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1. 发明申请

US20100319209A1 ALIGNMENT APPARATUS AND ALIGNMENT METHOD 有权
标题翻译：对准装置和对准方法
公开(公告)号：US20100319209A1
公开(公告)日：2010-12-23
申请号：US12818518
申请日：2010-06-18
申请人： Akihiko NAKAMURA , Junichi Katsuragawa , Satoshi Kobari , Tamotsu Sasaki
发明人： Akihiko NAKAMURA , Junichi Katsuragawa , Satoshi Kobari , Tamotsu Sasaki
IPC分类号： G01D21/00
CPC分类号： G01D1/00 , G01D15/00
摘要： Provided is an alignment apparatus including holding and rotating means for holding an alignment object and rotating the alignment object, the alignment apparatus including supporting means for supporting that part of the alignment object being rotated which is different from that part of the alignment object which is held by the holding and rotating means. This makes it possible to align the alignment object highly accurately by preventing the alignment object from being deformed, e.g. bent, due to its own weight.
摘要翻译：本发明提供了一种对准装置，包括用于保持对准物体并旋转对准物体的保持和旋转装置，该对准装置包括支撑装置，用于支撑被旋转的对准物体的部分与被保持的对准物体的部分不同的部分通过握持和旋转手段。这使得可以通过防止对准物体变形而高度准确地对准对准物体，例如，弯曲，由于自己的重量。

2. 发明授权

US08205349B2 Alignment apparatus and alignment method 有权
标题翻译：对准装置和对准方法
公开(公告)号：US08205349B2
公开(公告)日：2012-06-26
申请号：US12818518
申请日：2010-06-18
申请人： Akihiko Nakamura , Junichi Katsuragawa , Satoshi Kobari , Tamotsu Sasaki
发明人： Akihiko Nakamura , Junichi Katsuragawa , Satoshi Kobari , Tamotsu Sasaki
IPC分类号： G01D21/00
CPC分类号： G01D1/00 , G01D15/00
摘要： Provided is an alignment apparatus including holding and rotating means for holding an alignment object and rotating the alignment object, the alignment apparatus including supporting means for supporting that part of the alignment object being rotated which is different from that part of the alignment object which is held by the holding and rotating means. This makes it possible to align the alignment object highly accurately by preventing the alignment object from being deformed, e.g. bent, due to its own weight.
摘要翻译：本发明提供了一种对准装置，包括用于保持对准物体并旋转对准物体的保持和旋转装置，该对准装置包括支撑装置，用于支撑被旋转的对准物体的部分与被保持的对准物体的部分不同的部分通过握持和旋转手段。这使得可以通过防止对准物体变形而高度准确地对准对准物体，例如，弯曲，由于自己的重量。

3. 发明授权

US07166184B2 Multi-stage type processing apparatus 失效
标题翻译：多级式处理装置
公开(公告)号：US07166184B2
公开(公告)日：2007-01-23
申请号：US10778947
申请日：2004-02-16
申请人： Akihiko Nakamura , Taiichiro Aoki , Seiji Ohishi , Tamotsu Sasaki
发明人： Akihiko Nakamura , Taiichiro Aoki , Seiji Ohishi , Tamotsu Sasaki
IPC分类号： G03B27/32 , H01L21/68
CPC分类号： G03F7/3021 , Y10S134/902
摘要： A multi-stage type processing apparatus which can be positioned in a limited space without having a complicated driving mechanism, includes processing units which are stacked in a multi-stage state in the vertical direction. Each processing unit has a cup surrounding a substrate and a chuck for retaining and rotating a substrate, and the cup can be elevated and lowered with respect to the chuck. A cylinder unit is contracted and thereby all the cups are unitarily lowered, so that the top surface of the chuck is located in a slightly upper position with respect to the top surface of the cup. In this state, a substrate is mounted on the chuck and attracted. Next, the cylinder unit is extended and thereby all the cups are unitarily elevated so as to accommodate the substrate therein. In this state, developing liquid is dropped from a nozzle for developing liquid onto the center of the substrate, and a motor is driven to rotate the chuck (the substrate) via a drive shaft and a timing belt to allow the developing liquid to cover the entire surface of the substrate.
摘要翻译：可以定位在有限空间中而不具有复杂驱动机构的多级型处理装置包括在垂直方向上以多级状态堆叠的处理单元。每个处理单元具有围绕基板的杯和用于保持和旋转基底的卡盘，并且杯可以相对于卡盘升高和降低。气缸单元收缩，从而所有的杯子一体地降低，使得卡盘的顶表面相对于杯的顶表面位于较高的位置。在这种状态下，将基板安装在卡盘上并被吸引。接下来，气缸单元延伸，从而所有的杯子一体地升高，以便容纳衬底。在这种状态下，显影液从用于显影液的喷嘴滴落到基板的中心，驱动马达驱动以通过驱动轴和同步皮带旋转卡盘（基板），以使显影液覆盖基片的整个表面。

4. 发明授权

US4468195A Thermal treatment apparatus 失效
标题翻译：热处理设备
公开(公告)号：US4468195A
公开(公告)日：1984-08-28
申请号：US418252
申请日：1982-09-15
申请人： Tamotsu Sasaki , Tetsuya Takagaki , Kenichi Ikeda
发明人： Tamotsu Sasaki , Tetsuya Takagaki , Kenichi Ikeda
IPC分类号： F27D3/04 , B01J4/00 , F27B5/02 , F27D3/12 , H01L21/22 , F27B1/26 , B65G25/00 , F27D3/00
CPC分类号： F27D3/12 , B01J4/001 , F27B5/02
摘要： The semiconductor device manufacturing process for producing semiconductors (transistor, IC, LSI or the like) needs a large number of thermal treatments for semiconductor wafers, such as thermal oxidation, diffusion, CVD, annealing or the like. The above-mentioned various thermal treatments are conducted by employing thermal treatment apparatus. The thermal treatment apparatus according to the present invention performs thermal treatments for semiconductor wafers, such as thermal oxidation, diffusion, CVD, annealing or the like, and has a soft landing loader capable of loading and unloading a wafer jig housing therein a plurality of semiconductor wafers into and from a process tube of the thermal treatment apparatus with high reliability and a high thermal efficiency as well as capable of automatic control of the movement of the semiconductor wafers in accordance with thermal treatment conditions.
摘要翻译：用于制造半导体（晶体管，IC，LSI等）的半导体器件制造方法需要对半导体晶片进行大量的热处理，例如热氧化，扩散，CVD，退火等。上述各种热处理通过使用热处理装置进行。根据本发明的热处理装置对半导体晶片进行热处理，例如热氧化，扩散，CVD，退火等，并且具有能够装载和卸载其中的多个半导体的晶片夹具的软着陆装载机晶片进入和离开热处理设备的处理管，具有高可靠性和高热效率，并且能够根据热处理条件自动控制半导体晶片的移动。

5. 发明授权

US08404060B2 Method for manufacturing hot-rolled sheet having fine-grained ferrite, and hot-rolled sheet 有权
标题翻译：具有细粒铁素体的热轧板的制造方法和热轧板
公开(公告)号：US08404060B2
公开(公告)日：2013-03-26
申请号：US12525094
申请日：2007-02-02
申请人： Suguhiro Fukushima , Manabu Eto , Tamotsu Sasaki , Kaori Kawano , Masayuki Wakita
发明人： Suguhiro Fukushima , Manabu Eto , Tamotsu Sasaki , Kaori Kawano , Masayuki Wakita
IPC分类号： C21D8/00
CPC分类号： C22C38/06 , B21B1/38 , B21B3/00 , C21D8/02 , C22C38/001 , C22C38/02 , C22C38/04
摘要： A method for manufacturing a hot-rolled sheet is provided, wherein the method attains grain refinement of the steel sheet containing C, Si, and Mn, wherein the grain size thereof is set to particularly below average of 2 μm, which has ferrite grain with equiaxed morphology, which has high formability in forming, and the ferrite grain-size deviation in the thickness direction is uniformed down to the level not higher than a predetermined amount whereby uniform formability in forming is high. The method includes a first rolling for rolling the sheet such that the total rolling reduction is 80% or more or the average grain size is 30 μm or less in a form of single phase of austenite, a second rolling of a single-pass, a third rolling being conducted thereafter, and a following cooling.
摘要翻译：提供了一种制造热轧板的方法，其中该方法对含有C，Si和Mn的钢板进行晶粒细化，其中其晶粒尺寸设定为特别低于2μm的平均值，其具有铁素体晶粒与等轴形状，其形成成形性高，并且厚度方向的铁素体晶粒尺寸偏差均匀化到不高于预定量的水平，从而均匀成形性高。该方法包括第一次轧制，以使得总的轧制压下量为80％以上，或平均粒径为30μm以下，奥氏体的单相，单程次的第二轧制，此后进行第三次轧制，并进行随后的冷却。

6. 发明申请

US20100089505A1 METHOD FOR MANUFACTURING HOT-ROLLED SHEET HAVING FINE-GRAINED FERRITE, AND HOT-ROLLED SHEET 有权
公开(公告)号：US20100089505A1
公开(公告)日：2010-04-15
申请号：US12525094
申请日：2007-02-02
申请人： Suguhiro Fukushima , Manabu Eto , Tamotsu Sasaki , Kaori Kawano , Masayuki Wakita
发明人： Suguhiro Fukushima , Manabu Eto , Tamotsu Sasaki , Kaori Kawano , Masayuki Wakita
IPC分类号： C21D8/02 , C22C38/00 , C22C38/04
CPC分类号： C22C38/06 , B21B1/38 , B21B3/00 , C21D8/02 , C22C38/001 , C22C38/02 , C22C38/04
摘要： The present invention provides a method for manufacturing the hot-rolled sheet, which includes: a step A including a first rolling in which a steel sheet containing 0.04-0.20% C, 0.01-2.0% Si, 0.5-3.0% Mn by mass, and the reminder being Fe and inevitable impurities, is rolled by successive multi-pass rolling at a total rolling reduction of 80% or more while keeping the steel sheet at temperatures not lower than the para-equilibrium transformation temperature Ae3; a step B including a second rolling in which a single-pass rolling is carried out at a rolling reduction of 30-55% when an entry side temperature is not lower than the para-equilibrium transformation temperature Ae3; a step C including a third rolling in which a single-pass rolling is carried out at a rolling reduction of 35-70% when an entry side temperature is set within a predetermined range; and a step D in which within 0.2 seconds after the third rolling, the rolled sheet is cooled at a cooling rate of 600 degree C./sec or higher to a temperature not higher than {(the para-equilibrium transformation temperature Ae3)−130 degree C.}, in the step C, the third rolling being carried out: within 0.6 seconds after the second rolling when the predetermined temperature range is {(the para-equilibrium transformation temperature Ae3)−60 degree C.} or more and below {(the para-equilibrium transformation temperature Ae3)−30 degree C.}; within 0.5 seconds after the second rolling when the predetermined temperature range is {(the para-equilibrium transformation temperature Ae3)−30 degree C.} or more and below {(the para-equilibrium transformation temperature Ae3)−5 degree C.}; and within 0.3 seconds after the second rolling when the predetermined temperature range is {(the para-equilibrium transformation temperature Ae3)−5 degree C.} or more and below {(the para-equilibrium transformation temperature Ae3)+20 degree C.}.

7. 发明授权

US4558266A Workpiece transfer apparatus 失效
标题翻译：工件传送装置
公开(公告)号：US4558266A
公开(公告)日：1985-12-10
申请号：US590050
申请日：1984-03-15
申请人： Tamotsu Sasaki , Yutaka Tsuchiya
发明人： Tamotsu Sasaki , Yutaka Tsuchiya
IPC分类号： B23Q39/04 , B23Q15/007 , B65G43/00 , G05B19/416 , G05B19/25
CPC分类号： B23Q15/0075 , G05B19/416 , Y10T74/1658 , Y10T74/18208
摘要： A workpiece transfer bar is reciprocated by a rack driven by a pinion which is driven by a servomotor through an eccentric arm. A computer is used to set rates of acceleration and deceleration, a maximum speed, etc. in accordance with the origin of the transfer bar, stroke thereof etc.
摘要翻译：工件传送杆通过由伺服电机通过偏心臂驱动的小齿轮驱动的齿条往复运动。计算机用于根据传送条的起点，行程等来设定加减速率，最大速度等。

8. 发明授权

US09286945B2 Disk information display device 有权
标题翻译：磁盘信息显示设备
公开(公告)号：US09286945B2
公开(公告)日：2016-03-15
申请号：US11099617
申请日：2005-04-06
申请人： Tamotsu Sasaki , Takashi Senoo
发明人： Tamotsu Sasaki , Takashi Senoo
IPC分类号： G06F3/00 , G11B27/34
CPC分类号： G11B27/34
摘要： A disk information display device capable of displaying display data responding to the operation of operating part in a complete and in real time, the disk information display device includes: a disk information acquiring unit for acquiring information recorded on a disk; an operating part for making a request to display data recorded on the disk in response to an operation; a control part that acquires display data responding to a final display request among display requests made during a period, in which display data responding to a former display request is acquired from the disk information acquiring unit, from the disk information acquiring unit when display requests are made in succession by the operation of operating part; and a display that displays the display data acquired by the control part after the display data responding to the former display request is displayed.
摘要翻译：一种磁盘信息显示装置，其能够完全实时地显示响应于操作部的操作的显示数据，所述磁盘信息显示装置包括：磁盘信息获取单元，用于获取记录在磁盘上的信息; 用于响应于操作显示记录在盘上的数据的请求的操作部分; 控制部件，当显示请求是从盘信息获取单元获取时，从盘信息获取单元获取响应于先前的显示请求的显示数据的显示请求期间作出的显示请求，经营部门经营连续作业; 显示在响应于前一显示请求的显示数据之后显示由控制部获取的显示数据。

9. 发明申请

US20140086787A1 METHOD FOR MANUFACTURING HOT-ROLLED SHEET HAVING FINE-GRAINED FERRITE, AND HOT-ROLLED SHEET 审中-公开
标题翻译：用于制造具有细粒铁粉的热轧板和热轧板的方法
公开(公告)号：US20140086787A1
公开(公告)日：2014-03-27
申请号：US13792458
申请日：2013-03-11
申请人： Suguhiro Fukushima , Manabu Eto , Tamotsu Sasaki , Kaori Kawano , Masayuki Wakita
发明人： Suguhiro Fukushima , Manabu Eto , Tamotsu Sasaki , Kaori Kawano , Masayuki Wakita
IPC分类号： C22C38/06 , C22C38/02 , C22C38/00 , C22C38/04
CPC分类号： C22C38/06 , B21B1/38 , B21B3/00 , C21D8/02 , C22C38/001 , C22C38/02 , C22C38/04
摘要： A method for manufacturing a hot-rolled sheet attains grain refinement of the steel sheet whose grain size is extremely fine. In particular, a ferrite grain size of less than average 2 μm is obtained, which is not laminar but has ferrite grains with equiaxed morphology and exhibits high formability in forming. The method comprises the steps of rolling and cooling, wherein the rolling reductions, cooling steps, and temperature are closely regulated. A hot rolled sheet made from the method of manufacturing has a controlled ferrite grain in different regions of sheet thickness.
摘要翻译：热轧板的制造方法可以获得晶粒细化的钢板的晶粒细化。特别地，得到小于2μm的铁素体晶粒尺寸，其不是层状的，而是具有等轴形态的铁素体晶粒，并且在成型时表现出高的成形性。该方法包括滚动和冷却的步骤，其中滚动减少，冷却步骤和温度被严格地调节。由制造方法制成的热轧板在板厚不同的区域具有受控的铁素体晶粒。

10. 发明申请

US20050265160A1 Disk information display device 有权
标题翻译：磁盘信息显示设备
公开(公告)号：US20050265160A1
公开(公告)日：2005-12-01
申请号：US11099617
申请日：2005-04-06
申请人： Tamotsu Sasaki , Takashi Senoo
发明人： Tamotsu Sasaki , Takashi Senoo
IPC分类号： G11B20/10 , G11B5/09 , G11B27/10 , G11B27/34 , G11B33/10
CPC分类号： G11B27/34
摘要： A disk information display device capable of displaying display data responding to the operation of operating part in a complete and in real time, the disk information display device includes: a disk information acquiring unit for acquiring information recorded on a disk; an operating part for making a request to display display data recorded on the disk in response to an operation; a control part that acquires display data responding to a final display request among display requests made during a period, in which display data responding to a former display request is acquired from the disk information acquiring unit, from the disk information acquiring unit when display requests are made in succession by the operation of operating part; and a display that displays the display data acquired by the control part after the display data responding to the former display request is displayed.
摘要翻译：一种磁盘信息显示装置，其能够完全实时地显示响应于操作部的操作的显示数据，所述磁盘信息显示装置包括：磁盘信息获取单元，用于获取记录在磁盘上的信息; 用于响应于操作来请求显示记录在盘上的显示数据的操作部分; 控制部件，当显示请求是从盘信息获取单元获取时，从盘信息获取单元获取响应于先前的显示请求的显示数据的显示请求期间作出的显示请求，经营部门经营连续作业; 显示在响应于前一显示请求的显示数据之后显示由控制部获取的显示数据。

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