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    • 1. 发明授权
    • Electron multipler and electron detector
    • 电子倍增器和电子探测器
    • US08022606B2
    • 2011-09-20
    • US12715570
    • 2010-03-02
    • Akio SuzukiEtsuo IizukaAkihiro KageyamaMotohiro Suyama
    • Akio SuzukiEtsuo IizukaAkihiro KageyamaMotohiro Suyama
    • H01J43/06
    • H01J43/246
    • An electron multiplier that can easily obtain characteristics according to a purpose is provided. By bonding a marginal portion 23 of an MCP 2 and a marginal portion 33 of an MCP 3 to each other via a conductive spacer layer 7, a gap 12 is formed between channel portions 22, 32. Therefore, when the electron multiplier is used for a purpose that requires a particularly high gain, by adjusting the thickness of the spacer layer 7, the gain can be increased by increasing the gap 12. In addition, when the electron multiplier is used for a purpose that requires an increase in gain as well as time characteristics, by adjusting the thickness of the spacer layer 7, the size of the gap 12 can be adjusted so that desired characteristics are obtained. Consequently, by only adjusting the thickness of the spacer layer 7, characteristics according to the purpose can be easily obtained.
    • 提供了可以容易地根据目的获得特性的电子倍增器。 通过经由导电间隔层7将MCP2的边缘部分23和MCP 3的边缘部分33彼此结合,在通道部分22,32之间形成间隙12.因此,当电子倍增器用于 通过调整间隔层7的厚度,需要特别高的增益的目的可以通过增加间隙12来增加增益。此外,当电子倍增器用于增加增益的目的时 作为时间特性,通过调整间隔层7的厚度,可以调节间隙12的尺寸,从而获得期望的特性。 因此,通过仅调整间隔层7的厚度,可以容易地获得根据目的的特性。
    • 2. 发明申请
    • ELECTRON MULTIPLER AND ELECTRON DETECTOR
    • 电子多路器和电子探测器
    • US20100225221A1
    • 2010-09-09
    • US12715570
    • 2010-03-02
    • Akio SUZUKIEtsuo IizukaAkihiro KageyamaMotohiro Suyama
    • Akio SUZUKIEtsuo IizukaAkihiro KageyamaMotohiro Suyama
    • H01J43/06
    • H01J43/246
    • An electron multiplier that can easily obtain characteristics according to a purpose is provided. By bonding a marginal portion 23 of an MCP 2 and a marginal portion 33 of an MCP 3 to each other via a conductive spacer layer 7, a gap 12 is formed between channel portions 22, 32. Therefore, when the electron multiplier is used for a purpose that requires a particularly high gain, by adjusting the thickness of the spacer layer 7, the gain can be increased by increasing the gap 12. In addition, when the electron multiplier is used for a purpose that requires an increase in gain as well as time characteristics, by adjusting the thickness of the spacer layer 7, the size of the gap 12 can be adjusted so that desired characteristics are obtained. Consequently, by only adjusting the thickness of the spacer layer 7, characteristics according to the purpose can be easily obtained.
    • 提供了可以容易地根据目的获得特性的电子倍增器。 通过经由导电间隔层7将MCP2的边缘部分23和MCP 3的边缘部分33彼此结合,在通道部分22,32之间形成间隙12.因此,当电子倍增器用于 通过调整间隔层7的厚度,需要特别高的增益的目的可以通过增加间隙12来增加增益。此外,当电子倍增器用于增加增益的目的时 作为时间特性,通过调整间隔层7的厚度,可以调节间隙12的尺寸,从而获得期望的特性。 因此,通过仅调整间隔层7的厚度,可以容易地获得根据目的的特性。
    • 5. 发明授权
    • Mass spectrometer
    • 质谱仪
    • US08357892B2
    • 2013-01-22
    • US12730475
    • 2010-03-24
    • Motohiro SuyamaEtsuo IizukaAkio SuzukiHiroshi Kobayashi
    • Motohiro SuyamaEtsuo IizukaAkio SuzukiHiroshi Kobayashi
    • H01J49/40
    • H01J49/40H01J49/025
    • A mass spectrometer that allows easy replacement of an MCP (microchannel plate) and is enabled to secure orthogonality between an incident surface of the MCP and an ion track at high accuracy is provided. A flight tube 2 where ions fly is arranged in a vacuum vessel composed of a vacuum flange 6 and a body 1, and an MCP group 4 is attached to a tail end of the flight tube 2 via an MCP-IN electrode 3. A vacuum flange 6 is attachably and detachably attached to the body 1, and the MCP group 4, by a spring 710 provided on a circuit board 7 for detection attached to the vacuum flange 6, is urged toward an end portion of the flight tube 2 so that its orthogonality with respect to an ion flight track is secured.
    • 提供了一种允许容易地更换MCP(微通道板)并且能够以高精度确保MCP的入射表面和离子轨道之间的正交性的质谱仪。 离子飞行的飞行管2布置在由真空法兰6和主体1组成的真空容器中,并且MCP组4经由MCP-IN电极3附接到飞行管2的尾端。真空 凸缘6可附接和可拆卸地附接到主体1,并且MCP组4通过设置在连接到真空凸缘6上的用于检测的电路板7上的弹簧710朝向飞行管2的端部被推动,使得 其相对于离子飞行轨道的正交性得到保证。
    • 6. 发明授权
    • Electron tube
    • 电子管
    • US06586877B1
    • 2003-07-01
    • US09889605
    • 2001-07-19
    • Motohiro SuyamaAkihiro KageyamaMasaharu Muramatsu
    • Motohiro SuyamaAkihiro KageyamaMasaharu Muramatsu
    • H01J4000
    • H01J31/26H01J29/92H01J31/49H01J2229/922H01J2231/50068
    • In an electron tube 1, a space S between a periphery part 15b of a semiconductor device 15 and a stem 11 is filled with an insulating resin 20. The insulating resin 20 functions as a reinforcing member while the electron tube 1 is assembled under high-temperature condition, thereby preventing a bump 16 from coming off a bump connection portion 19. Since the space S is only partly closed by the resin 20, the space between the semiconductor device 15 and the stem 11 is ensured a ventilability. That is, no air reservoir is formed between an electron incidence part 15a at the center of the semiconductor device 15 and the surface C of the stem 11, whereby air expanding at high temperature does not damage the electron incidence part 15a of the back-illuminated semiconductor device 15.
    • 在电子管1中,半导体器件15的周边部分15b和杆11之间的空间S填充有绝缘树脂20.绝缘树脂20用作加强构件,而电子管1组装在高温 从而防止突起16从凸起连接部分19脱落。由于空间S仅部分地被树脂20封闭,因此确保了半导体器件15与杆11之间的空间。 也就是说,在半导体器件15的中心处的电子入射部分15a和杆11的表面C之间没有形成空气储存器,由此在高温下膨胀的空气不会损坏背照射的电子入射部分15a 半导体器件15。
    • 7. 发明授权
    • Electron tube
    • 电子管
    • US06583558B1
    • 2003-06-24
    • US09868883
    • 2001-06-22
    • Motohiro SuyamaAkihiro KageyamaMasaharu Muramatsu
    • Motohiro SuyamaAkihiro KageyamaMasaharu Muramatsu
    • H01J4006
    • H01J29/44H01J31/26H01L2224/48091H01L2224/73265H01L2924/10155H01L2924/00014
    • An electron tube 10 mainly includes a sleeve 12, an input plate 14 having a photocathode surface 18, a stem 16 and a CCD 20. A vacuum is provided in an interior of the electron tube 10. The CCD 20 is fixed onto the stem such that a rear surface B faces the photocathode surface 18. In the CCD 20, on a single conductive type semiconductor substrate 64, a buried layer 66, a barrier region 68, a SiO2 layer 70, a storage electrode layer 72, a transmission electrode layer 74, and a barrier electrode layer 76 are formed at their predetermined positions. A PSG film 78 is formed at an entire front surface A over these layers to flatten the surface of the CCD 20. Further, SiN film 106 mainly composed of SiN is formed above the PSG film over the entire front surface A.
    • 电子管10主要包括套管12,具有光电阴极表面18的输入板14,杆16和CCD 20.在电子管10的内部设有真空。CCD 20固定在杆上 后表面B面对光电面表面18.在CCD 20中,在单个导电型半导体衬底64上,掩埋层66,势垒区68,SiO 2层70,存储电极层72,透射电极层 74和阻挡电极层76形成在其预定位置。 在这些层的整个前表面A上形成PSG膜78,以平坦化CCD 20的表面。此外,主要由SiN构成的SiN膜106在整个前表面A上形成在PSG膜的上方。
    • 9. 发明授权
    • Electron tube
    • 电子管
    • US08040060B2
    • 2011-10-18
    • US12257151
    • 2008-10-23
    • Atsuhito FukasawaYasuyuki EgawaMotohiro Suyama
    • Atsuhito FukasawaYasuyuki EgawaMotohiro Suyama
    • H01J40/06
    • H01J31/26H01J5/24H01J29/861H01J40/02H01J43/28
    • An electron tube of the present invention includes: a vacuum vessel including a side tube portion made of glass and a plate-like member blocking one opening of the side tube portion and made of glass; a first metal film provided on an end face of the side tube portion; a second metal film arranged facing the first metal film and provided on a marginal part of a face at a vacuum side of the plate-like member; a third metal film provided on at least one of an outer wall face of the side tube portion adjacent to the end face and a side face of the plate-like member adjacent to the marginal part; and a metal member made of a low-melting-point metal, for sealing a gap between the side tube portion and the plate-like member while contacting the first metal film, the second metal film, and the third metal film.
    • 本发明的电子管包括:真空容器,包括由玻璃制成的侧管部分和阻挡侧管部分的一个开口并由玻璃制成的板状部件; 设置在所述侧管部的端面上的第一金属膜; 第二金属膜,其布置成面对所述第一金属膜并且设置在所述板状构件的真空侧的面的边缘部分上; 设置在与端面相邻的侧管部分的外壁面中的至少一个上的第三金属膜和邻近边缘部分的板状构件的侧面; 以及由低熔点金属制成的金属构件,用于在与第一金属膜,第二金属膜和第三金属膜接触的同时密封侧管部和板状构件之间的间隙。