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    • 2. 发明授权
    • Fluorine gas generating apparatus
    • 氟气发生装置
    • US08864961B2
    • 2014-10-21
    • US13520237
    • 2010-11-30
    • Akiou KikuchiAkifumi YaoTatsuo MiyazakiNobuyuki Tokunaga
    • Akiou KikuchiAkifumi YaoTatsuo MiyazakiNobuyuki Tokunaga
    • C25B9/00C25B1/24C25B15/08C01B7/20F17C7/04
    • C25B1/245C01B7/20C25B9/00C25B15/08F17C7/04
    • A fluorine gas generating apparatus includes an electrolytic cell where the molten salt is retained and which is separated and divided above the liquid level of the molten salt into a first gas chamber where a product gas mainly containing a fluorine gas generated at an anode immersed in the molten salt is led and a second gas chamber where a byproduct gas mainly containing a hydrogen gas generated at a cathode immersed in the molten salt is led, and a refining device refining the fluorine gas by coagulating with a cooling medium and trapping a hydrogen fluoride gas evaporated from the molten salt in the electrolytic cell and mixed in the product gas generated from the anode. The cooling medium for coagulation of the hydrogen fluoride gas in the refining device and discharged is re-used as a utility gas used at spots in the fluorine gas generating apparatus.
    • 氟气发生装置包括电解池,其中熔融盐保持并且在熔融盐的液面之上分离和分割成第一气室,在第一气室中主要含有在阳极中产生的氟气的产物浸没在 引入熔融盐,引导第二气室,其中主要含有浸在熔盐中的阴极产生的氢气的副产物被引导,精炼装置通过用冷却介质凝结和捕获氟化氢气体来精炼氟气 从电解池中的熔融盐中蒸发出来并混合在从阳极产生的产物气体中。 精炼装置中的氟化氢气体的凝结用冷却介质被排出,作为在氟气发生装置的点处使用的有用气体。
    • 3. 发明授权
    • Fluorine gas generating apparatus
    • 氟气发生装置
    • US08864960B2
    • 2014-10-21
    • US13513812
    • 2010-11-25
    • Akifumi YaoTatsuo MiyazakiYosuke NakamuraKeita NakaharaNobuyuki Tokunaga
    • Akifumi YaoTatsuo MiyazakiYosuke NakamuraKeita NakaharaNobuyuki Tokunaga
    • C25B1/24
    • C25B1/245
    • A fluorine gas generating apparatus generating a fluorine gas by electrolyzing hydrogen fluoride in molten salt, includes: an electrolytic cell including, above a liquid level of molten salt, a first gas chamber into which a product gas mainly containing the fluorine gas generated at an anode immersed in the molten salt and a second gas chamber separated from the first gas chamber into which a byproduct gas mainly containing a hydrogen gas generated at a cathode immersed in the molten salt; a hydrogen fluoride supply source retaining hydrogen fluoride to be replenished in the electrolytic cell; a refining device trapping a hydrogen fluoride gas evaporated from the molten salt in the electrolytic cell and mixed in the product gas generated from the anode to refine the fluorine gas; and a recovery facility conveying and recovering the hydrogen fluoride trapped in the refining device in the electrolytic cell or the hydrogen fluoride supply source.
    • 一种通过在熔融盐中电解氟化氢产生氟气的氟气发生装置,包括:电解槽,其包括在熔融盐的液面以上的第一气室,主要含有在阳极产生的氟气的产物气体 浸入熔融盐和从第一气室分离的第二气室,在该第一气室中主要含有在浸入熔盐中的阴极产生的氢气的副产物气体; 氟化氢供应源,其保留在电解池中补充的氟化氢; 精炼装置捕集从电解槽中的熔融盐蒸发的氟化氢气体,并混合在由阳极产生的产物气体中,以精炼氟气; 以及回收设备,其输送和回收截留在电解池或氟化氢供应源中的精炼装置中的氟化氢。
    • 4. 发明授权
    • Method of forming tungsten carbide by chemical vapor deposition
    • 通过化学气相沉积法形成碳化钨的方法
    • US4980201A
    • 1990-12-25
    • US319707
    • 1989-03-07
    • Nobuyuki TokunagaYasushi Kita
    • Nobuyuki TokunagaYasushi Kita
    • C01B32/949C23C16/32
    • C23C16/32
    • The invention relates to a chemical vapor deposition (CVD) method for forming tungsten carbide, W.sub.3 C, by subjecting a gas mixture of tungsten hexafluoride, hydrogen and an aromatic hydrocarbon, e.g. benzene, to vapor phase reaction at an elevated temperature. The reaction temperature can be lowered to the extent of 250.degree. C. and the reaction can be carried out even at normal pressure, not necessarily under reduced pressure, by proportioning tungsten hexafluoride, hydrogen and the hydrocarbon such that in the gas mixture the atomic ratio of C to W falls in the range from 2 to 10 while the atomic ratio of H to C is not lower than 3. By this method a W.sub.3 C film excellent in glossiness can be deposited on various metal parts without adversely affecting the metal parts by the elevated temperature.
    • 本发明涉及一种化学气相沉积(CVD)方法,用于通过使六氟化钨,氢气和芳烃的气体混合物,例如, 苯,在升高的温度下进行气相反应。 反应温度可以降低到250℃的程度,并且即使在常压下,也不一定在减压下,通过配比六氟化钨,氢气和烃来进行反应,使得在气体混合物中原子比 的C与W的比率在2〜10的范围内,而H与C的原子比不低于3.通过该方法,可以在各种金属部件上沉积出优异的光泽度的W3C膜,而不会对金属部件造成不良影响 升温
    • 5. 发明授权
    • Fluorine gas generating apparatus
    • 氟气发生装置
    • US08951393B2
    • 2015-02-10
    • US13574295
    • 2011-01-18
    • Akifumi YaoNobuyuki Tokunaga
    • Akifumi YaoNobuyuki Tokunaga
    • C25B1/24C25B15/02C25B15/08C25B9/00
    • C25B1/245C25B9/00C25B15/02C25B15/08
    • A provided emergency stop facility includes an alternative gas supply facility capable of supplying a cooling medium in a refining device as an alternative gas instead of an entrained gas shut-off by closure of an entrained gas shut-off valve with loss of a driving source caused by the emergency stop; an alternative entrained gas shut-off valve switching between supply and shut-off of an alternative gas to a hydrogen fluoride supply passage; and an instrumentation gas supply facility for emergency stop having an instrumentation gas shut-off valve enabling supply of an instrumentation gas by opening with loss of the driving source caused by the emergency stop, wherein at the emergency stop of the fluorine gas generating apparatus, the alternative entrained gas shut-off valve is opened upon receipt of the supply of the instrumentation gas, and the alternative gas is supplied to the hydrogen fluoride supply passage.
    • 提供的紧急停止设施包括替代气体供应设备,其能够将精炼装置中的冷却介质作为替代气体提供,而不是通过关闭带有驱动源的损失的夹带气体截止阀而夹带气体截止 紧急停止; 替代的夹带气体截止阀,在供应和关闭与氟化氢供应通道的替代气体之间切换; 以及用于紧急停止的仪表气体供应设备,具有仪表气体切断阀,能够通过由紧急停止引起的驱动源的损失打开来供给仪表气体,其中在氟气发生装置的紧急停止时, 替代夹带气体截止阀在接收到仪表气体的供应时打开,替代气体被供应到氟化氢供应通道。
    • 6. 发明申请
    • FLUORINE GAS GENERATING APPARATUS
    • 氟燃气发生装置
    • US20130008781A1
    • 2013-01-10
    • US13520237
    • 2010-11-30
    • Akiou KikuchiAkifumi YaoTatsuo MiyazakiNobuyuki Tokunaga
    • Akiou KikuchiAkifumi YaoTatsuo MiyazakiNobuyuki Tokunaga
    • C25B1/24
    • C25B1/245C01B7/20C25B9/00C25B15/08F17C7/04
    • A fluorine gas generating apparatus includes an electrolytic cell where the molten salt is retained and which is separated and divided above the liquid level of the molten salt into a first gas chamber where a product gas mainly containing a fluorine gas generated at an anode immersed in the molten salt is led and a second gas chamber where a byproduct gas mainly containing a hydrogen gas generated at a cathode immersed in the molten salt is led, and a refining device refining the fluorine gas by coagulating with a cooling medium and trapping a hydrogen fluoride gas evaporated from the molten salt in the electrolytic cell and mixed in the product gas generated from the anode. The cooling medium for coagulation of the hydrogen fluoride gas in the refining device and discharged is re-used as a utility gas used at spots in the fluorine gas generating apparatus.
    • 氟气发生装置包括电解池,其中熔融盐保持并且在熔融盐的液面之上分离和分割成第一气室,在第一气室中主要含有在阳极中产生的氟气的产物浸没在 引入熔融盐,引导第二气室,其中主要含有浸在熔盐中的阴极产生的氢气的副产物被引导,精炼装置通过用冷却介质凝结和捕获氟化氢气体来精炼氟气 从电解池中的熔融盐中蒸发出来并混合在从阳极产生的产物气体中。 精炼装置中的氟化氢气体的凝结用冷却介质被排出,作为在氟气发生装置的点处使用的有用气体。
    • 7. 发明申请
    • FLUORINE GAS GENERATING APPARATUS
    • 氟燃气发生装置
    • US20120241313A1
    • 2012-09-27
    • US13513812
    • 2010-11-25
    • Akifumi YaoTatsuo MiyazakiYosuke NakamuraKeita NakaharaNobuyuki Tokunaga
    • Akifumi YaoTatsuo MiyazakiYosuke NakamuraKeita NakaharaNobuyuki Tokunaga
    • C25B9/00C25B1/24
    • C25B1/245
    • A fluorine gas generating apparatus generating a fluorine gas by electrolyzing hydrogen fluoride in molten salt, includes: an electrolytic cell including, above a liquid level of molten salt, a first gas chamber into which a product gas mainly containing the fluorine gas generated at an anode immersed in the molten salt and a second gas chamber separated from the first gas chamber into which a byproduct gas mainly containing a hydrogen gas generated at a cathode immersed in the molten salt; a hydrogen fluoride supply source retaining hydrogen fluoride to be replenished in the electrolytic cell; a refining device trapping a hydrogen fluoride gas evaporated from the molten salt in the electrolytic cell and mixed in the product gas generated from the anode to refine the fluorine gas; and a recovery facility conveying and recovering the hydrogen fluoride trapped in the refining device in the electrolytic cell or the hydrogen fluoride supply source.
    • 一种通过在熔融盐中电解氟化氢产生氟气的氟气发生装置,包括:电解槽,其包括在熔融盐的液面以上的第一气室,主要含有在阳极产生的氟气的产物气体 浸入熔融盐和从第一气室分离的第二气室,在该第一气室中主要含有在浸入熔盐中的阴极产生的氢气的副产物气体; 氟化氢供应源,其保留在电解池中补充的氟化氢; 精炼装置捕集从电解槽中的熔融盐蒸发的氟化氢气体,并混合在由阳极产生的产物气体中,以精炼氟气; 以及回收设备,其输送和回收截留在电解池或氟化氢供应源中的精炼装置中的氟化氢。
    • 9. 发明申请
    • FLUORINE GAS GENERATING APPARATUS
    • 氟燃气发生装置
    • US20120292180A1
    • 2012-11-22
    • US13574295
    • 2011-01-18
    • Akifumi YaoNobuyuki Tokunaga
    • Akifumi YaoNobuyuki Tokunaga
    • C25B1/24
    • C25B1/245C25B9/00C25B15/02C25B15/08
    • A provided emergency stop facility includes an alternative gas supply facility capable of supplying a cooling medium in a refining device as an alternative gas instead of an entrained gas shut-off by closure of an entrained gas shut-off valve with loss of a driving source caused by the emergency stop; an alternative entrained gas shut-off valve switching between supply and shut-off of an alternative gas to a hydrogen fluoride supply passage; and an instrumentation gas supply facility for emergency stop having an instrumentation gas shut-off valve enabling supply of an instrumentation gas by opening with loss of the driving source caused by the emergency stop, wherein at the emergency stop of the fluorine gas generating apparatus, the alternative entrained gas shut-off valve is opened upon receipt of the supply of the instrumentation gas, and the alternative gas is supplied to the hydrogen fluoride supply passage.
    • 提供的紧急停止设施包括替代气体供应设备,其能够将精炼装置中的冷却介质作为替代气体提供,而不是通过关闭带有驱动源的损失的夹带气体截止阀而夹带气体截止 紧急停止; 替代的夹带气体截止阀,在供应和关闭与氟化氢供应通道的替代气体之间切换; 以及用于紧急停止的仪表气体供应设备,具有仪表气体切断阀,能够通过由紧急停止引起的驱动源的损失打开来供给仪表气体,其中在氟气发生装置的紧急停止时, 替代夹带气体截止阀在接收到仪表气体的供应时打开,替代气体被供应到氟化氢供应通道。
    • 10. 发明授权
    • Method for producing nitrogen trifluoride by gas-solid reaction
    • 通过气 - 固反应制备三氟化氮的方法
    • US06183713B2
    • 2001-02-06
    • US09315406
    • 1999-05-20
    • Nobuyuki TokunagaShirou MoroiKeizo Kojima
    • Nobuyuki TokunagaShirou MoroiKeizo Kojima
    • C01B2106
    • C01B21/0832
    • The invention relates to a method for producing nitrogen trifluoride by gas-solid reaction. This method includes the steps of (a) providing a packed-bed-type vessel filled with a particulate solid of an ammonium complex of a metal fluoride; (b) introducing a fluorine-containing gas into the vessel to allow the fluorine-containing gas to flow upwardly through the vessel such that fluorine of the fluorine-containing gas is reacted with the particulate solid in the vessel, thereby to obtain a reaction gas containing nitrogen trifluoride; and (c) separating the nitrogen trifluoride from the reaction gas. A part of the reaction gas flowing out of the vessel may be introduced into the vessel, and thereby circulated through the vessel. The yield of nitrogen trifluoride becomes substantially improved by this method.
    • 本发明涉及一种通过气 - 固反应生产三氟化氮的方法。 该方法包括以下步骤:(a)提供填充有金属氟化物的铵络合物的颗粒状固体的填充床型容器; (b)向容器中引入含氟气体,使含氟气体向上流过容器,使得含氟气体的氟与容器中的颗粒状固体反应,从而获得反应气体 含有三氟化氮; 和(c)从反应气体中分离出三氟化氮。 从容器流出的反应气体的一部分可以引入容器中,从而循环通过容器。 通过该方法,三氟化氮的收率大大提高。