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    • 2. 发明申请
    • SUBSTRATE CLEANING APPARATUS
    • 基板清洁装置
    • US20110258808A1
    • 2011-10-27
    • US13140527
    • 2009-11-09
    • Hideshi MakitaToru Tanigawa
    • Hideshi MakitaToru Tanigawa
    • A47L9/00
    • C03C23/0075B08B1/00B08B5/04B08B7/02
    • A substrate cleaning apparatus includes a cleaning plate, a vibration unit for vibrating the cleaning plate, a suction unit having an intake opening in the vicinity of a tip end portion of the cleaning plate, for sucking an upper surface of a substrate to be cleaned without being in contact with the substrate, and a moving mechanism for moving the cleaning plate relative to the substrate. In the substrate cleaning apparatus, the tip end portion of the cleaning plate is pressed against the upper surface of the substrate to cause the cleaning plate to be elastically deformed, and the cleaning plate moves relative to the substrate in the cleaning direction of the substrate, with the tip end portion of the cleaning plate being in line contact or surface contact with the upper surface of the substrate. Such a configuration allows the substrate to be cleaned stably while preventing scratching the substrate.
    • 一种基板清洗装置,包括清洁板,用于振动清洁板的振动单元,具有在清洁板的顶端部附近的进气口的吸引单元,用于吸取要清洁的基板的上表面而没有 与基板接触,以及用于相对于基板移动清洁板的移动机构。 在基板清洗装置中,清洁板的前端部被压靠在基板的上表面,使得清洁板弹性变形,并且清洁板沿着基板的清洁方向相对于基板移动, 其中清洁板的顶端部分与衬底的上表面线接触或表面接触。 这样的结构使得能够稳定地清洗基板,同时防止刮擦基板。
    • 3. 发明授权
    • Substrate cleaning apparatus
    • 基材清洗装置
    • US08789236B2
    • 2014-07-29
    • US13140527
    • 2009-11-09
    • Hideshi MakitaToru Tanigawa
    • Hideshi MakitaToru Tanigawa
    • A47L9/06B08B5/00
    • C03C23/0075B08B1/00B08B5/04B08B7/02
    • A substrate cleaning apparatus includes a cleaning plate, a vibration unit for vibrating the cleaning plate, a suction unit having an intake opening in the vicinity of a tip end portion of the cleaning plate, for sucking an upper surface of a substrate to be cleaned without being in contact with the substrate, and a moving mechanism for moving the cleaning plate relative to the substrate. In the substrate cleaning apparatus, the tip end portion of the cleaning plate is pressed against the upper surface of the substrate to cause the cleaning plate to be elastically deformed, and the cleaning plate moves relative to the substrate in the cleaning direction of the substrate, with the tip end portion of the cleaning plate being in line contact or surface contact with the upper surface of the substrate. Such a configuration allows the substrate to be cleaned stably while preventing scratching the substrate.
    • 一种基板清洗装置,包括清洁板,用于振动清洁板的振动单元,具有在清洁板的顶端部附近的进气口的吸引单元,用于吸取要清洁的基板的上表面而没有 与基板接触,以及用于相对于基板移动清洁板的移动机构。 在基板清洗装置中,清洁板的前端部被压靠在基板的上表面,使得清洁板弹性变形,并且清洁板沿着基板的清洁方向相对于基板移动, 其中清洁板的顶端部分与衬底的上表面线接触或表面接触。 这样的结构使得能够稳定地清洗基板,同时防止刮擦基板。