置在可移动外壳的内部，该接收元件可在位于另一个之上的至少两个平面之间移动，一个用于对装载和卸载装置充电的平面以及用于由装卸装置对半导体机器进行充电。外壳具有用于紧固到与半导体加工机对准的联接元件的对准和保持元件。该设备可以使用SMIF技术对半导体加工平面进行改造，同时考虑到人体工程学的要求。

8. 发明授权

US5636724A Device for transferring a transport object between two end positions 失效
标题翻译：用于在两个终端位置之间传输传输对象的设备
公开(公告)号：US5636724A
公开(公告)日：1997-06-10
申请号：US396673
申请日：1995-03-01
申请人： Werner Scheler , Juergen Graefe , Andreas Mages , Andreas Birkner , Erich Adler
发明人： Werner Scheler , Juergen Graefe , Andreas Mages , Andreas Birkner , Erich Adler
IPC分类号： B65G49/07 , H01L21/677 , H01R13/24 , H01R41/00 , B65G47/24
CPC分类号： H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： The object of a device for transferring a transport object between two end positions is to exclude negative influences on dependability and clean room conditions, also in lengthy transport paths, while ensuring a highly flexible transfer. To control the operation of sensors and actuators at a movable part of a drive serving to transfer, electrical contact between these sensors and actuators and a supply unit located in a stationary part of the drive is effected exclusively in the two end positions. The device is provided in particular for use in the manufacture of semiconductors, e.g., for charging semiconductor processing machines, but is not limited to this field.
摘要翻译：用于在两个终端位置之间传送传输对象的设备的目的是在确保高度灵活的传送的同时，在可靠性和洁净室条件以及冗长的传输路径中排除负面影响。为了控制用于传送的驱动器的可移动部分的传感器和致动器的操作，这些传感器和致动器之间的电接触以及位于驱动器的静止部分中的供应单元仅在两个端部位置进行。该器件特别用于制造半导体，例如用于对半导体加工机进行充电，但不限于此。

9. 发明授权

US06000732A Arrangement for locking and unlocking a door of a container 失效
标题翻译：用于锁定和解锁集装箱门的装置
公开(公告)号：US06000732A
公开(公告)日：1999-12-14
申请号：US649263
申请日：1996-05-17
申请人： Werner Scheler , Karl Schubert , Andreas Mages , Andreas Anton
发明人： Werner Scheler , Karl Schubert , Andreas Mages , Andreas Anton
IPC分类号： E05C9/06 , E05C9/04 , H01L21/673 , E05C5/00
CPC分类号： H01L21/67373 , Y10T292/0805 , Y10T292/0892
摘要： An arrangement for locking and unlocking a door of a container for increasing operating reliability when locking and unlocking in a simple manner and for ensuring an opening and closing of the transport container in automated operation. Particle generation is reduced at the same time. Locking elements within a door, which can move in and out, penetrate into recesses of the container to be closed when moved out along a curved path. The arrangement is particularly applicable in transport containers for wafer-shaped objects of larger diameter, in which removal and charging are effected individually in a plane parallel to the surface of the wafer-shaped object and whose container cover is removed and inserted laterally.
摘要翻译：用于锁定和解锁容器的门的装置，用于在以简单的方式锁定和解锁时提高操作可靠性，并且用于确保自动操作中的运输容器的打开和关闭。同时减少颗粒生成。可以进出的门内的锁定元件沿着弯曲的路径移出时，穿过容器的凹部以被关闭。该装置特别适用于较大直径的晶圆形物体的运输容器，其中在与晶片形物体的表面平行的平面内分别进行移除和加料，并且其容器盖被横向插入。

10. 发明授权

US06736582B1 Device for manipulating an object for loading and unloading a clean room 有权
标题翻译：用于操纵装载和卸载洁净室的物体的装置
公开(公告)号：US06736582B1
公开(公告)日：2004-05-18
申请号：US09958504
申请日：2001-10-09
申请人： Andreas Mages , Andreas Birkner , Alfred Schulz , Klaus Schultz
发明人： Andreas Mages , Andreas Birkner , Alfred Schulz , Klaus Schultz
IPC分类号： B65G4907
CPC分类号： H01L21/67772 , H01L21/67775 , Y10S414/139 , Y10S414/14
摘要： In a device for manipulating an object for loading and unloading a clean room, the problem is to reduce the hardware expense for adjustment devices and for air conditioning while maintaining ergonomic benefits and to further improve the clean room conditions in the device. The device contains a stationary outer part (3) of a housing (2) as well as an inner part (4) that can extend telescopically from it and a receptacle element (11) in the roof area of the inner part (4). For the telescopic extension of the inner part and for the lowering of the receptacle element into the inner part, a common guide rail (16) and a common drive (20) are provided. The receptacle element connected to the drive engages with a driver of the inner part for the telescopic extension of the inner part by vertical upward movement and after reaching an access level (E2, E2), at which the inner part is secured, it can be lowered in the inner part. The inner part is flushed with an air flow coming from the clean room in the region of each level. The device is used for loading and unloading of clean rooms with objects that are transported in a container.
摘要翻译：在用于操纵用于装载和卸载洁净室的物体的装置中，问题在于降低调整装置和空调的硬件费用，同时保持符合人体工程学的益处并进一步改善装置中的洁净室条件。该装置包括壳体（2）的固定外部部分（3）以及可从其延伸伸缩的内部部分（4）和在内部部分（4）的顶部区域中的容器元件（11）。为了使内部部件伸缩，并且为了将插座元件降低到内部部件中，设置有公共导轨（16）和公共驱动器（20）。连接到驱动器的插座元件通过垂直向上移动与内部部件的驱动器接合，用于内部部件的伸缩延伸，并且在达到内部部件被固定的入口水平面（E2，E2）之后，可以是内部下降。内部部分用来自每层的洁净室的气流冲洗。该装置用于装载和卸载在容器中运输的物体的洁净室。

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