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    • 10. 发明申请
    • Microprobe tips and methods for making
    • 微型笔尖和制作方法
    • US20060109016A1
    • 2006-05-25
    • US11244817
    • 2005-10-06
    • Vacit AratAdam CohenDennis SmalleyEzekiel KruglickRichard ChenKieun Kim
    • Vacit AratAdam CohenDennis SmalleyEzekiel KruglickRichard ChenKieun Kim
    • G01R31/02
    • G01R1/06711G01R1/06716G01R1/06733G01R1/06744G01R3/00
    • Multilayer test probe structures are electrochemically fabricated via depositions of one or more materials in a plurality of overlaying and adhered layers. In some embodiments each probe structure may include a plurality of contact arms or contact tips that are used for contacting a specific pad or plurality of pads wherein the arms and/or tips are configured in such away so as to provide a scrubbing motion (e.g. a motion perpendicular to a primary relative movement motion between a probe carrier and the IC) as the probe element or array is made to contact an IC, or the like, and particularly when the motion between the probe or probes and the IC occurs primarily in a direction that is perpendicular to a plane of a surface of the IC. In some embodiments arrays of multiple probes are provided and even formed in desired relative position simultaneously.
    • 多层测试探针结构通过在多个覆盖层和粘附层中的一种或多种材料的沉积进行电化学制造。 在一些实施例中,每个探针结构可以包括用于接触特定垫或多个垫的多个接触臂或接触尖端,其中臂和/或尖端被配置成如此远离以提供擦洗运动(例如, 当探针元件或阵列与探针载体和IC之间的初级相对移动运动垂直的运动)与IC等接触时,特别是当探针或探针与IC之间的运动主要发生在 方向垂直于IC的表面的平面。 在一些实施例中,多个探针的阵列被提供并且甚至同时形成在期望的相对位置。