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1. 发明申请

US20070134894A1 REMOVABLE LINERS FOR CHARGED PARTICLE BEAM SYSTEMS 失效
标题翻译：充电粒子束系统的可拆卸线
公开(公告)号：US20070134894A1
公开(公告)日：2007-06-14
申请号：US11422092
申请日：2006-06-05
申请人： Alan Chandler , Tushar Desai , Ellis Hayford , Nicholas Mone , James Nakos
发明人： Alan Chandler , Tushar Desai , Ellis Hayford , Nicholas Mone , James Nakos
IPC分类号： H01L21/04 , H01L23/58
CPC分类号： H01J37/3171 , H01J37/16 , H01J2237/0213 , H01J2237/022 , H01J2237/0268
摘要： An improved performance charged beam apparatus and method of improving the performance of charged beam apparatus. The apparatus including: a chamber having an interior surface; a pump port for evacuating the chamber; a substrate holder within the chamber; a charged particle beam within the chamber, the charged beam generated by a source and the charged particle beam striking the substrate; and one or more liners in contact with one or more different regions of the interior surface of the chamber, the liners preventing material generated by interaction of the charged beam and the substrate from coating the one or more different regions of the interior surface of the chamber.
摘要翻译：一种改进的性能带电束装置和改善带电束装置性能的方法。该装置包括：具有内表面的室; 用于抽空室的泵口; 腔室内的衬底保持器; 室内的带电粒子束，由源产生的带电束和带电粒子束撞击衬底; 以及与室的内表面的一个或多个不同区域接触的一个或多个衬垫，衬垫防止由带电束和衬底的相互作用产生的材料涂覆室的内表面的一个或多个不同区域。

2. 发明申请

US20050274910A1 ION BEAM SYSTEM 失效
标题翻译：离子束系统
公开(公告)号：US20050274910A1
公开(公告)日：2005-12-15
申请号：US10710051
申请日：2004-06-15
申请人： Tushar Desai , Ellis Hayford , Nicholas Mone
发明人： Tushar Desai , Ellis Hayford , Nicholas Mone
IPC分类号： H01J37/02 , H01J37/317
CPC分类号： H01J37/02 , H01J2237/022 , H01J2237/026 , H01J2237/16 , H01J2237/31701
摘要： A method of reducing foreign material contamination of a substrate in an ion beam system and an ion beam system. The system, including: a vacuum chamber having an ion beam axis; a substrate chamber free to tilt about a tilt axis, the tilt axis orthogonal to and intersecting the ion beam axis; a flexible bellows connecting an opening in the substrate chamber and an opening in the vacuum chamber, both openings co-axially aligned with the ion beam axis, the bellows providing a vacuum seal between the substrate chamber and the vacuum chamber; and a hollow foreign material shield open at a top proximate to the vacuum chamber and a bottom proximate to the substrate chamber, the foreign material shield located between the ion beam axis and the flexible bellows, the top and bottom of the foreign material shield co-axially aligned with the ion beam axis.
摘要翻译：一种减少离子束系统和离子束系统中的衬底的异物污染的方法。该系统包括：具有离子束轴的真空室; 基板室可绕倾斜轴线自由倾斜，倾斜轴线与离子束轴线正交并与其相交; 连接基板室中的开口和真空室中的开口的柔性波纹管，两个开口与离子束轴线同轴对准，波纹管在基板室和真空室之间提供真空密封; 以及在靠近真空室的顶部开口的中空异物屏蔽件和靠近基板室的底部，位于离子束轴线和柔性波纹管之间的异物屏蔽层，异物屏蔽层的顶部和底部，与离子束轴线轴向对准。

3. 发明申请

US20080258081A1 REMOVABLE LINERS FOR CHARGED PARTICLE BEAM SYSTEMS 失效
标题翻译：充电粒子束系统的可拆卸线
公开(公告)号：US20080258081A1
公开(公告)日：2008-10-23
申请号：US12167271
申请日：2008-07-03
申请人： Alan Michael Chandler , Tushar Desai , Ellis Craig Hayford , Nicholas Mone , James Spiros Nakos
发明人： Alan Michael Chandler , Tushar Desai , Ellis Craig Hayford , Nicholas Mone , James Spiros Nakos
IPC分类号： H01J37/30 , H05H1/00
CPC分类号： H01J37/3171 , H01J37/16 , H01J2237/0213 , H01J2237/022 , H01J2237/0268
摘要： A method of improving the performance of charged beam apparatus. The method including: providing the apparatus, the apparatus comprising: a chamber having an interior surface; a pump port for evacuating the chamber; a substrate holder within the chamber; and a charged particle beam within the chamber, the charged beam generated by a source and the charged particle beam striking the substrate; and positioning one or more liners in contact with one or more different regions of the interior surface of the chamber, the liners preventing material generated by interaction of the charged beam and the substrate from coating the one or more different regions of the interior surface of the chamber.
摘要翻译：一种提高带电束装置性能的方法。该方法包括：提供该装置，该装置包括：具有内表面的腔室; 用于抽空室的泵口; 腔室内的衬底保持器; 以及室内的带电粒子束，由源产生的带电束和带电粒子束撞击衬底; 并且将一个或多个衬垫定位成与腔室的内表面的一个或多个不同区域接触，衬垫防止由带电束和衬底的相互作用产生的材料涂覆在腔室的内表面的一个或多个不同区域房间。

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