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1. 发明申请

US20120006487A1 System for In-Situ Mixing and Diluting Fluorine Gas 审中-公开
标题翻译：用于现场混合和稀释氟气的系统
公开(公告)号：US20120006487A1
公开(公告)日：2012-01-12
申请号：US13256842
申请日：2010-02-26
申请人： Akiou Kikuchi , Isamu Mori , Akifumi Yao , Tatsuo Miyazaki , Keita Nakahara
发明人： Akiou Kikuchi , Isamu Mori , Akifumi Yao , Tatsuo Miyazaki , Keita Nakahara
IPC分类号： H01L21/306
CPC分类号： C01B7/20 , B01F3/028 , B01F15/0408 , G05D11/132
摘要： [Task] It is a task to provide a fluorine gas supply system which can stably supply fluorine gas generated by a fluorine gas generation device to a semiconductor processing device in a large quantity and in a precise concentration.[Means for solving task] In the fluorine gas supply system, a mixed gas stored in a buffer tank is introduced into a gas introducing piping before the mixed gas is adjusted in the buffer tank to circulate the mixed gas and a monitoring device is disposed which measures a fluorine gas concentration within the mixed gas so that, in response to the obtained fluorine gas concentration, a flow quantity of inert gas supply source can be adjusted.
摘要翻译： [任务]提供一种能够将氟气产生装置产生的氟气稳定地供给到半导体处理装置的氟气供给系统的任务是大量且精确地集中。 [解决任务的方法]在氟气供给系统中，将缓冲罐内的混合气体引入到气体导入配管中，然后在缓冲罐内调节混合气体以使混合气体循环，并且设置监测装置，测量混合气体中的氟气浓度，使得响应于获得的氟气浓度，可以调节惰性气体供应源的流量。

2. 发明申请

US20120241313A1 FLUORINE GAS GENERATING APPARATUS 有权
标题翻译：氟燃气发生装置
公开(公告)号：US20120241313A1
公开(公告)日：2012-09-27
申请号：US13513812
申请日：2010-11-25
申请人： Akifumi Yao , Tatsuo Miyazaki , Yosuke Nakamura , Keita Nakahara , Nobuyuki Tokunaga
发明人： Akifumi Yao , Tatsuo Miyazaki , Yosuke Nakamura , Keita Nakahara , Nobuyuki Tokunaga
IPC分类号： C25B9/00 , C25B1/24
CPC分类号： C25B1/245
摘要： A fluorine gas generating apparatus generating a fluorine gas by electrolyzing hydrogen fluoride in molten salt, includes: an electrolytic cell including, above a liquid level of molten salt, a first gas chamber into which a product gas mainly containing the fluorine gas generated at an anode immersed in the molten salt and a second gas chamber separated from the first gas chamber into which a byproduct gas mainly containing a hydrogen gas generated at a cathode immersed in the molten salt; a hydrogen fluoride supply source retaining hydrogen fluoride to be replenished in the electrolytic cell; a refining device trapping a hydrogen fluoride gas evaporated from the molten salt in the electrolytic cell and mixed in the product gas generated from the anode to refine the fluorine gas; and a recovery facility conveying and recovering the hydrogen fluoride trapped in the refining device in the electrolytic cell or the hydrogen fluoride supply source.
摘要翻译：一种通过在熔融盐中电解氟化氢产生氟气的氟气发生装置，包括：电解槽，其包括在熔融盐的液面以上的第一气室，主要含有在阳极产生的氟气的产物气体浸入熔融盐和从第一气室分离的第二气室，在该第一气室中主要含有在浸入熔盐中的阴极产生的氢气的副产物气体; 氟化氢供应源，其保留在电解池中补充的氟化氢; 精炼装置捕集从电解槽中的熔融盐蒸发的氟化氢气体，并混合在由阳极产生的产物气体中，以精炼氟气; 以及回收设备，其输送和回收截留在电解池或氟化氢供应源中的精炼装置中的氟化氢。

3. 发明授权

US08864960B2 Fluorine gas generating apparatus 有权
标题翻译：氟气发生装置
公开(公告)号：US08864960B2
公开(公告)日：2014-10-21
申请号：US13513812
申请日：2010-11-25
申请人： Akifumi Yao , Tatsuo Miyazaki , Yosuke Nakamura , Keita Nakahara , Nobuyuki Tokunaga
发明人： Akifumi Yao , Tatsuo Miyazaki , Yosuke Nakamura , Keita Nakahara , Nobuyuki Tokunaga
IPC分类号： C25B1/24
CPC分类号： C25B1/245
摘要： A fluorine gas generating apparatus generating a fluorine gas by electrolyzing hydrogen fluoride in molten salt, includes: an electrolytic cell including, above a liquid level of molten salt, a first gas chamber into which a product gas mainly containing the fluorine gas generated at an anode immersed in the molten salt and a second gas chamber separated from the first gas chamber into which a byproduct gas mainly containing a hydrogen gas generated at a cathode immersed in the molten salt; a hydrogen fluoride supply source retaining hydrogen fluoride to be replenished in the electrolytic cell; a refining device trapping a hydrogen fluoride gas evaporated from the molten salt in the electrolytic cell and mixed in the product gas generated from the anode to refine the fluorine gas; and a recovery facility conveying and recovering the hydrogen fluoride trapped in the refining device in the electrolytic cell or the hydrogen fluoride supply source.
摘要翻译：一种通过在熔融盐中电解氟化氢产生氟气的氟气发生装置，包括：电解槽，其包括在熔融盐的液面以上的第一气室，主要含有在阳极产生的氟气的产物气体浸入熔融盐和从第一气室分离的第二气室，在该第一气室中主要含有在浸入熔盐中的阴极产生的氢气的副产物气体; 氟化氢供应源，其保留在电解池中补充的氟化氢; 精炼装置捕集从电解槽中的熔融盐蒸发的氟化氢气体，并混合在由阳极产生的产物气体中，以精炼氟气; 以及回收设备，其输送和回收截留在电解池或氟化氢供应源中的精炼装置中的氟化氢。

4. 发明申请

US20130032471A1 FLUORINE GAS GENERATING APPARATUS 有权
标题翻译：氟燃气发生装置
公开(公告)号：US20130032471A1
公开(公告)日：2013-02-07
申请号：US13640877
申请日：2011-04-04
申请人： Akifumi Yao , Keita Nakahara
发明人： Akifumi Yao , Keita Nakahara
IPC分类号： C25B15/02 , C25B1/24 , C25B9/00
CPC分类号： C25B1/245 , C25B9/00 , C25B15/02
摘要： A fluorine gas generating apparatus includes: a first main passage connected to a first gas chamber and supplying a fluorine gas to an external device; a first conveying device leading out and conveying the fluorine gas from the first gas chamber; a first pressure detector detecting the pressure on the upstream side of the first conveying device; a first pressure regulating valve returning the fluorine gas from the first conveying device to the suction side of the first conveying device; a controller controlling the opening degree of the first pressure regulating valve so that the pressure detected by the first pressure detector becomes a first set value; a start valve provided on the upstream side of the pressure detector; and a differential pressure detector for detecting the pressure difference before and after the start valve in the closed valve state.
摘要翻译：氟气发生装置包括：第一主通道，连接到第一气室并将氟气供应到外部装置; 从第一气室引出并输送氟气的第一输送装置; 第一压力检测器，检测第一输送装置的上游侧的压力; 第一调压阀将氟气从第一输送装置返回到第一输送装置的吸入侧; 控制第一压力调节阀的开度的控制器，使得由第一压力检测器检测的压力成为第一设定值; 设置在压力检测器的上游侧的起动阀; 以及差压检测器，用于检测处于关闭阀状态的起动阀之前和之后的压力差。

5. 发明授权

US09139918B2 Fluorine gas generating apparatus 有权
标题翻译：氟气发生装置
公开(公告)号：US09139918B2
公开(公告)日：2015-09-22
申请号：US13640877
申请日：2011-04-04
申请人： Akifumi Yao , Keita Nakahara
发明人： Akifumi Yao , Keita Nakahara
IPC分类号： C25B1/24 , C25B15/02 , C25B9/00
CPC分类号： C25B1/245 , C25B9/00 , C25B15/02
摘要： A fluorine gas generating apparatus includes: a first main passage connected to a first gas chamber and supplying a fluorine gas to an external device; a first conveying device leading out and conveying the fluorine gas from the first gas chamber; a first pressure detector detecting the pressure on the upstream side of the first conveying device; a first pressure regulating valve returning the fluorine gas from the first conveying device to the suction side of the first conveying device; a controller controlling the opening degree of the first pressure regulating valve so that the pressure detected by the first pressure detector becomes a first set value; a start valve provided on the upstream side of the pressure detector; and a differential pressure detector for detecting the pressure difference before and after the start valve in the closed valve state.
摘要翻译：氟气发生装置包括：第一主通道，连接到第一气室并将氟气供应到外部装置; 从第一气室引出并输送氟气的第一输送装置; 第一压力检测器，检测第一输送装置的上游侧的压力; 第一调压阀将氟气从第一输送装置返回到第一输送装置的吸入侧; 控制第一压力调节阀的开度的控制器，使得由第一压力检测器检测的压力成为第一设定值; 设置在压力检测器的上游侧的起动阀; 以及差压检测器，用于检测处于关闭阀状态的起动阀之前和之后的压力差。

6. 发明申请

US20130221024A1 HALOGEN-CONTAINING GAS SUPPLY APPARATUS AND HALOGEN-CONTAINING GAS SUPPLY METHOD 审中-公开
标题翻译：含氢气供应装置和含氢气供应方法
公开(公告)号：US20130221024A1
公开(公告)日：2013-08-29
申请号：US13878292
申请日：2011-09-07
申请人： Akifumi Yao , Tomonori Umezaki , Keita Nakahara , Yuta Takeda
发明人： Akifumi Yao , Tomonori Umezaki , Keita Nakahara , Yuta Takeda
IPC分类号： F17C7/00 , F17C13/00 , F16L55/027
CPC分类号： F17C7/00 , F16L55/02736 , F17C13/00 , F17C13/002 , F17C2221/03 , F17C2223/0123 , F17C2223/036 , F17C2227/045 , F17C2260/044 , F17C2260/053 , F17C2270/0518
摘要： Disclosed is a halogen-containing gas supply apparatus for supplying a halogen-containing gas from a container filled with the halogen-containing gas at a high pressure to an external apparatus, the halogen-containing gas supply apparatus including: a supply tube connecting the container and the external apparatus; a supply valve attached to the supply tube to supply the halogen-containing gas from the container; and a shock wave prevention mechanism installed downstream of the supply valve to prevent generation of a shock wave.
摘要翻译：本发明公开了一种含卤素气体供给装置，其特征在于，所述含卤素气体供给装置包括：供给管，其将所述容器和外部设备; 供给阀，附接到供应管以从容器供应含卤素气体; 以及安装在供给阀下游的防冲击机构，以防止产生冲击波。

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